Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2004
06/17/2004DE10253164B3 Speicherzellenfeld Memory cell array
06/17/2004DE10239643B3 Complementary metal oxide semiconductor/bipolar complementary metal oxide semiconductor - integrated circuit for camera chip has single individual layer as last layer of passivation system sealing off integrated circuit
06/17/2004DE10216614B4 Verfahren zur Verstärkung einer dielektrischen Schicht auf einem Halbleitersubstrat an Fehlstellen und Anordnung mit einer verstärkten dielektrischen Schicht A method of reinforcing a dielectric layer on a semiconductor substrate at defects and assembly with a reinforced dielectric layer
06/17/2004DE10036183B4 Verfahren und Gerät zum Erhitzen eines Wafers und Verfahren und Gerät zum Ausheizen eines Photoresistfilms auf einem Wafer Method and apparatus for heating a wafer, and method and apparatus for baking a photoresist film on a wafer
06/17/2004DE10027003B4 Halbleiterschaltungsvorrichtung mit der Fähigkeit, Stromversorgungspotentiale extern an eine interne Schaltung anzulegen und dabei Rauschen einzuschränken Semiconductor integrated circuit device with the ability to create electricity supply potentials external to an internal circuit and thereby reduce noise
06/17/2004CA2507693A1 System and method for expanding a pulse width
06/16/2004EP1429392A2 SiC-misfet and method for fabricating the same
06/16/2004EP1429391A1 Insulated gate semiconductor device and method of making the same
06/16/2004EP1429390A2 Bipolar junction transistor
06/16/2004EP1429389A1 Compact circuit module having high mounting accuracy and method of manufacturing the same
06/16/2004EP1429388A1 High performance vias for vertical IC packaging
06/16/2004EP1429387A2 Electronic device capable of preventing electromagnetic wave from being radiated
06/16/2004EP1429386A2 Tape carrier for tab and method for producing the same
06/16/2004EP1429383A2 Method of forming a semiconductor device with silicon-carbon-oxygen dielectric having improved metal barrier adhesion
06/16/2004EP1429382A2 Via formation for damascene metal conductors in an integrated circuit
06/16/2004EP1429381A2 A method for manufacturing a material compound
06/16/2004EP1429380A1 Container for precision substrate
06/16/2004EP1429379A1 Transporting tool for object to be tested, and object to be tested transporting system
06/16/2004EP1429378A1 METHOD OF HEAT−PEELING CHIP CUT PIECES FROM HEAT PEEL TYPE ADHESIVE SHEET, ELECTRONIC PART, AND CIRCUIT BOARD
06/16/2004EP1429377A2 Method of reflowing conductive terminals
06/16/2004EP1429376A1 Method and apparatus for processing organosiloxane film
06/16/2004EP1429375A1 System and method for performing semiconductor processing on substrate being processed
06/16/2004EP1429374A2 Growth of III-Nitride films on mismatched substrates without conventional low temperature nucleation layers
06/16/2004EP1429373A2 Conveyor system
06/16/2004EP1429372A1 Apparatus and method for thin die detachment
06/16/2004EP1429368A2 Fabrication of three dimensional structures
06/16/2004EP1429351A1 Magnetic memory array, method for recording in a magnetic memory array and method for reading out from a magnetic memory array
06/16/2004EP1429342A1 MRAM having NAND structure
06/16/2004EP1429341A1 Magnetic memory device and its recording control method
06/16/2004EP1429267A2 Automated selection and placement of memory during design of an integrated circuit
06/16/2004EP1429266A2 Method for composing memory on programmable platform devices to meet varied memory requirements with a fixed set of resources
06/16/2004EP1429221A1 Power supply ic having switching regulator and series regulator
06/16/2004EP1429190A2 Exposure apparatus and method
06/16/2004EP1429189A1 Lithographic apparatus and device manufacturing method
06/16/2004EP1429186A2 Pellicle frame with porous inserts or heightened bonding surfaces
06/16/2004EP1429185A1 Etching method and composition for forming etching protective layer
06/16/2004EP1428911A1 Framework assisted crystal growth
06/16/2004EP1428907A1 Thermal activation of gas for use in a semiconductor process chamber
06/16/2004EP1428906A1 Low dielectric constant material and method of processing by CVD
06/16/2004EP1428862A1 CERIUM−BASED ABRASIVE MATERIAL SLURRY AND METHOD FOR PRODUCING CERIUM−BASED ABRASIVE MATERIAL SLURRY
06/16/2004EP1428417A1 Liquid crystal polymers for flexible circuits
06/16/2004EP1428269A1 Antiparallel magnetoresistive memory cells
06/16/2004EP1428263A2 Process for ultra-thin body soi devices that incorporate epi silicon tips and article made thereby
06/16/2004EP1428262A2 Semiconductor structures employing strained material layers with defined impurity gradients and methods for fabricating same
06/16/2004EP1428261A1 Semiconductor memory element arrangement
