Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2005
01/19/2005EP1498939A2 Method of forming integrated circuit contacts
01/19/2005EP1498938A1 Method of forming silicon epitaxial layer
01/19/2005EP1498937A1 Vertical heat treating equipment
01/19/2005EP1498936A1 Reflection type mask blank and reflection type mask and production methods for them
01/19/2005EP1498935A1 Device for calculating the quantity of light and method thereof
01/19/2005EP1498934A2 Robotic wafer transport apparatus
01/19/2005EP1498933A2 Substrate joining method and apparatus
01/19/2005EP1498919A2 Manufacturing a magnetic cell
01/19/2005EP1498889A1 Method of delivering substrates to a film forming device for disk-like substrates, substrate delivering mechanism and mask used in such method, and disk-like recording medium producing method using such method
01/19/2005EP1498778A1 Lithographic apparatus and device manufacturing method
01/19/2005EP1498777A1 Substrate holder and lithographic projection apparatus
01/19/2005EP1498750A1 Reflection element of exposure light and production method therefor, mask, exposure system, and production method of semiconductor device
01/19/2005EP1498727A1 Method for inspecting semiconductor device
01/19/2005EP1498511A1 Method of electroless plating and semiconductor wafer having metal plating layer formed thereon
01/19/2005EP1498456A1 Organic semiconductor composition, organic semiconductor element, and process for producing the same
01/19/2005EP1498443A1 Siloxane-based resin containing germanium and interlayer insulating film for semiconductor device using the same
01/19/2005EP1498244A1 Method for producing a semiconductor-molding tablet, a semiconductor-molding tablet obtained thereby and a semiconductor device using the same
01/19/2005EP1498228A1 Articulated robot
01/19/2005EP1498216A1 Method of cutting processed object
01/19/2005EP1498215A1 Laser processing method
01/19/2005EP1497869A2 Semiconductor component comprising an integrated capacitor structure that has a plurality of metallization planes
01/19/2005EP1497868A1 Structure and method for an emitter ballast resistor in an hbt
01/19/2005EP1497867A2 Electronic displays
01/19/2005EP1497864A2 Power and ground shield mesh to remove both capacitive and inductive signal coupling effects of routing in integrated circuit device
01/19/2005EP1497862A1 Semiconductor component comprising an integrated latticed capacitance structure
01/19/2005EP1497861A1 Semiconductor component having an integrated capacitance structure and method for producing the same
01/19/2005EP1497859A2 Method for the production of thin metal-containing layers having low electrical resistance
01/19/2005EP1497858A2 High frequency signal isolation in a semiconductor device
01/19/2005EP1497857A1 Method for handling semiconductor layers in such a way as to thin same
01/19/2005EP1497856A1 Method for ashing
01/19/2005EP1497855A2 Method for producing one or more monocrystalline layers, each with a different lattice structure, on one plane of a series of layers
01/19/2005EP1497854A2 Method for fabricating a soi substrate with a high resistivity support substrate
01/19/2005EP1497853A2 Apparatus for depositing a multilayer coating on discrete sheets
01/19/2005EP1497852A2 Method and apparatus for connecting vertically stacked integrated circuit chips
01/19/2005EP1497851A2 Program-controlled dicing of a substrate using a pulsed laser
01/19/2005EP1497849A1 Silicon parts for plasma reaction chambers
01/19/2005EP1497798A1 Controlling device for monitoring the spatial or mechanical delimitation of producer goods or materials in the production cycle by using transponder technology
01/19/2005EP1497701A2 Method and apparatus for simplified system configuration
01/19/2005EP1497699A1 Attenuated embedded phase shift photomask blanks
01/19/2005EP1497697A2 Photoresist compositions comprising acetals and ketals as solvents
01/19/2005EP1497695A2 Nanoimprint resist
01/19/2005EP1497621A1 Semiconductor load port alignment device
01/19/2005EP1497611A2 Scatterometric measurement of undercut multi-layer diffracting structures
01/19/2005EP1497485A1 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
01/19/2005EP1497481A2 Method and device for depositing thin layers on a substrate in a height-adjustable process chamber
01/19/2005EP1497478A2 Device for targeted application of deposition material to a substrate
01/19/2005EP1497408A2 Method for making a molecularly smooth surface
01/19/2005EP1497375A1 Polysulfone compositions exhibiting very low color and high light transmittance properties and articles made therefrom
