| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/15/2004 | WO2003077313A3 Multilayered ceramic substrate for integrated power components and method for the production of said substrate |
| 07/15/2004 | WO2003075323A3 Device and method for anisotropically plasma etching a substrate |
| 07/15/2004 | WO2003073448A3 Control of semiconductor fabrication process using scanning electron microscopy and a focused ion beam device |
| 07/15/2004 | WO2003062739A3 Method and apparatus for compensation of time-varying optical properties of gas in interferometry |
| 07/15/2004 | WO2003060979A3 Organic compositions for low dielectric constant materials |
| 07/15/2004 | WO2003046953A3 Retaining device and method for supplying heat to or discharging heat from a substrate |
| 07/15/2004 | WO2003043810A3 Nanocrystal structures |
| 07/15/2004 | WO2003043038A3 Mems device having contact and standoff bumps and related methods |
| 07/15/2004 | WO2001086698A3 Method and system for detecting metal contamination on a semiconductor wafer |
| 07/15/2004 | US20040139419 Minimization of microelectronic interconnect thickness variations |
| 07/15/2004 | US20040139418 Automatic optical proximity correction (OPC) rule generation |
| 07/15/2004 | US20040139414 Integrated circuit pattern designing method, exposure mask manufacturing method, exposure mask, and integrated circuit device manufacturing method |
| 07/15/2004 | US20040139412 Semiconductor device, method of generating pattern for semiconductor device, method of manufacturing semiconductor device and device of generating pattern used for semiconductor device |
| 07/15/2004 | US20040139409 Automatic circuit design apparatus and computer-implemented automatic circuit design method |
| 07/15/2004 | US20040139407 Semiconductor device layout inspection method |
| 07/15/2004 | US20040139405 Optimizing designing apparatus of integrated circuit, optimizing designing method of integrated circuit, and storing medium in which program for carrying out optimizing designing method of integrated circuit is stored |
| 07/15/2004 | US20040138856 Method for analyzing final test parameters |
| 07/15/2004 | US20040138842 Method for determining rotational error portion of total misalignment error in a stepper |
| 07/15/2004 | US20040138841 Method and apparatus for detecting an unused state in a semiconductor circuit |
| 07/15/2004 | US20040138766 Ultra-precision positioning system |
| 07/15/2004 | US20040138489 Composition and method for low temperature deposition of silicon-containing films |
| 07/15/2004 | US20040137832 Polishing head and chemical mechanical polishing apparatus |
| 07/15/2004 | US20040137829 Polishing apparatus and related polishing methods |
| 07/15/2004 | US20040137823 Polishing apparatus |
| 07/15/2004 | US20040137762 Annealing process and device of semiconductor wafer |
| 07/15/2004 | US20040137761 Method for fabricating semiconductor device |
| 07/15/2004 | US20040137760 Thin film processing method and system |
| 07/15/2004 | US20040137759 Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
| 07/15/2004 | US20040137758 Method for curing low dielectric constant film using direct current bias |
| 07/15/2004 | US20040137757 Method and apparatus to improve cracking thresholds and mechanical properties of low-k dielectric material |
| 07/15/2004 | US20040137756 Method of improving stability in low k barrier layers |
| 07/15/2004 | US20040137755 System and method for hydrogen-rich selective oxidation |
| 07/15/2004 | US20040137754 Method and apparatus for the production of process gases |
| 07/15/2004 | US20040137753 Method for low temperature liquid-phase deposition and method for cleaning liquid-deposition apparatus |
| 07/15/2004 | US20040137752 Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus |
| 07/15/2004 | US20040137751 Method and apparatus for control of layer thicknesses |
| 07/15/2004 | US20040137750 Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma |
| 07/15/2004 | US20040137749 Method for removing conductive residue |
| 07/15/2004 | US20040137748 Selective etching of low-k dielectrics |
| 07/15/2004 | US20040137747 Plasma etching method |
| 07/15/2004 | US20040137746 Semiconductor device manufacturing system for etching a semiconductor by plasma discharge |
| 07/15/2004 | US20040137745 Method and apparatus for removing backside edge polymer |
| 07/15/2004 | US20040137743 Semiconductor device including bit line formed using damascene technique and method of fabricating the same |
| 07/15/2004 | US20040137742 Shallow trench isolation for strained silicon processes |
| 07/15/2004 | US20040137741 Methods for reducing contamination of semiconductor substrates |
| 07/15/2004 | US20040137740 Method to reduce dishing, erosion and low-k dielectric peeling for copper in low-k dielectric CMP process |
| 07/15/2004 | US20040137737 Method of manufacturing a semiconductor device |
| 07/15/2004 | US20040137736 Based on a transparent epoxy casting resin with an admixed luminous pigment being a mixed oxide of aluminum or gallium, a group IIIB metal and a rare earth metal; electroluminescent devices emitting ultraviolet, blue or green light |
