Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2004
07/01/2004US20040124420 Etch stop layer
07/01/2004US20040124419 Semiconductor device and its manufacturing method
07/01/2004US20040124418 Semiconductor device and method of manufacturing the same
07/01/2004US20040124417 Active matrix display device and manufacturing method thereof
07/01/2004US20040124416 Method for producing organic electronic devices on deposited dielectric materials
07/01/2004US20040124414 Transflective liquid crystal display device and fabricating method thereof
07/01/2004US20040124413 Wafer support plate
07/01/2004US20040124411 Semiconductor device capable of preventing a pattern collapse
07/01/2004US20040124410 Novel organic semiconductor polymer and organic thin film transistor using the same
07/01/2004US20040124409 Quantum optical semiconductor device
07/01/2004US20040124375 Method of aligning a substrate, computer program, device manufacturing method and device manufactured thereby
07/01/2004US20040124365 Electron beam source, electron optical apparatus using such beam source and method of operating an electron beam source
07/01/2004US20040124348 Controlling surface chemistry on solid substrates
07/01/2004US20040124340 Photoelectric leak current compensating circuit and optical signal circuit using same
07/01/2004US20040124280 Anti-corrosion shower head used in dry etching process and method of manufacturing the same
07/01/2004US20040124271 Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same
07/01/2004US20040124225 Apparatus for aligning and dispensing solder columns in an array
07/01/2004US20040124177 Method of etching structures into an etching body using a plasma
07/01/2004US20040124176 Palsma etchingm method
07/01/2004US20040124172 Aftertreatment etching; hydrogen peroxide oxidation of silicon wafer; inert gas purging
07/01/2004US20040124171 [bump-forming process]
07/01/2004US20040124118 Thin plate supporting container
07/01/2004US20040124090 Wafer electroplating apparatus and method
07/01/2004US20040124089 Plating method and apparatus for controlling deposition on predetermined portions of a workpiece
07/01/2004US20040124088 Processing apparatus
07/01/2004US20040123953 Apparatus and method for thermally isolating a heat chamber
07/01/2004US20040123952 FPD fabricating apparatus
07/01/2004US20040123950 Venting of pellicle cavity for a mask
07/01/2004US20040123922 Retarding agglomeration of Ni monosilicide using Ni alloys
07/01/2004US20040123921 Engraving pattern ; forming dielectric films
07/01/2004US20040123907 Gas delivery system for supplying gas to semiconductor manufacturing equipment
07/01/2004US20040123879 Reacting a metal with one gas; forming oxides; decompsoition with second gas
07/01/2004US20040123878 Apparatus and method for cleaning electronic packages
07/01/2004US20040123806 Chemical vapor deposition apparatus and method
07/01/2004US20040123805 Vacuum treatment method and vacuum treatment device
07/01/2004US20040123800 Showerheads
07/01/2004US20040123796 Production method for semiconductor crystal and semiconductor luminous element
07/01/2004US20040123657 Mass flow controller for control purge and managing method of the same
07/01/2004US20040123639 Making integral heat spreader by coining
07/01/2004US20040123528 Mixture of surfactant, abrasive and water
07/01/2004US20040123484 High pressure processing method and apparatus
07/01/2004US20040123456 Process for producing semiconductor device
07/01/2004DE4142469B4 Verfahren zur Erzeugung und zur Entfernung von temporären Siliziumdioxid-Strukturen A process for the production and for the removal of the temporary silicon dioxide structures
07/01/2004DE202004005378U1 Trägerhorde aus Quarzglas für die Aufnahme von scheibenförmigen Substraten aus Halbleiterwerkstoff A carrier rack made of quartz glass for recording disc substrates of semiconductor material
07/01/2004DE19920871B4 Verfahren zum Aktivieren von Ladungsträgern durch strahlungsunterstützte Wärmebehandlung Method for activating carriers by irradiation assisted heat treatment
07/01/2004DE19808989B4 Dünnschichttransistor und Herstellungsverfahren dafür Thin film transistor and manufacturing method thereof
07/01/2004DE19611726B4 Blindstruktur zur Außeraxial-Belichtung Blind structure for off-axis illumination
07/01/2004DE10356700A1 Verfahren zum Aufnehmen von Halbleiterchips von einer Folie A method for picking up a semiconductor chip from a foil
07/01/2004DE10356654A1 Removal of metal layers used in fabricating semiconductor device comprises removing metal layers with cleaning solution comprising acid solution and oxidation agent containing iodine
07/01/2004DE10348192A1 Integrierte Luftstromsteuerung für eine Positionierspindelbaugruppe Integrated airflow control for a Positionierspindelbaugruppe
07/01/2004DE10346609A1 Oxidation process for a flash memory cell comprises preparing a semiconductor substrate on which is formed a gate electrode with a tunnel oxide film, a potential-free gate, a dielectric film and control gate, and carrying out dry oxidation
