Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2013
01/10/2013WO2012154789A3 Methods for manufacturing high dielectric constant films
01/10/2013WO2012154764A3 Method for achieving smooth side walls after bosch etch process
01/10/2013WO2012152740A3 Synthesis of nanoparticles comprising oxidation sensitive metals with tuned particle size and high oxidation stability
01/10/2013WO2012149184A3 Dmos transistor with cavity below drift region
01/10/2013WO2012148869A3 Contact metal for hybridization and related methods
01/10/2013WO2012148353A3 Substrate comprising si-base and inas-layer
01/10/2013WO2012148237A3 Holder for supporting a substrate, and substrate-processing apparatus using same
01/10/2013WO2012144855A3 Flux for solder paste, solder paste and solder bump, and preparation methods thereof
01/10/2013WO2012142007A3 Extended life textured chamber components and method for fabricating same
01/10/2013WO2012141544A3 Interferometer for tsv measurement and measurement method using same
01/10/2013WO2012141489A3 Semiconductor manufacturing device and manufacturing method thereof
01/10/2013WO2012129422A3 Aromatic polyamide films for transparent flexible substrates
01/10/2013WO2012122186A4 Chemical mechanical planarization pad conditioner
01/10/2013WO2012097143A3 Formulations for the removal of particles generated by cerium- containing solutions
01/10/2013WO2012097024A3 Pvd process with synchronized process parameters and magnet position
01/10/2013WO2012096838A3 Memory devices incorporating strings of memory cells having string select gates, and methods of operating and forming the same
01/10/2013WO2012074889A3 Ion implanter system including remote dopant source, and method comprising same
01/10/2013WO2012063774A9 Group iii nitride composite substrate
01/10/2013WO2012033305A8 Method for manufacturing a semiconductor device
01/10/2013WO2012017798A9 Semiconductor device and process for production thereof
01/10/2013US20130013246 Method and apparatus for post-silicon testing
01/10/2013US20130012107 Laminate polishing pad
01/10/2013US20130012106 Polishing pad
01/10/2013US20130012105 Polishing pad and production method therefor, and production method for semiconductor device
01/10/2013US20130012102 Polishing slurry and polishing method therefor
01/10/2013US20130012036 Line scan sequential lateral solidification of thin films
01/10/2013US20130012035 Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
01/10/2013US20130012034 Zirconium-doped tantalum oxide films
01/10/2013US20130012033 Silicon oxide film forming method and plasma oxidation apparatus
01/10/2013US20130012032 Nh3 containing plasma nitridation of a layer on a substrate
01/10/2013US20130012031 Hafnium tantalum oxide dielectrics
01/10/2013US20130012030 Method and apparatus for remote plasma source assisted silicon-containing film deposition
01/10/2013US20130012029 Method and device for layer deposition
01/10/2013US20130012028 High purity, environmentally clean method and apparatus, for high rate, liquid anisotropic etching of single crystal silicon or etching of polycrystalline silicon, using an overpressure of ammonia gas above aqueous ammonium hydroxide
01/10/2013US20130012027 Method for the supply of fluorine
01/10/2013US20130012026 Methodology for fabricating isotropically recessed source and drain regions of cmos transistors
01/10/2013US20130012025 Device having and method for forming fins with multiple widths
01/10/2013US20130012024 Structure for microelectronics and microsystem and manufacturing process
01/10/2013US20130012023 Method of forming micropattern, method of forming damascene metallization, and semiconductor device and semiconductor memory device fabricated using the same
01/10/2013US20130012022 Method for fabricating silicon nanowire arrays
01/10/2013US20130012021 Method of manufacturing semiconductor device
01/10/2013US20130012020 Use of epitaxial ni silicide
01/10/2013US20130012019 Method for fabricating semiconductor device
01/10/2013US20130012018 On-chip cooling for integrated circuits
01/10/2013US20130012017 Microelectronic structure including air gap
01/10/2013US20130012016 Enhancing metal/low-k interconnect reliability using a protection layer
01/10/2013US20130012015 Semiconductor device for improving electrical and mechanical connectivity of conductive pillers and method therefor
01/10/2013US20130012014 UBM Etching Methods for Eliminating Undercut
01/10/2013US20130012013 Methods Of Forming Transistor Gates
01/10/2013US20130012012 Semiconductor process