01/19/2005EP1497226A2 Method for producing nitrides
01/19/2005EP1497076A1 Method and apparatus for heating polishing pad
01/19/2005EP1497046A1 In-situ local heating using megasonic transducer resonator
01/19/2005EP1448669A4 Polyimide copolymer and methods for preparing the same
01/19/2005EP1360513A4 Multiple-capture dft system for detecting or locating crossing clock-domain faults during self-test or scan test
01/19/2005EP1256007A4 Decompressor/prpg for applying pseudo-random and deterministic test patterns
01/19/2005EP1194803B1 Broad band ultraviolet catadioptric imaging system
01/19/2005EP1133442A4 Opening system compatible with a vertical interface
01/19/2005EP1121840B1 Soldering of a semiconductor chip to a substrate
01/19/2005EP1118259B1 Assembly device
01/19/2005EP1032949B1 Semiconductor element, especially a solar cell, and method for the production thereof
01/19/2005EP1025512A4 Software system and method for extending classifications and attributes in production analysis
01/19/2005EP0943158B1 Affinity based self-assembly systems and devices for photonic and electronic applications
01/19/2005EP0801606B1 Method for treating a surface
01/19/2005CN2672855Y Multi path micro flow control chip unit detecting system
01/19/2005CN2672854Y Ion injector for polysilicon film transistor
01/19/2005CN2672685Y Electro-optical device and electronic device
01/19/2005CN1568549A Thin-film semiconductor device and its manufacturing method
01/19/2005CN1568548A Thin film transistor device and method of manufacturing same
01/19/2005CN1568547A Triggering of an ESD NMOS through the use of an n-type buried layer
01/19/2005CN1568546A Semiconductor device and method of manufacturing the same
01/19/2005CN1568543A Semiconductor component
01/19/2005CN1568540A Method of obtaining a self-supported thin semiconductor layer for electronic circuits
01/19/2005CN1568539A Providing photonic control over wafer borne semiconductor devices
01/19/2005CN1568538A Capping layer for improved silicide formation in narrow semiconductor structures
01/19/2005CN1568537A Selective metal oxide removal
01/19/2005CN1568536A An apparatus and method for controlling galvanic corrosion effects on a single-wafer cleaning system
01/19/2005CN1568535A Metal-insulator-metal (MIM) capacitor structure and methods of fabricating same
01/19/2005CN1568534A Metal-insulator-metal capacitor in copper
01/19/2005CN1568523A Sense amplifier and architecture for open digit arrays
01/19/2005CN1568444A Photosnesitive resin composition comprising quinonediazide sulfate ester compound
01/19/2005CN1568433A Methods of conducting wafer level burn-in of electronic devices
01/19/2005CN1568432A Providing current control over wafer borne semiconductor devices using trenches
01/19/2005CN1568431A Systems for wafer level burn-in of electronic devices
01/19/2005CN1568430A Method and apparatus for accelerated determination of electromigration characteristics of semiconductor wiring
01/19/2005CN1568429A Providing current control over wafer borne semiconductor devices using overlayer patterns
01/19/2005CN1568379A Methods for the production of components and ultra high vacuum cvd reactor
01/19/2005CN1568378A Hafnium silicide target and manufacturing method for preparation thereof
01/19/2005CN1568376A Method of depositing a material layer
01/19/2005CN1568284A Micromachine and production method thereof
01/19/2005CN1568244A Assembly system for stationing semiconductor wafer suitable for processing and process for manufacturing semiconductor wafer
01/19/2005CN1567735A Semiconductor thin film and method of manufacturing the same and semiconductor device and method of manufacturing the same
01/19/2005CN1567711A Oscillating circuit and manufacturing method thereof
01/19/2005CN1567602A Method for making a multi-electrode gallium nitride based semiconductor device
01/19/2005CN1567595A A double-grid MOS transistor and method for making same
01/19/2005CN1567593A Fin-shaped element of insulating silicon chip and method for forming same
01/19/2005CN1567591A Image sensor packaging structure and packaging method
01/19/2005CN1567590A A CMOS integrated circuit and method for making same
01/19/2005CN1567588A Sandwich antireflection structural metal layer of semiconductor and making process thereof
01/19/2005CN1567587A Packaging structure of high speed memory
01/19/2005CN1567584A Semiconductor packaging element with chip planted conductive lug and making method thereof
01/19/2005CN1567583A External electrode material of chip type electronic module and preparing method thereof