Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2004
07/01/2004WO2004055920A2 Electronic devices
07/01/2004WO2004055919A2 Electronic devices
07/01/2004WO2004055917A2 Manufacture of thin film transistors
07/01/2004WO2004055905A1 Field effect transistor
07/01/2004WO2004055904A1 Vertical insulated gate transistor and manufacturing method
07/01/2004WO2004055903A1 Semiconductor material having bipolar transistor structure and semiconductor device using same
07/01/2004WO2004055902A1 Semiconductor material for electronic device and semiconductor element using same
07/01/2004WO2004055900A1 Semiconductor multilayer structure having inhomogeneous quantum dots, light-emitting diode using same, semiconductor laser diode, semiconductor optical amplifier, and method for manufacturing them
07/01/2004WO2004055892A1 Electro-forming master, minute pattern by the master and the same manufacturing method
07/01/2004WO2004055891A1 Semiconductor device and stacked semiconductor device
07/01/2004WO2004055890A1 Method and apparatus for electrostatically aligning integrated circuits
07/01/2004WO2004055889A1 Miniature moldlocks for heatsink or flag for an overmolded plastic package
07/01/2004WO2004055888A1 Magnetic memory device
07/01/2004WO2004055887A2 Manipulation of micrometer-sized electronic objects with liquid droplets
07/01/2004WO2004055886A2 Manipulation of objects with fluid droplets
07/01/2004WO2004055884A1 Manufacture of trench-gate semiconductor devices
07/01/2004WO2004055883A1 Method of manufacture of a trench-gate semiconductor device
07/01/2004WO2004055882A1 Method of manufacturing a trench-gate semiconductor device
07/01/2004WO2004055881A1 Nitrogen-free dielectric anti-reflective coating and hardmask
07/01/2004WO2004055880A1 Annealing method and device
07/01/2004WO2004055879A1 Ozone-processing apparatus
07/01/2004WO2004055878A1 Ozone-processing apparatus
07/01/2004WO2004055877A1 Processing method and device
07/01/2004WO2004055876A1 Method for preparation of ferroelectric single crystal film structure using deposition method
07/01/2004WO2004055875A1 Method for preparing film structure comprising ferroelectric single crystal layer
07/01/2004WO2004055874A1 Method for producing silicon epitaxial wafer
07/01/2004WO2004055873A1 Thin film forming apparatus
07/01/2004WO2004055872A2 Columnar structured material and method of manufacturing the same
07/01/2004WO2004055871A1 Method for manufacturing soi wafer
07/01/2004WO2004055870A1 Wirebonding method and apparatus
07/01/2004WO2004055868A2 Integrated circuit modification using well implants
07/01/2004WO2004055866A2 Programmable interconnect cell for configuring a field programmable gate array
07/01/2004WO2004055864A2 Composition and method for copper chemical mechanical planarization
07/01/2004WO2004055855A2 Gas distribution apparatus and method for uniform etching
07/01/2004WO2004055607A2 Apparatus for processing an object with high position accurancy
07/01/2004WO2004055594A2 Method and system for determining characteristics of substrates employing fluid geometries
07/01/2004WO2004055419A1 Cover body device and vacuum vessel device
07/01/2004WO2004055234A1 Method for forming film
07/01/2004WO2004055089A1 Polyol composition of the two-part system for foam grindstone, two-part curable composition for foam grindstone, foam grindstone, and process for production thereof
07/01/2004WO2004054924A1 Columnar structured material, electrode having columnar structured material, and production method therefor
07/01/2004WO2004054922A2 Nanostructure, electronic device and method of manufacturing the same
07/01/2004WO2004054755A2 Device for gripping a semiconductor plate through a transfer opening, using the closure of the opening
07/01/2004WO2004044921A3 Nonvolatile memory array using unified cell structure in divided-well allowing write operation with no disturb
07/01/2004WO2004040665A3 Etch-stop material for improved manufacture of magnetic devices
07/01/2004WO2004040624A3 Method and apparatus for controlling a manufacturing process
07/01/2004WO2004039132A3 Method for surface processing by means of a microwave vacuum-plasma associated with electron-cyclotron resonance
07/01/2004WO2004038275B1 Microfabrication tool pedestal and method of use
07/01/2004WO2004036628A3 Device and method for transporting wafer-shaped articles
07/01/2004WO2004035807A3 Method and system for compensating for anneal non-uniformities
07/01/2004WO2004034421A3 Method for electric field assisted deposition of films of nanoparticles
07/01/2004WO2004032205A3 Current-carrying electronic component and method of manufacturing same
07/01/2004WO2004032187A3 Multi-zone resitive heater
07/01/2004WO2004030041A3 High selectivity and high planarity dielectric polishing
