| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/27/2004 | US6767834 Forming contact hole in interlayer using photoresist pattern as etching mask, wherein surface of underlayer is exposed at bottom of hole, ashing photoresist, cleaning semiconductor substrate, depositing filler |
| 07/27/2004 | US6767833 Method for damascene reworking |
| 07/27/2004 | US6767832 In situ liner barrier |
| 07/27/2004 | US6767831 Method for forming cobalt salicides |
| 07/27/2004 | US6767830 Br2SbCH3 a solid source ion implant and CVD precursor |
| 07/27/2004 | US6767829 Plasma deposition method and system |
| 07/27/2004 | US6767828 Method for forming patterns for semiconductor devices |
| 07/27/2004 | US6767827 Method for forming dual inlaid structures for IC interconnections |
| 07/27/2004 | US6767826 Method of manufacturing semiconductor device |
| 07/27/2004 | US6767825 Etching process for forming damascene structure of the semiconductor |
| 07/27/2004 | US6767824 Method of fabricating a gate structure of a field effect transistor using an alpha-carbon mask |
| 07/27/2004 | US6767823 Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers |
| 07/27/2004 | US6767822 Method of forming metallic film and method of producing semiconductor system |
| 07/27/2004 | US6767821 Method for fabricating an interconnect line |
| 07/27/2004 | US6767820 Chip scale surface mounted device and process of manufacture |
| 07/27/2004 | US6767819 Apparatus with compliant electrical terminals, and methods for forming same |
| 07/27/2004 | US6767818 Method for forming electrically conductive bumps and devices formed |
| 07/27/2004 | US6767817 Asymmetric plating |
| 07/27/2004 | US6767815 Stereolithographically fabricated conductive elements, semiconductor device components and assemblies including such conductive elements, and methods |
| 07/27/2004 | US6767814 Semiconductor device having silicide thin film and method of forming the same |
| 07/27/2004 | US6767813 Integrated circuit devices having active regions with expanded effective widths and methods of manufacturing same |
| 07/27/2004 | US6767812 Method of forming CVD titanium film |
| 07/27/2004 | US6767810 Method to increase substrate potential in MOS transistors used in ESD protection circuits |
| 07/27/2004 | US6767809 Method of forming ultra shallow junctions |
| 07/27/2004 | US6767808 Method for fabricating semiconductor device |
| 07/27/2004 | US6767806 Method of forming a patterned substantially crystalline ta2o5 comprising material, and method of forming a capacitor having a capacitor dielectric region comprising substantially crystalline ta2o5 comprising material |
| 07/27/2004 | US6767804 2N mask design and method of sequential lateral solidification |
| 07/27/2004 | US6767803 Method for peeling protective sheet |
| 07/27/2004 | US6767802 Methods of making relaxed silicon-germanium on insulator via layer transfer |
| 07/27/2004 | US6767801 Simox substrate and method for production thereof |
| 07/27/2004 | US6767800 Process for integrating alignment mark and trench device |
| 07/27/2004 | US6767799 Laser beam irradiation method |
| 07/27/2004 | US6767798 Comprises silicon nitride/dioxide layers; high speed, bipolar transistors |
| 07/27/2004 | US6767797 Method of fabricating complementary self-aligned bipolar transistors |
| 07/27/2004 | US6767796 Method of manufacturing semiconductor device and the semiconductor device |
| 07/27/2004 | US6767795 Highly reliable amorphous high-k gate dielectric ZrOXNY |
| 07/27/2004 | US6767794 Method of making ultra thin oxide formation using selective etchback technique integrated with thin nitride layer for high performance MOSFET |
| 07/27/2004 | US6767793 Strained fin FETs structure and method |
| 07/27/2004 | US6767792 Fabrication method for forming flash memory device provided with adjustable sharp end structure of the L-shaped floating gate |
| 07/27/2004 | US6767791 Structure and method for suppressing oxide encroachment in a floating gate memory cell |
| 07/27/2004 | US6767790 Methods of writing/erasing of nonvolatile semiconductor storage device |
| 07/27/2004 | US6767789 Method for interconnection between transfer devices and storage capacitors in memory cells and device formed thereby |
| 07/27/2004 | US6767788 Semiconductor device having a metal insulator metal capacitor |
| 07/27/2004 | US6767787 Methods of forming integrated circuits using masks to provide ion implantation shielding to portions of a substrate adjacent to an isolation region therein |
| 07/27/2004 | US6767786 Method for forming bottle trenches by liquid phase oxide deposition |
| 07/27/2004 | US6767785 Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry |
| 07/27/2004 | US6767783 Self-aligned transistor and diode topologies in silicon carbide through the use of selective epitaxy or selective implantation |
| 07/27/2004 | US6767782 Suppressing electric charges generated on substrate and which flow to ground potential through substrate prevents damages to substrate due to charge-up |
