| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/22/2004 | US20040140520 Provide a higher operating speed |
| 07/22/2004 | US20040140518 Semiconductor devices and methods for fabricating the same |
| 07/22/2004 | US20040140517 LDMOS transistor with high voltage source and drain terminals hideaki tsuchiko |
| 07/22/2004 | US20040140515 Method for manufacturing electro-optical substrate, method for manufacturing electro-optical apparatus, and electro-optical apparatus |
| 07/22/2004 | US20040140513 Atomic layer deposition of CMOS gates with variable work functions |
| 07/22/2004 | US20040140512 Integrated device with Schottky diode and MOS transistor and related manufacturing process |
| 07/22/2004 | US20040140510 Electrically erasable read only memory; efficiency |
| 07/22/2004 | US20040140509 Non-volatile memory and fabricating method thereof |
| 07/22/2004 | US20040140508 Forming a first insulating film on a semiconductor substrate; removing part of the first insulating film; forming a second insulating film forming an undoped semiconductor film on first and second insulating films; implanting an impurity; removing |
| 07/22/2004 | US20040140507 Method of building a CMOS structure on thin SOI with source/drain electrodes formed by in situ doped selective amorphous silicon |
| 07/22/2004 | US20040140506 Enhanced T-gate structure for modulation doped field effect transistors |
| 07/22/2004 | US20040140505 Electrostatic discharge device protection structure |
| 07/22/2004 | US20040140504 Low power flash memory cell and method |
| 07/22/2004 | US20040140503 Semiconductor device and method for fabricating the same |
| 07/22/2004 | US20040140502 Semiconductor integrated circuit device and a method of manufacturing the same |
| 07/22/2004 | US20040140501 Integrated circuit devices having fuse structures including buffer layers and methods of fabricating the same |
| 07/22/2004 | US20040140500 Stack gate with tip vertical memory and method for fabricating the same |
| 07/22/2004 | US20040140499 Method of manufacturing a semiconductor device |
| 07/22/2004 | US20040140498 Dual-bit nitride read only memory cell |
| 07/22/2004 | US20040140497 Forming deep N well on a P-type substrate; forming single polysilicon EEPROM (Electrically Erasable Programmable Read Only Memory), cell, wherein the EEPROM cell is isolated from the P-type substrate by the N well |
| 07/22/2004 | US20040140496 Bitline structure for DRAM and method of forming the same |
| 07/22/2004 | US20040140495 Semiconductor integrated circuit device and the process of manufacturing the same having poly-silicon plug, wiring trenches and bit lines formed in the wiring trenches having a width finer than a predetermined size |
| 07/22/2004 | US20040140494 Contact structure |
| 07/22/2004 | US20040140493 Ferroelectric memory and method for fabricating the same |
| 07/22/2004 | US20040140492 Thin film magnetic memory device |
| 07/22/2004 | US20040140491 Deep implanted region for a cmos imager |
| 07/22/2004 | US20040140490 Sputtering aluminum under high pressure; reduced power source |
| 07/22/2004 | US20040140487 Semiconductor device |
| 07/22/2004 | US20040140486 Dynamic random access memory |
| 07/22/2004 | US20040140484 Use of irregularly shaped conductive filler features to improve planarization of the conductive layer while reducing parasitic capacitance introduced by the filler features |
| 07/22/2004 | US20040140483 Semiconductor integrated circuit and fabrication method for same |
| 07/22/2004 | US20040140482 Semiconductor device and process for producing semiconductor device |
| 07/22/2004 | US20040140481 Optimized blocking impurity placement for SiGe HBTs |
| 07/22/2004 | US20040140480 Semiconductor device and power amplifier using the same |
| 07/22/2004 | US20040140479 Compliant substrate for a heteroepitaxial structure and method for making same |
| 07/22/2004 | US20040140472 Light emitting device |
| 07/22/2004 | US20040140471 Semiconductor device and manufacturing method thereof |
