H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1994
12/13/1994	US5372965 Method for fabricating capacitor of semiconductor memory device
12/13/1994	US5372964 Method of producing pillar-shaped DRAM and ROM devices
12/13/1994	US5372963 Method for manufacturing a semiconductor memory device capable of preventing memory cells from deteriorating in electric characteristics
12/13/1994	US5372962 Increasing surface area of lower electrode by roughening
12/13/1994	US5372961 Method for manufacturing a semiconductor integrated circuit device
12/13/1994	US5372960 Method of fabricating an insulated gate semiconductor device
12/13/1994	US5372959 Thin film transistor having a multi-layer stacked channel and its manufacturing method
12/13/1994	US5372958 Process for fabricating a thin film semiconductor device
12/13/1994	US5372957 Multiple tilted angle ion implantation MOSFET method
12/13/1994	US5372956 Method for making direct contacts in high density MOS/CMOS processes
12/13/1994	US5372955 Method of making a device with protection from short circuits between P and N wells
12/13/1994	US5372954 Method of fabricating an insulated gate bipolar transistor
12/13/1994	US5372953 Increasing oxygen content of oxide film to form borosilicate glass which can be chemically removed completely
12/13/1994	US5372952 Method for forming isolated semiconductor structures
12/13/1994	US5372951 Method of making a semiconductor having selectively enhanced field oxide areas
12/13/1994	US5372950 Method for forming isolation regions in a semiconductor memory device
12/13/1994	US5372912 Radiation-sensitive resist composition and process for its use
12/13/1994	US5372860 Heating glass substrate to compact, applying noncrystalline silicon film, heating to covert to polycrystalline silicon
12/13/1994	US5372859 Forming interface between electrode and ferroelectic film
12/13/1994	US5372848 Process for creating organic polymeric substrate with copper
12/13/1994	US5372842 Method for the formation of a silicon oxide film
12/13/1994	US5372837 Method of manufacturing thin film EL device utilizing a shutter
12/13/1994	US5372836 Method of forming polycrystalling silicon film in process of manufacturing LCD
12/13/1994	US5372754 Liquid vaporizer/feeder
12/13/1994	US5372677 Resist coating superimposed on resist pattern; preventing stripping of upper layer
12/13/1994	US5372675 Method for producing fine structure for electronic device
12/13/1994	US5372674 Electrode for use in a plasma assisted chemical etching process
12/13/1994	US5372673 Method for processing a layer of material while using insitu monitoring and control
12/13/1994	US5372658 Disordered crystalline semiconductor
12/13/1994	US5372652 Aerosol cleaning method
12/13/1994	US5372651 Making glass surface hydrophilic by uv rad generation of ozone ; for semiconductors
12/13/1994	US5372649 Apparatus for weighting a diffusion furnace cantilever
12/13/1994	US5372648 Plasma CVD system
12/13/1994	US5372647 Apparatus for forming thin film
12/13/1994	US5372612 Semiconductor material contacting member
12/13/1994	US5372471 Single semiconductor wafer transfer method and manufacturing system
12/13/1994	US5372343 Syringe holder attachment structure
12/13/1994	US5372296 Graphite lid seal fixture
12/13/1994	US5372295 Solder material, junctioning method, junction material, and semiconductor device
12/13/1994	US5372294 Method of preparing a component for automated placement
12/13/1994	US5372293 Apparatus for degolding or tinning conductive portions of a microelectronic device
12/13/1994	US5372292 Tape bonding apparatus
12/13/1994	US5372239 Apparatus for conveying plate-form articles
12/13/1994	US5372233 Conveying method and a conveyor control device
12/13/1994	US5372088 Crystal growth method and apparatus
12/13/1994	US5371950 Isopropyl alcohol vapor dryer system
12/13/1994	US5371943 Method of manufacturing a semiconductor apparatus
12/12/1994	CA2120557A1 Method and apparatus for testing of integrated circuit chips
12/08/1994	WO1994028588A1 Structure for use in producing semiconductor devices with buried contacts and method for its preparation
12/08/1994	WO1994028585A1 Scr electrostatic discharge protection for integrated circuits
