| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/25/1995 | EP0635886A1 Monolithic device including a protection diode connected in parallel to a plurality of diode pairs connected in series |
| 01/25/1995 | EP0635885A1 High density circuit assembly and method of forming the same |
| 01/25/1995 | EP0635884A1 Method for forming a trench in a substrate and application to smart-power-technology |
| 01/25/1995 | EP0635883A2 Semiconductor device inspection system |
| 01/25/1995 | EP0635882A2 A method of fabricating a silicon carbide vertical mosfet |
| 01/25/1995 | EP0635881A2 A method of fabricating a silicon carbide locos vertical mosfet and device |
| 01/25/1995 | EP0635880A1 Method of manufacturing a transistor using silicon on insulator technology |
| 01/25/1995 | EP0635879A2 Semiconductor silicon wafer and process for producing it |
| 01/25/1995 | EP0635878A1 Wiring forming, restoring and pattern changing method |
| 01/25/1995 | EP0635877A2 Apparatus and method for depositing borophosphosilicate glass on a substrate |
| 01/25/1995 | EP0635876A1 Fabrication process for a self-aligned optical subassembly |
| 01/25/1995 | EP0635875A1 Apparatus for heat treatment |
| 01/25/1995 | EP0635874A1 Thin film single crystal substrate |
| 01/25/1995 | EP0635873A1 Processing system and device manufacturing method using the same |
| 01/25/1995 | EP0635872A2 Wafer support apparatus |
| 01/25/1995 | EP0635870A1 An electrostatic chuck having a grooved surface |
| 01/25/1995 | EP0635869A1 Semiconductor processing apparatus, method of making and use of same |
| 01/25/1995 | EP0635838A2 Voltage generation circuit |
| 01/25/1995 | EP0635789A1 Microcontroller integrated circuit with read only memory containing test program, test station and corresponding manufacturing process |
| 01/25/1995 | EP0635723A1 Buckling beam test probe assembly |
| 01/25/1995 | EP0635588A1 Improved method for growing silicon crystal |
| 01/25/1995 | EP0635168A1 Manufacture of grating structures |
| 01/25/1995 | EP0634973A1 Lithographic mask, comprising a membrane having improved strength |
| 01/25/1995 | CN1027519C Method for producing silicon film piezoresistance and pressure sensor |
| 01/24/1995 | US5384742 Non-volatile semiconductor memory |
| 01/24/1995 | US5384741 Semiconductor memory device adapted for preventing a test mode operation from undesirably occurring |
| 01/24/1995 | US5384731 Semiconductor memory device |
| 01/24/1995 | US5384729 Semiconductor storage device having ferroelectric film |
| 01/24/1995 | US5384727 For use with an electrical circuit |
| 01/24/1995 | US5384682 Electrostatic chuck |
| 01/24/1995 | US5384681 Electrostatic chuck |
| 01/24/1995 | US5384531 Apparatus for inspecting characteristics of semiconductor chips |
| 01/24/1995 | US5384529 Current limiting circuit and method of manufacturing same |
| 01/24/1995 | US5384497 Low-skew signal routing in a programmable array |
| 01/24/1995 | US5384486 Integrated circuit device having signal wiring structure of ultrahigh-speed performance |
| 01/24/1995 | US5384485 Contact structure for connecting an electrode to a semiconductor |
| 01/24/1995 | US5384483 Planarizing glass layer spaced from via holes |
| 01/24/1995 | US5384481 Multilayer insulating layer, refractories, thin silicon layera and refractory metals |
| 01/24/1995 | US5384479 Field effect transistor with T-shaped gate electrode |
| 01/24/1995 | US5384478 Mask ROM process |
| 01/24/1995 | US5384475 Semiconductor device and method of manufacturing the same |
| 01/24/1995 | US5384474 Dynamic random access memory device |
| 01/24/1995 | US5384473 Semiconductor body having element formation surfaces with different orientations |
| 01/24/1995 | US5384472 Symmetrical multi-layer metal logic array with continuous substrate taps and extension portions for increased gate density |
| 01/24/1995 | US5384466 Electron beam lithography apparatus and a method thereof |
| 01/24/1995 | US5384464 Process and apparatus for optical near field microlithography |
| 01/24/1995 | US5384289 Reductive elimination chemical vapor deposition processes utilizing organometallic precursor compounds in semiconductor wafer processing |
| 01/24/1995 | US5384288 Method of forming a planarized insulation layer |
| 01/24/1995 | US5384287 Method of forming a semiconductor device having self-aligned contact holes |
| 01/24/1995 | US5384286 Positioning heat sinking frame and lead frame on lower mold, covering with upper mold, injecting resin |
