Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1996
11/06/1996EP0741302A2 Trigger pulse generator for analysis of CMOS latch-up
11/06/1996EP0741196A1 Method for depositing a silicium oxide layer
11/06/1996EP0741118A2 Method of synthetic diamond ablation with an oxygen plasma and synthetic diamonds etched accordingly
11/06/1996EP0740991A1 Apparatus for and method of transferring an encapsulating material to a mold cavity
11/06/1996EP0740859A1 Electrostatic discharge circuit for high speed, high voltage circuitry
11/06/1996EP0740854A1 A self-aligned dual-bit split gate (dsg) flash eeprom cell
11/06/1996EP0740853A1 Semiconductor device with a carrier body on which a substrate with a semiconductor element is fastened by means of a glue layer and on which a pattern of conductor tracks is fastened
11/06/1996EP0740852A1 Methods and apparatus for producing integrated circuit devices
11/06/1996EP0740849A1 Method of forming a silicon-on-insulator (soi) material having a high degree of thickness uniformity
11/06/1996EP0740795A1 Reversible chip contacting device
11/06/1996EP0740757A1 Chemical refill system for high purity chemicals
11/06/1996EP0642425A4 Method of fabricating group iii-v compound semiconductor devices using selective etching.
11/06/1996EP0580618B1 Electroluminescent silicon device
11/06/1996EP0426747B1 Avalanche photodiode structure
11/06/1996CN1135268A Contact structure for interconnections, interposer, semiconductor assembly and method
11/06/1996CN1135220A Self-addressable self-assembling microelectronic system and devices for molecular biological analysis and diagnostics
11/06/1996CN1135095A Semiconductor device and its related integrated circuit
11/06/1996CN1135094A Method for mfg. semiconductor device
11/06/1996CN1135084A Method for mfg. soft magnetic film
11/06/1996CN1135080A Self-bootstrapping device
11/06/1996CN1135041A Method and arrangement for response analysis of semiconductor materials with optical excitation
11/06/1996CN1134869A Combination type moulding apparatus
11/06/1996CN1033252C Method for fabricating thin film transistor
11/05/1996US5572598 Automated photomask inspection apparatus
11/05/1996US5572564 Reflecting photo mask for x-ray exposure and method for manufacturing the same
11/05/1996US5572563 Mirror unit and an exposure apparatus using the unit
11/05/1996US5572469 Static random access memory device having a single bit line configuration
11/05/1996US5572464 Semiconductor memory device and method of using the same
11/05/1996US5572448 Enhanced resolution imaging and measurement systems
11/05/1996US5572409 Apparatus including a programmable socket adapter for coupling an electronic component to a component socket on a printed circuit board
11/05/1996US5572405 Thermally enhanced ball grid array package
11/05/1996US5572398 Tri-polar electrostatic chuck
11/05/1996US5572394 CMOS on-chip four-LVTSCR ESD protection scheme
11/05/1996US5572288 Exposure apparatus with variable alignment optical system
11/05/1996US5572287 Illuminating arrangement for a projection microlithographic exposure apparatus
11/05/1996US5572179 Thin film transformer
11/05/1996US5572170 Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
11/05/1996US5572072 Semiconductor device having a multi-layer metallization structure
11/05/1996US5572071 Semiconductor device having a multi-layer metallization structure
11/05/1996US5572069 Conductive epoxy grid array semiconductor packages
11/05/1996US5572068 Integrated double-chip semiconductor package and method for fabricating same
11/05/1996US5572066 Lead-on-chip semiconductor device and method for its fabrication
11/05/1996US5572065 Hermetically sealed ceramic integrated circuit heat dissipating package
11/05/1996US5572063 Bipolar transistor with L-shaped emitter
11/05/1996US5572060 Uncooled YBaCuO thin film infrared detector
11/05/1996US5572056 High density ROM
11/05/1996US5572055 Insulated-gate bipolar transistor with reduced latch-up
11/05/1996US5572054 Method of operating a single transistor non-volatile electrically alterable semiconductor memory device
11/05/1996US5572053 Dynamic random access memory cell having a stacked capacitor
