| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/15/2004 | US6750498 Semiconductor device including memory cells and manufacturing method thereof |
| 06/15/2004 | US6750496 Manufacturing method of semiconductor integrated circuit device, and semiconductor integrated circuit device |
| 06/15/2004 | US6750495 Damascene capacitors for integrated circuits |
| 06/15/2004 | US6750494 Semiconductor buried contact with a removable spacer |
| 06/15/2004 | US6750493 Semiconductor storage device including nonvolatile ferroelectric memory |
| 06/15/2004 | US6750492 Semiconductor memory with hydrogen barrier |
| 06/15/2004 | US6750491 Magnetic memory device having soft reference layer |
| 06/15/2004 | US6750487 Dual double gate transistor |
| 06/15/2004 | US6750486 Silicon substrate; n-channel region with silicon-germanium buffer layer, silicon-germanium compound relax layer, silicon epitaxial layer; p-channel region with silicon-germanium compound layer and silicon epitaxial cap layer |
| 06/15/2004 | US6750484 Silicon germanium hetero bipolar transistor |
| 06/15/2004 | US6750483 Silicon-germanium bipolar transistor with optimized germanium profile |
| 06/15/2004 | US6750482 Highly conductive semiconductor layer having two or more impurities |
| 06/15/2004 | US6750481 Semiconductor laminated substrate, semiconductor crystal substrate and semiconductor device and method of manufacturing the same |
| 06/15/2004 | US6750480 Bipolar transistor with lattice matched base layer |
| 06/15/2004 | US6750479 Semiconductor component and a method for identifying a semiconductor component |
| 06/15/2004 | US6750476 Substrate device manufacturing method and substrate device, electrooptical device manufacturing method and electrooptical device and electronic unit |
| 06/15/2004 | US6750475 Method for fabricating electric interconnections and interconnection substrate having electric interconnections fabricated by the same method |
| 06/15/2004 | US6750474 Semiconducting devices and method of making thereof |
| 06/15/2004 | US6750471 Microelectronic device including transistor with source and drain region separated by channel region comprising molecule having closed hollow cage structure which conducts electrons, exhibits coulomb blockage and receives and transmits electrons |
| 06/15/2004 | US6750464 Having pattern elements defined as apertures in stencil reticle, each element split into portions separated by girders formed from membrane of reticle and configured for transfer to substrate using single exposure shot of charged particle beam |
| 06/15/2004 | US6750462 Ion implanting method and apparatus |
| 06/15/2004 | US6750423 Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device |
| 06/15/2004 | US6750159 Semiconductor apparatus, manufacturing method therefor, solid state image device and manufacturing method therefor |
| 06/15/2004 | US6750158 Method for producing a semiconductor device |
| 06/15/2004 | US6750157 Nonvolatile memory cell with a nitridated oxide layer |
| 06/15/2004 | US6750155 Methods to minimize moisture condensation over a substrate in a rapid cycle chamber |
| 06/15/2004 | US6750154 Gas assisted method for applying resist stripper and gas-resist stripper combinations |
| 06/15/2004 | US6750153 Process for producing macroscopic cavities beneath the surface of a silicon wafer |
| 06/15/2004 | US6750151 Etching method for ZnSe polycrystalline substrate |
| 06/15/2004 | US6750150 Method for reducing dimensions between patterns on a photoresist |
| 06/15/2004 | US6750149 Method of manufacturing electronic device |
| 06/15/2004 | US6750147 Process for integration of a trench for capacitors and removal of black silicon |
| 06/15/2004 | US6750146 Method for forming barrier layer |
| 06/15/2004 | US6750145 Method of eliminating agglomerate particles in a polishing slurry |
| 06/15/2004 | US6750144 Method for electrochemical metallization and planarization of semiconductor substrates having features of different sizes |
| 06/15/2004 | US6750143 Method for forming a plating film, and device for forming the same |
| 06/15/2004 | US6750142 Semiconductor device and method for manufacturing the same |
| 06/15/2004 | US6750141 Silicon carbide cap layers for low dielectric constant silicon oxide layers |
| 06/15/2004 | US6750140 Process for producing contact holes on a metallization structure |
| 06/15/2004 | US6750139 Dummy metal pattern method and apparatus |
| 06/15/2004 | US6750138 Multilayer wires laminated to integrated circuit chip; applying electrode, dielectric; pressurization |
| 06/15/2004 | US6750137 Method and apparatus for forming an interlayer insulating film and semiconductor device |
| 06/15/2004 | US6750136 Contact structure production method |
| 06/15/2004 | US6750135 Method for forming chip scale package |
| 06/15/2004 | US6750134 Variable cross-section plated mushroom with stud for bumping |
| 06/15/2004 | US6750133 Selective ball-limiting metallurgy etching processes for fabrication of electroplated tin bumps |
| 06/15/2004 | US6750132 Flip chip package, circuit board thereof and packaging method thereof |
| 06/15/2004 | US6750130 Heterointegration of materials using deposition and bonding |
