Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2005
02/03/2005US20050022722 Method for pulling a single crystal
02/03/2005US20050022697 High performance sol-gel spin-on glass materials
02/03/2005US20050022604 Damper for a gauge sensor in a dry etch chamber
02/03/2005US20050022456 Polishing slurry and method for chemical-mechanical polishing of copper
02/03/2005US20050022418 Method and device for drying flat objects, in particular gallium or silicon wafers or other like substrates
02/03/2005US20050022411 Positioning aid and method for assisting in aligning heavy machines
02/03/2005US20050022378 Apparatus used to package multimedia card by transfer molding
02/03/2005US20050022375 Method and apparatus for shock and vibration isolation of a circuit component
02/03/2005US20050022374 Pattern forming method, device, method of manufacture thereof, electro-optical apparatus, and electronic apparatus
02/03/2005US20050022325 Cleaning processing system and cleaning processing apparatus
02/03/2005DE69433618T2 Gerät zur prüfung der verbindung zwischen dem ausgang einer schaltung mit fester logischer ausgabe und dem eingang eines weiteren schaltkreises Apparatus for testing the connection between the output of a circuit with a fixed logical output and the input of another switching circle
02/03/2005DE4326211B4 Chemisches Bedampfungsverfahren zum Herstellen einer Konformen Schicht aus Titansilicid auf einem Halbleiterwafer Chemical vapor deposition method for fabricating a conformal layer of titanium silicide on a semiconductor wafer
02/03/2005DE19840866B4 Verfahren zur Dotierung der externen Basisanschlußgebiete von Si-basierten Einfach-Polysilizium-npn-Bipolartransistoren Method for doping the external base terminal regions of Si-based single polysilicon npn bipolar transistors
02/03/2005DE19803013B4 Verfahren zum Ablösen einer Epitaxieschicht oder eines Schichtsystems und nachfolgendem Aufbringen auf einen alternativen Träger Method for detaching an epitaxial layer or a layer system and subsequent application to an alternative carrier
02/03/2005DE10361695B3 Transistor structure for dynamic random-access memory cell has recess structure between source/drain regions and vertical gate electrode enclosing active region on at least 2 sides
02/03/2005DE10331593A1 Verfahren zur Defektsegmentierung in Strukturen auf Halbleitersubstraten A method for segmentation defect in structures on semiconductor substrates
02/03/2005DE10331528A1 DRAM-Halbleiterspeicherzelle sowie Verfahren zu deren Herstellung DRAM semiconductor memory cell as well as processes for their preparation
02/03/2005DE10331526A1 Verfahren zum anisotropen Ätzen einer Ausnehmung in ein Siliziumsubstrat und Verwendung einer Plasmaätzanlage A method for anisotropically etching a recess in a silicon substrate using a plasma etching and
02/03/2005DE10330535A1 Production of a layer made from ferroelectric material used in the production of a ferroelectric capacitor comprises roughening a ferroelectric material layer on a surface and applying an electrode to the roughened surface
02/03/2005DE10330003A1 Vorrichtung, Verfahren und Computerprogramm zur Wafer-Inspektion Apparatus, method and computer program for wafer inspection
02/03/2005DE10329976A1 Mechanical fixing device securing substrate to substrate electrode e.g. for plasma treatment of semiconductor wafer, using pneumatic adjustment of clamp relative to substrate support surface
02/03/2005DE10329865A1 Semiconductor wafer alignment method during formation of structures in the photosensitive surface layer using masks, whereby the last illumination field of one step is used as the first illumination field of the next
02/03/2005DE10329856A1 Verfahren und Vorrichtung zur Ermittlung des Verhältnisses zwischen einer RC-Zeitkonstante in einer integrierten Schaltung und einem Sollwert Method and apparatus for determining the relationship between a RC time constant in an integrated circuit and a target value