| 07/22/2004 | US20040140470 Semiconductor device and method of fabricating the same |
| 07/22/2004 | US20040140469 Panel of a flat display and method of fabricating the panel |
| 07/22/2004 | US20040140468 Buffer layer for promoting electron mobility and thin film transistor having the same |
| 07/22/2004 | US20040140467 Semiconductor device having pad |
| 07/22/2004 | US20040140466 Semiconductor device that can measure timing difference between input and output signals |
| 07/22/2004 | US20040140442 Method and apparatus for accessing microelectronic workpiece containers |
| 07/22/2004 | US20040140437 Electron beam array write head system and method |
| 07/22/2004 | US20040140436 Transfer method and apparatus, exposure method and apparatus, method of manufacturing exposure apparatus, and device manufacturing method |
| 07/22/2004 | US20040140418 System and method for lithography process monitoring and control |
| 07/22/2004 | US20040140365 Substrate treating apparatus |
| 07/22/2004 | US20040140298 Iced film substrate cleaning |
| 07/22/2004 | US20040140297 Laser irradiation method, method for manufacturing semiconductor device, and laser irradiation system |
| 07/22/2004 | US20040140291 Forming an acetic salt in a solution by reacting in acid with hydroxide;applying acetic salt to integrated circuit to etch the copper layer;supplying acid to solution to completely consume the hydroxide; etching the copper layer with acetic salt |
| 07/22/2004 | US20040140289 Method for selectively etching organosilicate glass with respect to a doped silicon carbide |
| 07/22/2004 | US20040140288 Wet etch of titanium-tungsten film |
| 07/22/2004 | US20040140287 Edge and bevel cleaning process and system |
| 07/22/2004 | US20040140217 Noble metal contacts for plating applications |
| 07/22/2004 | US20040140206 Method for fabricating silicon targets |
| 07/22/2004 | US20040140205 Rotational and reciprocal radial movement of a sputtering magnetron |
| 07/22/2004 | US20040140204 Magnetron cathode and magnetron sputtering apparatus comprising the same |
| 07/22/2004 | US20040140199 Plating apparatus, plating cup and cathode ring |
| 07/22/2004 | US20040140197 Sputtering target, Al interconnection film, and electronic component |
| 07/22/2004 | US20040140196 Shaping features in sputter deposition |
| 07/22/2004 | US20040140176 Convey device for a plate-like workpiece |
| 07/22/2004 | US20040140122 Product comprising a substrate and a chip attached to the substrate |
| 07/22/2004 | US20040140053 Method and apparatus for micro-jet enabled, low-energy ion generation and transport in plasma processing |
| 07/22/2004 | US20040140052 Method for aligning key in semiconductor device |
| 07/22/2004 | US20040140040 Ceramic substrate and process for producing the same |
| 07/22/2004 | US20040140039 Adhesive tape applying method and apparatus |
| 07/22/2004 | US20040140036 Plasma processing method and apparatus |
| 07/22/2004 | US20040139991 Using nitrogen laden isopropyl alcohol as dynamic barrier that wipes down surface during rinsing and drying; entraining water and contaminants |
| 07/22/2004 | US20040139986 Imparting turbulence; increasing circulation of supercritical fluid; pressure chamber with rotable impeller and drive shaft |
| 07/22/2004 | US20040139985 Determining endpoint; optimizing and controlling process; optical thickness measurement |
| 07/22/2004 | US20040139982 Sonic-energy cleaner system with gasified fluid |
| 07/22/2004 | US20040139917 Plasma processing apparatus |
| 07/22/2004 | US20040139916 Applying the particles to be separated on a substrate supported membrane, such that the particles are mobile across the surface of the substrate supported membrane; providing an electrical field; temporarily modifying the electrical field and/or adding a substrate supported membrane |
| 07/22/2004 | US20040139915 Plasma CVD apparatus and dry cleaning method of the same |
| 07/22/2004 | US20040139820 a powder batch and method of making copper metal particles that are substantially spherical, have a weight average particle size of less than about 5 mu m and a narrow particle size distribution and high crystallinity |