| 07/27/2004 | US6767781 Structure and method of forming bitline contacts for a vertical DRAM array using a line bitline contact mask |
| 07/27/2004 | US6767780 Method for fabricating CMOS transistor |
| 07/27/2004 | US6767779 Asymmetrical MOSFET layout for high currents and high speed operation |
| 07/27/2004 | US6767778 Low dose super deep source/drain implant |
| 07/27/2004 | US6767777 Method for manufacturing and structure for transistors with reduced gate to contact spacing including etching to thin the spacers |
| 07/27/2004 | US6767776 Semiconductor device, and method for manufacturing the same |
| 07/27/2004 | US6767775 Method of manufacturing thin-film transistor |
| 07/27/2004 | US6767773 Method of Production of a thin film type semiconductor device having a heat-retaining layer |
| 07/27/2004 | US6767772 Active matrix substrate, electrooptical device, and method of producing active matrix substrate |
| 07/27/2004 | US6767771 Formation process of quantum dots or wires |
| 07/27/2004 | US6767770 Method of forming self-aligned thin capacitively-coupled thyristor structure |
| 07/27/2004 | US6767769 Metal-to-metal antifuse employing carbon-containing antifuse material |
| 07/27/2004 | US6767767 Method of manufacturing a semiconductor device in which a block molding package utilizes air vents in a substrate |
| 07/27/2004 | US6767765 Methods and apparatus for disposing a thermal interface material between a heat source and a heat dissipation device |
| 07/27/2004 | US6767763 Component mounting method and method of producing electro-optical device |
| 07/27/2004 | US6767761 Method of manufacturing a flip-chip semiconductor device with a stress-absorbing layer made of thermosetting resin |
| 07/27/2004 | US6767760 Process of manufacturing a thin-film transistor |
| 07/27/2004 | US6767759 Multi-trench region for accumulation of photo-generated charge in a CMOS imager |
| 07/27/2004 | US6767755 Method of producing electrooptical device and method of producing driving substrate for driving electrooptical device |
| 07/27/2004 | US6767754 Thin film transistor matrix device and method for fabricating the same |
| 07/27/2004 | US6767753 Image sensor of a quad flat package |
| 07/27/2004 | US6767752 Temperature control method and semiconductor device manufacturing method |
| 07/27/2004 | US6767751 Integrated driver process flow |
| 07/27/2004 | US6767750 Detection of AIOx ears for process control in FeRAM processing |
| 07/27/2004 | US6767749 Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting |
| 07/27/2004 | US6767698 High speed stripping for damaged photoresist |
| 07/27/2004 | US6767694 Process for forming pattern and method for producing liquid crystal apparatus employing process for forming pattern |
| 07/27/2004 | US6767693 Materials and methods for sub-lithographic patterning of contact, via, and trench structures in integrated circuit devices |
| 07/27/2004 | US6767691 Scattering-reticle assemblies for electron-beam microlithography including a scattering-stencil reticle portion and a scattering-membrane reticle portion |
| 07/27/2004 | US6767689 Antireflective coating compositions |
| 07/27/2004 | US6767687 Polymer for chemically amplified resist and a resist composition using the same |
| 07/27/2004 | US6767686 Chemically amplifying type positive resist composition |
| 07/27/2004 | US6767675 Rendering, developing, and etching for superposition of masking patterns |
| 07/27/2004 | US6767672 Method for forming a phase-shifting mask for semiconductor device manufacture |
| 07/27/2004 | US6767662 Electrochemical device and process of making |
| 07/27/2004 | US6767655 Magneto-resistive element |
| 07/27/2004 | US6767641 Method for sealing fine groove with siliceous material and substrate having siliceous coating formed thereon |
| 07/27/2004 | US6767582 Method of modifying source chemicals in an ald process |
| 07/27/2004 | US6767484 Transfer molding method for manufacturing semiconductor devices |
| 07/27/2004 | US6767476 Polishing composition for metal CMP |
| 07/27/2004 | US6767475 Chemical-organic planarization process for atomically smooth interfaces |
| 07/27/2004 | US6767473 Method for fine pattern formation |
| 07/27/2004 | US6767437 Electroplating apparatus and electroplating method |
| 07/27/2004 | US6767429 Vacuum processing apparatus |
| 07/27/2004 | US6767428 Method and apparatus for chemical mechanical planarization |
| 07/27/2004 | US6767427 Apparatus and method for conditioning polishing pad in a chemical mechanical planarization process |
| 07/27/2004 | US6767426 Method of cutting a protective tape and protective tape applying apparatus using the same method |
| 07/27/2004 | US6767409 Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring |
| 07/27/2004 | US6767407 Auto-centering device for mechanical clamp |
| 07/27/2004 | US6767403 Spin bowl having fluid seal for preventing air from flowing into the bowl during spinning |
| 07/27/2004 | US6767402 Method for vaporizing and supplying |
| 07/27/2004 | US6767400 Crystal growth method |