| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/18/2005 | US6844268 Method for fabricating a semiconductor storage device having an increased dielectric film area |
| 01/18/2005 | US6844267 Anisotropic etching of organic-containing insulating layers |
| 01/18/2005 | US6844266 Anisotropic etching of organic-containing insulating layers |
| 01/18/2005 | US6844265 Etching method |
| 01/18/2005 | US6844264 Dry etching method |
| 01/18/2005 | US6844263 LSI device polishing composition and method for producing LSI device |
| 01/18/2005 | US6844262 CMP process |
| 01/18/2005 | US6844261 Method of forming ruthenium and ruthenium oxide films on a semiconductor structure |
| 01/18/2005 | US6844260 Insitu post atomic layer deposition destruction of active species |
| 01/18/2005 | US6844259 Method for forming contact plug in semiconductor device |
| 01/18/2005 | US6844258 Selective refractory metal and nitride capping |
| 01/18/2005 | US6844257 Porous low-k dielectric interconnects with improved adhesion produced by partial burnout of surface porogens |
| 01/18/2005 | US6844255 Methods of providing an interlevel dielectric layer intermediate different elevation conductive metal layers in the fabrication of integrated circuitry |
| 01/18/2005 | US6844254 Semiconductor device having bonding pad electrode of multi-layer structure |
| 01/18/2005 | US6844253 Selective deposition of solder ball contacts |
| 01/18/2005 | US6844252 Semiconductor processing methods of forming a conductive gate and line |
| 01/18/2005 | US6844251 Method of forming a semiconductor device with a junction termination layer |
| 01/18/2005 | US6844250 Method and system for laser thermal processing of semiconductor devices |
| 01/18/2005 | US6844249 Method for manufacturing a semiconductor device using laser light |
| 01/18/2005 | US6844248 Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells |
| 01/18/2005 | US6844247 Semiconductor device and method of manufacturing the same |
| 01/18/2005 | US6844246 Production method of III nitride compound semiconductor, and III nitride compound semiconductor element based on it |
| 01/18/2005 | US6844245 Method of preparing a self-passivating Cu laser fuse |
| 01/18/2005 | US6844244 Dual sided lithographic substrate imaging |
| 01/18/2005 | US6844243 Methods of forming semiconductor constructions |
| 01/18/2005 | US6844242 Method of manufacturing SOI wafer |
| 01/18/2005 | US6844241 Fabrication of semiconductor structures having multiple conductive layers in an opening |
| 01/18/2005 | US6844240 Semiconductor device having trench isolation |
| 01/18/2005 | US6844239 Method for forming shallow well of semiconductor device using low-energy ion implantation |
| 01/18/2005 | US6844238 Multiple-gate transistors with improved gate control |
| 01/18/2005 | US6844237 Method for improving dielectric polishing |
| 01/18/2005 | US6844236 Method and structure for DC and RF shielding of integrated circuits |
| 01/18/2005 | US6844235 Reticle repeater monitor wafer and method for verifying reticles |
| 01/18/2005 | US6844234 Semiconductor device and method for manufacturing semiconductor device |
| 01/18/2005 | US6844233 Semiconductor memory device and fabrication method thereof using damascene gate and epitaxial growth |
| 01/18/2005 | US6844232 Flash memory device and fabricating method therefor |
| 01/18/2005 | US6844231 Method of manufacturing a flash memory cell using a self-aligned floating gate |
| 01/18/2005 | US6844230 Methods of forming capacitors and resultant capacitor structures |
| 01/18/2005 | US6844229 Method of manufacturing semiconductor device having storage electrode of capacitor |
| 01/18/2005 | US6844228 Manufacturing method of a semiconductor device capable of accurately setting a resistance value of a resistance element |
| 01/18/2005 | US6844227 Semiconductor devices and method for manufacturing the same |
| 01/18/2005 | US6844226 System and method to reduce noise in a substrate |
| 01/18/2005 | US6844225 Self-aligned mask formed utilizing differential oxidation rates of materials |
| 01/18/2005 | US6844224 Substrate contact in SOI and method therefor |
| 01/18/2005 | US6844223 Semiconductor device having silicon on insulator and fabricating method therefor |
| 01/18/2005 | US6844219 Semiconductor device and lead frame therefor |
| 01/18/2005 | US6844217 Die support structure |
| 01/18/2005 | US6844214 Microelectromechanical system based sensors, sensor arrays, sensing systems, sensing methods and methods of fabrication |
| 01/18/2005 | US6844210 Organic electroluminescence device and method of manufacturing same |
| 01/18/2005 | US6844208 Method and system for monitoring implantation of ions into semiconductor substrates |
| 01/18/2005 | US6844204 Magnetic random access memory |
| 01/18/2005 | US6844203 Gate oxides, and methods of forming |
| 01/18/2005 | US6844143 Sandwich photoresist structure in photolithographic process |
| 01/18/2005 | US6844135 Chemically amplified resist material and patterning method using same |
| 01/18/2005 | US6844134 For semiconductors; high transmittance; improved dry etching resistance, adhesiveness, and wettability |
