H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1994
12/07/1994	EP0379594B1 Gas supply pipeline system for process equipment
12/06/1994	US5371712 Semiconductor memory device having detection circuitry for sensing faults in word lines
12/06/1994	US5371704 Nonvolatile memory device with compensation for over-erasing operation
12/06/1994	US5371700 Semiconductor memory device with covered sidewall spacers
12/06/1994	US5371699 Non-volatile ferroelectric memory with folded bit lines and method of making the same
12/06/1994	US5371684 Semiconductor floor plan for a register renaming circuit
12/06/1994	US5371414 Simultaneous multiple antifuse programming method
12/06/1994	US5371410 Integrated circuit metallization with zero contact enclosure requirements
12/06/1994	US5371407 Electronic circuit with diamond substrate and conductive vias
12/06/1994	US5371406 Semiconductor device
12/06/1994	US5371404 Thermally conductive integrated circuit package with radio frequency shielding
12/06/1994	US5371401 Semiconductor integrated circuit fully isolated from the substrate
12/06/1994	US5371398 Thin film transistor
12/06/1994	US5371396 Field effect transistor having polycrystalline silicon gate junction
12/06/1994	US5371395 High voltage input pad protection circuitry
12/06/1994	US5371394 Double implanted laterally diffused MOS device and method thereof
12/06/1994	US5371393 EEPROM cell with improved tunneling properties
12/06/1994	US5371392 Semiconductor apparatus and horizontal register for solid-state image pickup apparatus with protection circuit
12/06/1994	US5371391 MOS semiconductor device and method of fabricating the same
12/06/1994	US5371390 Interconnect substrate with circuits for field-programmability and testing of multichip modules and hybrid circuits
12/06/1994	US5371389 High current gain
12/06/1994	US5371387 Lamination of buffer, undoped channel and N-type electron supplying layer sequentially deposited on a semi-insulating semiconductor substrate; epitaxial structure
12/06/1994	US5371383 Highly oriented diamond film field-effect transistor
12/06/1994	US5371382 Used for high temperature and radiation hardened electronics
12/06/1994	US5371381 Process for producing single crystal semiconductor layer and semiconductor device produced by said process
12/06/1994	US5371380 Si- and/or Ge-containing non-single crystalline semiconductor film with an average radius of 3.5 A or less as for microvoids contained therein and a microvoid density 1×10.sup.(19) (cm-3) or less
12/06/1994	US5371375 Method for obtaining three-dimensional data from multiple parts or devices in a multi-pocketed tray
12/06/1994	US5371373 Electron beam lithography method and apparatus separating repetitive and non-repetitive pattern data
12/06/1994	US5371352 Photodetector comprising a test element group of PN junctions and including a mask having at least one window spaced apart from the PN junctions
12/06/1994	US5371351 Imaging device with electrostatic discharge protection
12/06/1994	US5371328 Component rework
12/06/1994	US5371178 Rapidly curing adhesive and method
12/06/1994	US5371169 Blends with overlapping molecular weight distribution; used in positive photoresists
12/06/1994	US5371047 Using organic dielectric to eliminate damage caused by outgassing vapors
12/06/1994	US5371046 Method to solve sog non-uniformity in the VLSI process
12/06/1994	US5371044 Method of uniformly encapsulating a semiconductor device in resin
12/06/1994	US5371042 Method of filling contacts in semiconductor devices
12/06/1994	US5371041 Forming a conformal refractory metal silicide layer over refractory metal nitride layer which extends vertically into opening
12/06/1994	US5371040 Method for manufacturing semiconductor components with short switching time
12/06/1994	US5371039 Method for fabricating capacitor having polycrystalline silicon film
12/06/1994	US5371038 Using growth and process apparatus that precisely controls the processing environment; minimization of contaminant deposition
12/06/1994	US5371037 Semiconductor member and process for preparing semiconductor member
12/06/1994	US5371036 Locos technology with narrow silicon trench
12/06/1994	US5371035 Method for forming electrical isolation in an integrated circuit device
12/06/1994	US5371032 Process for production of a semiconductor device having a cladding layer
12/06/1994	US5371031 Method of making EEPROM array with buried N+ windows and with separate erasing and programming regions
12/06/1994	US5371030 Method of fabricating field oxide isolation for a contactless flash EPROM cell array
12/06/1994	US5371028 Tunneling insulator layer structure between the floating gate and control gate: dual layer formed of outer silicon oxide layer and an inner silicon oxynitride layer
12/06/1994	US5371027 Method of manufacturing a semiconductor device having a non-volatile memory with an improved tunnel oxide
