| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/28/2004 | US6797565 Methods for fabricating and planarizing dual poly scalable SONOS flash memory |
| 09/28/2004 | US6797564 Method of forming bit lines and bit line contacts in a memory device |
| 09/28/2004 | US6797563 Method of forming cross point type DRAM cell |
| 09/28/2004 | US6797562 Method for manufacturing a buried strap contact in a memory cell |
| 09/28/2004 | US6797561 Method of fabricating a capacitor of a semiconductor device |
| 09/28/2004 | US6797560 Method of manufacturing a capacitor having tantalum oxide film as an insulating film |
| 09/28/2004 | US6797559 Method of fabricating semiconductor device having metal conducting layer |
| 09/28/2004 | US6797558 Methods of forming a capacitor with substantially selective deposite of polysilicon on a substantially crystalline capacitor dielectric layer |
| 09/28/2004 | US6797557 Methods and systems for forming embedded DRAM for an MIM capacitor |
| 09/28/2004 | US6797556 MOS transistor structure and method of fabrication |
| 09/28/2004 | US6797555 Direct implantation of fluorine into the channel region of a PMOS device |
| 09/28/2004 | US6797554 Method of manufacturing semiconductor integrated circuit having capacitor and silicided and non-silicided transistors |
| 09/28/2004 | US6797553 Method for making multiple threshold voltage FET using multiple work-function gate materials |
| 09/28/2004 | US6797552 Method for defect reduction and enhanced control over critical dimensions and profiles in semiconductor devices |
| 09/28/2004 | US6797551 Semiconductor device having contact electrode to semiconductor substrate |
| 09/28/2004 | US6797550 Semiconductor device and manufacturing method therefor |
| 09/28/2004 | US6797548 Electro-optical device and thin film transistor and method for forming the same |
| 09/28/2004 | US6797547 Bladed silicon-on-insulator semiconductor devices and method of making |
| 09/28/2004 | US6797545 Method and apparatus for fabricating electronic device |
| 09/28/2004 | US6797544 Semiconductor device, method of manufacturing the device and method of mounting the device |
| 09/28/2004 | US6797542 Fabrication method of semiconductor integrated circuit device |
| 09/28/2004 | US6797541 Leadless semiconductor product packaging apparatus having a window lid and method for packaging |
| 09/28/2004 | US6797540 Dap isolation process |
| 09/28/2004 | US6797539 Method of manufacturing a semiconductor device |
| 09/28/2004 | US6797537 Method of making stackable layers containing encapsulated integrated circuit chips with one or more overlaying interconnect layers |
| 09/28/2004 | US6797536 Magnetic memory device having yoke layer, and manufacturing method |
| 09/28/2004 | US6797535 Thin film transistor and method for fabricating same |
| 09/28/2004 | US6797534 Method of integrating the fabrication process for integrated circuits and MEM devices |
| 09/28/2004 | US6797533 Quantum well intermixing in InGaAsP structures induced by low temperature grown InP |
| 09/28/2004 | US6797532 Semiconductor device and method for manufacturing the same |
| 09/28/2004 | US6797530 Semiconductor device-manufacturing method for manufacturing semiconductor devices with improved heat radiating efficiency and similar in size to semiconductor elements |
| 09/28/2004 | US6797529 Processing apparatus with measuring unit and method |
| 09/28/2004 | US6797528 Micro probing tip made by micro machine method |
| 09/28/2004 | US6797527 Manufacturing method of a phase shift mask, method of forming a resist pattern and manufacturing method of a semiconductor device |
| 09/28/2004 | US6797526 Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data |
| 09/28/2004 | US6797525 Fabrication process for a semiconductor device having a metal oxide dielectric material with a high dielectric constant, annealed with a buffered anneal process |
| 09/28/2004 | US6797456 Photoresist structure that does not have swelling defects |
| 09/28/2004 | US6797443 Light is directed onto a photomask by non- telecentric illumination obtained by controlling a shape of an opening of an illumination aperture |
| 09/28/2004 | US6797442 Fabrication method of semiconductor integrated circuit device |
| 09/28/2004 | US6797440 First phase-shifting regions phase shift the light traveling through them 180 degrees relative to the light traveling through the rims, thereby increasing the contrast of the light traveling through the rim phase shifting mask |
| 09/28/2004 | US6797416 Use in semiconductor element; vapor deposition, lamination |
| 09/28/2004 | US6797368 Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure |
| 09/28/2004 | US6797340 Exposing surface to a borane; depositing nucleation layer by alternately pulsing a tungsten compound and a silane reducing gas |
| 09/28/2004 | US6797339 Irradiating the surface of a substrate with ions of a gas cluster to cause a reaction with the surface of a substrate and thereby form a thin film on the substrate surface |
| 09/28/2004 | US6797323 On a surface of a silicon layer by an oxidation method using wet gas at an ambient temperature at which no silicon atom is eliminated from the surface of the silicon layer |