07/01/2004WO2004027834A3 Mim capacitor structures and fabrication methods in dual-damascene structures
07/01/2004WO2004027820A3 Self-aligned npn transistor with raised extrinsic base
07/01/2004WO2004021409A3 A method and system to enhance the removal of high-k-dielectric materials
07/01/2004WO2004021407A3 Electrical connector having a cored contact assembly
07/01/2004WO2004021405A3 Method and system for dynamic modeling and recipe optimization of semiconductor etch processes
07/01/2004WO2004019373B1 Nanocrystal electron device
07/01/2004WO2004017395A9 Isolated complementary mos devices in epi-less substrate
07/01/2004WO2004017377A3 Atomic layer deposition of high k metal oxides
07/01/2004WO2004012221A3 Method for adjusting voltage on a powered faraday shield
07/01/2004WO2004011177A3 Building a three-dimensional structure by manipulating individual particles
07/01/2004WO2004001817A9 Transfer chamber for vacuum processing system
07/01/2004WO2004001797A3 Sensitized chemically amplified photoresist for use in photomask fabrication and semiconductor processing
07/01/2004WO2003102690A3 Method for producing photoresist masks for structuring semiconductor substrates by means of optical lithography
07/01/2004WO2003093903A3 Projection method comprising pupillary filtration and a projection lens therefor
07/01/2004WO2003085719A3 Process for making air gap containing semiconducting devices and resulting semiconducting device
07/01/2004WO2003079463A3 Programmable structure, an array including the structure, and methods of forming the same
07/01/2004WO2003079407A3 Wafer-level coated copper stud bumps
07/01/2004WO2003065465A3 Boron phosphide-based semiconductor device, production method thereof, light-emitting diode and boron phosphide-based semiconductor layer
07/01/2004WO2003054925A3 Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein
07/01/2004WO2002080265B1 Plasma processor and method for operating same
07/01/2004US20040128636 Semiconductor device, semiconductor device design method, semiconductor device design method recording medium, and semiconductor device design support system
07/01/2004US20040128628 Process for designing and manufacturing semi-conductor memory components, in particular dram components
07/01/2004US20040128600 Built-in self-test hierarchy for an integrated circuit
07/01/2004US20040128599 Decompressor/PRPG for applying pseudo-random and deterministic test patterns
07/01/2004US20040128598 Integrated circuit device including a scan test circuit and methods of testing the same
07/01/2004US20040128115 Hierarchical power supply noise monitoring device and system for very large scale integrated circuits
07/01/2004US20040128023 Substrate transfer system
07/01/2004US20040128021 Method and apparatus for monitoring a material processing system
07/01/2004US20040128005 Apparatus including user interface and method regarding user interface
07/01/2004US20040127697 arylisothiocyanate compounds useful for activating alcohol-containing macromolecules, for example polyethyleneglycols and cellulose, for covalent linkage to amino-groups of biomolecules such as antibodies, enzymes, and proteins
07/01/2004US20040127595 Resin compositions, processes for preparing the resin compositions and processes for forming resin films
07/01/2004US20040127374 Composition and method for removing copper-compatible resist
07/01/2004US20040127148 Polishing method for semiconductor device, method for fabricating semiconductor device and polishing system
07/01/2004US20040127145 Perforated-transparent polishing pad
07/01/2004US20040127143 Apparatus and methods for slurry flow control
07/01/2004US20040127142 Load cup for chemical mechanical polishing
07/01/2004US20040127074 Interconnect assemblies and methods
07/01/2004US20040127070 Additives to prevent degradation of alkyl-hydrogen siloxanes
07/01/2004US20040127069 Deposition of silane and nitrogen in a plasma reactor onto a workkpiece; field-effect transistors
07/01/2004US20040127068 Semiconductor device fabrication method and semiconductor fabrication control method
07/01/2004US20040127066 Mask for sequential lateral solidification and crystallization method using thereof
07/01/2004US20040127065 Pattern and its forming method of liquid crystal display device
07/01/2004US20040127063 Method of forming oxynitride film
07/01/2004US20040127062 Methods of forming a nonvolatile memory device having a local SONOS structure that use spacers to adjust the overlap between a gate electrode and a charge trapping layer
07/01/2004US20040127061 Method for manufacturing semiconductor device
07/01/2004US20040127060 Deliberate semiconductor film variation to compensate for radial processing differences, determine optimal device characteristics, or produce small productions
07/01/2004US20040127059 Clean gas injector system for reactor chamber