| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/13/2005 | US20050009353 Multi-layer integrated circuit package |
| 01/13/2005 | US20050009352 Method for optimized laser annealing smoothing |
| 01/13/2005 | US20050009350 Carbon hard mask with bonding layer for bonding to metal |
| 01/13/2005 | US20050009349 Chuck for supporting wafers with a fluid |
| 01/13/2005 | US20050009348 Method for implanting atomic species through an uneven surface of a semiconductor layer |
| 01/13/2005 | US20050009347 Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 01/13/2005 | US20050009346 Method of manufacturing semiconductor device |
| 01/13/2005 | US20050009345 Rework process of patterned photo-resist layer |
| 01/13/2005 | US20050009343 Method and structure for a self-aligned silicided word line and polysilicon plug during the formation of a semiconductor device |
| 01/13/2005 | US20050009342 Method for etching an organic anti-reflective coating (OARC) |
| 01/13/2005 | US20050009341 Method of reducing critical dimension bias of dense pattern and isolation pattern |
| 01/13/2005 | US20050009340 Method and apparatus for forming capping film |
| 01/13/2005 | US20050009339 Method of forming copper wiring in semiconductor device |
| 01/13/2005 | US20050009338 Methods of forming a refractory metal silicide |
| 01/13/2005 | US20050009337 [metal silicide structure and method of forming the same] |
| 01/13/2005 | US20050009336 Metal deposition apparatus used in fabrication of semiconductor devices and methods of forming metal layers using the same |
| 01/13/2005 | US20050009335 Apparatuses for treating pluralities of discrete semiconductor substrates; and methods for treating pluralities of discrete semiconductor substrates |
| 01/13/2005 | US20050009334 Method of producing multilayer interconnection structure |
| 01/13/2005 | US20050009333 Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses |
| 01/13/2005 | US20050009332 Integrated circuit devices having a resistor pattern and plug pattern that are made from a same material and methods of forming the same |
| 01/13/2005 | US20050009331 Method of forming copper wiring in semiconductor device |
| 01/13/2005 | US20050009330 Methods for making semiconductor device structures with containers and contact apertures having increased aspect ratios |
| 01/13/2005 | US20050009329 Semiconductor chip production method, semiconductor device production method, semiconductor chip, and semiconductor device |
| 01/13/2005 | US20050009328 Methods of removing resistive remnants from contact holes using silicidation |
| 01/13/2005 | US20050009327 Apparatus and method for formation of a wiring pattern on a substrate, and electronic devices and producing methods thereof |
| 01/13/2005 | US20050009326 Integrated circuitry and a semiconductor processing method of forming a series of conductive lines |
| 01/13/2005 | US20050009325 Atomic layer deposition of barrier materials |
| 01/13/2005 | US20050009324 Trench etch process for low-k dielectrics |
| 01/13/2005 | US20050009323 Method for forming metal wiring of semiconductor device |
| 01/13/2005 | US20050009322 Slurry for CMP, and method of manufacturing semiconductor device |
| 01/13/2005 | US20050009321 Method of forming metal line in semiconductor device |
| 01/13/2005 | US20050009320 Method of forming silicon carbide films |
| 01/13/2005 | US20050009319 Method of forming buried wiring in semiconductor device |
| 01/13/2005 | US20050009318 Conductive connection forming methods, oxidation reducing methods, and integrated circuits formed thereby |
| 01/13/2005 | US20050009317 Bumping process |
| 01/13/2005 | US20050009315 Method for manufacturing micro electro-mechanical systems using solder balls |
| 01/13/2005 | US20050009314 Method for forming a bonding pad of a semiconductor device |
| 01/13/2005 | US20050009313 Manufacturing method for semiconductor device |
| 01/13/2005 | US20050009312 Gate length proximity corrected device |
| 01/13/2005 | US20050009311 Methods of forming a multilayer stack alloy for work function engineering |
| 01/13/2005 | US20050009310 Semi-insulating GaN and method of making the same |
| 01/13/2005 | US20050009309 Plasma CVD method |
| 01/13/2005 | US20050009308 Chemical treatment of semiconductor substrates |
| 01/13/2005 | US20050009307 Laser beam processing method and laser beam processing machine |
| 01/13/2005 | US20050009306 Semiconductor device and method of manufacturing the same |
| 01/13/2005 | US20050009305 Method of forming freestanding semiconductor layer |
| 01/13/2005 | US20050009304 Methods of fabricating gallium nitride semiconductor layers by lateral growth into trenches |
| 01/13/2005 | US20050009303 Method and apparatus for self-assembly of functional blocks on a substrate facilitated by electrode pairs |