11/05/1996US5572048 Voltage-driven type semiconductor device
11/05/1996US5572047 Electro-Optic device having pairs of complementary transistors
11/05/1996US5572046 Semiconductor device having at least two thin film transistors
11/05/1996US5572045 Light valve device using semiconductive composite substrate
11/05/1996US5572044 Monocrystalline semiconductor commutator with grain boundry
11/05/1996US5572040 Mos device
11/05/1996US5572036 Support element for an automatic load platform of a silicon wafer exposure unit
11/05/1996US5571852 Irradiation with uv excimer laser
11/05/1996US5571753 Method for forming a wiring conductor in semiconductor device
11/05/1996US5571752 Method of forming a planar contact with a void
11/05/1996US5571751 Interconnect structures for integrated circuits
11/05/1996US5571749 Method and apparatus for forming deposited film
11/05/1996US5571748 Methods for producing compound semiconductor devices
11/05/1996US5571747 Method for producing a semiconductor commutator
11/05/1996US5571745 Fabrication method of semiconductor device containing n- and p-channel MOSFETs
11/05/1996US5571744 Defect free CMOS process
11/05/1996US5571743 Method of making buried-sidewall-strap two transistor one capacitor trench cell
11/05/1996US5571742 Method of fabricating stacked capacitor of DRAM cell
11/05/1996US5571741 Membrane dielectric isolation IC fabrication
11/05/1996US5571740 Method of making a capped modular microwave integrated circuit
11/05/1996US5571739 Method for fabricating a read-only-memory (ROM) using a new ROM code mask process
11/05/1996US5571738 Method of making poly LDD self-aligned channel transistors
11/05/1996US5571737 Multilayer transistors with dopes, oxide layers and electrodes
11/05/1996US5571736 Fabricating a high density EPROM cell by removing a portion of the field insulator regions
11/05/1996US5571735 Method of manufacturing a semiconducter device capable of easily forming metal silicide films on source and drain regions
11/05/1996US5571734 Method for forming a fluorinated nitrogen containing dielectric
11/05/1996US5571733 Method of forming CMOS integrated circuitry
11/05/1996US5571732 Method for fabricating a bipolar transistor
11/05/1996US5571731 Procedure for the manufacture of bipolar transistors without epitaxy and with fully implanted base and collector regions which are self-positioning relative to each other
11/05/1996US5571730 Semiconductor device having vertical metal oxide semiconductors and a method for manufacturing the same
11/05/1996US5571644 Method and apparatus for developing resist
11/05/1996US5571641 Diffraction mask for the fabrication of semiconductor devices
11/05/1996US5571578 Plasma chemical vapor deposition, perfluoroalkane, oxygen
11/05/1996US5571577 Method and apparatus for plasma treatment of a surface
11/05/1996US5571576 Method of forming a fluorinated silicon oxide layer using plasma chemical vapor deposition
11/05/1996US5571572 Vapor deposition, injection and pressurization
11/05/1996US5571571 Silicon oxide films
11/05/1996US5571495 Dielectric thin film of substituted lead titanate
11/05/1996US5571391 Group 3a metal nitride semiconductor layer, metal silicide electrode layer, free energy
11/05/1996US5571376 Quantum device and method of making such a device
11/05/1996US5571375 Method of removing native oxide film from a contact hole on silicon wafer
11/05/1996US5571374 Method of etching silicon carbide
11/05/1996US5571373 Method of rough polishing semiconductor wafers to reduce surface roughness
11/05/1996US5571367 Apparatus for subjecting a semiconductor substrate to a washing process
11/05/1996US5571337 Method for cleaning and drying a semiconductor wafer
11/05/1996US5571333 Heat treatment furnace with an exhaust baffle
11/05/1996US5571331 Vacuum treatment apparatus
11/05/1996US5571330 Load lock chamber for vertical type heat treatment apparatus
11/05/1996US5571325 Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus
11/05/1996US5571324 Rotary-cup coating apparatus
11/05/1996US5571321 Method for producing a gallium phosphide epitaxial wafer