Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2004
07/27/2004US6767834 Forming contact hole in interlayer using photoresist pattern as etching mask, wherein surface of underlayer is exposed at bottom of hole, ashing photoresist, cleaning semiconductor substrate, depositing filler
07/27/2004US6767833 Method for damascene reworking
07/27/2004US6767832 In situ liner barrier
07/27/2004US6767831 Method for forming cobalt salicides
07/27/2004US6767830 Br2SbCH3 a solid source ion implant and CVD precursor
07/27/2004US6767829 Plasma deposition method and system
07/27/2004US6767828 Method for forming patterns for semiconductor devices
07/27/2004US6767827 Method for forming dual inlaid structures for IC interconnections
07/27/2004US6767826 Method of manufacturing semiconductor device
07/27/2004US6767825 Etching process for forming damascene structure of the semiconductor
07/27/2004US6767824 Method of fabricating a gate structure of a field effect transistor using an alpha-carbon mask
07/27/2004US6767823 Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers
07/27/2004US6767822 Method of forming metallic film and method of producing semiconductor system
07/27/2004US6767821 Method for fabricating an interconnect line
07/27/2004US6767820 Chip scale surface mounted device and process of manufacture
07/27/2004US6767819 Apparatus with compliant electrical terminals, and methods for forming same
07/27/2004US6767818 Method for forming electrically conductive bumps and devices formed
07/27/2004US6767817 Asymmetric plating
07/27/2004US6767815 Stereolithographically fabricated conductive elements, semiconductor device components and assemblies including such conductive elements, and methods
07/27/2004US6767814 Semiconductor device having silicide thin film and method of forming the same
07/27/2004US6767813 Integrated circuit devices having active regions with expanded effective widths and methods of manufacturing same
07/27/2004US6767812 Method of forming CVD titanium film
07/27/2004US6767810 Method to increase substrate potential in MOS transistors used in ESD protection circuits
07/27/2004US6767809 Method of forming ultra shallow junctions
07/27/2004US6767808 Method for fabricating semiconductor device
07/27/2004US6767806 Method of forming a patterned substantially crystalline ta2o5 comprising material, and method of forming a capacitor having a capacitor dielectric region comprising substantially crystalline ta2o5 comprising material
07/27/2004US6767804 2N mask design and method of sequential lateral solidification
07/27/2004US6767803 Method for peeling protective sheet
07/27/2004US6767802 Methods of making relaxed silicon-germanium on insulator via layer transfer
07/27/2004US6767801 Simox substrate and method for production thereof
07/27/2004US6767800 Process for integrating alignment mark and trench device
07/27/2004US6767799 Laser beam irradiation method
07/27/2004US6767798 Comprises silicon nitride/dioxide layers; high speed, bipolar transistors
07/27/2004US6767797 Method of fabricating complementary self-aligned bipolar transistors
07/27/2004US6767796 Method of manufacturing semiconductor device and the semiconductor device
07/27/2004US6767795 Highly reliable amorphous high-k gate dielectric ZrOXNY
07/27/2004US6767794 Method of making ultra thin oxide formation using selective etchback technique integrated with thin nitride layer for high performance MOSFET
07/27/2004US6767793 Strained fin FETs structure and method
07/27/2004US6767792 Fabrication method for forming flash memory device provided with adjustable sharp end structure of the L-shaped floating gate
07/27/2004US6767791 Structure and method for suppressing oxide encroachment in a floating gate memory cell
07/27/2004US6767790 Methods of writing/erasing of nonvolatile semiconductor storage device
07/27/2004US6767789 Method for interconnection between transfer devices and storage capacitors in memory cells and device formed thereby
07/27/2004US6767788 Semiconductor device having a metal insulator metal capacitor
07/27/2004US6767787 Methods of forming integrated circuits using masks to provide ion implantation shielding to portions of a substrate adjacent to an isolation region therein
07/27/2004US6767786 Method for forming bottle trenches by liquid phase oxide deposition
07/27/2004US6767785 Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry
07/27/2004US6767783 Self-aligned transistor and diode topologies in silicon carbide through the use of selective epitaxy or selective implantation
07/27/2004US6767782 Suppressing electric charges generated on substrate and which flow to ground potential through substrate prevents damages to substrate due to charge-up
