Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2005
01/27/2005US20050016751 Microelectronic package with reduced underfill and methods for forming such packages
01/27/2005US20050016687 Single-substrate-heat-processing apparatus for performing reformation and crystallization
01/27/2005US20050016686 Apparatus and method for fabricating semiconductor devices
01/27/2005US20050016685 Substrate holding technique
01/27/2005US20050016684 Process kit for erosion resistance enhancement
01/27/2005US20050016683 Plasma electron density measuring and monitoring device
01/27/2005US20050016682 Method of setting etching parameters and system therefor
01/27/2005US20050016681 Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface
01/27/2005US20050016680 Device for etching rinsing and drying substrates in an ultra-clean atmosphere
01/27/2005US20050016678 Method of manufacturing semiconductor device and manufacturing apparatus of semiconductor device
01/27/2005US20050016672 Melt-flow controlling method for elastomer by uv irradiation
01/27/2005US20050016577 Process for preparing nano-porous metal oxide semiconductor layers
01/27/2005US20050016568 Apparatus and method for cleaning of semiconductor device manufacturing equipment
01/27/2005US20050016567 Substrate treatment apparatus
01/27/2005US20050016565 Cleaning masks
01/27/2005US20050016470 Susceptor and deposition apparatus including the same
01/27/2005US20050016469 Downward mechanism for support pins
01/27/2005US20050016468 Compensation frame for receiving a substrate
01/27/2005US20050016467 System and method for dry chamber temperature control
01/27/2005US20050016466 Susceptor with raised tabs for semiconductor wafer processing
01/27/2005US20050016465 Electrostatic chuck having electrode with rounded edge
01/27/2005US20050016464 Methods and fixtures for facilitating handling of thin films
01/27/2005US20050016454 Dual substrate loadlock process equipment
01/27/2005US20050016452 Gas supply unit and semiconductor device manufacturing apparatus using the same
01/27/2005US20050016451 Interchangeable microdesition head apparatus and method
01/27/2005US20050016446 CaF2 lenses with reduced birefringence
01/27/2005US20050016321 Apparatus for opening and closing cover
01/27/2005US20050016251 Forming tool for forming a contoured microelectronic spring mold
01/27/2005US20050016217 Method for manufacturing optical waveguide, optical waveguide device, electro-optical apparatus and electronic apparatus
01/27/2005US20050016201 Multi-staged heating system for fabricating microelectronic devices
01/27/2005US20050015970 Method, system, and apparatus for transfer of dies using a pin plate
01/27/2005US20050015903 Seal system for irrigated scrubber mandrel assembly
01/27/2005DE19901894B4 Verfahren zum Herstellen einer Halbleitervorrichtung die einen Speicherknoten aufweist A method of manufacturing a semiconductor device having a storage node
01/27/2005DE10361707A1 Verfahren zum Herstellen eines Flash-Speicherbausteins A method of manufacturing a flash memory device
01/27/2005DE10339998B3 Forming releasable bond between semiconductor substrate and support comprises using a triethoxysilylalkylamine adhesive
01/27/2005DE10338024B3 Raster electron microscope process to monitor the presence of corrosive substances present in the vicinity of semiconductor manufacture
01/27/2005DE10332112A1 Manufacturing semiconductor, other finely-structured components involves setting working distance at least temporarily to less than maximum size of optical near field of emanating projection light
01/27/2005DE10331594A1 Inspecting structures on semiconducting wafers involves assigning region(s) of interest to structural element in single element, transferring to corresponding structural element in other elements
01/27/2005DE10331132A1 Verfahren zum Reinigen einer metallischen Oberfläche A method of cleaning a metallic surface
01/27/2005DE10330005A1 Vorrichtung zur Inspektion eines Wafers Apparatus for inspecting a wafer
01/27/2005DE10329212A1 Process for preparation of an integrated circuit on an Si substrate with a number of MOS-transistors useful for electronic devices
01/27/2005DE10329101A1 Semiconductor components containing substrate and power semiconductor chip with source terminal fitted on substrate with rear contacting, while source terminal and forwarding conductor
01/27/2005DE10328811A1 Verbindung zur Bildung einer selbstorganisierenden Monolage, Schichtstruktur, Halbleiterbauelement mit einer Schichtstruktur und Verfahren zur Herstellung einer Schichtstruktur Compound to form a self-assembled monolayer layer structure semiconductor device having a layer structure and process for producing a layer structure
01/27/2005DE10297648T5 Prüfstation Inspection station
01/27/2005DE10297642T5 Verfahren und Vorrichtung zum Steuern der Höhe der Chiphalterandnaht, um Chipscherungsbelastungen zu reduzieren Method and apparatus for controlling the height of the chip holding edge seam to reduce Chipscherungsbelastungen
01/27/2005DE10297349T5 Halbleiterstruktur mit verbesserten geringeren Durchlassspannungsverlusten und höherer Sperrfähigkeit Semiconductor structure having improved lower forward voltage loss and higher blocking capability
01/27/2005DE102004030806A1 Halbleitrvorrichtung und Verfahren zur Herstellung derselben Halbleitrvorrichtung and methods for making the same
01/27/2005DE102004029093A1 Halbleiterwafer-Unterteilungsverfahren unter Verwendung eines Laserstrahls A semiconductor wafer dividing method using a laser beam