| 07/15/2004 | US20040137735 Method for fabricating a SiGe film, substrate for epitaxial growth and multilayered structure |
| 07/15/2004 | US20040137734 Compositions and processes for nanoimprinting |
| 07/15/2004 | US20040137733 GCIB processing of integrated circuit interconnect structures |
| 07/15/2004 | US20040137732 Process for producing an epitaxial layer of gallium nitride |
| 07/15/2004 | US20040137731 Selectable area laser assisted processing of substrates |
| 07/15/2004 | US20040137730 Method of making packets of nanostructures |
| 07/15/2004 | US20040137728 Air gap formation |
| 07/15/2004 | US20040137726 Underlayer film-forming material for copper, method for a forming underlayer film for copper, an underlayer film for copper, and a semiconductor device |
| 07/15/2004 | US20040137725 Copper interconnects |
| 07/15/2004 | US20040137724 Semiconductor die including conductive columns |
| 07/15/2004 | US20040137723 Manufacturing method of semiconductor device |
| 07/15/2004 | US20040137722 Structure and method for eliminating metal contact to P-well or N-well shorts or high leakage paths using polysilicon liner |
| 07/15/2004 | US20040137721 Replacement of silicon nitride copper barrier with a self-aligning metal barrier |
| 07/15/2004 | US20040137720 Semiconductor device and manufacturing method for the same |
| 07/15/2004 | US20040137719 Method for forming metal line of semiconductor device |
| 07/15/2004 | US20040137718 Anti-reflective coatings and methods for forming and using same |
| 07/15/2004 | US20040137717 Methods of preventing oxidation of barrier metal of semiconductor devices |
| 07/15/2004 | US20040137716 Methods of forming metal lines in semiconductor devices |
| 07/15/2004 | US20040137715 Methods of manufacturing semiconductor devices |
| 07/15/2004 | US20040137714 Method of forming a conductive barrier layer having improve adhesion and resistivity characteristics |
| 07/15/2004 | US20040137713 Semiconductor structure having an improved pre-metal dielectric stack and method for forming the same |
| 07/15/2004 | US20040137712 Interlayer connections for layered electronic devices |
| 07/15/2004 | US20040137711 Forming silicon nitride as hard mask for wiring by dual damascene process; multilayer; etching patterns |
| 07/15/2004 | US20040137710 Method for producing a structure using nanoparticles |
| 07/15/2004 | US20040137709 Metal barrier cap fabrication by polymer lift-off |
| 07/15/2004 | US20040137708 Method for manufacturing semiconductor device |
| 07/15/2004 | US20040137707 Flat-top bumping structure and preparation method |
| 07/15/2004 | US20040137706 Method of manufacturing semiconductor device |
| 07/15/2004 | US20040137705 Method of manufacturing semiconductor device |
| 07/15/2004 | US20040137704 Method of manufacturing memory with nano dots |
| 07/15/2004 | US20040137703 MOSFET threshold voltage tuning with metal gate stack control |
| 07/15/2004 | US20040137702 Semiconductor device obtained by dividing semiconductor wafer by use of laser dicing technique and method of manufacturing the same |
| 07/15/2004 | US20040137701 Semiconductor device and manufacturing method thereof |
| 07/15/2004 | US20040137700 Method for dividing semiconductor wafer |
| 07/15/2004 | US20040137699 Semiconductor device manufacturing apparatus and semiconductor device manufacturing method for forming semiconductor chips by dividing semiconductor wafer |
| 07/15/2004 | US20040137698 Fabrication system and method for monocrystaline semiconductor on a substrate |
| 07/15/2004 | US20040137697 Method and apparatus for separating composite substrate |
| 07/15/2004 | US20040137696 Methods of forming semiconductor devices having field oxides in trenches and devices formed thereby |
| 07/15/2004 | US20040137695 Substrate-embedded capacitor, production method thereof, and circuit board |
| 07/15/2004 | US20040137694 Integrated circuit capacitor structure |
| 07/15/2004 | US20040137693 Method for forming an MIM capacitor |
| 07/15/2004 | US20040137692 Methods for forming capacitors and contact holes of semiconductor devices simultaneously |
| 07/15/2004 | US20040137691 Method of manufacturing capacitor in semiconductor devices |
| 07/15/2004 | US20040137689 Low-GIDL MOSFET structure and method for fabrication |
| 07/15/2004 | US20040137688 Semiconductor device with tapered gate and process for fabricating the device |
| 07/15/2004 | US20040137687 Semiconductor device having improved doping profiles and a method of improving the doping profiles of a semiconductor device |
| 07/15/2004 | US20040137686 Method of forming an embedded memory including forming three silicon or polysilicon layers |
| 07/15/2004 | US20040137685 Gate material for semiconductor device fabrication |
| 07/15/2004 | US20040137684 Semiconductor device processing |
| 07/15/2004 | US20040137683 [method of fabricating multi-bit flash memory] |
| 07/15/2004 | US20040137682 Methods for fabricating a semiconductor device |
| 07/15/2004 | US20040137681 Magnetic memory device and its production method |