| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/23/1992 | EP0365589B1 Method and apparatus for aligning silicon wafers |
| 09/23/1992 | CN1064766A Method for making transistor by silicon single crystal thin section |
| 09/22/1992 | US5150392 For providing precise alignment |
| 09/22/1992 | US5150391 Exposure apparatus |
| 09/22/1992 | US5150325 Bi-CMOS semiconductor memory device, including improved layout structure and testing method |
| 09/22/1992 | US5150276 Method of fabricating a vertical parallel cell capacitor having a storage node capacitor plate comprising a center fin effecting electrical communication between itself and parallel annular rings |
| 09/22/1992 | US5150253 Reflective mirror having cooling unit attached thereto |
| 09/22/1992 | US5150240 Thin film active matrix circuit |
| 09/22/1992 | US5150233 Multilayer electrode; indium, tin oxide, molybdenum (or alloy there of)and aluminum (or alloy thereof) |
| 09/22/1992 | US5150216 Solid-state image sensing device having an optimum overflow drain voltage generation circuit |
| 09/22/1992 | US5150197 Die attach structure and method |
| 09/22/1992 | US5150195 Rapid-curing adhesive formulation for semiconductor devices |
| 09/22/1992 | US5150191 P-type II-VI compound semiconductor doped |
| 09/22/1992 | US5150188 Reference voltage generating circuit device |
| 09/22/1992 | US5150184 Method for forming emitters in a BiCMOS process |
| 09/22/1992 | US5150182 Semiconductor device enhanced for optical interaction |
| 09/22/1992 | US5150181 Amorphous thin film semiconductor device with active and inactive layers |
| 09/22/1992 | US5150179 Diffusionless source/drain conductor electrically-erasable, electrically-programmable read-only memory and method for making and using the same |
| 09/22/1992 | US5150178 Gate structure for a semiconductor memory device |
| 09/22/1992 | US5150177 Schottky diode structure with localized diode well |
| 09/22/1992 | US5150173 Method and apparatus for alignment and exposure |
| 09/22/1992 | US5150153 Lithographic device with a suspended object table |
| 09/22/1992 | US5150152 Exposure apparatus including device for determining movement of an object |
| 09/22/1992 | US5150040 Positioning a work piece along the Z axis |
| 09/22/1992 | US5149994 Method and apparatus for compensating inherent non-uniformity of electrical properties among mos integrated circuits |
| 09/22/1992 | US5149993 Circuit arrangement of semiconductor integrated circuit device |
| 09/22/1992 | US5149990 Semiconductor device for preventing malfunction caused by a noise |
| 09/22/1992 | US5149975 Pattern fabrication method using a charged particle beam and apparatus for realizing same |
| 09/22/1992 | US5149974 Gas delivery for ion beam deposition and etching |
| 09/22/1992 | US5149973 Apparatus for wiring semiconductor device using energy beam and wiring method by using the same |
| 09/22/1992 | US5149958 Optoelectronic device component package |
| 09/22/1992 | US5149676 Etching cavities in silicon surface to roughen it, charge storage electrodes |
| 09/22/1992 | US5149674 Multilayer; metal overcoating of dielectric |
| 09/22/1992 | US5149673 Selective chemical vapor deposition of tungsten for microdynamic structures |
| 09/22/1992 | US5149672 Process for fabricating integrated circuits having shallow junctions |
| 09/22/1992 | US5149671 Applying malleable electroconductivity material; removal segments |
| 09/22/1992 | US5149669 Elimination of bird's beaks and other defects, silicon oxide, silicon nitride layers |
| 09/22/1992 | US5149668 Method of preventing storage node to storage node shorts in fabrication of memory integrated circuitry having stacked capacitors and stacked capacitor memory integrated circuits |
| 09/22/1992 | US5149667 Forming oxide, etching, doping |
| 09/22/1992 | US5149666 Method of manufacturing a semiconductor memory device having a floating gate electrode composed of 2-10 silicon grains |
| 09/22/1992 | US5149665 Conductive source line for high density programmable read-only memory applications |
| 09/22/1992 | US5149664 Self-aligning ion-implantation method for semiconductor device having multi-gate type MOS transistor structure |
| 09/22/1992 | US5149663 Method for manufacturing a Bi-CMOS semiconductor device |
| 09/22/1992 | US5149615 Applying multicoat of chromium adhesion, gold plating seed, polyimide dielectric, passivation layer and electroplated copper conductors; patterning, dissolving, exposing and etching to form desired integrated circuit |
| 09/22/1992 | US5149378 Tungsten film forming apparatus |
| 09/22/1992 | US5149244 Apparatus for aligning wafers within a semiconductor wafer cassette |
| 09/22/1992 | US5149199 Temperature detection circuit used in thermal shielding circuit |
| 09/22/1992 | US5149158 Wafer carrier holder for wafer carriers |
| 09/22/1992 | US5148967 Apparatus and method for detecting missing interconnect material |
| 09/22/1992 | US5148964 Wire bonding method |