| 01/13/2005 | US20050009302 Manufacturing method of semiconductor device |
| 01/13/2005 | US20050009301 Semiconductor wafer dividing method utilizing laser beam |
| 01/13/2005 | US20050009299 Method of manufacturing a semiconductor device |
| 01/13/2005 | US20050009298 Method for manufacturing semiconductor device |
| 01/13/2005 | US20050009297 Device and method for cutting an assembly |
| 01/13/2005 | US20050009296 Method for manufacturing a multilayer semiconductor structure that includes an irregular layer |
| 01/13/2005 | US20050009295 Novel method to achieve increased trench depth, independent of CD as defined by lithography |
| 01/13/2005 | US20050009294 Process for the formation of dielectric isolation structures in semiconductor devices |
| 01/13/2005 | US20050009293 Method of forming trench isolations |
| 01/13/2005 | US20050009292 Method for forming isolation layer of semiconductor device |
| 01/13/2005 | US20050009291 Methods for filling high aspect ratio trenches in semiconductor layers |
| 01/13/2005 | US20050009290 Method of forming shallow trench isolation using deep trench isolation |
| 01/13/2005 | US20050009289 Aluminum cap with electroless nickel/immersion gold |
| 01/13/2005 | US20050009288 Process for producing semiconductor article using graded epitaxial growth |
| 01/13/2005 | US20050009287 Alignment mark and method for manufacturing a semiconductor device having the same |
| 01/13/2005 | US20050009286 Method of fabricating nano-scale resistance cross-point memory array |
| 01/13/2005 | US20050009285 Semiconductor component and method of manufacture |
| 01/13/2005 | US20050009284 Semiconductor device and method of manufacturing the same |
| 01/13/2005 | US20050009283 Method for removal of a spacer |
| 01/13/2005 | US20050009282 Semiconductor apparatus |
| 01/13/2005 | US20050009281 Method of forming gate in semiconductor device |
| 01/13/2005 | US20050009280 Methods of fabricating multiple sets of field effect transistors |
| 01/13/2005 | US20050009279 Methods of fabricating multiple sets of field effect transistors |
| 01/13/2005 | US20050009278 Methods of fabricating multiple sets of field effect transistors |
| 01/13/2005 | US20050009276 Methods and structure for an improved floating gate memory cell |
| 01/13/2005 | US20050009275 Method for fabricating semiconductor memory device |
| 01/13/2005 | US20050009274 Method of manufacturing flash memory device |
| 01/13/2005 | US20050009273 Method and system for forming source regions in memory devices |
| 01/13/2005 | US20050009272 Self-aligned silicide for word lines and contacts |
| 01/13/2005 | US20050009271 Low leakage one transistor static random access memory |
| 01/13/2005 | US20050009270 Methods of forming memory circuitry |
| 01/13/2005 | US20050009269 Semiconductor device and method of manufacturing semiconductor device |
| 01/13/2005 | US20050009268 Method for forming buried plate of trench capacitor |
| 01/13/2005 | US20050009267 Forming collar structures in deep trench capacitors with thermally stable filler material |
| 01/13/2005 | US20050009266 Systems and methods for forming refractory metal oxide layers |
| 01/13/2005 | US20050009265 Method of fabricating MOS transistor using total gate silicidation process |
| 01/13/2005 | US20050009264 Method of forming trench in semiconductor device |
| 01/13/2005 | US20050009263 Complementary metal oxide semiconductor transistor technology using selective epitaxy of a strained silicon germanium layer |
| 01/13/2005 | US20050009262 Semiconductor device and process for fabricating the same |
| 01/13/2005 | US20050009261 Semiconductor memory device having resistor and method of fabricating the same |
| 01/13/2005 | US20050009259 Underfill and encapsulation of carrier substrate-mounted flip-chip components using stereolithography |
| 01/13/2005 | US20050009258 Semiconductor device and manufacturing method thereof |
| 01/13/2005 | US20050009257 Method of manufacturing semiconductor device |
| 01/13/2005 | US20050009256 Semiconductor device and method of manufacturing the same |
| 01/13/2005 | US20050009255 Process for forming thick oxides on Si or SiC for semiconductor devices |
| 01/13/2005 | US20050009254 Method for fabricating thin-film transistor |
| 01/13/2005 | US20050009253 Manufacturing method of thin film transistor |
| 01/13/2005 | US20050009252 Method of fabricating a semiconductor device |
| 01/13/2005 | US20050009251 Manufacturing method of semiconductor device |
| 01/13/2005 | US20050009250 Ultra short channel field effect transistor and method of fabricating the same |
| 01/13/2005 | US20050009249 Method for fabricating polycrystalline silicon liquid crystal display device |
| 01/13/2005 | US20050009248 Solution-processed thin film transistor formation method |