| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/27/2005 | US20050019979 Fabrication method of semiconductor integrated circuit device |
| 01/27/2005 | US20050019978 Systems and methods for forming tantalum oxide layers and tantalum precursor compounds |
| 01/27/2005 | US20050019974 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 01/27/2005 | US20050019973 Phase array oxide-confined VCSEL |
| 01/27/2005 | US20050019972 Fabrication method of semiconductor device |
| 01/27/2005 | US20050019970 Active matrix substrate for a liquid crystal display and method of forming the same |
| 01/27/2005 | US20050019969 Method for manufacturing thin film transistor array panel |
| 01/27/2005 | US20050019967 Method of fabricating a microelectronic die |
| 01/27/2005 | US20050019965 Process for testing IC wafer |
| 01/27/2005 | US20050019964 Method and system for determining a component concentration of an integrated circuit feature |
| 01/27/2005 | US20050019962 Plasma monitoring method, plasma processing method, method of manufacturing semiconductor device, and plasma processing system |
| 01/27/2005 | US20050019961 Method for automatic determination of semiconductor plasma chamber matching and source of fault by comprehensive plasma monitoring |
| 01/27/2005 | US20050019960 Method and apparatus for forming a ferroelectric layer |
| 01/27/2005 | US20050019709 Method and apparatus for maintaining a machine part |
| 01/27/2005 | US20050019708 Phase-shifting mask and method of forming pattern using the same |
| 01/27/2005 | US20050019705 Applying iquid coating layer of a positive-acting photoresist comprising photoacid generator and resin on substrate surface; removing solvent; exposure to patterned activating radiation; heating; developing to form relief image |
| 01/27/2005 | US20050019704 Coating substrates with subbing layers comprising terpolymers and acid generators, then covering with ultraviolet radiation layers, exposing and selectively etching to form patterns; miniaturization; microelectronics |
| 01/27/2005 | US20050019696 Photoresist composition |
| 01/27/2005 | US20050019692 Resist material and method for pattern formation |
| 01/27/2005 | US20050019689 Stimulus-sensitive composition, compound and pattern formation method using the stimulation-sensitive composition |
| 01/27/2005 | US20050019678 Method of selecting photomask blank substrates |
| 01/27/2005 | US20050019676 Method of selecting photomask blank substrates |
| 01/27/2005 | US20050019675 Lithographic apparatus, device manufacturing method, and mask |
| 01/27/2005 | US20050019674 Suppress the loading effect and achieve a high CD (critical dimension) accuracy when forming a highly accurate pattern by dry etching; photomask blank having, on the light-transmissive substrate, a chromium film, an etching mask film having a resistance against etching of the chromium film, and a resist |
| 01/27/2005 | US20050019592 cyano-functional styrenic polymers with high dielectric constant; high observed device mobilities; capable of being solution-deposited, e.g., by spin-coating |
| 01/27/2005 | US20050019534 Method for producing a hybrid product composed of several wiring planes, as well as a sensor or evaluation circuit and a control device with hybrid product produced by the inventive method |
| 01/27/2005 | US20050019500 Coupling a heat resistant porphyrins derivatized with an attachment group to a silicon or germanium semiconductor surface by heating to at least 200 degrees Celsius; integrated circuits |
| 01/27/2005 | US20050019498 Treating a substrate coated with a film made of a high dielectric constant material with a heated treatment solution containing phosphoric acid; semiconductors; liquid crystal displays; leak current inhibition |
| 01/27/2005 | US20050019493 Method for controlling deposition of dielectric films |
| 01/27/2005 | US20050019166 Methods of handling wind turbine blades and mounting said blades on a wind turbine, system and gripping unit for handling a wind turbine blade |
| 01/27/2005 | US20050019146 Device for selectively displacing holding devices and fitting head for transporting components |
| 01/27/2005 | US20050018997 Lithographic apparatus and device manufacturing method |
| 01/27/2005 | US20050018733 Semiconductor laser device and manufacturing method therefor |
| 01/27/2005 | US20050018525 Semiconductor device and method for fabricating the same |
| 01/27/2005 | US20050018515 Stress balanced semiconductor packages, method of fabrication and modified mold segment |
| 01/27/2005 | US20050018508 Embedded ROM device using substrate leakage |
| 01/27/2005 | US20050018500 Device and method to read a 2-transistor flash memory cell |
| 01/27/2005 | US20050018489 Non-volatile semiconductor memory device and electric device with the same |
| 01/27/2005 | US20050018485 Semiconductor memory |
| 01/27/2005 | US20050018479 Magnetic storage cell and magnetic memory device using same |
| 01/27/2005 | US20050018478 Magnetic random access memory device having thermal agitation property and high write efficiency |
| 01/27/2005 | US20050018476 Magnetoresistive element, magnetic memory cell, and magnetic memory device, and method for manufacturing the same |
| 01/27/2005 | US20050018471 Semiconductor memory device |
| 01/27/2005 | US20050018468 Ferroelectric memory |
