Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1996
11/12/1996US5574397 Signal output circuit operating stably and arrangement of power supply interconnection line therefor in semiconductor integrated circuit device
11/12/1996US5574395 Semiconductor circuit
11/12/1996US5574386 Apparatus and method for creating detachable solder connections
11/12/1996US5574384 Combined board construction for burn-in and burn-in equipment for use with combined board
11/12/1996US5574311 Semiconductor device
11/12/1996US5574308 Semiconductor device and its manufacturing method
11/12/1996US5574307 Semiconductor device and method of producing the same
11/12/1996US5574306 Lateral bipolar transistor and FET
11/12/1996US5574305 Walled-emitter transistor
11/12/1996US5574303 Semiconductor voltage sensing device
11/12/1996US5574302 Field effect transistor structure of a diving channel device
11/12/1996US5574301 Vertical switched-emitter structure with improved lateral isolation
11/12/1996US5574299 Semiconductor device having vertical conduction transistors and cylindrical cell gates
11/12/1996US5574298 Substrate contact for gate array base cell and method of forming same
11/12/1996US5574296 Doping of IIB-VIA semiconductors during molecular beam epitaxy electromagnetic radiation transducer having p-type ZnSe layer
11/12/1996US5574295 Dielectrically isolated SiC mosfet
11/12/1996US5574294 Vertical dual gate thin film transistor with self-aligned gates / offset drain
11/12/1996US5574293 Solid state imaging device using disilane
11/12/1996US5574285 Electromagnetic radiation detector and its production process
11/12/1996US5574280 Focused ion beam apparatus and method
11/12/1996US5574276 Apparatus and method for detecting a dust particle having high purity inert gas atmosphere
11/12/1996US5574262 Noise cancellation for non-ideal electrostatic shielding
11/12/1996US5574247 CVD reactor apparatus
11/12/1996US5573981 Method of removing residual charges of an electrostatic chuck used in a layer deposition process
11/12/1996US5573980 Method of forming salicided self-aligned contact for SRAM cells
11/12/1996US5573979 Sloped storage node for a 3-D dram cell structure
11/12/1996US5573978 Method of forming a metal wire in a semiconductor device
11/12/1996US5573974 Method for isolating semiconductor elements
11/12/1996US5573973 Integrated circuit having a diamond thin film trench arrangement as a component thereof and method
11/12/1996US5573972 Method for manufacturing a silicon bonded wafer
11/12/1996US5573971 Semiconductors
11/12/1996US5573969 Method for fabrication of CMOS devices having minimized drain contact area
11/12/1996US5573968 Method for fabricating stacked capacitors of semiconductor device
11/12/1996US5573967 Method for making dynamic random access memory with fin-type stacked capacitor
11/12/1996US5573966 Method for making a read-only memory device having trenches
11/12/1996US5573965 Method of fabricating semiconductor devices and integrated circuits using sidewall spacer technology
11/12/1996US5573964 Method of making thin film transistor with a self-aligned bottom gate using diffusion from a dopant source layer
11/12/1996US5573963 Method of forming self-aligned twin tub CMOS devices
11/12/1996US5573962 Low cycle time CMOS process
11/12/1996US5573961 Method of making a body contact for a MOSFET device fabricated in an SOI layer
11/12/1996US5573960 Method of manufacturing semiconductor layers by bonding without defects created by bonding
11/12/1996US5573958 Method of fabricating a thin film transistor wherein the gate terminal is formed after the gate insulator
11/12/1996US5573891 Method and apparatus for fine processing
11/12/1996US5573890 Method of optical lithography using phase shift masking
11/12/1996US5573875 Laser ablation mask and method of fabrication
11/12/1996US5573837 Masking layer having narrow isolated spacings and the method for forming said masking layer and the method for forming narrow isolated trenches defined by said masking layer
11/12/1996US5573808 Method for producing a multilayer circuit
11/12/1996US5573680 Method for etching a semiconductor material without altering flow pattern defect distribution
11/12/1996US5573634 Method for forming contact holes of a semiconductor device
11/12/1996US5573633 Method of chemically mechanically polishing an electronic component
