| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/23/2004 | US20040185643 P-type semiconductor manufacturing method and semiconductor device |
| 09/23/2004 | US20040185642 Method for doping a semiconductor body |
| 09/23/2004 | US20040185641 Thin film transistor having high mobility and high on-current and method for manufacturing the same |
| 09/23/2004 | US20040185640 Abrupt "delta-like" doping in Si and SiGe films by UHV-CVD |
| 09/23/2004 | US20040185639 Ic chip manufacturing method |
| 09/23/2004 | US20040185638 Substrate manufacturing method |
| 09/23/2004 | US20040185637 Method to preserve alignment mark optical integrity |
| 09/23/2004 | US20040185636 Method of forming a substrste having a surface comprising at least one of Pt, Pd, Co and Au in at least one of element and alloy forms |
| 09/23/2004 | US20040185635 Semiconductor device and method for fabricating the same |
| 09/23/2004 | US20040185634 Methods of forming integrated circuit devices having a capacitor with a hydrogen barrier spacer on a sidewall thereof and integrated circuit devices formed thereby |
| 09/23/2004 | US20040185633 Complementary junction-narrowing implants for ultra-shallow junctions |
| 09/23/2004 | US20040185632 Method for a parallel production of an MOS transistor and a bipolar transistor |
| 09/23/2004 | US20040185631 Method for manufacturing a bipolar transistor having a polysilicon emitter |
| 09/23/2004 | US20040185630 Technique to mitigate short channel effects with vertical gate transistor with different gate materials |
| 09/23/2004 | US20040185629 Semiconductor device fabrication methods for inhibiting carbon out-diffusion in wafers having carbon-containing regions |
| 09/23/2004 | US20040185628 Nonvolatile memory device and method of forming same |
| 09/23/2004 | US20040185627 Method for making a semiconductor device having a high-k gate dielectric |
| 09/23/2004 | US20040185626 Semiconductor device with different lattice properties |
| 09/23/2004 | US20040185625 Graded GexSe100-x concentration in PCRAM |
| 09/23/2004 | US20040185624 Semiconductor device and method for fabricating the same |
| 09/23/2004 | US20040185623 System-on-chip (SOC) solutions with multiple devices by multiple poly gate trimming process |
| 09/23/2004 | US20040185622 Self-aligned trench transistor using etched contact |
| 09/23/2004 | US20040185621 Multi-bit non-volatile memory device and method therefor |
| 09/23/2004 | US20040185620 Modified source/drain re-oxidation method and system |
| 09/23/2004 | US20040185619 Non-volatile memory device with enlarged trapping layer |
| 09/23/2004 | US20040185618 Non-volatile semiconductor memory device and its manufacturing method |
| 09/23/2004 | US20040185617 Semiconductor integrated circuit device and a method of manufacturing the same |
| 09/23/2004 | US20040185616 Nonvolatile memories and methods of fabrication |
| 09/23/2004 | US20040185615 Nonvolatile memories and methods of fabrication |
| 09/23/2004 | US20040185614 Fabrication of integrated circuit elements in structures with protruding features |
| 09/23/2004 | US20040185613 Method of forming dram capacitors with protected outside crown surface for more robust structures |
| 09/23/2004 | US20040185612 Semiconductor device and process of production of same |
| 09/23/2004 | US20040185611 Method for a parallel production of an MOS transistor and a bipolar transistor |
| 09/23/2004 | US20040185609 Semiconductor manufacturing method including forming additional active layer |
| 09/23/2004 | US20040185608 Methods of forming integrated circuit devices using buffer layers covering conductive/insulating interfaces |
| 09/23/2004 | US20040185607 Thin film transistor having LDD region and process for producing same |
| 09/23/2004 | US20040185606 Methods of forming semiconductor circuitry |
| 09/23/2004 | US20040185605 Display device and a method for manufacturing the same |
| 09/23/2004 | US20040185603 Flip-chip system and method of making same |
| 09/23/2004 | US20040185602 No-flow underfill process and material therefor |
| 09/23/2004 | US20040185601 Wafer-applied underfill process |
| 09/23/2004 | US20040185600 Electronic device including a self-assembled monolayer, and a method of fabricating the same |
| 09/23/2004 | US20040185595 Method for fabricating complementary metal oxide semiconductor image sensor |
| 09/23/2004 | US20040185593 Wafer-level inter-connector formation method |
| 09/23/2004 | US20040185591 Method for fabricating a titanium nitride sensing membrane on an EGFET |
| 09/23/2004 | US20040185589 Semiconductor device, semiconductor laser, their manufacturing methods and etching methods |
| 09/23/2004 | US20040185587 Method of testing ion implantation energy in ion implantation equipment |
| 09/23/2004 | US20040185585 Method of testing semiconductor device |
| 09/23/2004 | US20040185584 Iteratively selective gas flow control and dynamic database to achieve CD uniformity |
| 09/23/2004 | US20040185583 Method of operating a system for chemical oxide removal |
| 09/23/2004 | US20040185582 System and method for in-situ monitor and control of film thickness and trench depth |
