Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1992
10/20/1992US5156994 Masking surfaces, doping, removing mask, selectively growing semiconductor, depositing refractory metal, annealing
10/20/1992US5156993 Merged with stacked trench and separated by dielectric layer; oxidation, doping, masking
10/20/1992US5156992 Forming memory cell of semiconductor pillar with insulator on sidewall, electrode adjacent insulator, transistor in pillar
10/20/1992US5156989 Using both rapid and slow diffusing dopants in selected areas
10/20/1992US5156987 High performance thin film transistor (TFT) by solid phase epitaxial regrowth
10/20/1992US5156986 Positive control of the source/drain-gate overlap in self-aligned TFTS via a top hat gate electrode configuration
10/20/1992US5156985 Method for making a charge transfer semiconductor device having an oblong trench
10/20/1992US5156984 Forming bipolar and complementary metal oxide semiconductor elements simultaneously on same substrate
10/20/1992US5156983 Method of manufacturing tape automated bonding semiconductor package
10/20/1992US5156981 Method of making a semiconductor device of a high withstand voltage
10/20/1992US5156942 Focusing electron beam which carries masking pattern onto printed circuit while controlling energy levels
10/20/1992US5156896 Silicon substrate having porous oxidized silicon layers and its production method
10/20/1992US5156881 Method for forming a film on a substrate by activating a reactive gas
10/20/1992US5156820 Reaction chamber with controlled radiant energy heating and distributed reactant flow
10/20/1992US5156716 Process for the manufacture of a three layer tape for tape automated bonding
10/20/1992US5156703 Removal and structuring of solids; surface doping
10/20/1992US5156681 Process module dispense arm
10/20/1992US5156649 Test clip adapter for integrated circuit device
10/20/1992US5156336 Multiple fluid injection nozzle array for rotary atomizer
10/20/1992US5156323 Wire bonding method
10/20/1992US5156320 Wire bonder and wire bonding method
10/20/1992US5156319 Wire bonding inspection equipment
10/20/1992US5156318 Ultrasonic bonding apparatus for bonding a semiconductor device to a tab tape
10/20/1992US5156174 Single wafer processor with a bowl
10/20/1992US5155902 Method of packaging a semiconductor device
10/20/1992US5155901 Integrated circuit lead frame positioner apparatus and method
10/20/1992US5155888 Semiconductor wafer lifter
10/20/1992CA2108673A1 Method and apparatus for linear magnetron sputtering
10/20/1992CA2062639A1 Water displacement composition
10/20/1992CA1309191C Bipolar transistor and manufacturing method thereof
10/18/1992CA2065468A1 Process for preparing radiation sensitive compound and positive resist composition
10/15/1992WO1992017908A1 Field effect transistor
10/15/1992WO1992017907A1 Thyristor with adjustable breakover voltage, and a process for manufacturing it
10/15/1992WO1992017906A2 Graded collector for inductive loads
10/15/1992WO1992017905A1 Method for producing coaxial connections for electronic components, and component casing containing such connections
10/15/1992WO1992017900A1 HIGH DURABILITY MASK FOR DRY ETCHING OF GaAs
10/15/1992WO1992017627A1 Process for preparation of a seed layer for selective metal deposition
10/15/1992WO1992017621A1 Apparatus and method for high throughput sputtering
10/15/1992WO1992017532A1 Process for manufacturing prepregs containing solvent-free epoxy resin
10/15/1992WO1992017516A1 Process for curing polyquinoline polymers and compositions thereof
10/15/1992WO1992017297A1 Fabrication of metal matrix composites by vacuum die casting
10/15/1992DE4211999A1 Reducing hot electron current density of submicron integrated circuits - using surface doping or lightly doped source-drain region in regions under spacer oxide, of the opposite impurity type
10/15/1992DE4210774A1 Semiconductor chip alignment for laser repair - using laser repair target which is sensed in X=ray directions to enable corresp. shifts to be computed
10/15/1992DE4207916A1 Interconnecting aluminium@ metallisation layers in semiconductor integrated circuit - involves forming barrier layer on first aluminium@ layer and sequence of titanium@ layer, barrier layer and aluminium@ layer as second metallisation
10/14/1992EP0508878A1 Method of manufacturing optoelectronic semiconductor device
10/14/1992EP0508833A1 Surface treating method and apparatus
