| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/01/2005 | US6849515 Semiconductor process for disposable sidewall spacers |
| 02/01/2005 | US6849514 Method of manufacturing SONOS flash memory device |
| 02/01/2005 | US6849513 Semiconductor device and production method thereof |
| 02/01/2005 | US6849512 Thin gate dielectric for a CMOS transistor and method of fabrication thereof |
| 02/01/2005 | US6849511 Semiconductor device and method for fabricating the same including interconnection of two electrodes |
| 02/01/2005 | US6849510 Non-oxidizing spacer densification method for manufacturing semiconductor devices |
| 02/01/2005 | US6849509 Methods of forming a multilayer stack alloy for work function engineering |
| 02/01/2005 | US6849507 Process for manufacture of low voltage power MOSFET device |
| 02/01/2005 | US6849506 Non-volatile memory device and fabrication method |
| 02/01/2005 | US6849505 Semiconductor device and method for fabricating the same |
| 02/01/2005 | US6849504 Method for fabricating flash memory |
| 02/01/2005 | US6849503 Method for forming metal interconnections for flash memory device |
| 02/01/2005 | US6849502 Semiconductor device and method of manufacturing the same |
| 02/01/2005 | US6849501 Methods for fabricating an improved floating gate memory cell |
| 02/01/2005 | US6849500 Method for manufacturing a nonvolatile memory device including an opening formed into an inverse-tapered shape |
| 02/01/2005 | US6849499 Process for flash memory cell |
| 02/01/2005 | US6849498 Method of manufacturing semiconductor capacitor |
| 02/01/2005 | US6849497 Method of fabricating a semiconductor integrated circuit including a capacitor formed on a single insulating substrate layer having lower boron dose in the vicinity of the surface thereof |
| 02/01/2005 | US6849496 DRAM with vertical transistor and trench capacitor memory cells and method of fabrication |
| 02/01/2005 | US6849495 Selective silicidation scheme for memory devices |
| 02/01/2005 | US6849494 Dielectric cure for reducing oxygen vacancies |
| 02/01/2005 | US6849493 Methods of forming polished material and methods of forming isolation regions |
| 02/01/2005 | US6849492 Method for forming standard voltage threshold and low voltage threshold MOSFET devices |
| 02/01/2005 | US6849491 Method of making high-voltage bipolar/CMOS/DMOS (BCD) devices |
| 02/01/2005 | US6849490 Semiconductor device having a memory cell region and a peripheral circuit region and method of manufacturing thereof |
| 02/01/2005 | US6849489 Method for forming transistors with ultra-short gate feature |
| 02/01/2005 | US6849487 Method for forming an electronic structure using etch |
| 02/01/2005 | US6849486 Method of manufacturing a thinned gate electrode utilizing protective films and etching |
| 02/01/2005 | US6849485 Process sequence and mask layout to reduce junction leakage for a dual gate MOSFET device |
| 02/01/2005 | US6849484 Method of manufacturing semiconductor device |
| 02/01/2005 | US6849483 Charge trapping device and method of forming the same |
| 02/01/2005 | US6849482 Semiconductor device, and method of forming the same |
| 02/01/2005 | US6849481 Thyristor-based SRAM and method for the fabrication thereof |
| 02/01/2005 | US6849480 Surface mount IC stacking method and device |
| 02/01/2005 | US6849479 Substrate based ESD network protection method for flip chip design |
| 02/01/2005 | US6849477 Method of fabricating and mounting flip chips |
| 02/01/2005 | US6849472 Nitride semiconductor device with reduced polarization fields |
| 02/01/2005 | US6849471 Barrier layers for microelectromechanical systems |
| 02/01/2005 | US6849470 Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device |
| 02/01/2005 | US6849469 Monitor and control of silicidation using fourier transform infrared scatterometry |
| 02/01/2005 | US6849468 Method for manufacturing ferroelectric random access memory capacitor |
| 02/01/2005 | US6849467 MOCVD of TiO2 thin film for use as FeRAM H2 passivation layer |
| 02/01/2005 | US6849466 Method for manufacturing MTJ cell of magnetic random access memory |
| 02/01/2005 | US6849465 Method of patterning a magnetic memory cell bottom electrode before magnetic stack deposition |
| 02/01/2005 | US6849464 Method of fabricating a multilayer dielectric tunnel barrier structure |
| 02/01/2005 | US6849391 Alkali-soluble novolak resin and a photosensitive compound having a naphthoquinone diazide group; absorption coefficient alpha of the photoresist for an exposure light falls in the range of 0.5<alpha</=7 |
| 02/01/2005 | US6849389 Lower sulfite/sulfate concentration on the wafer due to plasma treatment translates into less moisture pick up and prevents high aspect ratio collapse; microelectronics |
| 02/01/2005 | US6849387 Multilayer lithography |
| 02/01/2005 | US6849384 Photoacid generators, photoresist compositions containing the same and pattering method with the use of the compositions |
| 02/01/2005 | US6849381 Copolymers and photoresist compositions comprising same |