12/08/1994	WO1994028581A1 Process for the production of a seal providing mechanical strength between a substrate and a chip hybridized by beads on the substrate
12/08/1994	WO1994028579A1 Method of forming insulating oxide film and semiconductor device
12/08/1994	WO1994028578A1 Plasma processing method
12/08/1994	WO1994028577A2 Method of producing a structure with narrow line width and devices obtained
12/08/1994	WO1994028574A1 Dose modulation and pixel deflection for raster scan lithography
12/08/1994	WO1994028552A1 Memory material and method for its manufacture
12/08/1994	WO1994028426A1 Process for producing surface micromechanical structures
12/08/1994	WO1994028376A1 Apparatus and method of film thickness measurement
12/08/1994	WO1994028318A1 Microvalve
12/08/1994	WO1994028207A1 Cast dopant for crystal growing
12/08/1994	WO1994028206A1 Apparatus and method for manufacturing single-crystal material
12/08/1994	WO1994028203A1 Digital electrochemical etching of compound semiconductors
12/08/1994	WO1994028194A1 Improved compositions and methods for polishing
12/08/1994	WO1994027823A1 Multi-head die bonding system
12/08/1994	WO1994027765A1 Method for making heat-dissipating elements for micro-electronic devices
12/08/1994	DE4419237A1 Process for removing a photoresist containing a silicon compound or a germanium compound
12/08/1994	DE4419074A1 Method for uniform doping of polycrystalline silicon with hemispherical grains
12/08/1994	DE4319848A1 Process for producing a metal-ceramic substrate
12/08/1994	DE4318422A1 Integrierte Schaltung mit Registerstufen Integrated circuit with register stages
12/08/1994	DE4318184A1 Method and appliance for pulling single crystals
12/08/1994	DE4317565A1 Oriented polycrystalline layer on an external (different, foreign) substrate, method for its production and tool suitable therefor
12/08/1994	DE4240504A1 Method for producing conductive tracks over trench regions of integrated semiconductor circuits, positive photoresist being used for the structuring
12/07/1994	EP0627875A1 Process for manufacturing metal-ceramic substrate
12/07/1994	EP0627872A2 Process for manufacturing metallized ceramic substrates
12/07/1994	EP0627842A1 Image pickup device
12/07/1994	EP0627768A2 Field effect transistor with a Schottky gate
12/07/1994	EP0627767A1 Process for fabricating isolated vertical bipolar and JFET transistors and capacitors
12/07/1994	EP0627766A1 Semiconductor device and manufacturing method thereof
12/07/1994	EP0627765A1 Semiconductor device having a flip-chip semiconducteur element
12/07/1994	EP0627764A2 Process for the separation of chips on a wafer
12/07/1994	EP0627763A1 Process for improving the adhesion between dielectric layers at their interface in semiconductor devices manufacture
12/07/1994	EP0627761A2 Epitaxial overgrowth method and devices
12/07/1994	EP0627760A1 Subdivisible substrate and method of making the same
12/07/1994	EP0627742A2 Semiconductor memory device and method of manufacturing the same
12/07/1994	EP0627667A1 Device fabrication entailing synchrotron radiation
12/07/1994	EP0627666A1 Apparatus and method for changing the scale of a printed pattern
12/07/1994	EP0627664A1 Method for the repair of phase shifting masks
12/07/1994	EP0627631A2 Analog autonomous test bus framework for testing integrated circuits on a printed circuit board
12/07/1994	EP0627611A1 Method and device for conformance testing of hybridization balls
12/07/1994	EP0627506A1 CdTe crystal for use in radiation detector and method of manufacturing such CdTe crystal
12/07/1994	EP0627497A1 Cleaning of a pvd chamber containing a collimator
12/07/1994	EP0627390A1 Viscosity tailoring of fused silica
12/07/1994	EP0627125A1 Improved method for forming pnp and npn bipolar transistor in a same substrate
12/07/1994	EP0627124A1 Fet chip with heat-extracting bridge
12/07/1994	EP0627123A1 Laser generated i.c. mask
12/07/1994	EP0627122A1 Laser generated i.c. pattern
12/07/1994	EP0608376A4 Voltage variable capacitor.
12/07/1994	EP0557278B1 A method of making a multilayer thin film structure
12/07/1994	EP0498887B1 Core wire connecting bridge for polycrystalline silicon manufacturing apparatuses
12/07/1994	EP0456682B1 P-n-p diamond transistor

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