Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1995
01/17/1995US5381599 Polyesters
01/17/1995CA2007412C Lateral transistor and method of making same
01/13/1995CA2126731A1 Hollow cathode array and method of cleaning sheet stock therewith
01/12/1995WO1995001653A1 Transistors and methods for fabrication thereof
01/12/1995WO1995001652A1 Electrical charge transfer apparatus
01/12/1995WO1995001650A1 Soi substrate fabrication
01/12/1995WO1995001649A1 Integrated circuit structure with programmable conductive electrode/interconnect material and method of making same
01/12/1995WO1994023444A3 Bonded wafer processing with oxidative bonding
01/12/1995DE4423782A1 Functional plastic element
01/12/1995DE4423207A1 Device for aligning wafers
01/12/1995DE4421770A1 Device for ball production in wire bonding, its control method and wire-bonding device
01/12/1995DE4421109A1 Method for producing a polycrystalline semiconductor thin film
01/12/1995DE4321686A1 Molecular beam epitaxy method
01/12/1995CA2166409A1 Soi substrate fabrication
01/11/1995EP0633713A1 Plasma reactor for a deposition and etching method
01/11/1995EP0633665A2 An inverter circuit
01/11/1995EP0633615A1 Resin coating method for a semiconductor laser chip and photodiode chips
01/11/1995EP0633608A1 Pin-finned heat sink and process for producing the same
01/11/1995EP0633607A1 Optical semiconductor device to optical substrate attachment method
01/11/1995EP0633606A1 Method of manufacturing a power diode
01/11/1995EP0633605A2 Thin film for semiconductor device and manufacturing method of thin film for semiconductor device
01/11/1995EP0633604A1 Method of crystallizing amorphous silicon and device obtained by using this method
01/11/1995EP0633600A1 Method and apparatus for forming thin films
01/11/1995EP0633599A1 Thin-film forming apparatus
01/11/1995EP0633576A2 Semiconductor integrated circuit
01/11/1995EP0633505A1 Process and device for adjusting the distance between a workpiece and a mask
01/11/1995EP0633503A1 Photopolymerizable compositions
01/11/1995EP0633502A1 Pattern forming material
01/11/1995EP0633500A1 Photosensitive composition and process for image formation
01/11/1995EP0633499A1 Radiation sensitive resist composition
01/11/1995EP0633464A2 Particle monitoring sensor
01/11/1995EP0633443A1 Heat exchanger
01/11/1995EP0633111A2 Single-strip moulding apparatus with movable mould halves
01/11/1995EP0633098A1 Apparatus for producing cryogenic aerosol
01/11/1995EP0633097A1 Polishing apparatus for notch portion of wafer
01/11/1995EP0633086A1 Inner diameter saw slicing machine
01/11/1995EP0632929A1 Producing magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions
01/11/1995EP0632925A1 Crystallographically aligned ferroelectric films usable in memories and method of making
01/11/1995CN1027413C 垂直双极晶体管 Vertical bipolar transistor
01/11/1995CN1027412C Charge-caupled device
01/11/1995CN1027411C CMOS transistor and one-capacitor dynamic-random-access memory cell and fabrication process thereof
01/10/1995US5381377 Word line driver circuit and method
01/10/1995US5381372 Semiconductor memory device
01/10/1995US5381364 Ferroelectric-based RAM sensing scheme including bit-line capacitance isolation
01/10/1995US5381345 Logic-circuit layout pattern inspection method and logical simulation
01/10/1995US5381344 Apparatus and method for obtaining a list of numbers of wafers for integrated circuit testing
01/10/1995US5381316 Electronic part assembly using a shape memory alloy element
01/10/1995US5381302 Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same
01/10/1995US5381210 Exposing apparatus
01/10/1995US5381104 Method for the inspection of circuit board
01/10/1995US5381103 System and method for accelerated degradation testing of semiconductor devices
01/10/1995US5381046 Static random access memories
01/10/1995US5381042 Packaged integrated circuit including heat slug having an exposed surface
01/10/1995US5381040 For an integrated circuit
01/10/1995US5381039 Hermetic semiconductor device having jumper leads
01/10/1995US5381038 Semiconductor device having passivation protrusions defining electrical bonding area
01/10/1995US5381036 Lead-on chip semiconductor device having peripheral bond pads