| 07/22/2004 | US20040139626 Substrate drying method and apparatus |
| 07/22/2004 | US20040139603 Wired board with bump electrode and method of fabricating the same |
| 07/22/2004 | US20040139601 Method for cutting a wafer |
| 07/22/2004 | US20040139589 Method of producing circuit carriers with integrated passive components |
| 07/22/2004 | US20040139574 Substrate cleaning device and substrate processing facility |
| 07/22/2004 | DE202004007917U1 A device with a receiver for reception of a plate-like workpiece (9), especially a silicon wafer, useful in semiconductor technology e.g. for dealing with silicon wafers |
| 07/22/2004 | DE19830161B4 Verfahren zur Herstellung einer Induktionsspule einer Halbleitereinrichtung A process for producing an induction coil of a semiconductor device |
| 07/22/2004 | DE19758704B4 Self-aligned process for semiconductor memory production |
| 07/22/2004 | DE19757269B4 Verfahren zur Herstellung eines Silicium-Auf-Isolator-Halbleitersubstrats A method for producing a silicon-on-insulator semiconductor substrate |
| 07/22/2004 | DE19727396B4 Polysilizium-Dünnschichttransistor mit Silizid und Herstellungsverfahren dafür Polysilicon thin film transistor with silicide and production method thereof |
| 07/22/2004 | DE10361649A1 Verfahren zum Herstellen einer Flüssigkristallanzeigevorrichtung A method of manufacturing a liquid crystal display device |
| 07/22/2004 | DE10356766A1 Laserbearbeitungsverfahren Laser processing method |
| 07/22/2004 | DE10355666A1 Thin film transistor array substrate for LCD panel, comprises gate insulation pattern and protection film pattern formed in region other than region where transparent electrode pattern is formed |
| 07/22/2004 | DE10354866A1 Fabrication of liquid crystal display device used to display picture, comprises forming passivation layer on substrate including pixel electrode, forming common electrode, and injecting liquid crystal material between substrates |
| 07/22/2004 | DE10353773A1 SiGe-Kontakt eines vertikalen Gates für eine Nachätzbehandlung des Gateleiters SiGe contact of a vertical gates for a Nachätzbehandlung the gate conductor |
| 07/22/2004 | DE10351775A1 Laserbearbeitungsverfahren und Laserbearbeitungsvorrichtung Laser processing method and laser processing apparatus |
| 07/22/2004 | DE10347462A1 Bodenelektrode eines Kondensators einer Halbleitervorrichtung und Verfahren zur Herstellung derselben Bottom electrode of a capacitor of a semiconductor device and method of manufacturing the same |
| 07/22/2004 | DE10346581A1 Verfahren zum Herstellen einer Halbleitervorrichtung A method of manufacturing a semiconductor device |
| 07/22/2004 | DE10334435A1 Halbleitervorrichtung und Verfahren für deren Herstellung Semiconductor device and methods for their preparation |
| 07/22/2004 | DE10334434A1 Verfahren und Gerät zum Reinigen eines Halbleitersubstrats Method and apparatus for cleaning a semiconductor substrate |
| 07/22/2004 | DE10317747B3 Process for control of thickness reduction of semiconductor elements involves use of a simple test structure with a series of trenches of different widths formed in a plate |
| 07/22/2004 | DE10317115A1 Halbleiter-Waferteilungsanordnung und Halbleitereinrichtungs-Herstellungsverfahren Semiconductor wafer dividing device and semiconductor device manufacturing method |
| 07/22/2004 | DE10317098A1 Bipolar transistor production comprises formation of semiconductor substrate with n type collector region |
| 07/22/2004 | DE10312662A1 Halbleitereinrichtungsherstellungsanordnung und Halbleitereinrichtungsherstellungsverfahren zum Bilden von Halbleiterchips durch Teilen von Halbleiterwafern A semiconductor device manufacturing apparatus and semiconductor device manufacturing method for forming semiconductor chips by dividing the semiconductor wafers |
| 07/22/2004 | DE10309502A1 Lothügelstruktur und Verfahren zur Herstellung derselben Lothügelstruktur and methods for making the same |