Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2004
09/23/2004US20040183073 Large grain size polysilicon films formed by nuclei-induced solid phase crystallization
09/23/2004US20040183072 Novel conductive elements for thin film transistors used in a flat panel display
09/23/2004US20040183064 Single electron devices
09/23/2004US20040183038 Extreme UV radiation source and semiconductor exposure device
09/23/2004US20040183036 Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus
09/23/2004US20040183030 Method and apparatus for recycling gases used in a lithography tool
09/23/2004US20040183024 X-ray detector and method of fabricating therefore
09/23/2004US20040183023 X-ray detector and method of fabricating therefore
09/23/2004US20040183015 Methods for measuring dimensions of minute structures and apparatus for performing the same
09/23/2004US20040182915 Structure and method for bonding to copper interconnect structures
09/23/2004US20040182913 Solder bonding technique for assembling a tilted chip or substrate
09/23/2004US20040182912 Wire bonder
09/23/2004US20040182911 Insulated bonding wire tool for microelectronic packaging
09/23/2004US20040182910 Solder ball attachment system
09/23/2004US20040182833 Method for manufacturing a substrate with a pre-seasoned plasma processing system
09/23/2004US20040182822 Plasma etching wherein the semiconductor wafer is heated to selectively controllable temperature zones; determining a first dimensional variation of etched features with respect to reference dimensions over predetermined areas of surface; determining operating temperatures, plasma etching
09/23/2004US20040182820 For forming a fine structure on a substrate using a mold comprising a heating and a pressure-applying mechanism
09/23/2004US20040182815 Method of trench isolation and method for manufacturing a non-volatile memory device using the same
09/23/2004US20040182720 Measuring thickness equivalent data of a film on a wafer, making a cathode member smaller than the surface face a region, interposing an electrolytic solution between the surface and the cathode member, applying a voltage using the cathode member as a cathode and the film an anode, electrolytic polishing
09/23/2004US20040182600 Method for growing carbon nanotubes, and electronic device having structure of ohmic connection to carbon element cylindrical structure body and production method thereof
09/23/2004US20040182565 Temperature adjusting system and exposure apparatus incorporating the same
09/23/2004US20040182563 Multi-channel temperature control system for semiconductor processing facilities
09/23/2004US20040182560 Apparatus and method of forming channels in a heat-exchanging device
09/23/2004US20040182516 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
09/23/2004US20040182515 warp yarns and weft yarns or shutes; machine rolling; papermaking
09/23/2004US20040182514 Using atomic hydrogen by mixing halogen and/or halide to a gas which is used for generating atomic hydrogen in the plasma; surface is prevented from physical damage caused by high energy particle and undesirable reactive species are controlled
09/23/2004US20040182513 Measurement of etching
09/23/2004US20040182472 Front opening unified pod
09/23/2004US20040182423 Gas flow of fluorine cleaning gas so as to flow from upstream toward an outlet port in a reaction chamber; flowing protective gas which reacts with the fluorine from vicinity of outlet port
09/23/2004US20040182422 Applying a semiconductor process to wafer being supported by a surface tension gradient device; monitoring and outputting result
09/23/2004US20040182419 High-pressure processing apparatus and high-pressure processing method
09/23/2004US20040182418 Removing foreign matter adhering to tip of a probe needle of a probe card comprising a cleaning layer containing a polyurethane and a vinyl polymer; wear resistance
09/23/2004US20040182417 Processing system and method for chemically treating a substrate
09/23/2004US20040182415 Cleaning method of apparatus for manufacturing semiconductor device
09/23/2004US20040182324 Method and apparatus for thermally insulating adjacent temperature controlled processing chambers
