Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1986
10/15/1986EP0197454A2 Method for making semiconductor devices comprising insulating regions
10/15/1986EP0197452A2 Method for producing high quality epitaxial layers by molecular beam epitaxy
10/15/1986EP0197438A1 Method of manufacturing electronic modules for microcircuit boards and modules obtained by this method
10/15/1986EP0197424A2 Process of fabricating a heterojunction bipolar transistor
10/15/1986EP0197422A2 Resin glass filled deep trench isolation
10/15/1986EP0197362A1 Method making use of a scanning microscope to determine the points on a sample conducting a signal of a predetermined frequency
10/15/1986EP0197286A2 A dry development method for a resist film
10/15/1986EP0197284A2 Method of producing semiconductor memory device
10/15/1986EP0197198A1 Method of producing an isolation separating the active regions of a highly integrated CMOS circuit
10/15/1986EP0197116A1 Low-leakage jfet.
10/15/1986EP0197078A1 Method for making monocrystalline silicon islands electrically isolated from each other.
10/15/1986EP0197044A1 Process for etching polysilicon with freon 11 and another gas
10/14/1986US4617681 Bistable aligner cartridge foot
10/14/1986US4617648 Semiconductor integrated circuit device
10/14/1986US4617529 Ring oscillator with delay element and potential pulling circuit
10/14/1986US4617524 Integrated amplifier circuit having RC network to suppress oscillation
10/14/1986US4617482 Complementary type MOS field-effect transistor circuit provided with a gate protection structure of small time constant
10/14/1986US4617469 Alignment apparatus
10/14/1986US4617453 Thyristor controlled power source for gradually decreasing loads
10/14/1986US4617252 Antireflective coatings for use in the manufacture of semi-conductor devices, methods and solutions for making such coatings, and the method for using such coatings to absorb light in ultraviolet photolithography processes
10/14/1986US4617237 Production of conductive metal silicide films from ultrafine powders
10/14/1986US4617193 Planar interconnect for integrated circuits
10/14/1986US4617192 Process for making optical INP devices
10/14/1986US4617160 Method for fabricating modules comprising uniformly stacked, aligned circuit-carrying layers
10/14/1986US4617151 Bonded to addition polymers and used as charge transfer compounds
10/14/1986US4617087 Method for differential selective deposition of metal for fabricating metal contacts in integrated semiconductor circuits
10/14/1986US4617086 Rapid etching method for silicon by SF6 gas
10/14/1986US4617085 Process for removing organic material in a patterned manner from an organic film
10/14/1986US4617079 Improved low frequency etching, uniformity
10/14/1986US4617071 Method of fabricating electrically connected regions of opposite conductivity type in a semiconductor structure
10/14/1986US4617066 Process of making semiconductors having shallow, hyperabrupt doped regions by implantation and two step annealing
10/14/1986US4616908 For projecting a reduced image of a reticle
10/14/1986US4616683 Particle-free dockable interface for integrated circuit processing
10/14/1986US4616412 Method for bonding electrical leads to electronic devices
10/14/1986US4616406 Process of making a semiconductor device having parallel leads directly connected perpendicular to integrated circuit layers therein
10/14/1986US4616405 Semiconductor device and manufacturing method thereof
10/14/1986US4616404 Method of making improved lateral polysilicon diode by treating plasma etched sidewalls to remove defects
10/14/1986US4616402 Method of manufacturing a semiconductor device with a stacked-gate-electrode structure
10/14/1986US4616401 Method of fabricating an insulated gate type field-effect transistor
10/14/1986US4616400 Process for fabricating a double recess channel field effect transistor
10/14/1986US4616399 Method of manufacturing an insulated gate field effect transistor
10/14/1986CA1212798A1 Polymer composition having terminal alkene and terminal carboxyl groups
10/14/1986CA1212781A1 Semiconductor power component and method of manufacturing
10/14/1986CA1212599A1 Process for manufacturing boron-doped gallium arsenide single crystal
10/09/1986WO1986005922A1 Method for prevention of autodoping of epitaxial layers
10/09/1986WO1986005895A1 Device for the alignment, testing and/or measurement of two-dimensional objects