| 09/28/2004 | US6797312 Electroless plating solution and process |
| 09/28/2004 | US6797246 Apparatus and method for cleaning, neutralizing and recirculating exhaust air in a confined environment |
| 09/28/2004 | US6797194 Surface treating for micromachining and method for surface treatment |
| 09/28/2004 | US6797189 Hexafluorobutadiene (C4F6), combined with a larger amount of diluent gas xenon (Xe) enhance nitride selectivity without the occurence of etch stop |
| 09/28/2004 | US6797188 Self-cleaning process for etching silicon-containing material |
| 09/28/2004 | US6797146 Contacting with an electroplating bath of a source of metal ions, an electrolyte comprising two or more acids, and additives |
| 09/28/2004 | US6797142 Tin plating |
| 09/28/2004 | US6797135 Electroplating apparatus |
| 09/28/2004 | US6797132 Apparatus for plating and polishing a semiconductor workpiece |
| 09/28/2004 | US6797131 Reduces contamination from flaking or crumbling of sputtered particles |
| 09/28/2004 | US6797128 Harmonic analysis of electrical discharge parameters; controlling frequency output and/or reactive gas flow |
| 09/28/2004 | US6797112 Plasma treatment apparatus and method of producing semiconductor device using the apparatus |
| 09/28/2004 | US6797111 Plasma processing apparatus |
| 09/28/2004 | US6797110 Glass, plasma resisting component, component for electromagnetic wave-transparent window and plasma processing apparatus |
| 09/28/2004 | US6797109 Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates |
| 09/28/2004 | US6797108 Apparatus and method for evenly flowing processing gas onto a semiconductor wafer |
| 09/28/2004 | US6797093 Sintering an unsintered laminated body formed by laminating together first and second green sheets capable of exhibiting different shrinking behaviors during a sintering process; inhibit the undesired shrinkage |
| 09/28/2004 | US6797079 Copper, silver alloy |
| 09/28/2004 | US6797076 Improving flushing of five sided boxes by jetting fluids at angles to direction of rotation |
| 09/28/2004 | US6797075 Pivoting wafer supports; stripping photoresist from semiconductor |
| 09/28/2004 | US6797074 Wafer edge cleaning method and apparatus |
| 09/28/2004 | US6797071 Surface treatment of semiconductor substrates |
| 09/28/2004 | US6797069 Gas driven planetary rotation apparatus and methods for forming silicon carbide layers |
| 09/28/2004 | US6797068 Film forming unit |
| 09/28/2004 | US6797063 Dispensing apparatus |
| 09/28/2004 | US6797029 Process facility having at least two physical units each having a reduced density of contaminating particles with respect to the surroundings |
| 09/28/2004 | US6796883 Controlled lubricated finishing |
| 09/28/2004 | US6796881 Sensing the presence of a wafer |
| 09/28/2004 | US6796880 Linear polishing sheet with window |
| 09/28/2004 | US6796795 Method and apparatus for loading substrate in semiconductor manufacturing apparatus |
| 09/28/2004 | US6796763 Clean box, clean transfer method and system |
| 09/28/2004 | US6796664 Method and device for decontaminating optical surfaces |
| 09/28/2004 | US6796517 Apparatus for the application of developing solution to a semiconductor wafer |
| 09/28/2004 | US6796481 Chip mounting method |
| 09/28/2004 | US6796458 Air supply apparatus for semiconductor device fabricating equipment |
| 09/28/2004 | US6796439 Vertical type wafer supporting jig |
| 09/28/2004 | US6796316 Atomic layer deposition (ALD) thin film deposition equipment having cleaning apparatus and cleaning method |
| 09/28/2004 | US6796314 Using hydrogen gas in a post-etch radio frequency-plasma contact cleaning process |
| 09/28/2004 | US6796269 Apparatus and method for monitoring plasma processing apparatus |
| 09/28/2004 | US6796268 Microwave plasma processing system |
| 09/28/2004 | US6796054 Low-pressure dryer and low-pressure drying method |
| 09/28/2004 | US6796025 Method for mounting electronic part and paste material |
| 09/28/2004 | CA2343105C Semiconductor light-emitting device and method for manufacturing the same |
| 09/28/2004 | CA2232768C Method for using high density compressed liquefied gases in cleaning applications |
| 09/23/2004 | WO2004082347A2 Solder on a sloped surface |
| 09/23/2004 | WO2004082346A1 Method and device for mounting conductive ball |
| 09/23/2004 | WO2004082111A2 Mosfet power transistors and methods |
| 09/23/2004 | WO2004082029A1 Liquid crystal display |
| 09/23/2004 | WO2004082028A1 Semiconductor processing |
| 09/23/2004 | WO2004082026A1 Magnetoresistive element and magnetic memory device |
| 09/23/2004 | WO2004082020A1 Via and trench structures for semiconductor substrates bonded to metallic substrates |
| 09/23/2004 | WO2004082018A2 Electronic component comprising a semiconductor chip and a plastic housing, and method for producing the same |
| 09/23/2004 | WO2004082017A1 Method for manufacturing a semiconductor component having a barrier-lined opening |
| 09/23/2004 | WO2004082016A1 Application of sonic energy during sputtering of metal to fill opening |
| 09/23/2004 | WO2004082015A1 Electrostatic chuck for wafer metrology and inspection equipment |