01/27/2005DE102004028425A1 Semiconductor device e.g. integrated circuit comprises dummy pattern formed within measurement pattern so as to decrease empty space in surface cross-section of measurement pattern
01/27/2005DE102004027152A1 Flüssigkristallanzeigevorrichtung, welche Dünnschichttransistoren mit polykristallinem Silizium aufweist, und Verfahren zum Herstellen derselben A liquid crystal display device which has thin film transistors with polycrystalline silicon, and process for producing same
01/27/2005DE102004025111A1 Verfahren zum Ausbilden einer Speicherzelle, Speicherzelle und Zwischenverbindungsstruktur eines Speicherzellenfeldes A method of forming a memory cell, memory cell and the interconnect structure of a memory cell array,
01/27/2005DE102004008218A1 Wiedergewinnen von in einem integrierten Magnetspeicher gespeicherten Daten Retrieving data stored in an integrated magnetic memory data
01/27/2005DE102004007978A1 Multichip-Modul Multichip module
01/27/2005DE102004006494A1 Semiconducting wafer has separation longer than sum of difference between maximum, minimum final tolerances of wafer, bearer plate diameter and maximum positioning error when wafer and plate joined
01/27/2005DE10195941T5 Halbleiter-Bearbeitungsverfahren zum Entfernen leitfähigen Materials Semiconductor processing method of removing conductive material
01/27/2005DE10141571B4 Verfahren zum Zusammenbau eines Halbleiterbauelements und damit hergestellte integrierte Schaltungsanordnung, die für dreidimensionale, mehrschichtige Schaltungen geeignet ist A method of assembling a semiconductor device and integrated circuit arrangement so manufactured, which is suitable for three-dimensional, multi-layer circuits
01/27/2005CA2532114A1 Abrasive particles for chemical mechanical polishing
01/27/2005CA2532033A1 Method of forming a scribe line on a passive electronic component substrate
01/27/2005CA2525618A1 Semi-insulating gan and method of making the same
01/26/2005EP1501162A2 Phase array oxide-confined vcsels
01/26/2005EP1501151A1 High frequency switch and electronic device containing the same
01/26/2005EP1501131A1 Stacked photovoltaic element and production method thereof
01/26/2005EP1501130A1 Semiconductor MOS device and related manufacturing method
01/26/2005EP1501128A1 Three - dimensional ferro-electric memory cell and manufacturing process thereof
01/26/2005EP1501127A2 Power semiconductor module with base plate having high bending stiffness
01/26/2005EP1501126A1 Semiconductor chip having a cavity for stacked die application
01/26/2005EP1501123A2 Adherence of structures comprising badly adhering material
01/26/2005EP1501122A1 High resistance silicon wafer and method for production thereof
01/26/2005EP1501121A1 Film formation method
01/26/2005EP1501120A1 Method for thinning wafer by grinding
01/26/2005EP1501119A1 Semiconductor wafer manufacturing method and wafer
01/26/2005EP1501118A1 Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method
01/26/2005EP1501117A1 Substrate for growing gallium nitride, method for preparing substrate for growing gallium nitride and method for preparing gallium nitride substrate
01/26/2005EP1501116A2 Electrostatic chuck having electrode with rounded edge
01/26/2005EP1501067A1 Display device
01/26/2005EP1501020A1 A non-volatile memory parallel processor
01/26/2005EP1500996A2 Inspection data analysis program, inspection tools, review apparatus and yield analysis apparatus
01/26/2005EP1500987A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
01/26/2005EP1500986A1 Lithographic apparatus and device manufacturing method
01/26/2005EP1500985A2 Safety mechanism for a lithographic patterning device
01/26/2005EP1500982A1 Lithographic apparatus and device manufacturing method
01/26/2005EP1500981A1 Lithographic apparatus and device manufacturing method
01/26/2005EP1500979A1 Lithographic apparatus and device manufacturing method
01/26/2005EP1500977A1 Radiation-sensitive composition, compound and pattern formation method using the radiation-sensitive composition
01/26/2005EP1500974A2 A method, program product and apparatus of simultaneous optimization for na-sigma exposure settings and scattering bars opc using a device layout
01/26/2005EP1500851A2 Apparatus for opening and closing cover
01/26/2005EP1500720A1 Dry etching method for magnetic material
01/26/2005EP1500515A2 Addressing the imaging elements of a spatial light modulator in an image recording apparatus
01/26/2005EP1500317A1 Method of manufacturing an electronic device
01/26/2005EP1500286A2 Temporal transition network protocol (ttnp) in a mobile ad hoc network
01/26/2005EP1500149A1 Silicon particles used as additives for improving the charge carrier mobility in organic semiconductors
01/26/2005EP1500145A1 Data communication bus
01/26/2005EP1500143A1 Low input capacitance electrostatic discharge protection circuit utilizing feedback
01/26/2005EP1500142A2 Component
01/26/2005EP1500141A1 Electronic device and method of manufacturing same
01/26/2005EP1500140A1 Integrated circuit with integrated capacitor and methods for making same
01/26/2005EP1500137A1 Carrier, method of manufacturing a carrier and an electronic device
01/26/2005EP1500136A1 Semiconductor device and method of manufacturing same
01/26/2005EP1500135A1 Method of manufacturing an electronic device, and electronic device
01/26/2005EP1500134A1 Method of manufacturing an electronic device