Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1995
01/03/1995US5378869 Method for forming an integrated circuit package with via interconnection
01/03/1995US5378859 Film wiring board
01/03/1995US5378802 Method for removing impurities from resist components and novolak resins
01/03/1995US5378660 Barrier layers and aluminum contacts
01/03/1995US5378659 Method and structure for forming an integrated circuit pattern on a semiconductor substrate
01/03/1995US5378658 Patterning process including simultaneous deposition and ion milling
01/03/1995US5378657 Method for making an aluminum clad leadframe and a semiconductor device employing the same
01/03/1995US5378656 Leadframe, semiconductor integrated circuit device using the same, and method of and process for fabricating the same
01/03/1995US5378655 Method of manufacturing a semiconductor device comprising an insulated gate field effect device
01/03/1995US5378654 Self-aligned contact process
01/03/1995US5378653 Method of forming aluminum based pattern
01/03/1995US5378652 Method of making a through hole in multi-layer insulating films
01/03/1995US5378651 Comprehensive process for low temperature epitaxial growth
01/03/1995US5378650 Semiconductor device and a manufacturing method thereof
01/03/1995US5378649 Process for producing non-volatile memory devices having closely spaced buried bit lines and non-overlapping code implant areas
01/03/1995US5378648 Situ stringer removal during polysilicon capacitor cell plate delineation
01/03/1995US5378647 Method of making a bottom gate mask ROM device
01/03/1995US5378646 Process for producing closely spaced conductive lines for integrated circuits
01/03/1995US5378645 Method of making a semiconductor device with a capacitor
01/03/1995US5378644 Method for manufacturing a semiconductor device
01/03/1995US5378643 Electrically programmable non-volatile semiconductor memory device and manufacturing method thereof
01/03/1995US5378642 Method of making a silicon carbide junction field effect transistor device for high temperature applications
01/03/1995US5378641 Electrically conductive substrate interconnect continuity region and method of forming same with an angled implant
01/03/1995US5378586 Resist composition comprising a quinone diazide sulfonic diester and a quinone diazide sulfonic complete ester
01/03/1995US5378583 Exposure and development with thinning of sheets to form patterns
01/03/1995US5378581 Integrated circuits
01/03/1995US5378579 Photopolymerizable composition and photosensitive lithographic printing plate
01/03/1995US5378541 Silicon thin film member
01/03/1995US5378514 Frame-supported pellicle for photolithography
01/03/1995US5378511 Spray coating; vibrating to spread; spinning and controlling uniformity and thickness; semiconductors
01/03/1995US5378507 Smoothness
01/03/1995US5378501 Method for chemical vapor deposition of titanium nitride films at low temperatures
01/03/1995US5378439 Oxidation, reduction
01/03/1995US5378318 Non-stoichiometric silicon oxide, etching
01/03/1995US5378317 Method for removing organic film
01/03/1995US5378316 Forming layer of chemical resistant amorphous carbon; electrooptics
01/03/1995US5378313 Hybrid circuits and a method of manufacture
01/03/1995US5378312 Process for fabricating a semiconductor structure having sidewalls
01/03/1995US5378311 Method of producing semiconductor device
01/03/1995US5378310 Chromium barrier prevents copper diffusion and side etching
01/03/1995US5378309 Method for controlling the etching profile of a layer of an integrated circuit
01/03/1995US5378289 Method of forming crystalline silicon film and solar cell obtained thereby
01/03/1995US5378283 Treating device
01/03/1995US5378145 Treatment system and treatment apparatus
01/03/1995US5378107 Controlled environment enclosure and mechanical interface
01/03/1995US5377911 Apparatus for producing cryogenic aerosol
01/03/1995US5377902 Method of making solder interconnection arrays
01/03/1995US5377899 Method for producing solder that contains therein additive particles maintaining its shape
01/03/1995US5377894 Wire bonder system
01/03/1995US5377816 Spiral magnetic linear translating mechanism
01/03/1995US5377708 Apparatus for processing wafers
01/03/1995US5377616 Method for vaporizing and supplying organometal compounds
