Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2004
06/22/2004US6753249 Multilayer interface in copper CMP for low K dielectric
06/22/2004US6753248 Post metal barrier/adhesion film
06/22/2004US6753247 Method(s) facilitating formation of memory cell(s) and patterned conductive
06/22/2004US6753246 Semiconductor device with a first dummy pattern
06/22/2004US6753245 Vapor deposition of an organometallic compound; forming silicide
06/22/2004US6753243 Semiconductor processing methods of forming contact openings, methods of forming memory circuitry, methods of forming electrical connections, and methods of forming dynamic random access memory (dram) circuitry
06/22/2004US6753242 Integrated circuit device and method therefor
06/22/2004US6753241 Semiconductor processing methods of forming contact openings, methods of forming electrical connections and interconnections, and integrated circuitry
06/22/2004US6753240 Semiconductor device production method
06/22/2004US6753239 Bond and back side etchback transistor fabrication process
06/22/2004US6753238 Semiconductor device and manufacturing method thereof
06/22/2004US6753237 Method of shallow trench isolation fill-in without generation of void
06/22/2004US6753236 Method for planarizing an isolating layer
06/22/2004US6753235 Method of manufacturing CMOS thin film transistor
06/22/2004US6753234 Method of forming the silicon germanium base of a bipolar transistor
06/22/2004US6753233 Method of manufacturing semiconductor device, and semiconductor device having memory cell
06/22/2004US6753232 Method for fabricating semiconductor device
06/22/2004US6753231 Semiconductor integrated circuit and method for manufacturing the same
06/22/2004US6753230 Method for fabricating semiconductor device with ultra-shallow super-steep-retrograde epi-channel by decaborane doping
06/22/2004US6753229 Multiple-thickness gate oxide formed by oxygen implantation
06/22/2004US6753228 Method of forming a low resistance semiconductor device and structure therefor
06/22/2004US6753227 Method of fabricating MOS transistors
06/22/2004US6753226 Methods for manufacturing semiconductor devices and semiconductor devices
06/22/2004US6753225 Method of forming a gate structure
06/22/2004US6753223 Method for fabricating flash memory cell
06/22/2004US6753222 Method of manufacturing semiconductor device
06/22/2004US6753221 Methods for fabricating semiconductor devices having capacitors
06/22/2004US6753220 Semiconductor processing methods of forming devices on a substrate, forming device arrays on a substrate, forming conductive lines on a substrate, and forming capacitor arrays on a substrate, and integrated circuitry
06/22/2004US6753219 Method of manufacturing semiconductor integrated circuit devices having a memory device with a reduced bit line stray capacity and such semiconductor integrated circuit devices
06/22/2004US6753217 Method for making self-registering non-lithographic transistors with ultrashort channel lengths
06/22/2004US6753216 Multiple gate transistor employing monocrystalline silicon walls
06/22/2004US6753215 Methods for manufacturing semiconductor devices and semiconductor devices
06/22/2004US6753213 Laser processing method
06/22/2004US6753212 Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device
06/22/2004US6753211 Semiconductor devices and manufacturing methods thereof
06/22/2004US6753208 Wafer scale method of packaging integrated circuit die
06/22/2004US6753203 Method for manufacturing an image sensor
06/22/2004US6753202 CMOS photodiode having reduced dark current and improved light sensitivity and responsivity
06/22/2004US6753201 Method of manufacturing semiconductor device capable of sensing dynamic quantity
06/22/2004US6753199 Topside active optical device apparatus and method
06/22/2004US6753195 Method of repairing organic light-emitting element pixels
06/22/2004US6753194 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
06/22/2004US6753193 Method of fabricating ferroelectric memory device
06/22/2004US6753133 Method and manufacturing a semiconductor device having a ruthenium or a ruthenium oxide
06/22/2004US6753128 Blocking acid generation during photolithography
06/22/2004US6753126 Polymer for chemically amplified resist and chemically amplified resist composition containing the same
06/22/2004US6753125 Photosensitive polymer having fused aromatic ring and photoresist composition containing the same