01/10/1995US5381035 Predictable programming voltage, integrated circuits, multilayer
01/10/1995US5381033 Dielectrics dividing wafer
01/10/1995US5381032 Semiconductor device having a gate electrode of polycrystal layer and a method of manufacturing thereof
01/10/1995US5381030 Semiconductor memory device with improved step protection and manufacturing method thereof
01/10/1995US5381029 Semiconductor device including semiconductor layer having impurity region and method of manufacturing the same
01/10/1995US5381028 Nonvolatile semiconductor memory with raised source and drain
01/10/1995US5381027 Semiconductor device having a heterojunction and a two dimensional gas as an active layer
01/10/1995US5381025 Insulated gate thyristor with gate turn on and turn off
01/10/1995US5381004 Particle analysis of notched wafers
01/10/1995US5380889 Silane having, bound to silicon, leaving group capable of reacting with hydroxyl on substrate surface to form covalent bond and substituent bound to silicon via oxygen and capable of absorbing deep UV light
01/10/1995US5380882 Phenylacetates and the use thereof
01/10/1995US5380881 Acid labile solution inhibitors and positive- and negative-acting photosensitive composition based thereon
01/10/1995US5380684 Method for transferring wafers from one processing station to another sequentially and system therefor
01/10/1995US5380683 Ionized cluster beam deposition of sapphire and silicon layers
01/10/1995US5380682 Wafer processing cluster tool batch preheating and degassing method
01/10/1995US5380680 Method for forming a metal contact of a semiconductor device
01/10/1995US5380679 Process for forming a multilayer wiring conductor structure in semiconductor device
01/10/1995US5380678 Bilayer barrier metal method for obtaining 100% step-coverage in contact vias without junction degradation
01/10/1995US5380677 Pretreatment with sulfur hexafluoride plasma
01/10/1995US5380676 Method of manufacturing a high density ROM
01/10/1995US5380675 Method for making closely spaced stacked capacitors on DRAM chips
01/10/1995US5380674 Method of fabricating semiconductor memory device having trench capacitor and electrical contact thereto
01/10/1995US5380673 Fabricating a high capacitance dynamic random access memory stacked capacitor on a semiconductor substrate
01/10/1995US5380672 Dense vertical programmable read only memory cell structures and processes for making them
01/10/1995US5380671 Integrated circuits, reduced leakage currents
01/10/1995US5380670 Method of fabricating a semiconductor device
01/10/1995US5380621 Mid and deep-UV antireflection coatings and methods for use thereof
01/10/1995US5380618 Micropattern-forming material having a low molecular weight novolak resin, a quinone diazide sulfonyl ester and a solvent
01/10/1995US5380609 Method for fabricating photomasks having a phase shift layer comprising the use of a positive to negative resist, substrate imaging and heating
01/10/1995US5380598 Solder joint
01/10/1995US5380567 Coating electronic device with hydrogen silsesquioxane resin solution, evaporating solvent to deposit preceramic coating, heating to 500-800 degrees C. in inert gas atmosphere
01/10/1995US5380555 Forming on substrate a coating of specified silicon resin copolymer and heating coated substrate to form ceramic film
01/10/1995US5380546 Multilevel metallization process for electronic components
01/10/1995US5380503 For storing or transporting articles: particle collector including irradiation source, photoelectron emitter and electrode; partition of irradiation energy screening material
01/10/1995US5380420 Arc ion plating system
01/10/1995US5380401 Method to remove fluorine residues from bond pads
01/10/1995US5380399 Method of treating semiconductor substrates
01/10/1995US5380398 Method for selectively etching AlGaAs
01/10/1995US5380397 Method of treating samples
01/10/1995US5380396 Valve and semiconductor fabricating equipment using the same
01/10/1995US5380372 Nucleation film, silicon carbide intermediate film, semiconductor film
01/10/1995US5380367 Vapour generator for chemical vapour deposition systems
01/10/1995US5380246 Dust suction apparatus