H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1994
11/15/1994	US5364809 Containing a transistor and capacitor
11/15/1994	US5364808 Method of making a buried bit line DRAM cell
11/15/1994	US5364807 Method for fabricating LDD transitor utilizing halo implant
11/15/1994	US5364806 Method of making a self-aligned dual-bit split gate (DSG) flash EEPROM cell
11/15/1994	US5364805 Method of manufacturing an EEPROM having an erasing gate electrode
11/15/1994	US5364804 Nitride cap sidewall oxide protection from BOE etch
11/15/1994	US5364803 Depositing diffusion barrier and tungsten silicide layer over silicon oxide layer on semiconductor surface, patterning, annealing; barrier prevents diffusion of fluorine
11/15/1994	US5364802 Method of making a semiconductor device with buried electrode
11/15/1994	US5364801 Method of forming a charge pump circuit
11/15/1994	US5364800 Varying the thickness of the surface silicon layer in a silicon-on-insulator substrate
11/15/1994	US5364742 Micro-miniature structures and method of fabrication thereof
11/15/1994	US5364737 Latex binder polymer with carboxylic acid and unsaturated monomers, photoinitiators and polyether polyurethane thickener
11/15/1994	US5364734 Postive-working radiation-sensitive mixture and radiation-sensitive recording material produced therewith
11/15/1994	US5364717 Method of manufacturing X-ray exposure mask
11/15/1994	US5364667 Photo-assisted chemical vapor deposition method
11/15/1994	US5364664 Vapor depositing aluminum from alkylaluminum hydride and hydrogen gas; wiring semiconductors and integrated circuits
11/15/1994	US5364499 Dry etching process for gallium arsenide excellent in selectivity with respect to aluminum gallium arsenide
11/15/1994	US5364496 Highly durable noncontaminating surround materials for plasma etching
11/15/1994	US5364488 Coaxial plasma processing apparatus
11/15/1994	US5364474 Spray cleaning while rotating workpiece surface to adjust impact velocity; electronics, integrated circuits
11/15/1994	US5364468 Method for the growth of epitaxial metal-insulator-metal-semiconductor structures
11/15/1994	US5364225 Method of printed circuit panel manufacture
11/15/1994	US5364222 Apparatus for processing wafer-shaped substrates
11/15/1994	US5364219 Apparatus for clean transfer of objects
11/15/1994	US5364144 Cassette transporting apparatus
11/15/1994	US5364009 Ultrasonic wire bonding method
11/15/1994	US5364004 Wedge bump bonding apparatus and method
11/15/1994	US5363872 Low particulate slit valve system and method for controlling same
11/15/1994	US5363867 Article storage house in a clean room
11/15/1994	US5363800 Cut and polish silicon wafer so that wafer is slightly misoriented, forming groove to establish independent growth region, pregrowth etching, intentional heterogenous nucleation growing film by chemical vapor deposition
11/15/1994	US5363799 Method for growth of crystal
11/15/1994	US5363793 Implanting ions in the surface of a substrate, preferential etching
11/15/1994	CA1333059C Method for planarizing an insulating layer
11/15/1994	CA1333042C Capping layer for recrystallization process
11/15/1994	CA1333041C Process for forming deposited film
11/15/1994	CA1333040C Process for forming deposited film
11/15/1994	CA1333039C Molecular beam epitaxy apparatus
11/15/1994	CA1333038C Molecular beam epitaxy apparatus
11/10/1994	WO1994025990A1 Thin film transistor and display using the transistor
11/10/1994	WO1994025988A1 Epitaxial semiconductor wafer for cmos integrated circuits
11/10/1994	WO1994025987A1 Semiconductor chip encapsulation method, device produced by this method and its application to three dimensional chip interconnection
11/10/1994	WO1994025982A1 Contact structure for vertical chip connections
11/10/1994	WO1994025981A1 Process for producing vertically connected semiconductor components
11/10/1994	WO1994025980A1 Container for packing semiconductor wafer
11/10/1994	WO1994025823A1 Self aligning in-situ ellipsometer and method of using for process monitoring
11/10/1994	WO1994025177A1 Device for lacquering or coating plates or panels
11/10/1994	WO1994024840A2 Thin film heat treatment apparatus
11/10/1994	WO1994021102A3 Direct multilevel thin-film transistor production method
11/10/1994	DE4415375A1 Film carrier and method for its production
