Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1996
11/19/1996US5576139 Positive type photoresist composition comprising a novolak resin made with a silica-magnesia solid catalyst
11/19/1996US5576138 Positive-working naphtho quinone diazide sulfonic acid ester photoresist composition containing select combination of additives
11/19/1996US5576126 Phase shifting mask
11/19/1996US5576125 Photolithography
11/19/1996US5576124 Phase shift mask and method for fabricating the same
11/19/1996US5576123 Overlying shifter type phase shift photomask blank, overlying shifter type phase shift photomask and methods of producing them
11/19/1996US5576122 Phase shift mask and manufacturing method thereof
11/19/1996US5576059 Using a preheat ring barrier; low pressure vapor deposition
11/19/1996US5575888 Sidewall passivation by oxidation during refractory-metal plasma etching
11/19/1996US5575887 Semiconductors
11/19/1996US5575886 Method for fabricating semiconductor device with chemical-mechanical polishing process for planarization of interlayer insulation films
11/19/1996US5575885 Copper-based metal polishing solution and method for manufacturing semiconductor device
11/19/1996US5575883 Apparatus and process for fabricating semiconductor devices
11/19/1996US5575872 Method for forming a ceramic circuit substrate
11/19/1996US5575862 Polycrystalline silicon photoelectric conversion device and process for its production
11/19/1996US5575855 Apparatus for forming a deposited film
11/19/1996US5575853 Vacuum exhaust system for processing apparatus
11/19/1996US5575850 Processing system
11/19/1996US5575847 Apparatus for producing single crystals
11/19/1996US5575707 Polishing pad cluster for polishing a semiconductor wafer
11/19/1996US5575662 Methods for connecting flexible circuit substrates to contact objects and structures thereof
11/19/1996US5575641 Semiconductor processor opening and closure construction
11/19/1996US5575611 Wafer transfer apparatus
11/19/1996US5575610 Transport-by-suction type die
11/19/1996US5575394 Wafer shipper and package
11/19/1996US5575081 Device for transporting magazines for molding wafer-shaped objects
11/19/1996US5575079 Substrate drying apparatus and substrate drying method
11/19/1996US5575059 Tape carrier package mounting apparatus with heaters for bonding tools
11/14/1996WO1996036176A2 Image display apparatus with line number conversion
11/14/1996WO1996036073A1 Semiconductor device and its manufacture
11/14/1996WO1996036072A2 Method of manufacturing a device, by which method a substrate with semiconductor element and conductor tracks is glued to a support body with metallization
11/14/1996WO1996036071A2 Method of manufacturing a semiconductor device suitable for surface mounting
11/14/1996WO1996036070A2 Method for curing spin-on-glass film utilizing electron beam radiation
11/14/1996WO1996036069A1 Integrated semiconductor wafer processing system
11/14/1996WO1996036068A1 Method and device for wet-processing substrates in a vessel
11/14/1996WO1996036067A2 Self-alignment technique for junction isolation and wells
11/14/1996WO1996036065A1 Sputtering apparatus with isolated coolant and sputtering target therefor
11/14/1996WO1996036064A1 Color cathode-ray tube
11/14/1996WO1996035823A1 Transport system for thin film sputtering system
11/14/1996WO1996035821A1 Apparatus for reducing arcing during sputtering
11/14/1996WO1996029635A3 Apparatus and method for controlling high throughput sputtering
11/14/1996DE19621244A1 Semiconductor component, e.g. vertical MOS transistor
11/14/1996DE19612948A1 Semiconductor component, e.g. flash EEPROM cell
11/14/1996DE19612407A1 Semiconductor memory device with redundancy row and column
11/14/1996DE19548386A1 Insulation film separated MOS transistor mfr.
