Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2004
07/08/2004US20040129965 Trench capacitor process for preventing parasitic leakage
07/08/2004US20040129964 Semiconductor memory device and manufacturing method thereof
07/08/2004US20040129963 Semiconductor device and manufacturing method thereof
07/08/2004US20040129962 Method for manufacturing non-volatile memory device and non-volatile memory device and semiconductor device
07/08/2004US20040129961 ferroelectric film comprises ferroelectric layered superlattice comprising strontium bismuth tantalate or strontium bismuth tantalum niobate; large surface area; vapor depositing conformal top electrode layer
07/08/2004US20040129960 Semiconductor device and manufacturing method thereof, delamination method, and transferring method
07/08/2004US20040129959 electrode comprising a first portion on the gate insulator in the recess and a second reduced-width portion extending from the first portion; and source/drain region in substrate adjacent recess; T-shaped gate electrode
07/08/2004US20040129956 Solid-state imaging device and method for producing the same
07/08/2004US20040129952 Integrated circuit with programmable fuse array
07/08/2004US20040129951 Semiconductor integrated circuit
07/08/2004US20040129943 manufacturing method capable of decreasing the number of mask processes
07/08/2004US20040129942 Inverted buried strap structure and method for vertical transistor DRAM
07/08/2004US20040129941 Amorphous and polycrystalline silicon nanolaminate
07/08/2004US20040129940 Semiconductor wafer and a methd for manufacturing a semiconductor wafer
07/08/2004US20040129939 Stacked type semiconductor device
07/08/2004US20040129938 Multi-functional structure for enhanced chip manufacturibility & reliability for low k dielectrics semiconductors and a crackstop integrity screen and monitor
07/08/2004US20040129935 Semiconductor photodetector with internal reflector
07/08/2004US20040129933 Pixel current driver for organic light emitting diode displays
07/08/2004US20040129928 Method for modifying switching field characteristics of magnetic tunnel junctions
07/08/2004US20040129900 Device inspection
07/08/2004US20040129898 Electron beam writing equipment and electron beam writing method
07/08/2004US20040129896 Method and device for generating extreme ultravilolet radiation in particular for lithography
07/08/2004US20040129880 Sem inspection and analysis of patterned photoresist features
07/08/2004US20040129856 Vertical guide unit and stage system with the same unit
07/08/2004US20040129761 Tool head for attaching an electrical conductor on the contact surface of a substrate and method for implementing the attachment
07/08/2004US20040129760 Apparatus for transferring a wafer
07/08/2004US20040129758 Die bonding apparatus
07/08/2004US20040129754 High speed linear and rotary split-axis wire bonder
07/08/2004US20040129679 Process and device for the wet-chemical treatment of silicon
07/08/2004US20040129674 Method and system to enhance the removal of high-k dielectric materials
07/08/2004US20040129673 High density plasma oxidation
07/08/2004US20040129672 Electronic and photonic devices having ultra-micro structures fabricated with a focused ion beam
07/08/2004US20040129671 Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
07/08/2004US20040129670 Method for fabricating ferroelectric random access memory device
07/08/2004US20040129575 rotating substrate holding member to remove plating liquid; and sucking liquid remaining on the substrate-contacting portion or in its vicinity, while the holding member is rotated
07/08/2004US20040129572 low-resistance; improves the RC-delay characteristic of circuit on large-area substrate and reduces the number of masks for processing of a structure of gate overlap lightly-doped drain (source)
07/08/2004US20040129558 Method of metal sputtering for integrated circuit metal routing
07/08/2004US20040129452 Multi-strand substrate for ball-grid array assemblies and method
07/08/2004US20040129451 Method of separating semiconductor dies from a wafer