07/01/2004DE10329107A1 Verfahren zum Bestimmen der Temperatur eines Halbleiterwafers in einer Schnellheizanlage A method for determining the temperature of a semiconductor wafer in a rapid heating
07/01/2004DE10296665T5 Messung der Rückseitenspannung eines integrierten Schaltkreises Measurement of the back voltage of an integrated circuit
07/01/2004DE10261424B3 Production of an emitter with a good ohmic contact used in the production of e.g. a diode comprises introducing an emitter into a surface region of a semiconductor body by doping in three steps
07/01/2004DE10260233A1 Workpiece processing method, e.g. for semiconductor wafer, by attaching workpiece to holder comprising porous material, using solid material such as wax or adhesive
07/01/2004DE10260091A1 Process for coating a substrate used in the production of dielectrics or ferroelectrics in the manufacture of memory chips in microelectronics comprises applying a suspension onto a substrate, vaporizing the substrate, and sintering
07/01/2004DE10257665B3 Halbleiterspeicher mit einer Anordnung von Speicherzellen A semiconductor memory comprising an array of memory cells
07/01/2004DE10134462B4 Verfahren zur Planarisierung der Oberfläche eines Halbleiterwafers und Vorrichtung zur Durchführung dieses Verfahrens A process for planarization of the surface of a semiconductor wafer and device for carrying out this method
07/01/2004CA2510606A1 Semiconductor multi-layered structure with non-uniform quantum dots, and light-emitting diode, semiconductor laser diode and, semiconductor light amplifier using the same as well as method for making them
06/2004
06/30/2004EP1434335A2 Alignment apparatus and exposure apparatus using the same
06/30/2004EP1434285A2 Organic semiconductor polymer and organic thin film transistor
06/30/2004EP1434281A2 Manufacturing method of thin-film transistor, thin-film transistor sheet, and electric circuit
06/30/2004EP1434276A2 Image sensor adapted for reduced component chip scale packaging
06/30/2004EP1434275A1 Thin film semiconductor device and method for fabricating the same
06/30/2004EP1434274A2 Buried-gate-type semiconductor device
06/30/2004EP1434273A2 Power semiconductor device and method of manufacturing same
06/30/2004EP1434272A1 Production method for semiconductor device
06/30/2004EP1434267A1 Manufacturing process of a stacked semiconductor device and corresponding device
06/30/2004EP1434264A2 Semiconductor device and manufacturing method using the transfer technique
06/30/2004EP1434263A2 Separating method for a layer that is to be transferred
06/30/2004EP1434262A2 Semiconductor device manufactured by the transfer technique
06/30/2004EP1434261A1 Circuit device mounitng method and press
06/30/2004EP1434260A2 Method to manufacture LDMOS transistors
06/30/2004EP1434259A1 Ferroelectric thin film and method for forming the same
06/30/2004EP1434258A2 MOS device and a process for manufacturing MOS devices using a dual-polysilicon layer technology with side contact
06/30/2004EP1434257A2 MOS device and process for manufacturing MOS devices using dual-polysolicon layer technology
06/30/2004EP1434256A2 Thin plate supporting container
06/30/2004EP1434255A2 Apparatus for processing substrate by process solution
06/30/2004EP1434254A2 Processing apparatus
06/30/2004EP1434253A1 SEMICONDUCTOR DEVICE FABRICATED ON SURFACE OF SILICON HAVING <110> DIRECTION OF CRYSTAL PLANE AND ITS PRODUCTION METHOD
06/30/2004EP1434238A2 Integrated circuit with programmable fuse array
06/30/2004EP1434231A2 Magnetic random access memory and data read method thereof
06/30/2004EP1434134A2 Self-reparable semiconductor and method thereof
06/30/2004EP1434093A2 Catoptric projection system, exposure apparatus and device fabrication method
06/30/2004EP1434092A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
06/30/2004EP1434091A1 Chemical-amplification-type positive radiation-sensitive resin composition
06/30/2004EP1433874A2 Method for metal oxide thin film deposition via MOCVD
06/30/2004EP1433743A1 METHOD FOR PREPARING COBALT−PROTEIN COMPLEX
06/30/2004EP1433740A1 Method for the closure of openings in a film
06/30/2004EP1433582A1 Method and apparatus for cutting a semiconductor wafer
06/30/2004EP1433368A1 Electronic circuit comprising conductive bridges and method for making such bridges
06/30/2004EP1433257A2 A reconfigurable integrated circuit with a scalable architecture
06/30/2004EP1433207A2 A process for large-scale production of cdte/cds thin film solar cells
06/30/2004EP1433206A1 Transistor with an electron and a vertical channel and the production methods thereof
06/30/2004EP1433205A1 Semiconductor memory device and corresponding manufacturing method
06/30/2004EP1433203A2 Method of producing a contact system on the rear of a component with stacked substrates and a component equipped with one such contact system
06/30/2004EP1433202A2 Integration of barrier layer and seed layer
06/30/2004EP1433201A1 Method for fabricating a power semiconductor device having a floating island voltage sustaining layer
06/30/2004EP1433200A2 Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands
06/30/2004EP1433199A1 Method for forming a cavity structure on soi substrate and cavity structure formed on soi substrate