10/09/1986WO1986005824A1 Thin layer consisting essentially of ruthenium salt
10/08/1986EP0196897A1 Thermal etching of a compound semiconductor
10/08/1986EP0196894A2 CMOS d-type flip-flop circuits
10/08/1986EP0196893A2 Temperature compensated active resistor
10/08/1986EP0196806A1 Optimized process for forming borophosphosilicate glass
10/08/1986EP0196771A2 Improved programmable logic device
10/08/1986EP0196757A2 Semiconductor device comprising a bipolar transistor and a MOS transistor and method of manufacturing the same
10/08/1986EP0196747A2 Substrate structure for a semiconductor device
10/08/1986EP0196715A1 Active load random access memory
10/08/1986EP0196711A1 A positioning device comprising pre-stressed contactless bearings
10/08/1986EP0196682A1 Fluidized bed heater, reactor and method for semiconductor processing
10/08/1986EP0196616A2 Logic circuit
10/08/1986EP0196534A1 Method and device making use of it to determine the signal frequencies at at least one point of a sample with the use of a scanning microscope
10/08/1986EP0196531A1 Method for indirectly determining the intensity distribution of pulsed particle beams produced in a particle beam measuring instrument
10/08/1986EP0196475A1 Noncontact testing of integrated circuits
10/08/1986EP0196474A2 Semiconductor device made of compound semiconductor material
10/08/1986EP0196391A2 Gallium arsenide gate array integrated circuit including DCFL NAND gate
10/08/1986EP0196374A1 Semiconductor embedded layer technology
10/08/1986EP0196346A1 Apparatus for manufacturing surface structures in the nanometer range
10/07/1986US4616340 Non-volatile semiconductor memory
10/07/1986US4616245 Direct-write silicon nitride EEPROM cell
10/07/1986US4616244 Non-single-crystal semiconductor light emitting device
10/07/1986US4616242 Enhancement and depletion mode selection layer for field effect transistor
10/07/1986US4616130 Projection exposure apparatus
10/07/1986US4615909 Method of manufacturing semiconductor devices, in which material is deposited from a reaction gas, and apparatus for carrying out such a method
10/07/1986US4615905 Method of depositing semiconductor films by free radical generation
10/07/1986US4615904 Maskless growth of patterned films
10/07/1986US4615857 Plastic encapsulating electronic devices; injection or transfer molding
10/07/1986US4615782 Undercutting etching of a polysiloxane layer
10/07/1986US4615781 Mask assembly having mask stress relieving feature
10/07/1986US4615766 Prevention of aresenic out-diffusion; noncracking; removed by etching
10/07/1986US4615765 Self-registered, thermal processing technique using a pulsed heat source
10/07/1986US4615764 SF6/nitriding gas/oxidizer plasma etch system
10/07/1986US4615762 Oxidieing surface and removing oxide
10/07/1986US4615756 Dry etching apparatus
10/07/1986US4615755 Wafer cooling and temperature control for a plasma etching system
10/07/1986US4615746 Method of forming isolated island regions in a semiconductor substrate by selective etching and oxidation and devices formed therefrom
10/07/1986US4615621 Auto-focus alignment and measurement system and method
10/07/1986US4615614 Optical exposure apparatus
10/07/1986US4615515 For use in a semiconductor circuit manufacturing apparatus
10/07/1986US4615478 Preheating, applying reducing gas flame
10/07/1986US4615298 Method of making non-crystalline semiconductor layer
10/07/1986US4615104 Method of forming isolation regions containing conductive patterns therein
10/07/1986US4615103 Method of forming isolation regions containing conductive patterns therein
10/07/1986US4615102 Method of producing enhancement mode and depletion mode FETs
10/07/1986US4615093 Method and an apparatus for the positioning of components with reference to a workpiece
10/07/1986CA1212485A1 Integrated semiconductor circuits with bipolar components and method of producing same
10/07/1986CA1212356A1 Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
10/01/1986EP0196245A1 Compound semiconductor layer having high carrier concentration and method of forming same
10/01/1986EP0196243A2 Temperature gradient furnace for materials processing
10/01/1986EP0196171A2 Digital integrated circuits
10/01/1986EP0196170A2 Organic metallic compound pyrolysis vapor growth apparatus
10/01/1986EP0196158A1 Apparatus and methods for resistivity testing
10/01/1986EP0196155A2 Method of forming an oxide film on a semiconductor substrate
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