09/23/2004US20040182322 Wafer holder for semiconductor manufacturing device and semiconductor manufacturing device in which it is installed
09/23/2004US20040182321 Holder for semiconductor production system
09/23/2004US20040182318 Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus
09/23/2004US20040182316 Processing equipment and processing method
09/23/2004US20040182315 Reduced maintenance chemical oxide removal (COR) processing system
09/23/2004US20040182313 Method of forming a ferroelectric film and fabrication process of a semiconductor device having a ferroelectric film
09/23/2004US20040182311 Semiconductor processing apparatus having semiconductor wafer mounting
09/23/2004US20040182308 Thick single crystal diamond layer method for making it and gemstones produced from the layer
09/23/2004US20040182277 Electroless Ni-B plating liquid, electronic device and method for manufacturing the same
09/23/2004US20040182165 Capacitive pressure sensor and its manufacturing method
09/23/2004US20040181965 Method and apparatus for cleaning and drying a workpiece
09/23/2004US20040181961 Handler for testing semiconductor device
09/23/2004US20040181938 Method for carrying a semiconductor device
09/23/2004US20040181929 Growth model automated material handling system
09/23/2004US20040181885 Cleaning apparatus for nozzle
09/23/2004DE19929542B4 Flächige Anordnung von Stimulationselektroden auf einem Chip und Herstellungsverfahren dazu und Verwendung als Retina-Implantat Dimensional arrangement of stimulating electrodes on a chip and manufacturing method thereof and use as retinal implant
09/23/2004DE19922547B4 Verfahren zum Herstellen einer Silizium-Solarzelle A method of manufacturing a silicon solar cell
09/23/2004DE19829614B4 Verfahren zur Herstellung eines Leistungshalbleiterbauelementes Method for producing a power semiconductor component
09/23/2004DE19715926B4 Herstellungsverfahren für einen externen Anschluß für ein Kugelgitterarray-(BGA)Halbleiterbauteil Manufacturing method for an external connection for a Kugelgitterarray- (BGA) semiconductor device
09/23/2004DE10341767A1 Halbleitervorrichtung, bei der eine nicht korrekte Bestimmung des Durchschmelzzustandes einer Sicherung unwahrscheinlich ist A semiconductor device in which an incorrect determination of the melting state of a fuse is unlikely
09/23/2004DE10325206B3 Process for preparation of a structural part in which the specific functional structures, i.e. etching troughs, are formed by anisotropic wet etching useful in production of single crystal semiconductors
09/23/2004DE10311575A1 Electrolytic metallizing of a workpiece with bores of high aspect ratio useful for the electrodeposition of copper, e.g. onto conductive plates
09/23/2004DE10310161A1 Monolithic integrated circuit for ID tags and chips has a sensor and an electrical energy supply generated by the vibration of an inductor and permanent magnet combination
09/23/2004DE10310128A1 Production process for a semiconductor zone for a dram cell having n conductivity in a single crystal body outdiffuses antimony from an adjacent polycrystalline semiconductor
09/23/2004DE10309869A1 Semiconductor chip production process, fills contact holes with conductive material to connect circuits to conductor rail and then divides into chips
09/23/2004DE10309607A1 Encapsulation process for functional components of an electrical element such as an organic light diode uses ultrasonic welding and solder-glass or adhesive sealant
09/23/2004DE10300523B4 Verfahren zur Herstellung eines flaschenförmigen Grabens in einem Halbleiter A process for producing a bottle-shaped trench in a semiconductor
09/23/2004DE10297102T5 Vorrichtung und Verfahren zum Herstellen einer dünnen Platte sowie Solarzelle Apparatus and method for manufacturing a thin plate, as well as solar cell
09/23/2004DE10295303T5 Nichtflüchtige Halbleiterspeichervorrichtung und Verfahren zu deren Herstellung A non-volatile semiconductor memory device and methods for their preparation
09/23/2004DE10253919B4 Verfahren zur Justage eines Substrates in einem Gerät zur Durchführung einer Belichtung A method for adjusting a substrate in an apparatus for performing an exposure