01/10/2013US20130012011 Interconnection structure for n/p metal gates
01/10/2013US20130012010 Semiconductor device exhibiting reduced parasitics and method for making same
01/10/2013US20130012009 Method for self aligned metal gate cmos
01/10/2013US20130012008 Method of producing soi wafer
01/10/2013US20130012007 Methods of implanting dopant ions
01/10/2013US20130012006 Plasma treatment apparatus, method for forming film, and method for manufacturing thin film transistor
01/10/2013US20130012005 Silicon on germanium
01/10/2013US20130012004 Manufacturing method of semiconductor substrate
01/10/2013US20130012003 Methods for depositing thin films comprising gallium nitride by atomic layer deposition
01/10/2013US20130012002 Method for producing semiconductor optical integrated device
01/10/2013US20130012001 Method for producing semiconductor optical device
01/10/2013US20130012000 Substrate dividing method
01/10/2013US20130011999 Coating adhesives onto dicing before grinding and micro-fabricated wafers
01/10/2013US20130011998 Resin Film Forming Sheet for Chip, and Method for Manufacturing Semiconductor Chip
01/10/2013US20130011997 Method for producing a wafer provided with chips
01/10/2013US20130011996 Method of manufacturing semiconductor device
01/10/2013US20130011995 Semiconductor device having wiring made by damascene method and capacitor and its manufacture method
01/10/2013US20130011994 Manufacturing method of semiconductor device
01/10/2013US20130011993 Planar phase- change memory cell with parallel electrical paths
01/10/2013US20130011992 Circuit, biasing scheme and fabrication method for diode accessed cross-point resistive memory array
01/10/2013US20130011990 Methods of Making Crystalline Tantalum Pentoxide
01/10/2013US20130011989 Methods of manufacturing a dram device
01/10/2013US20130011988 Method of manufacturing a semiconductor device having a laminated structure comprising a boron-doped silicon germanium film and a metal film
01/10/2013US20130011987 Method for fabricating semiconductor device with vertical gate
01/10/2013US20130011986 Method for Manufacturing Full Silicide Metal Gate Bulk Silicon Multi-Gate Fin Field Effect Transistors
01/10/2013US20130011985 Shallow-trench cmos-compatible super junction device structure for low and medium voltage power management applications
01/10/2013US20130011984 Using Hexachlorodisilane as a Silicon Precursor for Source/Drain Epitaxy
01/10/2013US20130011983 In-Situ Doping of Arsenic for Source and Drain Epitaxy
01/10/2013US20130011982 Layout method of semiconductor device with junction diode for preventing damage due to plasma charge
01/10/2013US20130011981 High performance mosfet
01/10/2013US20130011980 Fabrication method of vertical silicon nanowire field effect transistor
01/10/2013US20130011979 Self-aligned semiconductor devices with reduced gate-source leakage under reverse bias and methods of making
01/10/2013US20130011978 Methods of Forming Memory Arrays and Semiconductor Constructions
01/10/2013US20130011977 Floating Body Cell Structures, Devices Including Same, and Methods for Forming Same
01/10/2013US20130011976 Fabricating method of pixel structure
01/10/2013US20130011975 Raised source/drain structure for enhanced strain coupling from stress liner
01/10/2013US20130011974 Thyristor-Based Memory Cells, Devices and Systems Including the Same and Methods for Forming the Same
01/10/2013US20130011973 Leadframe strip and mold apparatus for an electronic component and method of encapsulating an electronic component
01/10/2013US20130011972 Method of producing laminated device
01/10/2013US20130011971 Fabricating method of semiconductor package structure
01/10/2013US20130011970 Manufacturing method of molded package
01/10/2013US20130011969 Method for fabricating the flexible electronic device
01/10/2013US20130011968 Hybrid bonding techniques for multi-layer semiconductor stacks
01/10/2013US20130011967 Semiconductor memory device and manufacturing method thereof
01/10/2013US20130011966 Stackable semiconductor assemblies and methods of manufacturing such assemblies
01/10/2013US20130011965 Distributing power with through-silicon-vias
01/10/2013US20130011964 Thermal enhanced package
01/10/2013US20130011963 Process for producing zinc oxide varistor
01/10/2013US20130011962 Sputtering target, method for manufacturing sputtering target, and method for forming thin film
01/10/2013US20130011961 Semiconductor device and method for manufacturing the same