H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1994
11/08/1994	US5362982 Insulated gate FET with a particular LDD structure
11/08/1994	US5362981 Integrated semiconductor device having a buried semiconductor layer and fabrication method thereof
11/08/1994	US5362980 Semiconductor component with protective element for limiting current through component
11/08/1994	US5362973 Quantum fabricated via photo induced evaporation enhancement during in situ epitaxial growth
11/08/1994	US5362972 Semiconductor device using whiskers
11/08/1994	US5362969 Processing endpoint detecting technique and detector structure using multiple radiation sources or discrete detectors
11/08/1994	US5362955 IC card having severable mini chip card
11/08/1994	US5362686 Vapor deposition of dielectric film using pressurized gaseous mixture containing organic silane and nitriding gas yields strong moisture resistant coating
11/08/1994	US5362685 Method for achieving a high quality thin oxide in integrated circuit devices
11/08/1994	US5362684 Non-monocrystalline silicon carbide semiconductor, process of production thereof, and semiconductor device employing the same
11/08/1994	US5362683 Cutting through single crystal semiconductor wafers which have growth layers on both surfaces
11/08/1994	US5362682 Method of producing sheets of crystalline material and devices made therefrom
11/08/1994	US5362681 Method for separating circuit dies from a wafer
11/08/1994	US5362680 Technique for enhancing adhesion capability of heat spreaders in molded packages
11/08/1994	US5362678 Method of manufacturing insulated via hole structure for semiconductor device
11/08/1994	US5362677 Method for producing a field effect transistor with a gate recess structure
11/08/1994	US5362676 Depositing nonconductive film(which can be converted to conductor by heating or applying voltage) on dielectric as part of connector
11/08/1994	US5362672 Method of forming a monocrystalline film having a closed loop step portion on the substrate
11/08/1994	US5362671 Method of fabricating single crystal silicon arrayed devices for display panels
11/08/1994	US5362670 Semiconductor device producing method requiring only two masks for completion of element isolation regions and P- and N-wells
11/08/1994	US5362669 Method of making integrated circuits
11/08/1994	US5362668 Method of fabricating an BPSG-filled trend and oxidation isolation structure with a gate electrode
11/08/1994	US5362667 Joining surfaces of wafer and handle wafer by applying oxidizer solutiion, pressing and heating
11/08/1994	US5362665 Method of making vertical DRAM cross point memory cell
11/08/1994	US5362664 Method for fabricating a semiconductor memory device
11/08/1994	US5362663 Method of forming double well substrate plate trench DRAM cell array
11/08/1994	US5362661 Method for fabricating thin film transistor
11/08/1994	US5362660 Depositing layer of chromium, then one of molybdenum on silicon surface, etching molybdenum with chromium acting as etch stop, then etching chromium with silicon acting as etch stop
11/08/1994	US5362659 Method for fabricating vertical bipolar junction transistors in silicon bonded to an insulator
11/08/1994	US5362658 Method for producing semiconductor device
11/08/1994	US5362657 Lateral complementary heterojunction bipolar transistor and processing procedure
11/08/1994	US5362632 Rapid thermal processing of semiconductor layer yields reaction preventing barrier
11/08/1994	US5362608 Microlithographic substrate cleaning and compositions therefor
11/08/1994	US5362600 Radiation sensitive compositions comprising polymer having acid labile groups
11/08/1994	US5362599 Fast diazoquinone positive resists comprising mixed esters of 4-sulfonate and 5-sulfonate compounds
11/08/1994	US5362585 Forming an array of latent images in a resist and analyzing scattered light from edges to provide information on correct exposure, focus and lens characteristics
11/08/1994	US5362583 Reticle mask exposure method comprising blank to remove incomplete circuits
11/08/1994	US5362575 Free-standing tensile fims supported at its edge by annular, tapered skirt structure; integrated electronic devices
11/08/1994	US5362550 Thin film circuit board and its manufacturing process
11/08/1994	US5362547 Film carrier
11/08/1994	US5362526 Plasma-enhanced CVD process using TEOS for depositing silicon oxide
11/08/1994	US5362450 Laser controlled decomposition of chlorofluorocarbons
11/08/1994	US5362372 Self cleaning collimator
11/08/1994	US5362370 Method for the electrolytic removal of plastic mold flash or bleed from the metal surfaces of semiconductor devices or similar electronic components
11/08/1994	US5362361 Sulfur-containing etchant
11/08/1994	US5362358 Dry etching apparatus and method of forming a via hole in an interlayer insulator using same
11/08/1994	US5362356 Plasma etching process control
11/08/1994	US5362354 Apparatus for manufacturing a semiconductor device