06/16/2004EP1428257A2 Apparatus with compliant electrical terminals, and methods for forming same
06/16/2004EP1428256A2 Semiconductor device with compliant electrical terminals, apparatus including the semiconductor device, and methods for forming same
06/16/2004EP1428255A1 Microelectronic mechanical system and methods
06/16/2004EP1428253A1 Plasma curing process for porous low-k materials
06/16/2004EP1428252A2 A method for making a semiconductor device having a high-k gate dielectric
06/16/2004EP1428251A1 Sidewall spacer definition of gates
06/16/2004EP1428250A1 Chemical surface deposition of ultra-thin semiconductors
06/16/2004EP1428249A1 Bonding method
06/16/2004EP1428248A2 Self-aligned transistor and diode toplogies in silicon carbide through the use of selective epitaxy or selective implantation
06/16/2004EP1428247A1 Field-effect transistor with horizontal self-aligned gates and the production method therefor
06/16/2004EP1428246A1 Wafer level underfill and interconnect process
06/16/2004EP1428245A1 Monolithic three-dimensional structures
06/16/2004EP1428244A2 Integrated circuit having an energy-absorbing structure
06/16/2004EP1428243A2 Method of forming semiconductor compound film for fabrication of electronic device and film produced by same
06/16/2004EP1428242A2 Real-time evaluation of stress fields and properties in line features formed on substrates
06/16/2004EP1428155A2 Structures and methods for selectively applying a well bias to portions of a programmable device
06/16/2004EP1428075A1 Method for high resolution patterning using low-energy electron beam, process for preparing nano device using the method
06/16/2004EP1428074A1 Method for high resolution patterning using soft x-ray, process for preparing nano device using the method
06/16/2004EP1428072A2 Method for automatic optical measurement of an opc structure
06/16/2004EP1428064A2 Electrostatic discharge protection for pixellated electronic device
06/16/2004EP1427868A2 Vaporizer
06/16/2004EP1427865A1 Textured-grain-powder metallurgy tantalum sputter target
06/16/2004EP1427672A1 Method for preparing a stable lead zircon-titanate sol and method for preparing films based on same
06/16/2004EP1427671A1 Electronic device comprising a mesoporous silica layer and composition for preparing the mesoporous silica layer
06/16/2004EP1342311B1 Electrostatic device for holding an electronic component wafer
06/16/2004EP1320874B1 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool
06/16/2004EP1314165B1 Memory cell arrangement and method for the production thereof
06/16/2004EP1226447B1 High resolution skew detection apparatus and method
06/16/2004EP1177068A4 Improved chemical mechanical polishing slurries for metal
06/16/2004EP1097252A4 Multi-position load lock chamber
06/16/2004EP1057207B1 Rf powered plasma enhanced chemical vapor deposition reactor and methods
06/16/2004EP1040292A4 Gas panel
06/16/2004EP1027463A4 Metal article with fine uniform structures and textures and process of making same
06/16/2004EP1016092B1 Method and apparatus for producing extreme ultra-violet light for use in photolithography
06/16/2004EP0970510B1 System for transferring wafers from cassettes to furnaces and method
06/16/2004EP0946783B1 Semiconducting devices and method of making thereof
06/16/2004EP0888578B1 Solutions and processes for removal of sidewall residue after dry-etching
06/16/2004EP0806056B1 Glass bonding layer for a ceramic circuit board support substrate
06/16/2004EP0683921B1 Microstructures and single mask, single-crystal process for fabrication thereof
06/16/2004CN1505857A High-peak-power laser device and application to the generation of light in the extreme ultraviolet
06/16/2004CN1505841A EEPROM cell with asymmetric thin window
06/16/2004CN1505840A Process for producing semiconductor integrated circuit device
06/16/2004CN1505839A Semiconductor device
06/16/2004CN1505837A High density mram array
06/16/2004CN1505836A Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey method
06/16/2004CN1505835A Manufacturing method for electric device
06/16/2004CN1505834A Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics
06/16/2004CN1505833A Method of polishing an integrated circuit device using dummy features
06/16/2004CN1505832A Method of plasma etching organic antireflective coating
06/16/2004CN1505831A Method of etching organic antireflection coating (ARC) layers
06/16/2004CN1505830A Remote maintenance system and remote maintenance method for semiconductor manufacturing apparatus
06/16/2004CN1505790A Block based design methodology with programmable components
06/16/2004CN1505773A Solvents and photoresist compositions for short wavelength imaging
06/16/2004CN1505695A Cerium oxide containing ceramic components and coatings in semiconductor processing equipment
06/16/2004CN1505694A Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases