Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1996
11/05/1996US5571320 Spiral heater for use in czochralski crystal pullers
11/05/1996US5571044 Wafer holder for semiconductor wafer polishing machine
11/05/1996US5571040 Method and device for detecting blade flexure and blade flexure control device for use with a slicing machine
11/05/1996US5571010 Heat treatment method and apparatus
11/05/1996US5570994 Wafer tray and ceramic blade for semiconductor processing apparatus
11/05/1996US5570990 Human guided mobile loader stocker
11/05/1996US5570987 Semiconductor wafer transport container
11/05/1996US5570504 Multi-Layer circuit construction method and structure
11/05/1996US5570502 Fabricating metal matrix composites containing electrical insulators
10/1996
10/31/1996WO1996034518A1 Precision clamp, and method for clamping thyristors and similar electronic power components
10/31/1996WO1996034413A1 Encapsulation of transmitter and receiver modules
10/31/1996WO1996034407A1 Bottom electrode structure for dielectric capacitors and method of making the same
10/31/1996WO1996034361A2 Laminating device for joining a metal strip and an insulating material strip
10/31/1996WO1996034034A1 Fluorosilicon network polymer, insulating coating thereof, and electronic devices coated therewith
10/31/1996WO1996033842A1 A polishing cloth and a method for attaching/detaching the polishing cloth to/from a base plate of a polishing machine
10/31/1996WO1996033839A1 Method and apparatus for step and repeat exposures
10/31/1996WO1996033813A1 Process for preparing an insulated multilayer structure
10/31/1996WO1996027210A3 Electronic component comprising a thin-film structure with passive elements
10/31/1996DE19616820A1 Magazine fitting frame for test manipulator for testing integrated circuit modules
10/31/1996DE19616810A1 Circuit board exchange mechanism for semiconductor test system
10/31/1996DE19616603A1 EEPROM Flashzelle sowie Verfahren zu deren Herstellung Flash EEPROM cell and methods for their preparation
10/31/1996DE19616212A1 Test probe station appts. for low noise measurement of wafer formed electronic device
10/31/1996DE19615919A1 Component loading and discharging appts. for semiconductor component handling device
10/31/1996DE19607166A1 Photoresist coating appts. for semiconductor integrated circuit mfr.
10/31/1996DE19605598C1 Substrate hold and release mechanism for vacuum chamber
10/31/1996DE19528746C1 Lateral silicon di:oxide spacer prodn. in semiconductor structure
10/31/1996DE19526310C1 Inner coupling line to polymer foil bonding appts. for e.g. integrated circuit
10/31/1996DE19515799A1 Process for plasma coating substrates with semiconductor
10/31/1996DE19515667A1 Semiconductor module with monolithically integrated components or shared substrate
10/31/1996DE19515024A1 Aq. compsn., for cleaning semi-conductor discs, esp. silicon
10/31/1996CA2216903A1 Encapsulation of transmitter and receiver modules
10/30/1996EP0740496A1 Method for fabricating highly conductive vias
10/30/1996EP0740424A2 Self-calibrating high speed D/A converter
10/30/1996EP0740352A2 Power MOS-gated device with recessed gate and method for its fabrication
10/30/1996EP0740351A2 Bipolar transistor having an emitter region formed of silicon carbide
10/30/1996EP0740350A1 Compound semiconductor device having reduced resistance
10/30/1996EP0740348A1 Semiconductor memory structure, using a ferroelectric dielectric and method of formation
10/30/1996EP0740347A1 Semiconductor memory structure, using a ferroelectric dielectric and method of formation
10/30/1996EP0740346A1 Integrated circuit fabrication
10/30/1996EP0740345A2 Semiconductor device having static memory cell provided with data retaining means
10/30/1996EP0740344A2 Method and apparatus for coupling multiple independent on-chip Vdd busses to an ESD core clamp
10/30/1996EP0740343A2 Structure of chip on chip mounting preventing crosstalk noise
10/30/1996EP0740342A2 Semiconductor device and wiring method
10/30/1996EP0740341A1 Connecting legs for electronic device
10/30/1996EP0740340A2 Structure and process for mounting semiconductor chip
10/30/1996EP0740339A2 Method of forming a capacitor electrode of a semiconductor memory device
10/30/1996EP0740338A2 Composite integrated circuit device