01/03/1995US5377596 Magnetic levitating transportation apparatus with rail gap sensor and non-parallel magnet unit arrangement
01/03/1995US5377476 Arrangement for storing, transporting and loading substrates
01/03/1995US5377425 Vacuum drying apparatus
01/03/1995US5377403 Method of manufacturing a pressure sensor assembly
01/03/1995CA2127234A1 Bare die testing
01/03/1995CA1333786C Process for producing patterns in dielectric layers formed by plasma enhanced chemical vapor deposition (pecvd)
12/1994
12/29/1994CA2126807A1 Process for producing aluminized structures on an aluminium nitride substrate
12/29/1994CA2126741A1 Semiconductor epitaxial substrate and process for producing same
12/28/1994EP0631358A2 Device for producing magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
12/28/1994EP0631356A2 Semiconductor light emitting device
12/28/1994EP0631326A2 Semiconductor memory device and method of manufacturing same
12/28/1994EP0631325A2 Semiconductor device with an oriented non single crystal silicon thin film and method for its preparation
12/28/1994EP0631324A1 Method of making ohmic contacts to a complementary semiconductor device
12/28/1994EP0631323A1 III-V Complementary heterostructure device with compatible non-gold ohmic contacts
12/28/1994EP0631322A1 Microelectronic circuit struture and its manufacturing method
12/28/1994EP0631319A1 Dielectric thin film device and manufacturing method thereof
12/28/1994EP0631318A1 An integrated circuit having a diode voltage clamp for preventing damage by electrostatic discharge
12/28/1994EP0631315A1 Semiconductor integrated circuit package of the "Lead on chip" type (LOC)
12/28/1994EP0631313A1 Semiconductor device containing a through hole
12/28/1994EP0631310A1 Polyimide-insulated cube package of stacked semiconductor device chips
12/28/1994EP0631309A2 Semiconductor device with contact structure and method of manufacturing the same
12/28/1994EP0631308A2 Method of controlling gate oxide thickness in the fabrication of semiconductor devices
12/28/1994EP0631307A2 Semiconductor device having trench structure for element isolating regions and fabricating method therefor
12/28/1994EP0631306A1 Process for manufacturing an isolation region in a substrate for smart-power-technology
12/28/1994EP0631305A1 Process for manufacturing un isolation region in a substrate for smart-power-technology
12/28/1994EP0631304A2 System and method for monitoring and evaluating semiconductor wafer fabrication
12/28/1994EP0631303A2 Method for fabricating multilayer circuits
12/28/1994EP0631302A2 Method of manufacturing a p-channel MOSFET
12/28/1994EP0631301A1 Method for fabrication of semiconductor power device for high commutation steepness
12/28/1994EP0631300A2 Selective diffusion for III - V semiconductor devices
12/28/1994EP0631299A1 Semiconductor expitaxial substrate
12/28/1994EP0631298A2 Semiconductor epitaxial substrate and process for its production
12/28/1994EP0631297A2 Method for low temperature growth of epitaxial silicon and devices produced thereby
12/28/1994EP0631287A2 Ferroelectric-based RAM sensing scheme including bit-line capacitance isolation
12/28/1994EP0631248A2 Process and device composite simulation system and simulation method
12/28/1994EP0631188A1 Resist materials
12/28/1994EP0631149A1 Method and apparatus for testing of integrated circuit chips
12/28/1994EP0631147A1 Eddy current test method and apparatus
12/28/1994EP0630989A2 Method of plasma chemical vapor deposition of layer with improved interface
12/28/1994EP0630988A1 Process for improved quality of CVD copper films
12/28/1994EP0630523A1 Circuit construction for controlling saturation of a transistor
12/28/1994EP0630520A1 System for transferring substrates in clean rooms
12/28/1994EP0630513A1 A floating gate memory array device having improved immunity to write disturbance
12/28/1994EP0630466A1 Enhanced resolution wafer thickness measurement system
12/28/1994EP0511301B1 Method for reducing shrinkage during firing of green ceramic bodies
12/28/1994EP0451247B1 Method and apparatus relating to ion implantation
12/28/1994EP0424485B1 Fully recessed interconnection scheme with titanium-tungsten and selective cvd tungsten
12/28/1994EP0422152B1 Edge doping processes for mesa structures in sos and soi devices