Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2004
07/01/2004US20040127058 Method for fabricating semiconductor device
07/01/2004US20040127057 Method for fabricating a patterned thin film and a micro device
07/01/2004US20040127056 Method for forming a micro pattern
07/01/2004US20040127055 Methods to fabricate a semiconductor device
07/01/2004US20040127054 Method for manufacturing magnetic random access memory
07/01/2004US20040127053 High precision integrated circuit capacitors
07/01/2004US20040127052 Method for fabricating semiconductor device
07/01/2004US20040127051 Apparatus and methods of chemical mechanical polishing
07/01/2004US20040127050 Method for manufacturing semiconductor device with contact body extended in direction of bit line
07/01/2004US20040127049 Differential planarization
07/01/2004US20040127048 Wafer processing apparatus including clean box stopping mechanism
07/01/2004US20040127047 Polishing composition and polishing method using the same
07/01/2004US20040127046 Polishing composition and polishing method using the same
07/01/2004US20040127045 Chemical mechanical planarization of wafers or films using fixed polishing pads and a nanoparticle composition
07/01/2004US20040127044 Especially an automobile air-duct, having a mono-layer of a semi-crystalline thermoplastic having a hardness of 50-65 Shore D and a modulus at 150 degrees C. of at least 60 MPa, particularly a block copolymer of butylene terephthalate and propylene oxide; may be made by extrusion blow-molding
07/01/2004US20040127043 Methods for forming capacitor structures; and methods for removal of organic materials
07/01/2004US20040127042 Compound crystal and method of manufacturing same
07/01/2004US20040127041 Substrate with amorphous carbon for removal with silicon oxygen layerwith chemical mechanical polishing
07/01/2004US20040127040 Method for the planarization of a semiconductor structure
07/01/2004US20040127039 Etchant fume exhaust apparatus
07/01/2004US20040127038 Transparent oxide semiconductor thin film transistors
07/01/2004US20040127037 Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask
07/01/2004US20040127036 Semiconductor device with electrically coupled spiral inductors
07/01/2004US20040127035 Method of forming isolation film of semiconductor device
07/01/2004US20040127034 Method for fabricating semiconductor device
07/01/2004US20040127032 comprises laminate embedded within cured inorganic sodium/potassium aluminosilicate polymer matrix; improved adhesion
07/01/2004US20040127031 Method and apparatus for monitoring a plasma in a material processing system
07/01/2004US20040127030 Method and apparatus for monitoring a material processing system
07/01/2004US20040127029 Wafer processing apparatus including clean box stopping mechanism
07/01/2004US20040127028 Wafer processing apparatus having dust proof function
07/01/2004US20040127027 Method for forming titanium silicide contact of semiconductor device
07/01/2004US20040127026 Methods for improving sheet resistance of silicide layer after removal of etch stop layer
07/01/2004US20040127025 Processes for fabricating conductive patterns using nanolithography as a patterning tool
07/01/2004US20040127024 Method for fabricating contact pad of semiconductor device
07/01/2004US20040127023 Method for forming a contact using a dual damascene process in semiconductor fabrication
07/01/2004US20040127022 Metal to polysilicon contact in oxygen environment
07/01/2004US20040127021 Diffusion barrier and method therefor
07/01/2004US20040127020 Method of forming a barrier metal in a semiconductor device
07/01/2004US20040127019 Film forming method and film forming apparatus
07/01/2004US20040127018 Bit line contacts
07/01/2004US20040127017 Semiconductor devices and methods to form a contact in a semiconductor device
07/01/2004US20040127016 Dual cap layer in damascene interconnection processes
07/01/2004US20040127015 Method for fabricating semiconductor device capable of improving gap-fill property
07/01/2004US20040127014 Method of improving a barrier layer in a via or contact opening
07/01/2004US20040127013 Method for forming bit line
07/01/2004US20040127012 Method for fabricating spaced-apart nanostructures
07/01/2004US20040127010 Bumping process
07/01/2004US20040127009 Bumping process
07/01/2004US20040127008 Method for producing integrated microsystems
