H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1994
12/20/1994	US5374327 Monitoring, adjustment using light emmission
12/20/1994	US5374325 Liquid agitation and purification system
12/20/1994	US5374315 Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
12/20/1994	US5374313 Magnetic roller gas gate employing transonic sweep gas flow to isolate regions of differing gaseous composition or pressure
12/20/1994	US5374312 Liquid coating system
12/20/1994	US5374159 Robotically loaded epitaxial deposition apparatus
12/20/1994	US5374158 Probe and inverting apparatus
12/20/1994	US5374153 Transfer apparatus
12/20/1994	US5374147 Transfer device for transferring a substrate
12/20/1994	US5374090 Cordless vacuum wand
12/20/1994	US5373807 Apparatus for growing multiple single crystals
12/20/1994	US5373804 Single silicon crystal having low OSF density induced by oxidation and method for production thereof
12/20/1994	US5373803 Method of epitaxial growth of semiconductor
12/20/1994	US5373751 Locating table apparatus
12/20/1994	US5373731 Bonding tool, production and handling thereof
12/20/1994	CA2014048C Semiconductor device isolation
12/19/1994	CA2125307A1 Configurable logic array
12/15/1994	DE4420417A1 Method of manufacturing a mask for producing a pattern on a semiconductor component
12/15/1994	DE4420409A1 Photomask (mask) with patterns for the reduction of the performance of a stepper
12/15/1994	DE4420408A1 Photomask (mask) for measuring the line width of a semiconductor device
12/15/1994	DE4420026A1 Semiconductor storage device
12/15/1994	DE4342821C1 Electronic memory circuit
12/15/1994	DE4334666C1 Method for anisotropic etching of monocrystalline materials
12/15/1994	DE4333426C1 Method for metallising solar cells comprising crystalline silicon
12/15/1994	DE4331185C1 Method for filling contact holes in a semiconductor layer structure
12/15/1994	DE4319089A1 Method for tungsten contact hole filling by full-surface tungsten deposition with reduced layer thickness and back-etching with inverse loading effect
12/15/1994	DE4240506A1 Method for producing interconnections over trench regions of interconnected semiconductor circuits, solder resist being used for the structuring
12/14/1994	EP0629110A2 Method of forming conductive pattern on substrate
12/14/1994	EP0629002A1 Semiconductor device and ferroelectric capacitor
12/14/1994	EP0629001A1 Integrated monolithic structure of a vertical bipolar transistor and a vertical MOSFET transistor
12/14/1994	EP0628999A1 Sealed feedthrough for a thickfilm ceramic substrate and method of making the same
12/14/1994	EP0628998A1 Wiring layer for semi conductor device and method for manufacturing the same
12/14/1994	EP0628997A2 Semiconductor device with small die pad and method of making same
12/14/1994	EP0628996A1 Semiconductor device
12/14/1994	EP0628995A1 Semiconductor substrate and method of manufacturing same
12/14/1994	EP0628994A2 Heat treatment method for semiconductor substrate
12/14/1994	EP0628993A2 A method for selective removal of hard trench masks
12/14/1994	EP0628992A2 Method of making semiconductor wafers
12/14/1994	EP0628991A1 Semiconductor device having reduced carrier lifetime and method of manufacturing the same
12/14/1994	EP0628990A1 Heat treatment apparatus
12/14/1994	EP0628989A2 Sealing device and method useful in semiconductor processing apparatus for bridging materials having a thermal expansion differential
12/14/1994	EP0628988A1 Semiconductor manufacturing system with self-diagnosing function and self-diagnosing method thereof
12/14/1994	EP0628986A1 Self cleaning collimator
12/14/1994	EP0628985A1 Control of particle generation within a reaction chamber
12/14/1994	EP0628921A2 Method of partitioning a circuit
12/14/1994	EP0628879A1 Surface-imaging technique for lithographic processes for device fabrication
12/14/1994	EP0628876A1 Environmentally stable highly sensitive acid amplifier photoresists
12/14/1994	EP0628832A2 Integrated circuit with register stages
12/14/1994	EP0628831A1 Bidirectional boundary scan test cell
12/14/1994	EP0628827A1 IC device including a level detection circuit of an operating voltage
12/14/1994	EP0628809A1 Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
12/14/1994	EP0628806A2 Image measurement system and method
12/14/1994	EP0628645A1 Spiral heater for use in Czochralski crystal pullers
12/14/1994	EP0628376A1 Semiconductor electrical heater and method for making same
12/14/1994	EP0628215A1 Bipolar junction transistor exhibiting suppressed kirk effect
12/14/1994	EP0628214A1 Manufacture of etched substrates such as infrared detectors
12/14/1994	EP0628213A1 Gas phase doping of semiconductor material in a cold-wall radiantly heated reactor under reduced pressure
12/14/1994	EP0628212A1 Enhanced thin film dc plasma processing system
12/14/1994	EP0628091A1 A method of coating a piezoelectric substrate with a semi-conducting material and a method of producing a droplet ejector arrangement including the coating method.
