Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2004
06/10/2004US20040108555 Dual work function semiconductor structure with borderless contact and method of fabricating the same
06/10/2004US20040108554 Trench DMOS device with improved drain contact
06/10/2004US20040108553 Semiconductor device and process for same
06/10/2004US20040108552 Semiconductor device with SOI region and bulk region and method of manufacture thereof
06/10/2004US20040108548 Integrated circuit structure with improved LDMOS design
06/10/2004US20040108546 Etching channel in semiconduuctor substrate ; forming grooves
06/10/2004US20040108545 Ion implantation methods and transistor cell layout for fin type transistors
06/10/2004US20040108543 Nonvolatile memory and semiconductor device
06/10/2004US20040108542 Stacked gate flash memory device and method of fabricating the same
06/10/2004US20040108541 Floating gate and method of fabricating the same
06/10/2004US20040108540 Nonvolatile semiconductor memory device and method for manufacturing same
06/10/2004US20040108539 Semiconductor device having one-time programmable ROM and method of fabricating the same
06/10/2004US20040108538 Prevention destroying of data processing by transferring electricity charging from floating gate; isolation dielectrics
06/10/2004US20040108537 Scalable nano-transistor and memory using back-side trapping
06/10/2004US20040108536 Semiconductor devices having capacitors of metal-insulator-metal structure with coextensive oxidation barrier pattern and lower electrode bottom and methods of forming the same
06/10/2004US20040108535 Interconnect line selectively isolated from an underlying contact plug
06/10/2004US20040108534 Semiconductor device and manufacturing method for the same
06/10/2004US20040108533 Method of process simplification and eliminating topography concerns for the creation of advanced 1T-RAM devices
06/10/2004US20040108531 Capacitor, semiconductor device, and method of manufacturing the semiconductor device
06/10/2004US20040108529 Single electron device, method of manufacturing the same, and method of simultaneously manufacturing single electron device and MOS transistor
06/10/2004US20040108527 Semiconductor device and its manufacture
06/10/2004US20040108526 Semiconductor memory device and semiconductor integrated circuit
06/10/2004US20040108524 Semiconductor device and method of manufacturing the same
06/10/2004US20040108523 Multiple-gate transistor structure and method for fabricating
06/10/2004US20040108520 Semiconductor integrated circuit device
06/10/2004US20040108519 Apparatus and method for manufacturing semiconductor devices, and semiconductor device
06/10/2004US20040108516 Pin photodiode
06/10/2004US20040108513 Nitride semiconductor device and a process of manufacturing the same
06/10/2004US20040108512 Semiconductor storage device and semiconductor integrated circuit
06/10/2004US20040108506 Methods of forming a high conductivity diamond film and structures formed thereby
06/10/2004US20040108505 Method for p-type doping wide band gap oxide semiconductors
06/10/2004US20040108504 Active matrix thin film transistor array backplane
06/10/2004US20040108503 Semiconductor device and method of fabricating same
06/10/2004US20040108500 Semiconductor device having a nitride-based hetero-structure and method of manufacturing the same
06/10/2004US20040108473 Extreme ultraviolet light source
06/10/2004US20040108470 Neutral particle beam processing apparatus
06/10/2004US20040108469 Beam processing apparatus
06/10/2004US20040108466 Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby
06/10/2004US20040108465 Lithographic projection apparatus and particle barrier for use therein
06/10/2004US20040108367 Structure and method for lead free solder electronic package interconnections
06/10/2004US20040108364 Multi-chip sack and method of fabrication utilizing self-aligning electrical contact array
06/10/2004US20040108363 Method of fabricating an electronic module comprising an active component on a base
06/10/2004US20040108314 Heating apparatus which has electrostatic adsorption function, and method for producing it
06/10/2004US20040108308 Ceramic heater having a resistant heater element
06/10/2004US20040108302 Mixture of 5-aminotetrazole, oxidizer, abrasives, chelate compound and solvent
06/10/2004US20040108301 Linear drive system for use in a plasma processing system
06/10/2004US20040108299 Etchant
06/10/2004US20040108297 Process for etching silicon wafers
06/10/2004US20040108296 XeF2 gas produced by sublimation in a vacuum atmosphere decomposes and gasifies grease components and removes silicon pieces by etching; with or without water
06/10/2004US20040108284 Storage cassette with positionable stoppers and method for operating the same
06/10/2004US20040108136 Structure comprising a barrier layer of a tungsten alloy comprising cobalt and/or nickel
