| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/08/2004 | US20040133401 Method of displaying measurement result in inspection process and system thereof, and computer program |
| 07/08/2004 | US20040133361 Method for CVD process control for enhancing device performance |
| 07/08/2004 | US20040133294 Defect alarm system and method |
| 07/08/2004 | US20040132900 Heat resistance, chemical resistance, waterproofing; curing, cyclization polyamic acids |
| 07/08/2004 | US20040132888 Electronic device packaging and curable resin composition |
| 07/08/2004 | US20040132399 Production system |
| 07/08/2004 | US20040132386 Apparatus and method for feeding slurry |
| 07/08/2004 | US20040132384 Method for post-chemical mechanical polishing cleaning |
| 07/08/2004 | US20040132381 Integrated circuit interconnect fabrication systems and methods |
| 07/08/2004 | US20040132318 System and method for wet cleaning a semiconductor wafer |
| 07/08/2004 | US20040132317 Method for oxidation of silicon substrate |
| 07/08/2004 | US20040132316 Ultra-thin gate dielectrics |
| 07/08/2004 | US20040132315 Multistage deposition that incorporates nitrogen via an intermediate step |
| 07/08/2004 | US20040132314 Method of manufacturing an electronic device |
| 07/08/2004 | US20040132313 Method for production of a metallic or metal-containing layer |
| 07/08/2004 | US20040132312 Silicon precursors for deep trench silicon etch processes |
| 07/08/2004 | US20040132311 Method of etching high-K dielectric materials |
| 07/08/2004 | US20040132310 Method for manufacturing electronic component |
| 07/08/2004 | US20040132309 Wafer polishing method and wafer polishing apparatus in semiconductor fabrication equipment |
| 07/08/2004 | US20040132308 Corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces |
| 07/08/2004 | US20040132307 Methods to fabricate semiconductor devices |
| 07/08/2004 | US20040132306 Method using multi-component colloidal abrasives for CMP processing of semiconductor and optical materials |
| 07/08/2004 | US20040132305 Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing process, production process of semiconductor device and material for preparing an aqueous dispersion for chemical mechanical polishing |
| 07/08/2004 | US20040132304 In situ plasma wafer bonding method |
| 07/08/2004 | US20040132303 Membrane 3D IC fabrication |
| 07/08/2004 | US20040132302 a mixture of deionized water, sulfuric acid, hydrogen peroxide and hydrofluoric acid, used for removing photoresist residues during etching |
| 07/08/2004 | US20040132299 Method for depositing lead-free tin alloy |
| 07/08/2004 | US20040132298 Apparatus for fabricating a III-V nitride film |
| 07/08/2004 | US20040132296 Methods to form dual metal gates by incorporating metals and their conductive oxides |
| 07/08/2004 | US20040132295 Method and device to remove unwanted material from the edge region of a workpiece |
| 07/08/2004 | US20040132294 Manufacturing method of fine structure, optical element, integrated circuit, and electronic instrument |
| 07/08/2004 | US20040132293 Method for manufacturing semiconductor device and heat treatment method |
| 07/08/2004 | US20040132292 Method for manufacturing semiconductor integrated circuit structures |
| 07/08/2004 | US20040132291 Method of fabricating dual damascene interconnections of microelectronic device using hybrid low k-dielectric and carbon-free inorganic filler |
| 07/08/2004 | US20040132290 Method for the manufacture of micro structures |
| 07/08/2004 | US20040132288 Fabrication of semiconductor devices |
| 07/08/2004 | US20040132287 Dry etch process for copper |
| 07/08/2004 | US20040132286 Methods of forming refractory metal silicide components and methods of restricting silicon surface migration of a silicon structure |
| 07/08/2004 | US20040132285 Polymer film metalization |
| 07/08/2004 | US20040132284 Method and apparatus for forming a barrier metal layer in semiconductor devices |
| 07/08/2004 | US20040132283 Methods of forming metal wiring of semiconductor devices |
| 07/08/2004 | US20040132282 Copper transition layer for improving copper interconnection reliability |
| 07/08/2004 | US20040132281 Treatment of low-k dielectric materials for CMP |
| 07/08/2004 | US20040132280 Method of forming metal wiring in a semiconductor device |
| 07/08/2004 | US20040132279 Electronic package with filled blind vias |
| 07/08/2004 | US20040132278 Method for manufacturing semiconductor device |
| 07/08/2004 | US20040132277 Production method for semiconductor device |
| 07/08/2004 | US20040132276 Forming openings within integrated circuits |
| 07/08/2004 | US20040132275 Bulk synthesis of metal and metal based dielectric nanowires |
| 07/08/2004 | US20040132274 Method of forming thick metal silicide layer on gate electrode |
| 07/08/2004 | US20040132273 Formation method of gate electrode in semiconductor |
| 07/08/2004 | US20040132272 Methods of fabricating a semiconductor device having a metal gate pattern |