11/12/1996US5573624 Chemical etch monitor for measuring film etching uniformity during a chemical etching process
11/12/1996US5573623 Apparatus for contactless real-time in-situ monitoring of a chemical etching process
11/12/1996US5573620 Method of manufacturing ceramic multilayer circuit component and handling apparatus for ceramic green sheet
11/12/1996US5573597 Plasma processing system with reduced particle contamination
11/12/1996US5573596 Arc suppression in a plasma processing system
11/12/1996US5573595 Methods and apparatus for generating plasma
11/12/1996US5573591 Method of exhausting silicon oxide
11/12/1996US5573448 Method of polishing wafers, a backing pad used therein, and method of making the backing pad
11/12/1996US5573334 Method for the turbulent mixing of gases
11/12/1996US5573171 Method of thin film patterning by reflow
11/12/1996US5573170 Bump forming apparatus
11/12/1996US5573023 Single wafer processor apparatus
11/12/1996US5572789 Process for forming a profiled element
11/12/1996CA2078940C Compound semiconductor device
11/10/1996CA2175276A1 Method and system for allowing an integrated circuit to be portably generated from one manufacturing process to another
11/07/1996WO1996035234A1 Peripheral circuit for semiconductor memory device
11/07/1996WO1996035233A1 Cover for an electronic component
11/07/1996WO1996035232A1 Method and device for treatment
11/07/1996WO1996035231A1 Self-aligned contact trench dmos transistor structure and methods of fabricating same
11/07/1996WO1996035230A1 Method of fabricating self-aligned contact trench dmos transistors
11/07/1996WO1996035229A1 Process for the localized reduction of the lifetime
11/07/1996WO1996035228A1 Slip free vertical rack design
11/07/1996WO1996035227A1 Device for treating wafer-shaped objects, especially silicon wafers
11/07/1996WO1996035187A1 Method and apparatus for cycle time costing
11/07/1996WO1996035145A1 Method for generating proximity correction features for a lithographic mask pattern
11/07/1996WO1996035129A1 Method and apparatus for testing semiconductor dice
11/07/1996WO1996035110A1 Dynamic contaminant extraction measurement for chemical distribution systems
11/07/1996WO1996035091A1 Unibody crucible
11/07/1996WO1996034994A1 Chemical vapor deposition method and apparatus
11/07/1996WO1996034744A1 Fabrication of leads on semiconductor connection components
11/07/1996DE19617833A1 Verfahren zur Herstellung eines Halbleiterbauelements A process for producing a semiconductor device
11/07/1996DE19617832A1 Verfahren und Schaltung zur Ansteuerung von Leistungstransistoren in einer Halbbrücken-Konfiguration Method and circuit for driving power transistors in a half bridge configuration
11/07/1996DE19613615A1 Fault analysing appts. for semiconductor wafer
11/07/1996DE19542606A1 MIS transistor with three-layer, transistor insulating film
11/07/1996DE19516446A1 Prodn. of semiconductor constructional element used for solar cell
11/07/1996DE19513918C1 Method of coating submicrometer structures for highly integrated circuits
11/06/1996EP0741459A2 Off-chip driver for mixed voltage applications
11/06/1996EP0741458A1 Integrated circuit output buffer
11/06/1996EP0741417A2 Heterostructure field effect device having refractory ohmic contact directly on channel layer and method of making
11/06/1996EP0741416A1 Thin epitaxy RESURF ic containing HV p-ch and n-ch devices with source or drain not tied to grounds potential
11/06/1996EP0741414A2 Monolithic microwave integrated circuit and method
11/06/1996EP0741413A2 Monolithic high frequency integrated circuit structure and method of manufacturing the same
11/06/1996EP0741411A2 Method of fabricating multi-chip packages
11/06/1996EP0741410A2 Semiconductor device and method for manufacturing the same
11/06/1996EP0741407A2 Process for filling openings in insulating layers and integrated circuit having such insulating layers
11/06/1996EP0741406A2 Laser assisted plasma chemical etching apparatus and method
11/06/1996EP0741405A2 Method of fabricating doped polysilicon gate electrodes
11/06/1996EP0741388A2 Ferro-electric memory array architecture and method for forming the same
11/06/1996EP0741369A1 Method for coating an electric component and device for carrying out the method
11/06/1996EP0741365A1 A system and method for generating mask layouts
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