02/03/2005DE10329364A1 Electrical contact for an optoelectronic component, especially an illuminating diode emitting in the infrared region comprises a mirror layer containing a gold-germanium alloy layer and a gold layer, a barrier layer and a solder layer
02/03/2005DE10329326B3 Manufacturing packages with electrical, electronic, micromechanical components or microelectromechanical systems involves providing protective wafer of ceramic, metal or plastic
02/03/2005DE10328876A1 Method for separation of semiconductor chips from semiconductor wafer using formation of separation lines by ion implantation and separation using ultrasonic bath
02/03/2005DE10328008A1 Integrierte Schaltungsanordnung mit pnp- und npn-Bipolartransistoren sowie Herstellungsverfahren An integrated circuit device with PNP and NPN bipolar transistors and manufacturing processes
02/03/2005DE10324448B3 Verfahren zur Herstellung einer Halbleiter-Gate-Struktur A process for producing a semiconductor gate structure
02/03/2005DE10318440B3 Elektrochemisches Verfahren zur direkten nanostrukturierbaren Materialabscheidung auf einem Substrat und mit dem Verfahren hergestelltes Halbleiterbauelement An electrochemical process for direct nanostrukturierbaren material deposition on a substrate and by the method of semiconductor component produced
02/03/2005DE10304103B4 Verfahren zur Herstellung von mit Aluminium gefüllten Kontaktlöchern A process for the production of filled aluminum vias
02/03/2005DE10259835B4 Vorrichtung und Verfahren zum Transport einer Komponente Device and method for transport of a component
02/03/2005DE10250823B4 Läuferscheibe und Verfahren zur gleichzeitig beidseitigen Bearbeitung von Werkstücken Rotor disc and method for simultaneously sided machining of workpieces
02/03/2005DE102004031920A1 Mehrchippackung und Herstellungsverfahren Multi-chip package and manufacturing processes
02/03/2005DE102004030860A1 Verfahren zum Schützen eines Metallisierungsgebiets und Halbleiterstruktur mit mindestens einem Metallisierungsgebiet A method for protecting a Metallisierungsgebiets and semiconductor structure with at least one Metallisierungsgebiet
02/03/2005DE102004029511A1 Substrate drying method used in semiconductor manufacture involves discharging gas through opening of dry disk provided at predetermined distance above process substrate
02/03/2005DE102004029007A1 Verfahren zum Entwickeln eines Fotolackmaterials und Halbleiteranordnung A method for developing a photoresist material, and the semiconductor arrangement
02/03/2005DE102004028057A1 Zusammengesetzte dielektrische Struktur mit niedrigem k Composite dielectric structure with low k
02/03/2005DE102004028026A1 Zweischichtige Metallhartmasken zur Verwendung in Dual-Damascene-Ätzschemata Two-layer metal hard mask for use in dual-damascene Ätzschemata
02/03/2005DE102004025925A1 Formation of self-aligned contact structure involves planarizing upper conductive layer and sacrificial mask patterns until upper surfaces of recessed mask patterns are exposed to form plug surrounded by spacer
02/03/2005DE102004025707A1 Verfahren zum Teilen eines nicht-metallischen Substrats A method for dividing a non-metallic substrate
02/03/2005DE102004023674A1 Process for coating unfired ceramic foils used in the manufacture of strip conductors comprises cutting ceramic foils to a required length, forming recesses a surface side, and further processing
02/03/2005CA2532740A1 Device for cutting or heating medical implants
02/03/2005CA2532638A1 Silicon crystallization using self-assembled monolayers
02/02/2005EP1503427A1 Method for fabricating tandem thin film photoelectric converter
02/02/2005EP1503425A2 Heterojunction semiconductor device and method of manufacturing the same
02/02/2005EP1503424A2 Multiple gate semiconductor device and method for forming same
02/02/2005EP1503423A1 MIS power semiconductor device and method of making the same
02/02/2005EP1503416A2 Power grid layout techniques on integrated circuits
02/02/2005EP1503415A2 On-chip Inductors having interconnect and inductor portions providing combined magnetic fields
02/02/2005EP1503414A2 Ball grid array package
02/02/2005EP1503412A2 Semiconductor device and manufacturing method of the same