12/06/1994	US5371026 Method for fabricating paired MOS transistors having a current-gain differential
12/06/1994	US5371025 Reduces extent of channel overlap between a gate electrode and source/drain regions; improved signal-to-noise ratio
12/06/1994	US5371024 Semiconductor device and process for manufacturing the same
12/06/1994	US5371022 Method of forming a novel vertical-gate CMOS compatible lateral bipolar transistor
12/06/1994	US5370974 Laser exposure of photosensitive polyimide for pattern formation
12/06/1994	US5370973 Forming T-shaped resist cavity by pattering photoresist layers by exposure to light, filling cavity with metal and removing rest of metal layer except cavity
12/06/1994	US5370972 Amorphous silicon photodiode with sloped sidewalls and method of fabrication
12/06/1994	US5370971 Epoxy based photopolymerizable composition
12/06/1994	US5370969 Planarization layer, chemical vapor deposited interfacial film, and photosensitivwe resist layer
12/06/1994	US5370951 Fluorocarbon-containing polysiloxane as adhesive; having silicon-bonded hydrogen atoms and vinyl groups for catalytic hydrosilation, crosslinking
12/06/1994	US5370923 Curving insulating structure placed in close spaced proximity with a conductive, interconnect structure
12/06/1994	US5370904 Method for the formation of silicon oxide films
12/06/1994	US5370903 Converting a hydrogen silsesquioxane resin into ceramic with specific amount or silicon-bonded hydrogen in oxide product; no pinholes or cracks
12/06/1994	US5370846 Ozonizing high purity oxygen in presence of nitrogen, argon, helium and carbon dioxide between electrode plates
12/06/1994	US5370769 Etching gas containing at least sulfur fluoride capable of releasing sulfur into a plasma
12/06/1994	US5370767 Electron cyclotron resonance plasma of chlorine/helium mixture
12/06/1994	US5370766 Forming conductive layer on substrate, forming patterned dielectric layer thereon, formed patterned thin film conductor above the dielectric layer to provide inductor
12/06/1994	US5370759 Method for producing multilayered ceramic substrate
12/06/1994	US5370741 Dynamic semiconductor wafer processing using homogeneous chemical vapors
12/06/1994	US5370740 Chemical decomposition by sonication in liquid carbon dioxide
12/06/1994	US5370739 Downwardly facing showerhead directs gas mixture from a cooled mixing chamber; smooth interior surface minimizes turbulence; lip reduces thermal gradients
12/06/1994	US5370738 Controlling thickness and composition; laminar flow of gases
12/06/1994	US5370736 Horizontal reactor hardware design
12/06/1994	US5370709 Semiconductor wafer processing apparatus having a Bernoulli chuck
12/06/1994	US5370517 Apparatus for assembling and resin-encapsulating a heat sink-mounted semiconductor power device
12/06/1994	US5370491 Method and apparatus for transferring articles between two controlled environments
12/06/1994	US5370371 Heat treatment apparatus
12/06/1994	US5370301 Apparatus and method for flip-chip bonding
12/06/1994	US5370300 Method and apparatus for wire bonding
12/06/1994	US5370274 Apparatus for cleaning a wafer surface
12/06/1994	US5370269 Process and apparatus for precise volumetric diluting/mixing of chemicals
12/06/1994	US5370142 Substrate washing device
12/06/1994	US5369891 Substrate drying apparatus
12/06/1994	CA1333356C Functional znse:h deposited films
12/02/1994	CA2123019A1 Viscosity tailoring of fused silica
12/01/1994	DE4418450A1 Microvalve
12/01/1994	DE4417819A1 Method for producing a CMOS transistor
12/01/1994	DE4417670A1 Improved TAB tape
12/01/1994	DE4416801A1 Method and device for pattern recognition
12/01/1994	DE4414353A1 Integrierte Halbleiterschaltung mit regelmäßig angeordneten Transistor-Basiszellen A semiconductor integrated circuit having regularly arranged transistor base cell
12/01/1994	DE4341667C1 Integrated circuit arrangement having at least one CMOS NAND gate and method for the production thereof
12/01/1994	DE4317722A1 Process for the anisotropic etching of an aluminium-containing layer
12/01/1994	DE4317623A1 Process and apparatus for the anisotropic plasma etching of substrates
11/1994
11/30/1994	EP0626756A2 Output circuit having three power supply lines
11/30/1994	EP0626751A1 Micromechanical element and method for producing the same
11/30/1994	EP0626745A2 Floating drive technique for reverse battery protection
11/30/1994	EP0626731A2 Improved method of making semiconductor heterostructures of gallium arsenide on germanium
11/30/1994	EP0626729A1 Method for producing a lateral bipolar transistor
11/30/1994	EP0626728A1 Integrated circuit of the type comprising a resistor, capacitor and transistor, method of fabricating the same and application to an oscillator
11/30/1994	EP0626727A2 Thin-film wiring layout for a non-planar thin-film structure
11/30/1994	EP0626726A2 Simultaneous multiple antifuse programming method

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