11/14/1996DE19531496C1 Power semiconductor module with high packing density, esp. current resetter
11/14/1996DE19517573A1 Verfahren und Vorrichtung zur Naßbehandlung von Substraten in einem Behälter Method and apparatus for the wet treatment of substrates in a container
11/14/1996DE19516548A1 Abdeckkappe für elektronisches Bauelement Cap for electronic component
11/14/1996CA2220046A1 Integrated semiconductor wafer processing system
11/14/1996CA2218736A1 Sputtering apparatus with isolated coolant and sputtering target therefor
11/14/1996CA2217777A1 Method and device for the wet processing of substrates in a container
11/13/1996EP0742639A2 Microwave oscillator, an antenna therefor and methods of manufacture
11/13/1996EP0742617A1 Semiconductor laser and method of manufacturing the semiconductor laser
11/13/1996EP0742593A2 Semiconductor device with multilevel structured insulator and fabrication method thereof
11/13/1996EP0742589A1 Bond pad option for integrated circuits
11/13/1996EP0742588A2 Method of protecting electrostatic chuck
11/13/1996EP0742587A2 Apparatus and method for semiconductor wafer edge inspection
11/13/1996EP0742586A2 Improvements in or relating to integrated circuits
11/13/1996EP0742585A1 Method and compositions for diffusion patterning tape on substrate
11/13/1996EP0742584A2 High density selective SiO2:Si3N4 etching using a stoichiometrically altered nitride etch stop layer
11/13/1996EP0742583A2 Method of removing damaged crystal areas from silicon wafers
11/13/1996EP0742582A2 Doping procedure for semiconductor growth processes
11/13/1996EP0742581A2 Sealed cavity arrangement
11/13/1996EP0742580A2 Barrier seal for electrostatic chuck
11/13/1996EP0742579A2 A method and apparatus for concentrating plasma on a substrate surface during processing
11/13/1996EP0742577A2 Inductively and multi-capacitively coupled plasma reactor
11/13/1996EP0742527A2 Method and system for producing a technology-independent integrated circuit design
11/13/1996EP0742492A1 Projection exposure method and apparatus and device manufacturing method
11/13/1996EP0742490A1 Positive acid catalized resists
11/13/1996EP0742489A1 Positive-working resist composition
11/13/1996EP0742423A1 Contactless electrical thin oxide measurements
11/13/1996EP0742290A1 Chemical vapor deposition (CVD) of silicon dioxide films using oxygen-silicon source reactants and a free radical promoter
11/13/1996EP0742282A1 Cleaning agent and method
11/13/1996EP0742084A2 Robot assembly
11/13/1996EP0741910A1 Cavity-containing structure and method for making same
11/13/1996EP0741909A1 Methods for improving semiconductor processing
11/13/1996EP0645054B1 Two-level microbridge bolometer imaging array and method of making same
11/13/1996EP0601068A4 Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom.
11/13/1996EP0467928B1 Improved novram cell using two differential, decouplable nonvolatile memory elements
11/13/1996CN1135681A Semi-conductor device
11/13/1996CN1135680A Piezoelectric oscillator and voltage-control oscillator, and manufacturing process thereof
11/13/1996CN1135671A Semiconductor laser device and production process thereof
11/13/1996CN1135659A MOS transistor read amplifier with dynamic controllable threshold voltage
11/13/1996CN1135658A method for jointing flat-plate displayer and integrated-circuit device
11/13/1996CN1135657A Lead-wire frame for resin sealed semiconductor device and method for production of resin sealed semiconductor device
11/13/1996CN1135656A Method for fabricating metal oxide semiconductor field
11/13/1996CN1135655A Method for making capacitor in semiconductor device
11/13/1996CN1135454A System of coveying liquid at special speed using supersonic vibrator
11/13/1996CN1135397A Chip-polishing device
11/12/1996US5574959 Powder metallurgy injection molding
11/12/1996US5574958 Hydrogen radical producing apparatus
11/12/1996US5574685 Self-aligned buried channel/junction stacked gate flash memory cell
11/12/1996US5574683 Memory device and a method for writing information in the memory device
11/12/1996US5574680 Semiconductor memory device
11/12/1996US5574621 Integrated circuit capacitor having a conductive trench
11/12/1996US5574556 Stage mechanism in exposure apparatus
11/12/1996US5574537 Apparatus for controlling light quantity using acousto-optic modulator for selecting 0th-order diffracted beam
11/12/1996US5574492 Imaging method and semiconductor device manufacturing method using the same
11/12/1996US5574487 Substrate with an etched silicon compound film and an ink jet head utilizing the substrate
11/12/1996US5574410 Impedance matching network
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