| 09/22/1992 | US5148962 Holder for soldering a flexible circuit board to a substrate |
| 09/22/1992 | US5148945 Apparatus and method for the transfer and delivery of high purity chemicals |
| 09/22/1992 | US5148823 Single chamber megasonic energy cleaner |
| 09/22/1992 | CA1307759C Vacuum processing apparatus |
| 09/22/1992 | CA1307695C Photosensitive compounds and thermally stable and aqueous developablenegative images |
| 09/21/1992 | CA2063220A1 Bipolar transistor and method of fabricating the same |
| 09/21/1992 | CA2062479A1 Photoresist pattern-forming process suitable for integrated circuit production |
| 09/17/1992 | WO1992016091A1 A package for integrated circuits |
| 09/17/1992 | WO1992016018A1 Batch assembly methods for packaging of chips |
| 09/17/1992 | WO1992016017A1 Cleaning liquid for semiconductor substrate |
| 09/17/1992 | WO1992016016A1 Laser lithography for integrated circuit manufacture |
| 09/17/1992 | WO1992016015A1 Robot loadable centrifugal semiconductor processor with extendible rotor |
| 09/17/1992 | WO1992015504A1 Wafer cushion for shippers |
| 09/17/1992 | DE4207913A1 MOSFET with improved properties - has 1st conductivity substrate, convex channel region, gate on channel region and 2nd conductivity source and drain regions |
| 09/17/1992 | DE4207002A1 Positioning system for test object carrier plate, e.g. for semiconductor devices - has carrier plate mounted on positioning device carrying connector block mounting sections and having positioning pins matching carrier plate holes |
| 09/17/1992 | DE4121327C1 Local clean space module e.g. for exposure in semiconductor mfr. or packing sterile product - has inlets providing clean air of various qualities at predetermined areas of internal space limited by socket module with hood above |
| 09/17/1992 | DE4108580A1 Aluminium@ alloy conductor path structure for semiconductor device mfr. - uses temp. processing of substrate process under controlled conditions |
| 09/17/1992 | DE4108394A1 Silicon@ substrate mfr. for DRAM components - comprises forming silicon@ mirror wafer and subjecting it to two=stage heat treatment process, then removing surface layer |
| 09/16/1992 | EP0504053A1 Autonomous container for treating an object under vacuum and transfer lock |
| 09/16/1992 | EP0504028A1 Method of supplying dilute hydrofluoric acid and apparatus for use in this method for supplying the acid |
| 09/16/1992 | EP0503961A2 Method of fabricating glass substrate for disk |
| 09/16/1992 | EP0503911A1 System for rapidly drying parts |
| 09/16/1992 | EP0503904A2 Contact structure of an interconnection layer placed on a surface having steps and SRAM having a multilayer interconnection and manufacturing method thereof |
| 09/16/1992 | EP0503892A1 High-frequency apparatus using quartz crystal resonator and its production method |
| 09/16/1992 | EP0503847A2 Exposure apparatus including two illuminating systems and exposure process using the same |
| 09/16/1992 | EP0503816A1 Heat treatment of Si single crystal |
| 09/16/1992 | EP0503815A2 Method for forming a gate oxide film |
| 09/16/1992 | EP0503787A1 Ion beam implantation method and apparatus for particulate control |
| 09/16/1992 | EP0503731A1 Method of making a transistor with high electron mobility |
| 09/16/1992 | EP0503712A1 Support device with a tiltable object table, and optical lithographic device provided with such a support device |
| 09/16/1992 | EP0503693A1 Method of selectively etching semiconductor material |
| 09/16/1992 | EP0503595A2 Exposure apparatus |
| 09/16/1992 | EP0503473A2 Method of dry etching InA1As and InGaAs lattice matched to InP |
| 09/16/1992 | EP0503472A2 Exposure apparatus and method |
| 09/16/1992 | EP0503236A2 Apparatus and a method for high numerical aperture microscopic examination of materials |
| 09/16/1992 | EP0503211A1 Semiconductor device comprising a layered structure grown on a structured substrate |
| 09/16/1992 | EP0503205A2 EPROM and method of producing same |
| 09/16/1992 | EP0503199A2 Dynamic RAM and process for producing same |
| 09/16/1992 | EP0503131A1 MOS Gated bipolar transistor |
| 09/16/1992 | EP0503077A1 Semiconductor device |
| 09/16/1992 | EP0503076A1 Photopolymerizable composition and photopolymerizable element |
| 09/16/1992 | EP0502992A1 Conductive adhesive useful for bonding a semiconductor die to a conductive support base |
| 09/16/1992 | EP0502884A1 Method and device for semiconductor fabrication fault analasys. |
| 09/16/1992 | EP0474810A4 System for controlling crystal growth apparatus and melt replenishment system therefor |
| 09/16/1992 | EP0368533B1 Quality control for wire bonding |
| 09/16/1992 | CN1064566A Package |
| 09/16/1992 | CN1018309B Method of manufacturing semiconductor device |
| 09/16/1992 | CN1018249B Solder and electronic circuit using the same |
| 09/15/1992 | US5148395 Dual eeprom cell with current mirror differential read |
| 09/15/1992 | US5148393 Mos dynamic semiconductor memory cell |