| 09/23/2004 | US20040185581 Method of aligning a semiconductor substrate with a semiconductor alignment apparatus |
| 09/23/2004 | US20040185580 Method for dicing semiconductor wafer |
| 09/23/2004 | US20040185579 Method of manufacturing semiconductor device |
| 09/23/2004 | US20040185578 Method for producing ferroelectric capacitors and integrated semiconductor memory chips |
| 09/23/2004 | US20040185383 Resist pattern forming method and resist pattern forming system |
| 09/23/2004 | US20040185382 Method for forming a minute pattern and method for manufacturing a semiconductor device using the same |
| 09/23/2004 | US20040185381 exposure light flux is transmitted and inverted through the shifter edge region contacted with the border of the opening region; destructive interference between exposure light fluxes improves resolution; microminiaturization, increased integration; photolithography |
| 09/23/2004 | US20040185380 Method and apparatus for bilayer photoresist dry development |
| 09/23/2004 | US20040185378 Stimulus sensitive compound and stimulus sensitive composition containing the same |
| 09/23/2004 | US20040185354 capable of getting a smooth sloped portion of the blaze and a sharp rising portion of the blaze edge using a small-diameter beam, and reducing the overall blaze patterning time at the same time |
| 09/23/2004 | US20040185353 Aligner, exposing method, method for manufacturing thin-film transistor, display device, and electronic device using shading means |
| 09/23/2004 | US20040185351 Design and layout of phase shifting photolithographic masks |
| 09/23/2004 | US20040185350 A thin layer material combined with a radiation-opaque layer material with different etch selectivity facilitate a multi-stage patterning treatment of an underlying mask layer and a resultant critical dimension in the patterned mask; accuracy |
| 09/23/2004 | US20040185310 Battery device with conductive layer, cathode, anode and electrolyte layer for electrical isolation |
| 09/23/2004 | US20040185301 Sealing |
| 09/23/2004 | US20040185183 Methods of forming fluorine doped insulating materials |
| 09/23/2004 | US20040184980 Production and use of tetrafluorosilane |
| 09/23/2004 | US20040184792 Processing system and method for thermally treating a substrate |
| 09/23/2004 | US20040184510 Semiconductor device |
| 09/23/2004 | US20040184493 Laser element, method of producing the laser element, and a laser module employing the laser element |
| 09/23/2004 | US20040184344 Semiconductor wafer, semiconductor chip, and manufacturing method of semiconductor device |
| 09/23/2004 | US20040184332 Semiconductor memory device |
| 09/23/2004 | US20040184330 Semiconductor integrated circuit device |
| 09/23/2004 | US20040184327 Semiconductor memory device and test method |
| 09/23/2004 | US20040184315 Thin film magnetic memory device provided with program element |
| 09/23/2004 | US20040184313 Nonvolatile magnetic memory device and method of writing data into tunnel magnetoresistance device in nonvolatile magnetic memory device |
| 09/23/2004 | US20040184311 Magnetic sensor |
| 09/23/2004 | US20040184307 Semiconductor device |
| 09/23/2004 | US20040184304 Semiconductor memory device |
| 09/23/2004 | US20040184298 Semiconductor memory device |
| 09/23/2004 | US20040184282 Mirror assembly with multi-color illumination |
| 09/23/2004 | US20040184226 Bare die semiconductor dice underfilled and encapsulated with a single dielectric material and method for manufacturing the same |
| 09/23/2004 | US20040184219 Assembly of semiconductor device, interposer and substrate |
| 09/23/2004 | US20040184218 Semiconductor capacitor with diffusion prevention layer |
| 09/23/2004 | US20040184217 On-die de-coupling capacitor using bumps or bars |
| 09/23/2004 | US20040184216 Voltage controlled variable capacitance device |
| 09/23/2004 | US20040184209 Overtemperature detection device and semiconductor integrated circuit device |
| 09/23/2004 | US20040184131 Test-element-provided substrate, method of manufacturing the same, substrate for electro-optical device, electro-optical device, and electronic apparatus |
| 09/23/2004 | US20040184119 Imaging head unit, imaging device and imaging method |
| 09/23/2004 | US20040184038 Method and apparatus for measuring the shape and thickness variation of polished opaque plates |
| 09/23/2004 | US20040184036 Substrate alignment apparatus and method, and exposure apparatus |
| 09/23/2004 | US20040184030 Method and apparatus for providing lens aberration compensation by illumination source optimization |
| 09/23/2004 | US20040184021 Photolithography processing system and method thereof |
| 09/23/2004 | US20040184020 Positioning device |
| 09/23/2004 | US20040184018 Abbe arm calibration system for use in lithographic apparatus |
| 09/23/2004 | US20040184015 Aligner and device fabrication method |
| 09/23/2004 | US20040184014 Contamination barrier with expandable lamellas |
| 09/23/2004 | US20040183977 Liquid crystal display device and method of fabricating the same |
| 09/23/2004 | US20040183955 Thin film transistor array panel and manufacturing method thereof |