| 01/24/1995 | US5384285 Process for fabricating a silicide layer in a semiconductor device |
| 01/24/1995 | US5384284 Bonding to a pad a conductive layer and adhesion on layers |
| 01/24/1995 | US5384283 Resist protection of ball limiting metal during etch process |
| 01/24/1995 | US5384282 Method for producing an embedded optoelectronic integrated circuit |
| 01/24/1995 | US5384281 Non-conformal and oxidizable etch stops for submicron features |
| 01/24/1995 | US5384280 Method of manufacturing a semiconductor device isolated by a trench |
| 01/24/1995 | US5384279 Method of manufacturing a semiconductor device comprising a silicon body in which semiconductor regions are formed by ion implantations |
| 01/24/1995 | US5384278 Tight control of resistor valves in a SRAM process |
| 01/24/1995 | US5384277 Method for forming a DRAM trench cell capacitor having a strap connection |
| 01/24/1995 | US5384276 Method of fabricating a memory device with a multilayer insulating film |
| 01/24/1995 | US5384275 Method of manufacturing a semiconductor integrated circuit device, and an electronic circuit device |
| 01/24/1995 | US5384274 Method of making a combined semiconductor device and inductor |
| 01/24/1995 | US5384273 Method of making a semiconductor device having a short gate length |
| 01/24/1995 | US5384272 Method for manufacturing a non-volatile, virtual ground memory element |
| 01/24/1995 | US5384271 Method for reduction of off-current in thin film transistors |
| 01/24/1995 | US5384270 Method of producing silicon carbide MOSFET |
| 01/24/1995 | US5384269 Gallium arsenide substrate with dopes, plasma etching and covering with silicon nitride and metal layers |
| 01/24/1995 | US5384268 Charge damage free implantation by introduction of a thin conductive layer |
| 01/24/1995 | US5384266 Electronic device manufacture using ion implantation |
| 01/24/1995 | US5384220 Silylation |
| 01/24/1995 | US5384218 Photomask and pattern transfer method for transferring a pattern onto a substrate having different levels |
| 01/24/1995 | US5384204 Tape automated bonding in semiconductor technique |
| 01/24/1995 | US5384192 Block and graft copolymers as adhesion promoters |
| 01/24/1995 | US5384167 Method for the surface treatment of a metal by atmospheric pressure plasma |
| 01/24/1995 | US5384152 Method for forming capacitors with roughened single crystal plates |
| 01/24/1995 | US5384090 Fine wire for forming bump electrodes using a wire bonder |
| 01/24/1995 | US5384028 Biosensor with a data memory |
| 01/24/1995 | US5384009 Plasma etching using xenon |
| 01/24/1995 | US5384000 Semiconductor chip mounting method and apparatus |
| 01/24/1995 | US5383993 Method of bonding semiconductor substrates |
| 01/24/1995 | US5383984 Plasma processing apparatus etching tunnel-type |
| 01/24/1995 | US5383971 Differential pressure CVD chuck |
| 01/24/1995 | US5383783 Substrate handling apparatus |
| 01/24/1995 | US5383759 Low particle wafer automatic flat aligner |
| 01/24/1995 | US5383574 System and method for dispensing liquid from storage containers |
| 01/24/1995 | US5383488 Apparatus and method for protecting chemical bath seals |
| 01/24/1995 | US5383484 Static megasonic cleaning system for cleaning objects |
| 01/24/1995 | US5383482 Semiconductor processing apparatus and module |
| 01/24/1995 | US5383444 For cutting a workpiece into slices |
| 01/24/1995 | US5383269 Method of making three dimensional integrated circuit interconnect module |
| 01/19/1995 | WO1995002257A1 Method and apparatus for chemically generating terminal bumps on semiconductor wafers |
| 01/19/1995 | WO1995002076A1 Method for forming thin film |
| 01/19/1995 | WO1994024840A3 Thin film heat treatment apparatus |
| 01/19/1995 | DE4424962A1 Method for producing a chip contact |
| 01/19/1995 | DE4424549A1 Verfahren zum Gehäusen eines Leistungshalbleiterbauelements und durch dieses Verfahren hergestelltes Gehäuse A method of housings of a power semiconductor device manufactured by this method and housing |
| 01/19/1995 | DE4423818A1 Semiconductor storage device and method for production thereof |
| 01/19/1995 | DE4423186A1 Verfahren und Einrichtung zum Testen von integrierten Schaltungen Method and device for testing integrated circuits |
| 01/19/1995 | DE4422683A1 Process and apparatus for the automatic ordering of batches for a production line |
| 01/18/1995 | EP0634797A2 Thin film semiconductor device for active matrix panel and method of manufacturing the same |
| 01/18/1995 | EP0634791A2 Wire bonder and wire bonding method |