07/08/2004US20040129385 Pre-loaded plasma reactor apparatus and application thereof
07/08/2004US20040129384 Chemical treatment apparatus and chemical treatment method
07/08/2004US20040129364 Bonding method
07/08/2004US20040129344 Semiconductor device with solder bumps with fewer occurrences of voids and cracks
07/08/2004US20040129324 Modular substrate gas panel having manifold connections in a common plane
07/08/2004US20040129302 Single workpiece processing system
07/08/2004US20040129300 Substrate processing apparatus and substrate transporting device mounted thereto
07/08/2004US20040129297 For processing wafers that loads the first set of wafers into wafer holders within the submersion mechanism, such that every other wafer holder loads a wafer from the first set of wafers
07/08/2004US20040129226 Method and apparatus for an improved focus ring in a plasma processing system
07/08/2004US20040129225 Method of fabricating semiconductor wafer and susceptor used therefor
07/08/2004US20040129224 Cooling mechanism with coolant, and treatment device with cooling mechanism
07/08/2004US20040129219 Atomic layer deposition apparatus and method
07/08/2004US20040129216 Molecular beam epitaxy equipment
07/08/2004US20040129215 Method for depositing especially crystalline layers from the gas phase onto especially crystalline substrates
07/08/2004US20040129212 Apparatus and method for delivery of reactive chemical precursors to the surface to be treated
07/08/2004US20040129210 Gas nozzle for substrate processing chamber
07/08/2004US20040129207 Dispenser for liquid crystal display panel and dispensing method using the same
07/08/2004US20040129204 Chemical vapor deposition using organometallic precursors
07/08/2004US20040129203 Silicon tube formed of bonded staves
07/08/2004US20040128829 Circuit board, method of manufacturing the same, transfer chip, transfer source subtrate, electro-optical device, and electronic apparatus
07/08/2004DE4444584B4 Halbleiterwafer zum Durchführen eines Burn-In-Tests Semiconductor wafers for performing a burn-in tests
07/08/2004DE4417626B4 Einrichtung und Verfahren zum Herstellen eines Halbleiters Apparatus and method for manufacturing a semiconductor
07/08/2004DE4312642B4 Verfahren und Vorrichtung zum Kontaktieren Method and apparatus for contacting
07/08/2004DE202004003434U1 Mobiles, manuelles, elektrostatisches Handhabungsgerät Mobiles, manual, electrostatic handling equipment
07/08/2004DE19962703B4 Verfahren und Vorrichtung zum Steuern des Beladens/Entladens von Halbleiterbauelementen Method and apparatus for controlling the loading / unloading of semiconductor devices
07/08/2004DE19916923B4 Vorrichtung zum berührungslosen senkrechten Transportieren von Bauteilen A device for the contactless vertical transporting of components
07/08/2004DE19712556B4 Verfahren und Vorrichtung zur Wärmebehandlung eines Halbleiterwafers Method and apparatus for heat treating a semiconductor wafer
07/08/2004DE19502827B4 Projektions-Belichtungsgerät A projection exposure apparatus
07/08/2004DE10361256A1 Silicon carbide semiconductor structure for e.g. metal oxide semiconductor field effect transistor, includes side surface intersecting main surface at specified acute angle
07/08/2004DE10359707A1 Waferstützplatte Wafer support plate
07/08/2004DE10358909A1 Plasma-CVD-Vorrichtung sowie Filmherstellverfahren und Verfahren zur Herstellung eines Halbleiterbauteils unter Verwendung derselben Plasma CVD apparatus and Filmherstellverfahren and method for producing a semiconductor device using the same
07/08/2004DE10358697A1 Halbleiteranordnung und Verfahren zur Herstellung derselben A semiconductor device and method of manufacturing the same
07/08/2004DE10355273A1 Magnetic random access memory device for storing data, has elongated reference magnetic resistors extending along face nonparallel to main magnetic resistors and including resistance between maximum and minimum resistance
07/08/2004DE10342359A1 MRAM mit zwei Schreibleitern MRAM with two write heads
07/08/2004DE10338739A1 Integrierter Halbleiterbaustein und Verfahren zur Taktsignalverteilung dafür Integrated semiconductor device and method for clock signal distribution for