| 06/15/2004 | US6750128 Methods of polishing, interconnect-fabrication, and producing semiconductor devices |
| 06/15/2004 | US6750127 Method for fabricating a semiconductor device using amorphous carbon having improved etch resistance |
| 06/15/2004 | US6750126 Methods for sputter deposition of high-k dielectric films |
| 06/15/2004 | US6750125 Semiconductor device and method for manufacturing the same, semiconductor wafer and semiconductor device manufactured thereby |
| 06/15/2004 | US6750124 Direct patterning of nanometer-scale silicide structures on silicon by ion-beam implantation through a thin barrier layer |
| 06/15/2004 | US6750123 Method of manufacturing CMOS device with implantation shielding layer |
| 06/15/2004 | US6750122 Semiconductor device formed with an oxygen implant step |
| 06/15/2004 | US6750121 Apparatus and method for forming single crystalline nitride substrate using hydride vapor phase epitaxy and laser beam |
| 06/15/2004 | US6750120 Method and apparatus for MOCVD growth of compounds including GaAsN alloys using an ammonia precursor with a catalyst |
| 06/15/2004 | US6750118 Process and apparatus to subdivide objects |
| 06/15/2004 | US6750117 Shallow trench isolation process |
| 06/15/2004 | US6750116 Method for fabricating asymmetric inner structure in contacts or trenches |
| 06/15/2004 | US6750115 Method for generating alignment marks for manufacturing MIM capacitors |
| 06/15/2004 | US6750114 One-mask metal-insulator-metal capacitor and method for forming same |
| 06/15/2004 | US6750113 Metal-insulator-metal capacitor in copper |
| 06/15/2004 | US6750112 Method of forming a bitline and a bitline contact, and dynamic memory cell including a bitline and bitline made contact according to the method |
| 06/15/2004 | US6750111 Method for fabricating a trench capacitor |
| 06/15/2004 | US6750110 Continuous good step coverage CVD platinum metal deposition |
| 06/15/2004 | US6750109 Halo-free non-rectifying contact on chip with halo source/drain diffusion |
| 06/15/2004 | US6750108 Method for manufacturing a semiconductor device |
| 06/15/2004 | US6750107 Method and apparatus for isolating a SRAM cell |
| 06/15/2004 | US6750106 Polysilicon gate doping level variation for reduced leakage current |
| 06/15/2004 | US6750105 Method of fabricating a high-voltage transistor with a multi-layered extended drain structure |
| 06/15/2004 | US6750104 Doping with phosphorus or boron |
| 06/15/2004 | US6750103 NROM cell with N-less channel |
| 06/15/2004 | US6750100 Nano-meter memory device and method of making the same |
| 06/15/2004 | US6750099 Method for fabricating capacitor of semiconductor device |
| 06/15/2004 | US6750098 Integrated semiconductor memory and fabrication method |
| 06/15/2004 | US6750097 Method of fabricating a patterened SOI embedded DRAM/eDRAM having a vertical device cell and device formed thereby |
| 06/15/2004 | US6750096 Trench capacitor with buried plate and method for its production |
| 06/15/2004 | US6750095 Integrated circuit with vertical transistors |
| 06/15/2004 | US6750093 Semiconductor integrated circuit and method for manufacturing the same |
| 06/15/2004 | US6750092 Methods of forming ruthenium film by changing process conditions during chemical vapor deposition and ruthenium films formed thereby |
| 06/15/2004 | US6750091 Diode formation method |
| 06/15/2004 | US6750089 Methods of forming conductive interconnects |
| 06/15/2004 | US6750088 SOI MOS field effect transistor and manufacturing method therefor |
| 06/15/2004 | US6750087 Thin film transistor array, fabrication method thereof, and liquid crystal display device employing the same |
| 06/15/2004 | US6750086 Semiconductor device having a semiconductor thin film containing low concentration of unbound hydrogen atoms and method of manufacturing the same |
| 06/15/2004 | US6750083 Method of masking microelectronic semiconductor chips with protective caps |
| 06/15/2004 | US6750080 Semiconductor device and process for manufacturing the same |
| 06/15/2004 | US6750076 Fabrication of a microchip-based electrospray device |
| 06/15/2004 | US6750075 Multi color detector |
| 06/15/2004 | US6750074 Method of manufacturing a semiconductor device and a method for fixing the semiconductor device using substrate jig |
| 06/15/2004 | US6750073 Method for forming a mask pattern |
| 06/15/2004 | US6750072 Method for micro-fabricating a pixelless infrared imaging device |
| 06/15/2004 | US6750069 Minimally spaced MRAM structures |
| 06/15/2004 | US6750068 Method of fabricating a magnetic element with an improved magnetoresistance ratio with an antiparallel top and bottom pinned ferromagnetic layer |
| 06/15/2004 | US6750067 Microelectronic piezoelectric structure and method of forming the same |
| 06/15/2004 | US6750066 Precision high-K intergate dielectric layer |
| 06/15/2004 | US6750000 Electron device manufacturing method, a pattern forming method, and a photomask used for those methods |
| 06/15/2004 | US6749998 Reactive double bonds, hydrazines, oximes, hydroquinone, pyrogallol, gallic acid, thiols, aldehydes, butyrophenones, hydroxytoluenes, 3-tert-butyl-4-hydroxy anisole, tocopherol, 6-hydroxy-2,5,7,8-tetramethylchroman-2-carboxylic acid |
| 06/15/2004 | US6749991 Negative-working photoresist composition |