09/23/2004DE102004013042A1 Spannungsregler und zugehöriger Halbleiterspeicherbaustein Voltage regulator and associated semiconductor memory device
09/23/2004DE102004011958A1 Mikro-Stromrichter mit mehreren Ausgängen Micro-power converter with multiple outputs
09/23/2004DE102004010354A1 Verfahren zum Formen von Wolfram oder Wolfram enthaltenden dünnen Schichten A method for forming tungsten or tungsten-containing thin layers
09/23/2004DE102004010352A1 Reduktion von Schub- bzw. Scherspannungen in Kupfer-Vias in organischem dielektrischen Zwischenschichtmaterial Reduction of shear and shear stresses in copper vias in organic interlayer dielectric material
09/23/2004DE102004009505A1 Integrierte Halbleiterschaltung mit einfach aufgebauter Temperaturerfassungsschaltung A semiconductor integrated circuit with simple design temperature sensing circuit
09/23/2004DE102004007183A1 Schutzschaltung Protection circuit
09/23/2004DE102004004854A1 Fotomaske sowie Verfahren und Vorrichtung zu ihrer Herstellung Photomask and method and apparatus for the production thereof
09/23/2004DE102004003537A1 Magnetische Speichervorrichtung, Verfahren zu deren Herstellung sowie integrierte Schaltung mit einer solchen Speichervorrichtung A magnetic memory device, to processes for their preparation as well as integrated circuit having such a memory device
09/23/2004DE10154500B4 Verfahren zur Herstellung dünner, strukturierter, metallhaltiger Schichten mit geringem elektrischen Widerstand A method for producing thin, structured, metal-containing layers with low electrical resistance
09/23/2004DE10116876B4 Verfahren zur Dotierung elektrisch leitfähiger organischer Verbindungen, organischer Feldeffekttransistor sowie Verfahren zu dessen Herstellung A method for doping electrically conductive organic compounds, organic field-effect transistor, and methods for its preparation
09/23/2004DE10015278B4 Halbleiterspeicher mit einem Speicherzellenfeld A semiconductor memory comprising a memory cell array
09/22/2004EP1460889A2 Plastic package with high heat dissipation and method for manufacturing the same
09/22/2004EP1460888A1 Low-profile electronic circuit module and method for manufacturing the same
09/22/2004EP1460886A2 Extreme UV radiation source and semiconductor exposure device
09/22/2004EP1460691A1 Method for producing cemented wafer
09/22/2004EP1460686A2 Method for Thin Film Resistor Integration in Dual Damascene Structure
09/22/2004EP1460685A1 Semiconductor device and method of manufacturing the same
09/22/2004EP1460684A1 No-flow underfill process and material therefor
09/22/2004EP1460683A1 Method for vanishing defects in single crystal silicon and single crystal silicon
09/22/2004EP1460682A1 Method and apparatus for etching silicon wafer and method for analysis of impurities
09/22/2004EP1460681A2 Silicon carbide semiconductor device and method for fabricating the same
09/22/2004EP1460680A2 Complementary junction-narrowing implants for formation of ultra-shallow junctions
09/22/2004EP1460678A1 Method and apparatus for cleaning and method and apparatus for etching
09/22/2004EP1460677A2 BARC etch comprising a selective etch chemistry and a high polymerizing gas for CD control
09/22/2004EP1460676A2 Reduced footprint tool for automated processing of microelectronic substrates
09/22/2004EP1460569A1 Semiconductor integrated circuit device with test signal repeater circuit and related design automation apparatus, method and program
09/22/2004EP1460479A2 Method and apparatus for recycling gases in a lithography tool
09/22/2004EP1460442A2 A magnetic sensor
09/22/2004EP1460374A2 Method and apparatus for measuring the shape and thickness variation of polished opaque plates
09/22/2004EP1460154A1 Group iii nitride semiconductor substrate and its manufacturing method
09/22/2004EP1460150A1 Method for fabricating bismuth thin film and device using said film
09/22/2004EP1460049A2 Method of manufacturing ceramic film and pressure heat treatment device used therefor
09/22/2004EP1460047A1 Method for adhering transparent articles and quartz glass plate prepared through adhesion and device using the same
09/22/2004EP1460037A1 A multi-layer device and method for producing the same
09/22/2004EP1460036A1 Mems element manufacturing method