10/30/1996EP0740337A1 Method of forming a thick field dielectric and a self-aligned channel stopper in a semiconductor device
10/30/1996EP0740336A2 Method for fabricating semiconductor device having buried contact structure
10/30/1996EP0740335A2 SOI-BiCMOS Fabrication
10/30/1996EP0740334A2 Isotropic silicon etch process that is highly selective to tungsten
10/30/1996EP0740333A2 High speed ashing method
10/30/1996EP0740332A2 Improvements in or relating to semiconductor integrated circuit devices
10/30/1996EP0740331A2 Apparatus and method for cleaning semiconductor wafers
10/30/1996EP0740330A2 Method for reducing the standing wave effect in a photolithography process
10/30/1996EP0740329A1 Apparatus and method for cleaning semiconductor wafers
10/30/1996EP0740328A2 Method and apparatus for producing plasma uniformity in a magnetic field-enhanced plasma reactor
10/30/1996EP0740327A2 Ion beam processing apparatus
10/30/1996EP0740306A2 Method of programming a semiconductor memory device
10/30/1996EP0740241A2 Control system for semiconductor spray process tools
10/30/1996EP0740215A1 Scan type exposure apparatus and exposure method using the same
10/30/1996EP0740139A1 Device for in situ measurement of stress in films
10/30/1996EP0739542A1 Input/output transistors with optimized esd protection
10/30/1996EP0739540A1 Process for producing a three-dimensional circuit
10/30/1996EP0739539A1 Process for filling contact holes
10/30/1996EP0739538A1 High value gate leakage resistor
10/30/1996EP0739537A1 Process for the anisotropic and selective dry etching of nitride over thin oxides
10/30/1996EP0739536A1 Charged particle projector system
10/30/1996EP0739535A1 Tuning system with dc-dc converter
10/30/1996EP0739531A1 Particle beam, in particular ionic optic reproduction system
10/30/1996EP0739499A1 Method of forming polyimide patterns on substrates
10/30/1996EP0739252A1 Process and apparatus for the treatment of semiconductor wafers in a fluid
10/30/1996EP0739228A1 Recycling of wafer cleaning substances
10/30/1996EP0706635A4 Apparatus for thermal treatment of thin film wafer
10/30/1996CN1134608A Semiconductor integrated circuit device with electrostatic protective function
10/30/1996CN1134607A Apparatus for inner lead bonding (ILB) comprising heat dissipation pin and method of ILB using such apparatus
10/30/1996CN1134606A Determination of critical film thickness of compound semiconductor layer, and method for manufacturing semiconductor device using the method of determination
10/30/1996CN1134605A Pallet installation table for processor
10/30/1996CN1134604A Producing method for semiconductor device
10/30/1996CN1134603A Method for forming metal wiring of semiconductor device
10/30/1996CN1134602A Method of forming two-layered polysilicon gate electrode in semiconductor device using grain boundaries
10/30/1996CN1134600A Method and apparatus for fabricating thin-film transistors
10/30/1996CN1134397A Aluminum nitride body having graded metallurgy
10/30/1996CN1033193C High-voltage thyristor making method and device
10/30/1996CN1033175C Method of depositing conductors in high aspect ratio apertures
10/29/1996US5570405 Registration and alignment technique for X-ray mask fabrication
10/29/1996US5570386 Semiconductor laser
10/29/1996US5570374 Built-in self-test control network
10/29/1996US5570319 Embedded access trees for memory arrays
10/29/1996US5570314 EEPROM devices with smaller cell size
10/29/1996US5570311 SRAM semiconductor device
10/29/1996US5570293 Method and device for manufacturing a semiconductor chip
10/29/1996US5570272 Apparatus for encapsulating an integrated circuit package
10/29/1996US5570059 BiCMOS multiplexers and crossbar switches
10/29/1996US5570058 Signal line testing circuit causing no delay in transmission of a normal data signal
10/29/1996US5570046 Lead frame with noisy and quiet VSS and VDD leads
10/29/1996US5570043 Overvoltage tolerant intergrated circuit output buffer
10/29/1996US5570041 Programmable logic module and architecture for field programmable gate array device
10/29/1996US5570031 Substrate surface potential measuring apparatus and plasma equipment
10/29/1996US5570005 Wide range power supply for integrated circuits
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