11/10/1994	DE4414005A1 Process for sheathing electronic components
11/10/1994	DE4412915A1 Plasma treatment plant and method of its operation
11/10/1994	DE4412902A1 Method for increasing the deposition rate, method for reducing the dust density in a plasma discharge chamber, and plasma chamber
11/10/1994	DE4315435A1 Process for etching insulation and buffer layers arranged on a semiconductor substrate
11/10/1994	DE4315012A1 Method for producing sensors, and sensor
11/10/1994	DE4302223C2 Nicht-flüchtige Halbleiterspeichereinrichtung sowie Herstellungsverfahren dafür The non-volatile semiconductor memory device and manufacturing method thereof
11/10/1994	CA2159831A1 Self aligning in-situ ellipsometer and method of using for process monitoring
11/09/1994	EP0624053A2 Mounting device and method of connecting miniaturized electronic components by bump connections
11/09/1994	EP0623999A2 Field programmable gate array
11/09/1994	EP0623964A2 Semiconductor devices using traps
11/09/1994	EP0623963A1 MOSFET on SOI substrate
11/09/1994	EP0623959A2 EEPROM cell
11/09/1994	EP0623958A1 Semi-conductor integrated circuit including protection means
11/09/1994	EP0623957A1 Lead frame manufacturing method
11/09/1994	EP0623956A2 A semiconductor device having no die supporting surface and method for making the same
11/09/1994	EP0623955A2 Semiconductor chip module
11/09/1994	EP0623953A2 Flagless semiconductor device and method for making the same
11/09/1994	EP0623951A1 A semiconductor device in a thin active layer with high breakdown voltage
11/09/1994	EP0623950A2 Process for manufacturing tubular microstructures in solid state bodies
11/09/1994	EP0623949A1 A dielectrically isolated semiconductor device and a method for its manufacture
11/09/1994	EP0623948A1 Load lock chamber for vertical type heat treatment apparatus
11/09/1994	EP0623947A1 Apparatus and method to ensure heat transfer to and from an entire substrate during semiconductor processing
11/09/1994	EP0623932A2 Soft error immune CMOS static RAM cell
11/09/1994	EP0623826A1 Membrane connector with stretch induced micro scrub
11/09/1994	EP0623824A1 Micro-machined accelerometer and method of its manufacture
11/09/1994	EP0623423A1 Method for polishing a substrate
11/09/1994	EP0623244A1 Quantum well p-channel field effect transistor, and integrated circuit having complementary transistors
11/09/1994	EP0623242A1 Backplane grounding for flip-chip integrated circuit
11/09/1994	EP0623241A1 Semiconductor device with terminal lead
11/09/1994	EP0598895A4 Symmetrical multi-layer metal logic array with continuous substrate taps.
11/09/1994	EP0469920B1 Method of manufacturing insulated substrate for semiconductor devices and patterned metal plate used therefor
11/09/1994	EP0398906B1 Zener power diode
11/09/1994	EP0340466B1 Semiconductor device comprising leads
11/09/1994	CN1094851A Transistor, semiconductor circuit, and method of forming the same
11/09/1994	CN1094850A Method for manufacturing a semiconductor chip bump
11/09/1994	CN1094849A Method for manufacturing semiconductor device with plastic package
11/09/1994	CN1094848A Laser vaporizing apparatus and Method for formation of semiconductor applying same
11/09/1994	CN1094847A Semiconductor device and method of fabricating the same
11/08/1994	US5363400 Physical vapor deposition method
11/08/1994	US5363339 Semiconductor memory device
11/08/1994	US5363336 Semiconductor memory device controlling the supply voltage on BIT lines
11/08/1994	US5363328 Highly stable asymmetric SRAM cell
11/08/1994	US5363327 Buried-sidewall-strap two transistor one capacitor trench cell
11/08/1994	US5363326 Semiconductor memory device having crossed word lines, and method of operating same
11/08/1994	US5363278 Surface of ceramic substrate oxidized prior to bonding
11/08/1994	US5363277 Structure and method for mounting semiconductor device
11/08/1994	US5363172 Method of projection exposure and stepper
11/08/1994	US5363170 Illumination device and projection exposure apparatus using the same
11/08/1994	US5363058 Amplifier having linear input-output characteristics and high efficiency
11/08/1994	US5362998 Composite circuit of bipolar transistors and MOS transistors and semiconductor integrated circuit device using the same
11/08/1994	US5362984 Semiconductor device with jumping wire

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