| 01/27/2005 | US20050018466 Embedded ROM device using substrate leakage |
| 01/27/2005 | US20050018462 Pattern layout of transfer transistors employed in row decoder |
| 01/27/2005 | US20050018381 Capacitor constructions and methods of forming |
| 01/27/2005 | US20050018380 Capacitor with enhanced performance and method of manufacture |
| 01/27/2005 | US20050018379 Ceramic substrate |
| 01/27/2005 | US20050018377 Electrostatic chuck |
| 01/27/2005 | US20050018376 Electrostatic chuck for wafer |
| 01/27/2005 | US20050018370 Semiconductor integrated circuit device |
| 01/27/2005 | US20050018296 Diffractive optical element and method of making same |
| 01/27/2005 | US20050018289 Simultaneously achieving circular symmetry and diminishing effects of optical defects and deviations during real time use of optical devices |
| 01/27/2005 | US20050018284 Two axis stage for microscope |
| 01/27/2005 | US20050018255 Image-recording apparatus using spatial light-modulation device on which divided reset actuation is performed |
| 01/27/2005 | US20050018210 Method for inspecting an insulator with a library of optic images |
| 01/27/2005 | US20050018207 Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method |
| 01/27/2005 | US20050018196 Measuring method and measuring apparatus of optical energy absorption ratio, and thermal processing apparatus |
| 01/27/2005 | US20050018183 Method and apparatus for determining surface layer thickness using continuous multi-wavelength surface scanning |
| 01/27/2005 | US20050018182 Method and apparatus for classifying defects of an object |
| 01/27/2005 | US20050018169 Substrate holding device, semiconductor manufacturing apparatus and device manufacturing method |
| 01/27/2005 | US20050018168 Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate |
| 01/27/2005 | US20050018167 Method and apparatus for positioning a substrate on a substrate table |
| 01/27/2005 | US20050018166 Stage system, exposure apparatus, and device manufacturing method |
| 01/27/2005 | US20050018165 Stage system, exposure apparatus, and device manufacturing method |
| 01/27/2005 | US20050018162 Lithographic apparatus, device manufacturing method, and angular encoder |
| 01/27/2005 | US20050018161 Positioning method, and positioning apparatus |
| 01/27/2005 | US20050018160 Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device |
| 01/27/2005 | US20050018159 Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method |
| 01/27/2005 | US20050018157 Lithographic projection apparatus and device manufacturing method |
| 01/27/2005 | US20050018156 Lithographic apparatus and device manufacturing method |
| 01/27/2005 | US20050018155 Lithographic apparatus and device manufacturing method |
| 01/27/2005 | US20050018154 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 01/27/2005 | US20050018122 Substrate bonding apparatus for liquid crystal display device panel |
| 01/27/2005 | US20050018112 Reflection type liquid crystal display and a method for manufacturing the same |
| 01/27/2005 | US20050018097 Array substrate having double-layered metal patterns and method of fabricating the same |
| 01/27/2005 | US20050017979 Non-volatile memory parallel processor |
| 01/27/2005 | US20050017933 Display device and method of driving the same |
| 01/27/2005 | US20050017837 Integrated transformer |
| 01/27/2005 | US20050017836 Inductors having interconnect and inductor portions to provide combined magnetic fields |
| 01/27/2005 | US20050017831 Alignment apparatus |
| 01/27/2005 | US20050017820 High frequency switch and electronic device including the same |
| 01/27/2005 | US20050017796 Input protection circuit |
| 01/27/2005 | US20050017789 Switch circuit and method of switching radio frequency signals |
| 01/27/2005 | US20050017787 Gate driving circuit and semiconductor device |
| 01/27/2005 | US20050017745 Semiconductor integrated circuit, and electrostatic withstand voltage test method and apparatus therefor |
| 01/27/2005 | US20050017741 Wafer probe station having environment control enclosure |
| 01/27/2005 | US20050017740 Module part |
| 01/27/2005 | US20050017529 Active edge gripping end effector |
| 01/27/2005 | US20050017414 Method of forming a three-dimensional structure |
| 01/27/2005 | US20050017377 FET channel having a strained lattice structure along multiple surfaces |
| 01/27/2005 | US20050017376 IC chip with improved pillar bumps |
| 01/27/2005 | US20050017374 Semiconductor component of semiconductor chip size with flip-chip-like external contacts, and method of producing the same |
| 01/27/2005 | US20050017373 Electronic circuit device and its manufacturing method |
| 01/27/2005 | US20050017372 Prevent short circuiting; flip chip bonding |
| 01/27/2005 | US20050017371 Electronic assembly having a die with rounded corner edge portions and a method of fabricating the same |
| 01/27/2005 | US20050017368 Multi-level redistribution layer traces for reducing current crowding in flipchip solder bumps |
| 01/27/2005 | US20050017367 Abrasive of precipitated silica, an oxidizer of ammonium persulfate, a corrosion inhibitor of barium and a buffer system; ph of 8-11.5 |
| 01/27/2005 | US20050017365 Replenishment of surface carbon and surface passivation of low-k porous silicon-based dielectric materials |