11/08/1994	US5362353 Faraday cage for barrel-style plasma etchers
11/08/1994	US5362350 Copper wires
11/08/1994	US5362274 Blowing port for clean air of an apparatus for washing semiconductor materials
11/08/1994	US5362229 Piping connection device
11/08/1994	US5361973 Method of soldering
11/08/1994	US5361970 Method of producing a semiconductor integrated circuit device having terminal members provided between semiconductor element and leads
11/08/1994	US5361914 Device for component processing
11/08/1994	US5361789 Washing/drying method and apparatus
11/08/1994	US5361787 Cleaning apparatus
11/08/1994	US5361721 Continuous process; from molten polycrystals such as silicon
11/08/1994	US5361515 Method of drying a protective polymer coating applied onto a surface of an article from a solution, and device for effecting thereof
11/08/1994	US5361492 Method of mounting terminals to substrate
11/08/1994	US5361491 Process for producing an IC-mounting flexible circuit board
11/08/1994	US5361490 Method for making tape automated bonding (TAB) semiconductor device
11/08/1994	US5361449 Cleaning apparatus for cleaning reverse surface of semiconductor wafer
11/08/1994	CA2009405C Microwave integrated circuit using a distributed line with a variable effective length
11/03/1994	DE4414729A1 Material for a line frame and line frame for semiconductor components
11/03/1994	DE4413815A1 Production method for a semiconductor device
11/02/1994	EP0622858A2 Gallium nitride-based III-V group compound semiconductor device and method of producing the same
11/02/1994	EP0622852A1 A field effect transistor and a production method therefor
11/02/1994	EP0622850A1 An electrostatic discharge protect diode for silicon-on-insulator technology
11/02/1994	EP0622849A1 A monolithic integrated structure of an electronic device having a predetermined unidirectional conduction threshold
11/02/1994	EP0622846A1 Fabrication and laser deletion of microfuses
11/02/1994	EP0622845A2 Apparatus and method for tape automated bonding beam lead insulation
11/02/1994	EP0622844A1 Method of forming low resistance contacts at the junction between regions having different conductivity types
11/02/1994	EP0622843A2 Reach-through isolation etching method for silicon-on-insulator devices
11/02/1994	EP0622842A2 A method of forming a frontside contact to the silicon substrate of a SOI wafer
11/02/1994	EP0622841A1 Method and apparatus for transportation of highly clean material
11/02/1994	EP0622840A2 Apparatus and method for assembling and checking microwave monolithic integrated circuit (MMIC) module
11/02/1994	EP0622839A2 Process for connecting an integrated circuit to an external circuit
11/02/1994	EP0622838A1 Method of making an article comprising solder bump bonding
11/02/1994	EP0622837A1 An optical semiconductor device and a method of manufacturing the same
11/02/1994	EP0622836A1 Encapsulating process for electronic hybrid components enabled by spheres on a substrat
11/02/1994	EP0622835A1 Heterojunction compound semiconductor device and method of manufacturing the same
11/02/1994	EP0622834A2 Method to prevent latch-up and improve breakdown voltage in SOI MOSFETS
11/02/1994	EP0622833A1 Adhesive sheet for wafer and process for preparing semiconductor apparatus using the same
11/02/1994	EP0622832A2 Method of connecting a wiring with a semiconductor region and semiconductor device obtained by this method
11/02/1994	EP0622807A2 Semiconductor memory device
11/02/1994	EP0622806A2 Nonvolatile semiconductor memory device
11/02/1994	EP0622760A1 External storage device and external storage device unit and method of producing external storage device
11/02/1994	EP0622735A1 Tie-up and tie-down circuits with a primary input for testability improvement of logic networks
11/02/1994	EP0622717A1 Temperature stable circuit for recycling discharge current during the driving of an inductive load
11/02/1994	EP0622683A1 Resist structures having through holes with shaped wall profiles and fabrication thereof
11/02/1994	EP0622680A2 Frame-supported dustproof pellicle for photolithographic photomask
11/02/1994	EP0622627A1 Method and apparatus for detecting particles on a substrate
11/02/1994	EP0622608A1 Scanning apparatus for investigating surface structures with a resolution of microns and method of its manufacture
11/02/1994	EP0622477A1 Etching aluminum and its alloys using HC1, C1-containing etchant and N2
11/02/1994	EP0622475A1 Method and apparatus for degassing semiconductor processing liquids
11/02/1994	EP0622472A1 Method for growing a diamond or c-BN thin film on a diamond or c-BN substrate
11/02/1994	EP0622155A1 Polishing pad and a method of polishing a semiconductor substrate
11/02/1994	EP0622151A1 An Article comprising a pb-free solder having improved mechanical properties
11/02/1994	EP0622149A1 A capillary for a wire bonding apparatus and a method for forming an electric connection bump using the capillary

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