Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2005
02/01/2005US6849515 Semiconductor process for disposable sidewall spacers
02/01/2005US6849514 Method of manufacturing SONOS flash memory device
02/01/2005US6849513 Semiconductor device and production method thereof
02/01/2005US6849512 Thin gate dielectric for a CMOS transistor and method of fabrication thereof
02/01/2005US6849511 Semiconductor device and method for fabricating the same including interconnection of two electrodes
02/01/2005US6849510 Non-oxidizing spacer densification method for manufacturing semiconductor devices
02/01/2005US6849509 Methods of forming a multilayer stack alloy for work function engineering
02/01/2005US6849507 Process for manufacture of low voltage power MOSFET device
02/01/2005US6849506 Non-volatile memory device and fabrication method
02/01/2005US6849505 Semiconductor device and method for fabricating the same
02/01/2005US6849504 Method for fabricating flash memory
02/01/2005US6849503 Method for forming metal interconnections for flash memory device
02/01/2005US6849502 Semiconductor device and method of manufacturing the same
02/01/2005US6849501 Methods for fabricating an improved floating gate memory cell
02/01/2005US6849500 Method for manufacturing a nonvolatile memory device including an opening formed into an inverse-tapered shape
02/01/2005US6849499 Process for flash memory cell
02/01/2005US6849498 Method of manufacturing semiconductor capacitor
02/01/2005US6849497 Method of fabricating a semiconductor integrated circuit including a capacitor formed on a single insulating substrate layer having lower boron dose in the vicinity of the surface thereof
02/01/2005US6849496 DRAM with vertical transistor and trench capacitor memory cells and method of fabrication
02/01/2005US6849495 Selective silicidation scheme for memory devices
02/01/2005US6849494 Dielectric cure for reducing oxygen vacancies
02/01/2005US6849493 Methods of forming polished material and methods of forming isolation regions
02/01/2005US6849492 Method for forming standard voltage threshold and low voltage threshold MOSFET devices
02/01/2005US6849491 Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices
02/01/2005US6849490 Semiconductor device having a memory cell region and a peripheral circuit region and method of manufacturing thereof
02/01/2005US6849489 Method for forming transistors with ultra-short gate feature
02/01/2005US6849487 Method for forming an electronic structure using etch
02/01/2005US6849486 Method of manufacturing a thinned gate electrode utilizing protective films and etching
02/01/2005US6849485 Process sequence and mask layout to reduce junction leakage for a dual gate MOSFET device
02/01/2005US6849484 Method of manufacturing semiconductor device
02/01/2005US6849483 Charge trapping device and method of forming the same
02/01/2005US6849482 Semiconductor device, and method of forming the same
02/01/2005US6849481 Thyristor-based SRAM and method for the fabrication thereof
02/01/2005US6849480 Surface mount IC stacking method and device
02/01/2005US6849479 Substrate based ESD network protection method for flip chip design
02/01/2005US6849477 Method of fabricating and mounting flip chips
02/01/2005US6849472 Nitride semiconductor device with reduced polarization fields
02/01/2005US6849471 Barrier layers for microelectromechanical systems
02/01/2005US6849470 Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device
02/01/2005US6849469 Monitor and control of silicidation using fourier transform infrared scatterometry
02/01/2005US6849468 Method for manufacturing ferroelectric random access memory capacitor
02/01/2005US6849467 MOCVD of TiO2 thin film for use as FeRAM H2 passivation layer
02/01/2005US6849466 Method for manufacturing MTJ cell of magnetic random access memory
02/01/2005US6849465 Method of patterning a magnetic memory cell bottom electrode before magnetic stack deposition
02/01/2005US6849464 Method of fabricating a multilayer dielectric tunnel barrier structure
02/01/2005US6849391 Alkali-soluble novolak resin and a photosensitive compound having a naphthoquinone diazide group; absorption coefficient alpha of the photoresist for an exposure light falls in the range of 0.5<alpha</=7
02/01/2005US6849389 Lower sulfite/sulfate concentration on the wafer due to plasma treatment translates into less moisture pick up and prevents high aspect ratio collapse; microelectronics
02/01/2005US6849387 Multilayer lithography
02/01/2005US6849384 Photoacid generators, photoresist compositions containing the same and pattering method with the use of the compositions
02/01/2005US6849381 Copolymers and photoresist compositions comprising same