07/01/2004US20040127007 Methods and apparatus to form gates in semiconductor devices
07/01/2004US20040127006 Methods of manufacturing semiconductor devices
07/01/2004US20040127005 Method of manufacturing semiconductor device
07/01/2004US20040127004 Manufacturing method which prevents abnormal gate oxidation
07/01/2004US20040127003 Methods for transistor gate fabrication and for reducing high-k gate dielectric roughness
07/01/2004US20040127002 Method of forming metal line in semiconductor device
07/01/2004US20040127001 Robust ultra-low k interconnect structures using bridge-then-metallization fabrication sequence
07/01/2004US20040127000 High-K gate dielectric defect gettering using dopants
07/01/2004US20040126999 Advances in spike anneal processes for ultra shallow junctions
07/01/2004US20040126998 Semiconductor device having an improved strained surface layer and method of forming a strained surface layer in a semiconductor device
07/01/2004US20040126997 Method for fabricating copper damascene structures in porous dielectric materials
07/01/2004US20040126996 Method and apparatus for machining substrate
07/01/2004US20040126995 Method for forming scribed groove and scribing apparatus
07/01/2004US20040126994 Method of forming a multi-layer semiconductor structure having a seamless bonding interface
07/01/2004US20040126993 Low temperature fusion bonding with high surface energy using a wet chemical treatment
07/01/2004US20040126992 Semiconductor device and a method of manufacturing the same
07/01/2004US20040126991 Methods of manufacturing semiconductor devices
07/01/2004US20040126990 Semiconductor device having STI without divot its manufacture
07/01/2004US20040126989 Method of manufacturing a semiconductor device
07/01/2004US20040126988 Method for releasing stress during semiconductor devicefabrication
07/01/2004US20040126987 Method for manufacturing merged DRAM with logic device
07/01/2004US20040126986 Improved deep isolation trenches
07/01/2004US20040126985 Formation of patterned silicon-on-insulator (SOI)/silicon-on-nothing (SON) composite structure by porous Si engineering
07/01/2004US20040126984 Method of fabricating a metal-insulator-metal capacitor
07/01/2004US20040126983 Method for forming capacitor in semiconductor device
07/01/2004US20040126982 Method for fabricating capacitor
07/01/2004US20040126981 MIM capacitors and methods for fabricating same
07/01/2004US20040126980 Method of fabricating capacitor with hafnium
07/01/2004US20040126979 Bipolar transistor and method of manufacturing the same
07/01/2004US20040126978 Self-aligned NPN transistor with raised extrinsic base
07/01/2004US20040126977 Process for producing an integrated electronic component and electrical device incorporating an integrated component thus obtained
07/01/2004US20040126976 Method of manufacturing a semiconductor device
07/01/2004US20040126975 Double gate semiconductor device having separate gates
07/01/2004US20040126974 Mask-ROM process and device to prevent punch through using a halo implant process
07/01/2004US20040126973 Method for fabricating semiconductor device
07/01/2004US20040126972 Method of manufacturing flash memory device
07/01/2004US20040126971 Methods of manufacturing flash memory semiconductor devices
07/01/2004US20040126970 DRAM cell having MOS capacitor and method for manufacturing the same
07/01/2004US20040126969 DRAM cell with enhanced SER immunity
07/01/2004US20040126968 Semiconductor memory and method of manufacturing the same
07/01/2004US20040126967 Method of manufacturing non-volatile memory device
07/01/2004US20040126966 Method for forming semiconductor device
07/01/2004US20040126965 Advanced recessed gate transistor and a method of forming the same
07/01/2004US20040126964 Method for fabricating capacitor in semiconductor device
07/01/2004US20040126963 Capacitor fabrication method
07/01/2004US20040126962 [method of fabricating shallow trench isolation]
07/01/2004US20040126961 Semiconductor trench structure
07/01/2004US20040126960 Merged memory and logic semiconductor device of salicided dual gate structure including embedded memory of self-aligned contact structure and manufacturing method thereof
07/01/2004US20040126959 Method of manufacturing ferroelectric memory device
07/01/2004US20040126958 Semiconductor device and method of manufacturing the same
07/01/2004US20040126957 Microelectronic process and structure