| 07/08/2004 | US20040132271 Method to produce dual gates (one metal and one poly or metal silicide) for CMOS devices using sputtered metal deposition, metallic ion implantation, or silicon implantation, and laser annealing |
| 07/08/2004 | US20040132270 Method of forming a novel gate electrode structure comprised of a silicon-germanium layer located between random grained polysilicon layers |
| 07/08/2004 | US20040132268 Method of forming cobalt silicide film and method of manufacturing semiconductor device having cobalt silicide film |
| 07/08/2004 | US20040132267 Patterned strained silicon for high performance circuits |
| 07/08/2004 | US20040132266 Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment |
| 07/08/2004 | US20040132265 Separating method |
| 07/08/2004 | US20040132264 Integrated high performance mos tunneling led in ulsi technology |
| 07/08/2004 | US20040132263 Method for forming shallow well of semiconductor device using low-energy ion implantation |
| 07/08/2004 | US20040132261 Method for forming gate oxide in semiconductor device |
| 07/08/2004 | US20040132260 Process for fabricating a short-gate-length MOS transistor and integrated circuit comprising such a transistor |
| 07/08/2004 | US20040132259 Method of manufacturing a semiconductor device |
| 07/08/2004 | US20040132258 MOSFET and method of fabricating the same |
| 07/08/2004 | US20040132257 Semiconductor device fabrication method |
| 07/08/2004 | US20040132256 MOS transistor having a recessed gate electrode and fabrication method thereof |
| 07/08/2004 | US20040132255 Semiconductor device and producing method of the same |
| 07/08/2004 | US20040132254 Deterministically doped field-effect devices and methods of making same |
| 07/08/2004 | US20040132253 Manufacture method of semiconductor device with gate insulating films of different thickness |
| 07/08/2004 | US20040132252 Method of forming a field effect transistor having a lateral depletion structure |
| 07/08/2004 | US20040132251 Non-volatile memory and method for manufacturing non-volatile memory |
| 07/08/2004 | US20040132250 Preventing dielectric thickening over a gate area of a transistor |
| 07/08/2004 | US20040132249 Semiconductor device and a method of manufacturing the same |
| 07/08/2004 | US20040132248 Flash memory cell and method for fabricating the same |
| 07/08/2004 | US20040132247 Semiconductor device and method of manufacturing the same |
| 07/08/2004 | US20040132246 Method of forming semiconductor device with capacitor |
| 07/08/2004 | US20040132245 Method of fabricating a dram cell |
| 07/08/2004 | US20040132244 Method of manufacturing a semiconductor device |
| 07/08/2004 | US20040132243 Method of forming cavity between multilayered wirings |
| 07/08/2004 | US20040132241 Insulated gate field effect transistor and method of fabricating the same |
| 07/08/2004 | US20040132240 Method of manufacturing CMOS semiconductor device |
| 07/08/2004 | US20040132239 Methods to form dual metal gates by incorporating metals and their conductive oxides |
| 07/08/2004 | US20040132238 Semiconductor device and manufacturing method thereof |
| 07/08/2004 | US20040132237 Method of manufacturing a semiconductor device |
| 07/08/2004 | US20040132236 Mos transistor |
| 07/08/2004 | US20040132234 Semiconductor device having silicon on insulator and fabricating method therefor |
| 07/08/2004 | US20040132233 Semiconductor device |
| 07/08/2004 | US20040132232 Vertical gain cell and array for a dynamic random access memory and method for forming the same |
| 07/08/2004 | US20040132231 Lithography device for semiconductor circuit pattern generator |
| 07/08/2004 | US20040132230 Ball grid array substrate and method for preparing the same |
| 07/08/2004 | US20040132226 Photoresponsive devices |
| 07/08/2004 | US20040132225 Method for reducing dimensions between patterns on a photoresist |
| 07/08/2004 | US20040132223 Method for isolating self-aligned contact pads |
| 07/08/2004 | US20040131980 Method for forming a pattern and substrate-processing apparatus |
| 07/08/2004 | US20040131976 Method of forming a thin film transistor liquid crystal display |
| 07/08/2004 | US20040131964 Thick film containing partially naphthoquinonediazidosulfonyl ester substituted novalak resin and methyl vinyl ether-monoalkyl maleate polymer; high sensitivity and resolution, perpendicular geometry and crack resistance during and after plating |
| 07/08/2004 | US20040131954 Non absorbing reticle and method of making same |
| 07/08/2004 | US20040131953 Photomask correction method using composite charged particle beam, and device used in the correction method |
| 07/08/2004 | US20040131952 Dry multilayer inorganic alloy thermal resist for lithographic processing and image creation |
| 07/08/2004 | US20040131951 Mask, manufacturing method for mask, and manufacturing method for semiconductor device |