12/14/1994	EP0472536B1 Sealable transportable container having improved latch mechanism
12/14/1994	EP0471737B1 Semiconductor device
12/14/1994	CN1096400A Method of cleaning semiconductor device and equipment for cleaning semiconductor device
12/13/1994	US5373522 Semiconductor devices with native aluminum oxide regions
12/13/1994	US5373521 Energy band gap at a position in the substrate, the buffer layers, and the first cladding layer varies stepwise as the position moves from the substrate to the first cladding layer via the buffer layers
12/13/1994	US5373476 Highly integrated semiconductor memory device with triple well structure
12/13/1994	US5373475 Semiconductor device in which the number of word lines selected simultaneously in a refresh mode is externally selectable and method of manufacturing the same
12/13/1994	US5373470 Method and circuit for configuring I/O devices
12/13/1994	US5373465 Non-volatile semiconductor memory cell
12/13/1994	US5373379 Repairable liquid crystal display panel with laser fusible links
12/13/1994	US5373233 Method for the recognition of testing errors in the test of microwirings
12/13/1994	US5373232 Method of and articles for accurately determining relative positions of lithographic artifacts
12/13/1994	US5373231 For use in testing a circuit
12/13/1994	US5373199 MOS transistor output circuit
12/13/1994	US5373192 Electromigration resistance metal interconnect
12/13/1994	US5373191 Semiconductor device and method of producing the same
12/13/1994	US5373190 Resin-sealed semiconductor device
12/13/1994	US5373188 Packaged semiconductor device including multiple semiconductor chips and cross-over lead
12/13/1994	US5373185 Multilayer vertical transistor having an overlay electrode connected to the top layer of the transistor and to the transistor substrate
12/13/1994	US5373184 SOI/semiconductor heterostructure fabrication by wafer bonding
12/13/1994	US5373181 Sensor for sensing fingerpaints and method for producing the sensor
12/13/1994	US5373180 Planar isolation technique for integrated circuits
12/13/1994	US5373179 Protective device for semiconductor IC
12/13/1994	US5373178 Semiconductor device
12/13/1994	US5373177 Semiconductor device with improved electric charge storage characteristics
12/13/1994	US5373176 Structurally matched ferroelectric device
12/13/1994	US5373175 Excellent adhesion to p-type semiconductors; low specific contact resistance
12/13/1994	US5373172 Semiconducting diamond light-emitting element
12/13/1994	US5373171 Thin film single crystal substrate
12/13/1994	US5373168 Two-dimensional electron gas field effect transistor including an improved InGaAs channel layer
12/13/1994	US5373164 For controllably treating a workpiece
12/13/1994	US5373114 Circuit substrate
12/13/1994	US5373110 Multilayer circuit board with repaired I/O pin and process for repairing I/O pin on multilayer circuit board
12/13/1994	US5372974 Approach to avoid buckling in BPSG by using an intermediate barrier layer
12/13/1994	US5372973 Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology
12/13/1994	US5372972 Method of and an apparatus for processing a lead frame
12/13/1994	US5372971 Method for forming via hole in multiple metal layers of semiconductor device
12/13/1994	US5372970 Method for epitaxially growing a II-VI compound semiconductor
12/13/1994	US5372969 Patterning to form islands on surface, surrounding with supporting materials, selectively forming electroconductive vias and trenches, depositing interlevel layer, repeating
12/13/1994	US5372968 Planarized local oxidation by trench-around technology
12/13/1994	US5372966 Method of making semiconductor device

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