06/22/2004US6753124 Radiation-sensitive resin composition
06/22/2004US6753120 Alignment measuring method of photolithography process
06/22/2004US6753093 Heat dissipating material and manufacturing method thereof
06/22/2004US6753037 Re-coating MEMS devices using dissolved resins
06/22/2004US6753033 Method of manufacturing ceramic thick-film printed circuit board
06/22/2004US6753001 Gel containing silica sol
06/22/2004US6752900 Vacuum loadlock ultraviolet bake for plasma etch
06/22/2004US6752899 Acoustic microbalance for in-situ deposition process monitoring and control
06/22/2004US6752897 Wet etch system with overflow particle removing feature
06/22/2004US6752896 Method of detaching a film of material from a substrate
06/22/2004US6752888 Mounting and curing chips on a substrate so as to minimize gap
06/22/2004US6752877 Single wafer type cleaning method and apparatus
06/22/2004US6752874 Apparatus for perpendicular-type ultra vacuum chemical vapor deposition
06/22/2004US6752872 Coating unit and coating method
06/22/2004US6752869 Forming metal oxides at low temperature; adsorption, oxidation
06/22/2004US6752844 Ceric-ion slurry for use in chemical-mechanical polishing
06/22/2004US6752701 Planarization apparatus with grinding and etching devices and holding device for moving workpiece between said devices
06/22/2004US6752692 Cleaning method and polishing apparatus employing such cleaning method
06/22/2004US6752689 Apparatus for optical inspection of wafers during polishing
06/22/2004US6752688 Cutting solution supplying and controlling apparatus for dicing machine
06/22/2004US6752625 Method and apparatus device for the heat treatment of substrates
06/22/2004US6752585 Method and apparatus for transferring a semiconductor substrate
06/22/2004US6752584 Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
06/22/2004US6752580 Vacuum processing apparatus and semiconductor manufacturing line using the same
06/22/2004US6752579 Vacuum processing apparatus and semiconductor manufacturing line using the same
06/22/2004US6752543 Substrate processing apparatus
06/22/2004US6752484 Apparatus and method of delivering a beam of a functional material to a receiver
06/22/2004US6752442 Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector
06/22/2004US6752387 Stable control over range of flow rates; heated valve for total gasification
06/22/2004US6752308 Diebond strip
06/22/2004US6752163 Collapsible play structures
06/22/2004US6752162 Edge roller assembly, method for contacting an edge of a substrate, and transport system for transporting semiconductor wafers to a wafer processing station
06/22/2004US6752160 Semiconductor substrate batch demounting apparatus
06/22/2004US6751882 Mechanism for positioning a substrate of an image sensor
06/22/2004US6751859 Method for forming modular sockets using flexible interconnects and resulting structures
06/22/2004US6751853 Apparatus and system for removing carrier film from a singulated die
06/22/2004US6751824 Cleaning apparatus for semiconductor wafer
06/22/2004CA2342857C Preparation of cross-linked 2-dimensional polymers with sidedness from .alpha.,.beta.-lactones
06/22/2004CA2317759C A field-effect transistor
06/22/2004CA2132986C Semiconductor optical devices and techniques
06/18/2004CA2452519A1 Package for housing semiconductor chip, fabrication method thereof and semiconductor device
06/17/2004WO2004052069A1 Method and device for the extraction of electronic components from tubes
06/17/2004WO2004052068A1 Board carrier, component mounter, and method for carrying board in component mounting
06/17/2004WO2004051806A2 Flip-chip device having conductive connectors
06/17/2004WO2004051754A1 Spin-injection device and magnetic device using spin-injection device
06/17/2004WO2004051753A1 Silicon nitrade charge trapping memory device
06/17/2004WO2004051752A2 Boron phosphide-based compound semiconductor device, production method thereof and light-emitting diode
06/17/2004WO2004051751A1 Information storage element, manufacturing method thereof, and memory array
06/17/2004WO2004051749A1 Lateral lubistor structure and method
06/17/2004WO2004051745A2 Electronic component comprising a plurality of chips and method for producing the same
06/17/2004WO2004051743A2 Radiation protection in integrated circuits
06/17/2004WO2004051742A1 Magnetoelectronics device and method for fabricating the same
06/17/2004WO2004051740A1 Semiconductor multilayer interconnection forming method