| 02/01/2005 | US6849378 Photosensitive polymers, resist compositions comprising the same, and methods for forming photoresistive patterns |
| 02/01/2005 | US6849376 Polymers and photoresist compositions comprising same |
| 02/01/2005 | US6849374 Can be imaged with short wavelength radiation |
| 02/01/2005 | US6849373 Antireflective coating compositions comprising photoacid generators |
| 02/01/2005 | US6849308 Method of forming a masking pattern on a surface |
| 02/01/2005 | US6849305 Photolytic conversion process to form patterned amorphous film |
| 02/01/2005 | US6849300 Method for forming high dielectric layers using atomic layer deposition |
| 02/01/2005 | US6849298 Method for forming diffusion barrier film of semiconductor device |
| 02/01/2005 | US6849200 Composition and process for wet stripping removal of sacrificial anti-reflective material |
| 02/01/2005 | US6849193 Highly selective process for etching oxide over nitride using hexafluorobutadiene |
| 02/01/2005 | US6849191 Method and apparatus for treating surface of semiconductor |
| 02/01/2005 | US6849173 Forming copper seed layer over the sidewalls of opening in patterned dielectric layer; electrochemically removing any copper oxide; electrochemically plating a bulk copper layer over the oxide-free seed layer |
| 02/01/2005 | US6849167 Electroplating reactor including back-side electrical contact apparatus |
| 02/01/2005 | US6849166 Ferroelectric thin film element and its manufacturing method, thin film capacitor and piezoelectric actuator using same |
| 02/01/2005 | US6849154 Plasma etching apparatus |
| 02/01/2005 | US6849153 Supplying a mixture of etching gas and an acid neutralizing gas into a vacuum chamber in which a water soluble material of sidewall polymer rails left behind on aluminum/copper line from reactive ion etching, removing it with deionized water |
| 02/01/2005 | US6849134 Minimum volume oven for producing uniform pyrolytic oxide coatings on capacitor anodes |
| 02/01/2005 | US6849133 CVD apparatuses and methods of forming a layer over a semiconductor substrate |
| 02/01/2005 | US6849131 Truncated dummy plate for process furnace |
| 02/01/2005 | US6849123 Plasma processing method and method for manufacturing semiconductor device |
| 02/01/2005 | US6849119 Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
| 02/01/2005 | US6849099 Colloidal silica, a periodic acid compound, ammonia, ammonium nitrate and water; pH is 1.8-4.0; reduces erosion when used in a final polishing step of manufacturing semiconductors |
| 02/01/2005 | US6848980 Vibration damping in a carrier head |
| 02/01/2005 | US6848977 Polishing pad for electrochemical mechanical polishing |
| 02/01/2005 | US6848975 Electrochemical planarization of metal feature surfaces |
| 02/01/2005 | US6848974 Polishing pad for semiconductor wafer and polishing process using thereof |
| 02/01/2005 | US6848882 Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system |
| 02/01/2005 | US6848625 Process liquid supply mechanism and process liquid supply method |
| 02/01/2005 | US6848578 Wafer enclosure sealing arrangement for wafer containers |
| 02/01/2005 | US6848500 Cooling system for pulsed power electronics |
| 02/01/2005 | US6848498 Temperature control apparatus |
| 02/01/2005 | US6848458 Apparatus and methods for processing semiconductor substrates using supercritical fluids |
| 02/01/2005 | US6848457 Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment |
| 02/01/2005 | US6848455 Comprises simultaneous application of ultraviolet radiation and hydrogen peroxide and dissolved ozone |
| 02/01/2005 | US6848454 Method of manufacturing semiconductor device |
| 02/01/2005 | US6848295 Acoustic wave sensor apparatus, method and system using wide bandgap materials |
| 02/01/2005 | US6848277 Projection lithography photomasks and method of making |
| 02/01/2005 | US6848198 Heat treatment apparatus and method of heat treatment |
| 02/01/2005 | US6848194 Apparatus for monitoring a semiconductor wafer during a spin drying operation |
| 02/01/2005 | US6848191 Apparatus and method for forming a combined substrate structure |
| 02/01/2005 | US6848177 Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme |
| 02/01/2005 | US6848176 Process for manufacturing flexible wiring boards |
| 02/01/2005 | US6848175 Method of forming an out-of-plane structure |
| 02/01/2005 | US6848174 Apparatus and method for processing electronic components |
| 02/01/2005 | US6848173 Microelectric packages having deformed bonded leads and methods therefor |
| 02/01/2005 | US6848171 Method of fabricating temperature control device |
| 02/01/2005 | US6848162 System and method of transferring dies using an adhesive surface |
| 02/01/2005 | CA2373565C Beam shaping and projection imaging with solid state uv gaussian beam to form vias |
| 01/27/2005 | WO2005009095A1 A cross-over of conductive interconnects and a method of crossing conductive interconnects |
| 01/27/2005 | WO2005009089A2 Plasma processing apparatus |