02/01/2005US6849378 Photosensitive polymers, resist compositions comprising the same, and methods for forming photoresistive patterns
02/01/2005US6849376 Polymers and photoresist compositions comprising same
02/01/2005US6849374 Can be imaged with short wavelength radiation
02/01/2005US6849373 Antireflective coating compositions comprising photoacid generators
02/01/2005US6849308 Method of forming a masking pattern on a surface
02/01/2005US6849305 Photolytic conversion process to form patterned amorphous film
02/01/2005US6849300 Method for forming high dielectric layers using atomic layer deposition
02/01/2005US6849298 Method for forming diffusion barrier film of semiconductor device
02/01/2005US6849200 Composition and process for wet stripping removal of sacrificial anti-reflective material
02/01/2005US6849193 Highly selective process for etching oxide over nitride using hexafluorobutadiene
02/01/2005US6849191 Method and apparatus for treating surface of semiconductor
02/01/2005US6849173 Forming copper seed layer over the sidewalls of opening in patterned dielectric layer; electrochemically removing any copper oxide; electrochemically plating a bulk copper layer over the oxide-free seed layer
02/01/2005US6849167 Electroplating reactor including back-side electrical contact apparatus
02/01/2005US6849166 Ferroelectric thin film element and its manufacturing method, thin film capacitor and piezoelectric actuator using same
02/01/2005US6849154 Plasma etching apparatus
02/01/2005US6849153 Supplying a mixture of etching gas and an acid neutralizing gas into a vacuum chamber in which a water soluble material of sidewall polymer rails left behind on aluminum/copper line from reactive ion etching, removing it with deionized water
02/01/2005US6849134 Minimum volume oven for producing uniform pyrolytic oxide coatings on capacitor anodes
02/01/2005US6849133 CVD apparatuses and methods of forming a layer over a semiconductor substrate
02/01/2005US6849131 Truncated dummy plate for process furnace
02/01/2005US6849123 Plasma processing method and method for manufacturing semiconductor device
02/01/2005US6849119 Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor
02/01/2005US6849099 Colloidal silica, a periodic acid compound, ammonia, ammonium nitrate and water; pH is 1.8-4.0; reduces erosion when used in a final polishing step of manufacturing semiconductors
02/01/2005US6848980 Vibration damping in a carrier head
02/01/2005US6848977 Polishing pad for electrochemical mechanical polishing
02/01/2005US6848975 Electrochemical planarization of metal feature surfaces
02/01/2005US6848974 Polishing pad for semiconductor wafer and polishing process using thereof
02/01/2005US6848882 Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system
02/01/2005US6848625 Process liquid supply mechanism and process liquid supply method
02/01/2005US6848578 Wafer enclosure sealing arrangement for wafer containers
02/01/2005US6848500 Cooling system for pulsed power electronics
02/01/2005US6848498 Temperature control apparatus
02/01/2005US6848458 Apparatus and methods for processing semiconductor substrates using supercritical fluids
02/01/2005US6848457 Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment
02/01/2005US6848455 Comprises simultaneous application of ultraviolet radiation and hydrogen peroxide and dissolved ozone
02/01/2005US6848454 Method of manufacturing semiconductor device
02/01/2005US6848295 Acoustic wave sensor apparatus, method and system using wide bandgap materials
02/01/2005US6848277 Projection lithography photomasks and method of making
02/01/2005US6848198 Heat treatment apparatus and method of heat treatment
02/01/2005US6848194 Apparatus for monitoring a semiconductor wafer during a spin drying operation
02/01/2005US6848191 Apparatus and method for forming a combined substrate structure
02/01/2005US6848177 Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme
02/01/2005US6848176 Process for manufacturing flexible wiring boards
02/01/2005US6848175 Method of forming an out-of-plane structure
02/01/2005US6848174 Apparatus and method for processing electronic components
02/01/2005US6848173 Microelectric packages having deformed bonded leads and methods therefor
02/01/2005US6848171 Method of fabricating temperature control device
02/01/2005US6848162 System and method of transferring dies using an adhesive surface
02/01/2005CA2373565C Beam shaping and projection imaging with solid state uv gaussian beam to form vias
01/2005
01/27/2005WO2005009095A1 A cross-over of conductive interconnects and a method of crossing conductive interconnects
01/27/2005WO2005009089A2 Plasma processing apparatus