07/08/2004DE10338047A1 Semiconducting memory device has memory cells in rows/columns, two word lines between adjacent bit line contacts in column direction; each bit line contact separates two adjacent cells in column direction
07/08/2004DE10316531A1 Self-adjusted dual polysilicon bipolar transistor has collector region, sub-collector region, base region, emitter region and carbon doped region on first side next to collector region
07/08/2004DE10313521A1 Arrangement for removing burrs from components in lead frames has image processing system with camera(s) for detecting component orientation/position, controlling laser beam along edge to be deburred
07/08/2004DE10302321A1 Formation of trench capacitor for dynamic random access memory, includes stage of selective modification enabling removal of material from only lower regions
07/08/2004DE10296911T5 Leistungs-MOSFET mit verbesserter Durchbruchspannung Power MOSFET with improved breakdown voltage
07/08/2004DE10260937A1 Strahlungssemittierender Halbleiterkörper und Verfahren zu dessen Herstellung Strahlungssemittierender semiconductor body and method of producing the
07/08/2004DE10258713A1 Determining characteristic layer parameters during a coating process in semiconductor manufacture, by separately guiding pyrometer radiation path and beam path of spectral-optical system
07/08/2004DE10258509A1 Production of a break-proof semiconductor wafer comprises preparing a plate-like object having a saw frame, forming trenches in the region of the frame, filling the trenches with a material, and thinning the object
07/08/2004DE10258420A1 Semiconductor memory production method for producing semiconductor memories with charge-trapping memory cells applies a memory layer sequence of dielectric material to a substrate
07/08/2004DE10258368A1 Wafer holder used in the production of chips in the semiconductor industry comprises a holding device structured so that the wafer is held in position by the device only on its outer edge
07/08/2004DE10258094A1 Wafer structure method for creating three-dimensional structures on wafers in the form of bumps spread on each wafer, with each bump linked electrically to a bond pad via a reroute layer
07/08/2004DE10258081A1 Production of a solder stop arrangement for forming three-dimensional structures on wafers comprises depositing a seed layer on a wafer having a coating made from an organic material which leaves open the tip of the structure
07/08/2004DE10257682A1 Halbleiterschaltungsanordnung Semiconductor circuitry
07/08/2004DE10257681A1 Verfahren zum Herstellen einer integrierten Schaltungsanordnung, die eine Metallnitridschicht enthält, und integrierte Schaltungsanordnung A method of fabricating an integrated circuit arrangement that contains a metal nitride layer, and integrated circuit arrangement
07/08/2004DE10253919A1 Verfahren zur Justage eines Substrates in einem Gerät zur Durchführung einer Belichtung A method for adjusting a substrate in an apparatus for performing an exposure
07/08/2004DE10222964B4 Verfahren zur Gehäusebildung bei elektronischen Bauteilen sowie so hermetisch verkapselte elektronische Bauteile A method for encasing for electronic components and so hermetically encapsulated electronic components
07/08/2004DE10147634B4 Verfahren zur Herstellung einer Halbleiterscheibe A process for producing a semiconductor wafer
07/07/2004EP1435665A2 MIM capacitors and methods for fabricating same
07/07/2004EP1435664A1 Semiconductor device
07/07/2004EP1435663A2 PMOS transistor and method for forming the same
07/07/2004EP1435661A2 Thin film transistor with protective cap over flexible substrate, electronic device using the same, and manufacturing method thereof
07/07/2004EP1435657A1 Non-volatile memory cell and manufacturing process
07/07/2004EP1435656A2 Method of manufacturing a dual damascene interconnect
07/07/2004EP1435655A2 Electrostatic chuck
07/07/2004EP1435654A2 Electrostatic chuck
07/07/2004EP1435653A2 Semiconductor device manufactured by a transferring method