06/10/2004US20040108133 Electrolytic cell; contacting electrode with projections; mixture of electroconductive filler and polymer
06/10/2004US20040108066 Temperature measuring method and plasma processing apparatus
06/10/2004US20040108065 Apparatus methods for controlling wafer temperature in chemical mechanical polishing
06/10/2004US20040108064 Methods for polishing semiconductor device structures by differentially applying pressure to substrates that carry the semiconductor device structures
06/10/2004US20040108063 Method and polishing pad design enabling improved wafer removal from a polishing pad in a CMP process
06/10/2004US20040108060 System for producing patterned deposition from compressed fluids
06/10/2004US20040108059 System and method for removal of materials from an article
06/10/2004US20040108028 High purity nickel/vanadium sputtering components; and methods of making sputtering components
06/10/2004US20040107911 Substrate support member for use in FPD manufacturing apparatus
06/10/2004US20040107903 System for producing patterned deposition from compressed fluid in a partially opened deposition chamber
06/10/2004US20040107897 Atomic layer deposition apparatus and method for preventing generation of solids in exhaust path
06/10/2004US20040107895 Quartz thin film
06/10/2004US20040107892 Crystallization apparatus and crystallization method
06/10/2004US20040107891 Method for producing group III nitride compound semiconductor substrate
06/10/2004US20040107704 Workpiece chuck with temperature control assembly having spacers between layers providing clearance for thermoelectric modules
06/10/2004US20040107650 Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal
06/10/2004US20040107570 Singulation methods and substrates for use with same
06/10/2004US20040107561 Electrostatically shielded radio frequency plasma apparatus and method of manufacturing
06/10/2004CA2502485A1 Transistors having buried p-type layers beneath the source region and methods of fabricating the same
06/09/2004EP1427032A2 Method of producing a piezoelectric part and piezoelectric part
06/09/2004EP1427022A2 Method for making a metal-insulator-metal (mim) capacitor and metal resistor for a copper back-end-of-line (beol) technology
06/09/2004EP1427021A1 Semiconductor device
06/09/2004EP1427018A1 Method for processing soi substrate
06/09/2004EP1427015A2 Semiconductor integrated circuit device and method for fabricating the same
06/09/2004EP1427014A2 Integrated circuit identification
06/09/2004EP1427012A2 Methods for forming single Damascene via or trench cavities and for forming dual Damascene via cavities
06/09/2004EP1427011A1 Method for realizing microchannels in an integrated structure
06/09/2004EP1427010A1 Manufacturing method for a semiconductor substrate comprising at least a buried cavity and devices formed with this method
06/09/2004EP1427009A1 Wafer shape evaluating method, wafer, and wafer selecting method
06/09/2004EP1427008A1 Process of manufacturing an electronic module comprising an active component on a substrate
06/09/2004EP1427007A2 Electrodes for semiconductor device and method for manufacturing the same
06/09/2004EP1427006A1 Electronic parts packaging structure and method of manufacturing the same
06/09/2004EP1427005A1 Process and device for making a tantalum pentoxide layer on a carrier material particularly titanium nitride and integreted circuit incorporating a tantalum pentoxide layer
06/09/2004EP1427004A2 Insulation film
06/09/2004EP1427003A2 Semiconductor device and method of manufacturing the same
06/09/2004EP1427002A1 A method for recycling a substrate using local cutting
06/09/2004EP1427001A1 A method for recycling a surface of a substrate using local thinning
06/09/2004EP1427000A1 Growth of a single crystal region of a III-V compound on a single crystal silicon substrate
06/09/2004EP1426999A1 Thin plate storage container
06/09/2004EP1426978A1 CONDUCTIVE PASTE AND CONDUCTIVE FILM USING IT, PLATING METHOD AND PRODUCTION METHOD FOR FINE METAL COMPONENT
06/09/2004EP1426974A2 Semiconductor memory device and erase method for memory array
06/09/2004EP1426966A2 Nonvolatile memory cell and nonvolatile semiconductor memory device
06/09/2004EP1426825A2 Catadioptric lithographic projection apparatus with a non-inverting beamsplitter system
06/09/2004EP1426824A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
06/09/2004EP1426820A2 Methods of manufacturing photomask blank and photomask
06/09/2004EP1426813A2 Semiconductor device, display device, and light-emitting device, and methods of manufacturing the same
06/09/2004EP1426469A1 Method for electrolytic copper plating
06/09/2004EP1426463A1 Process for atomic layer deposition of metal films
06/09/2004EP1426424A1 Stopper for chemical mechanical planarization, method for manufacturing same, and chemical mechanical planarization method