02/02/2005EP1503411A1 Conductive lines embedded in isolation regions
02/02/2005EP1503410A1 Semiconductor device and method of manufacturing the same
02/02/2005EP1503409A2 Module with embedded semiconductor IC which has a narrow electrode pitch and method of fabricating the module
02/02/2005EP1503408A1 Method for measuring withstand voltage of semiconductor epitaxial wafer and semiconductor epitaxial wafer
02/02/2005EP1503406A2 Back-side contact pads of a semiconductor chip
02/02/2005EP1503405A2 Selective etching of carbon-doped low-k dielectrics
02/02/2005EP1503404A2 Precise patterning of high-k films
02/02/2005EP1503403A1 Reticle and optical characteristic measuring method
02/02/2005EP1503402A1 Substrate supporting apparatus
02/02/2005EP1503401A1 Method and apparatus for cleaning a substrate by using a supercritical fluid
02/02/2005EP1503389A1 Switchable inductance
02/02/2005EP1503383A2 Method for manufacturing a memory
02/02/2005EP1503246A2 Positioning mechanism, exposure apparatus, and device manufacturing method
02/02/2005EP1503245A2 Modulation of exposure duration and/or power to achieve gray-scaling in maskless photolithography
02/02/2005EP1503244A1 Lithographic projection apparatus and device manufacturing method
02/02/2005EP1503243A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby
02/02/2005EP1503216A1 Sheet-form connector and production method and application therefor
02/02/2005EP1502972A1 Silicon single crystal wafer and epitaxial wafer, and method for producing silicon single crystal
02/02/2005EP1502969A1 Method and apparatus for the soft deposition of dielectric films using plasma assisted CVD
02/02/2005EP1502922A1 Curable encapsulant compositions
02/02/2005EP1502881A1 Positioning assistance and procedure for the support of the adjustment of heavy machines
02/02/2005EP1502703A1 Porous polyurethane polishing pads
02/02/2005EP1502695A1 Finishing machine using laser beam
02/02/2005EP1502485A1 Method of generating extreme ultraviolet radiation
02/02/2005EP1502335A2 Automatic gas control system for a gas discharge laser
02/02/2005EP1502309A1 Integrated circuit with internal impedance matching circuit
02/02/2005EP1502308A1 Enhanced cutoff frequency silicon germanium transistor
02/02/2005EP1502305A1 Metal gate electrode using silicidation and method of formation thereof
02/02/2005EP1502304A1 Esd-robust power switch and method of using same
02/02/2005EP1502303A1 High voltage switching devices and process for forming same
02/02/2005EP1502302A1 Nanowire and electronic device
02/02/2005EP1502301A2 Logic components from organic field effect transistors
02/02/2005EP1502300A1 Circuit comprising a capacitor and at least one semiconductor component, and method for designing same
02/02/2005EP1502299A2 Contacting of nanotubes
02/02/2005EP1502298A1 Process for manufacturing substrates with detachment of a temporary support, and associated substrate
02/02/2005EP1502297A2 Double pullback method of filling an isolation trench
02/02/2005EP1502296A1 Semiconductor probe with resistive tip and method of fabricating the same, and information recording apparatus, information reproducing apparatus, and information measuring apparatus having the semiconductor probe
02/02/2005EP1502295A1 Method of making transistors
02/02/2005EP1502294A2 Methods for forming low resistivity, ultrashallow junctions with low damage
02/02/2005EP1502293A2 Method for the production of structured layers on substrates
02/02/2005EP1502292A1 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition
02/02/2005EP1502291A1 Exposure apparatus and device fabrication method using the same
02/02/2005EP1502290A2 Barrier for capacitor over plug structures
02/02/2005EP1502289A2 Infrared thermopile detector system for semiconductor process monitoring and control
02/02/2005EP1502288A2 Lithography laser with beam delivery and beam pointing control
02/02/2005EP1502286A2 Method of fabricating vertical structure leds
02/02/2005EP1502285A2 Silicon-on-insulator structures and methods
02/02/2005EP1502283A2 Method of etching substrates
02/02/2005EP1502265A2 Ferroelectric memory