07/27/2004US6767781 Structure and method of forming bitline contacts for a vertical DRAM array using a line bitline contact mask
07/27/2004US6767780 Method for fabricating CMOS transistor
07/27/2004US6767779 Asymmetrical MOSFET layout for high currents and high speed operation
07/27/2004US6767778 Low dose super deep source/drain implant
07/27/2004US6767777 Method for manufacturing and structure for transistors with reduced gate to contact spacing including etching to thin the spacers
07/27/2004US6767776 Semiconductor device, and method for manufacturing the same
07/27/2004US6767775 Method of manufacturing thin-film transistor
07/27/2004US6767773 Method of Production of a thin film type semiconductor device having a heat-retaining layer
07/27/2004US6767772 Active matrix substrate, electrooptical device, and method of producing active matrix substrate
07/27/2004US6767771 Formation process of quantum dots or wires
07/27/2004US6767770 Method of forming self-aligned thin capacitively-coupled thyristor structure
07/27/2004US6767769 Metal-to-metal antifuse employing carbon-containing antifuse material
07/27/2004US6767767 Method of manufacturing a semiconductor device in which a block molding package utilizes air vents in a substrate
07/27/2004US6767765 Methods and apparatus for disposing a thermal interface material between a heat source and a heat dissipation device
07/27/2004US6767763 Component mounting method and method of producing electro-optical device
07/27/2004US6767761 Method of manufacturing a flip-chip semiconductor device with a stress-absorbing layer made of thermosetting resin
07/27/2004US6767760 Process of manufacturing a thin-film transistor
07/27/2004US6767759 Multi-trench region for accumulation of photo-generated charge in a CMOS imager
07/27/2004US6767755 Method of producing electrooptical device and method of producing driving substrate for driving electrooptical device
07/27/2004US6767754 Thin film transistor matrix device and method for fabricating the same
07/27/2004US6767753 Image sensor of a quad flat package
07/27/2004US6767752 Temperature control method and semiconductor device manufacturing method
07/27/2004US6767751 Integrated driver process flow
07/27/2004US6767750 Detection of AIOx ears for process control in FeRAM processing
07/27/2004US6767749 Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
07/27/2004US6767698 High speed stripping for damaged photoresist
07/27/2004US6767694 Process for forming pattern and method for producing liquid crystal apparatus employing process for forming pattern
07/27/2004US6767693 Materials and methods for sub-lithographic patterning of contact, via, and trench structures in integrated circuit devices
07/27/2004US6767691 Scattering-reticle assemblies for electron-beam microlithography including a scattering-stencil reticle portion and a scattering-membrane reticle portion
07/27/2004US6767689 Antireflective coating compositions
07/27/2004US6767687 Polymer for chemically amplified resist and a resist composition using the same
07/27/2004US6767686 Chemically amplifying type positive resist composition
07/27/2004US6767675 Rendering, developing, and etching for superposition of masking patterns
07/27/2004US6767672 Method for forming a phase-shifting mask for semiconductor device manufacture
07/27/2004US6767662 Electrochemical device and process of making
07/27/2004US6767655 Magneto-resistive element
07/27/2004US6767641 Method for sealing fine groove with siliceous material and substrate having siliceous coating formed thereon
07/27/2004US6767582 Method of modifying source chemicals in an ald process
07/27/2004US6767484 Transfer molding method for manufacturing semiconductor devices
07/27/2004US6767476 Polishing composition for metal CMP
07/27/2004US6767475 Chemical-organic planarization process for atomically smooth interfaces
07/27/2004US6767473 Method for fine pattern formation
07/27/2004US6767437 Electroplating apparatus and electroplating method
07/27/2004US6767429 Vacuum processing apparatus
07/27/2004US6767428 Method and apparatus for chemical mechanical planarization
07/27/2004US6767427 Apparatus and method for conditioning polishing pad in a chemical mechanical planarization process
07/27/2004US6767426 Method of cutting a protective tape and protective tape applying apparatus using the same method
07/27/2004US6767409 Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring
07/27/2004US6767407 Auto-centering device for mechanical clamp
07/27/2004US6767403 Spin bowl having fluid seal for preventing air from flowing into the bowl during spinning
07/27/2004US6767402 Method for vaporizing and supplying
07/27/2004US6767400 Crystal growth method