| 01/18/2005 | US6844132 Positive photosensitive compositions |
| 01/18/2005 | US6844123 System for production of large area display panels with improved precision |
| 01/18/2005 | US6844119 Alternately laminating, on a transparent substrate, thin layers made of tintanium nitride and thin layers made of silicon nitride to form multilayered semi-transmission film, heating the film at 300 degree C. or higher |
| 01/18/2005 | US6844117 Reactive ion etching using a mixed gas including an oxygen containing gas and a halogen containing gas, and a reducing gas for dry etching a metal film; high precision pattern-etched product; dry etching apparatus |
| 01/18/2005 | US6844076 Silicon oxide based gate dielectric layer |
| 01/18/2005 | US6844074 Quartz layer; vibrators, oscillators, high frequency filter surface acoustic wave elements, optical waveguides, semicon-ductors; atmospheric pressure vapor phase epitaxial deposited silicate on gallium nitride or zinc oxide buffered substrate |
| 01/18/2005 | US6844052 Method for underfilling semiconductor components |
| 01/18/2005 | US6844027 Environment exchange control for material on a wafer surface |
| 01/18/2005 | US6844023 Alumina insulation for coating implantable components and other microminiature devices |
| 01/18/2005 | US6843975 Oxide sintered body and manufacturing method thereof |
| 01/18/2005 | US6843929 Accelerated etching of chromium |
| 01/18/2005 | US6843927 Method and apparatus for endpoint detection in electron beam assisted etching |
| 01/18/2005 | US6843926 In-situ measurement of wafer position on lower electrode |
| 01/18/2005 | US6843893 Metal dry etch using electronic field |
| 01/18/2005 | US6843883 Vacuum processing apparatus and method for producing an object to be processed |
| 01/18/2005 | US6843882 Gas flow control in a wafer processing system having multiple chambers for performing same process |
| 01/18/2005 | US6843880 Enhanced endpoint detection for wet etch process control |
| 01/18/2005 | US6843879 Separation method for object and glue membrane |
| 01/18/2005 | US6843859 Dump door |
| 01/18/2005 | US6843857 Rotating articles within chamber, applying heated liquid comprising water onto rotating articles, introducing ozone gas and carbon dioxide gas into chamber, ozone oxidizing contaminants on articles, cleaning articles |
| 01/18/2005 | US6843855 TDrying chamber is supercritical or low pressure; the wet-cleaning chamber is single-wafer, horizontal spinning, megasonic wet-cleaning, or horizontal spinning having acoustic waves transmitted to the substrate. |
| 01/18/2005 | US6843848 Semiconductor wafer made from silicon and method for producing the semiconductor wafer |
| 01/18/2005 | US6843847 Silicon single crystal wafer and production method thereof and soi wafer |
| 01/18/2005 | US6843833 Front opening unified pod and associated method for preventing outgassing pollution |
| 01/18/2005 | US6843816 Cerium-based abrasive material and method for preparation thereof |
| 01/18/2005 | US6843809 Vacuum/purge operation of loadlock chamber and method of transferring a wafer using said operation |
| 01/18/2005 | US6843711 Chemical mechanical polishing pad having a process-dependent groove configuration |
| 01/18/2005 | US6843709 Chemical mechanical polishing method for reducing slurry reflux |
| 01/18/2005 | US6843707 Methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing |
| 01/18/2005 | US6843704 Method and apparatus for automatically loading a double-sided polishing machine with wafer crystals |
| 01/18/2005 | US6843572 Form-error-cancelling mirror-support devices and related methods, and microlithography systems comprising same |
| 01/18/2005 | US6843259 Solution treatment unit |
| 01/18/2005 | US6843257 Rotating wafer; prevent damage; pattern of transverse groove in cleaning detector; controlled spinning |
| 01/18/2005 | US6843202 Thermal processing apparatus for substrate employing photoirradiation |
| 01/18/2005 | US6843201 Temperature control for single substrate semiconductor processing reactor |
| 01/18/2005 | US6843122 Mass flow controller for control purge and managing method of the same |
| 01/18/2005 | US6843069 Etching apparatus |
| 01/18/2005 | US6842933 Substrate cleaning apparatus and cleaning member |
| 01/18/2005 | US6842932 Cleaning processing system and cleaning processing apparatus |
| 01/18/2005 | CA2472900A1 Device with microwave integrated circuits shielded by elastic contact element(s) |
| 01/13/2005 | WO2005004564A1 REFLOW SOLDERING METHOD USING Pb-FREE SOLDER ALLOY AND HYBRID PACKAGING METHOD AND STRUCTURE |
| 01/13/2005 | WO2005004316A1 Dc/dc converter using bipolar transistor, method of manufacturing the same and dc power supply module using the same |
| 01/13/2005 | WO2005004237A1 Method for interconnecting active and passive components, and a resulting thin heterogeneous component |
| 01/13/2005 | WO2005004234A1 Selective capping of copper wiring |
| 01/13/2005 | WO2005004233A1 Method for obtaining a structure having a supporting substrate and an ultra-thin layer |