10/14/1992EP0508821A2 Process for manufacturing multi-layer glass ceramic substrate
10/14/1992EP0508771A1 Multiple fluid injection nozzle array for rotary atomizer
10/14/1992EP0508760A1 Dynamic random access memory cell
10/14/1992EP0508759A2 Method of producing submicron contacts with unique etched slopes
10/14/1992EP0508748A2 Wafer centering system
10/14/1992EP0508707A1 System for testing on-wafer devices
10/14/1992EP0508679A1 Method for making a silicide layer by ionic implantation and semi semiconductor device thereby produced
10/14/1992EP0508618A2 Method of making ohmic contact to a III-V semiconductor device
10/14/1992EP0508582A2 A method for forming a material layer in a semiconductor device using liquid phase deposition
10/14/1992EP0508463A2 Method of forming a rotation-induced superlattice structure
10/14/1992EP0508462A2 Microelectronic device incorporating an improved packaging scheme
10/14/1992EP0508408A2 Semiconductor device having metallization layers
10/14/1992EP0508388A1 Method and composition for the determination of bicarbonate ions in fluids
10/14/1992EP0508354A2 Semiconductor memory with reduced peak current
10/14/1992EP0508327A2 CMOS-Bandgap reference circuit
10/14/1992EP0508268A1 Radiation-sensitive composition comprising naphthoquinone-di-azide-sulfonic acid esters and recording material produced therewith
10/14/1992EP0508267A1 Radiation-sensitive composition with 1,2-naphthoquinone-2-dazide-sulfonic acid esters and recording material produced therewith
10/14/1992EP0508266A1 Semiconductor device having reduced die stress and process for making the same
10/14/1992EP0508195A1 Method of forming a microelectronic package having a copper substrate
10/14/1992EP0508174A1 Radiation sensitive mixture, containing groups which are labile in acid environment and method for fabrication of relief patterns and relief images
10/14/1992EP0508156A1 Copper alloy metallurgies for VLSI interconnection structures
10/14/1992EP0507885A1 A low frequency inductive rf plasma reactor
10/14/1992EP0507881A1 Semiconductor interconnect structure utilizing a polyimide insulator
10/14/1992EP0507773A1 Processing systems with intelligent article tracking
10/14/1992EP0344290B1 Vacuum apparatus
10/14/1992CN1065365A Voltage reference circuit
10/14/1992CN1018659B Method for forming deposited film
10/14/1992CN1018621B Laser scribing system and method
10/13/1992US5155777 Scattered light blocking layer for optoelectronic receivers
10/13/1992US5155749 Variable magnification mask for X-ray lithography
10/13/1992US5155700 Method for reducing coupling noise of word lines in a semiconductor memory device
10/13/1992US5155692 Technique for routing conductive paths
10/13/1992US5155665 Copper sheet bonded to surface of ceramic substrate; hardness
10/13/1992US5155658 Crystallographically aligned ferroelectric films usable in memories and method of crystallographically aligning perovskite films
10/13/1992US5155657 High area capacitor formation using material dependent etching
10/13/1992US5155652 Temperature cycling ceramic electrostatic chuck
10/13/1992US5155578 Bond wire configuration and injection mold for minimum wire sweep in plastic IC packages
10/13/1992US5155577 Integrated circuit carriers and a method for making engineering changes in said carriers
10/13/1992US5155576 Semiconductor integrated circuit having a multilayer wiring structure
10/13/1992US5155573 Ferroelectric capacitor and a semiconductor device having the same
10/13/1992US5155572 Vertical isolated-collector PNP transistor structure
10/13/1992US5155569 Thyristor device with improved turn-off characteristics
10/13/1992US5155568 High-voltage semiconductor device
10/13/1992US5155564 Thin-film transistor array
10/13/1992US5155563 Semiconductor device having low source inductance
10/13/1992US5155561 Permeable base transistor having an electrode configuration for heat dissipation
10/13/1992US5155559 High temperature refractory silicide rectifying contact
10/13/1992US5155557 Optical alignment detection apparatus
10/13/1992US5155523 Workpiece supporting mechanism
10/13/1992US5155429 Threshold voltage generating circuit
10/13/1992US5155369 Multiple angle implants for shallow implant
10/13/1992US5155337 Method and apparatus for controlling rapid thermal processing systems
10/13/1992US5155336 Rapid thermal heating apparatus and method
10/13/1992US5155331 Method for cooling a plasma electrode system for an etching apparatus