| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/03/2005 | US20050022722 Method for pulling a single crystal |
| 02/03/2005 | US20050022697 High performance sol-gel spin-on glass materials |
| 02/03/2005 | US20050022604 Damper for a gauge sensor in a dry etch chamber |
| 02/03/2005 | US20050022456 Polishing slurry and method for chemical-mechanical polishing of copper |
| 02/03/2005 | US20050022418 Method and device for drying flat objects, in particular gallium or silicon wafers or other like substrates |
| 02/03/2005 | US20050022411 Positioning aid and method for assisting in aligning heavy machines |
| 02/03/2005 | US20050022378 Apparatus used to package multimedia card by transfer molding |
| 02/03/2005 | US20050022375 Method and apparatus for shock and vibration isolation of a circuit component |
| 02/03/2005 | US20050022374 Pattern forming method, device, method of manufacture thereof, electro-optical apparatus, and electronic apparatus |
| 02/03/2005 | US20050022325 Cleaning processing system and cleaning processing apparatus |
| 02/03/2005 | DE69433618T2 Gerät zur prüfung der verbindung zwischen dem ausgang einer schaltung mit fester logischer ausgabe und dem eingang eines weiteren schaltkreises Apparatus for testing the connection between the output of a circuit with a fixed logical output and the input of another switching circle |
| 02/03/2005 | DE4326211B4 Chemisches Bedampfungsverfahren zum Herstellen einer Konformen Schicht aus Titansilicid auf einem Halbleiterwafer Chemical vapor deposition method for fabricating a conformal layer of titanium silicide on a semiconductor wafer |
| 02/03/2005 | DE19840866B4 Verfahren zur Dotierung der externen Basisanschlußgebiete von Si-basierten Einfach-Polysilizium-npn-Bipolartransistoren Method for doping the external base terminal regions of Si-based single polysilicon npn bipolar transistors |
| 02/03/2005 | DE19803013B4 Verfahren zum Ablösen einer Epitaxieschicht oder eines Schichtsystems und nachfolgendem Aufbringen auf einen alternativen Träger Method for detaching an epitaxial layer or a layer system and subsequent application to an alternative carrier |
| 02/03/2005 | DE10361695B3 Transistor structure for dynamic random-access memory cell has recess structure between source/drain regions and vertical gate electrode enclosing active region on at least 2 sides |
| 02/03/2005 | DE10331593A1 Verfahren zur Defektsegmentierung in Strukturen auf Halbleitersubstraten A method for segmentation defect in structures on semiconductor substrates |
| 02/03/2005 | DE10331528A1 DRAM-Halbleiterspeicherzelle sowie Verfahren zu deren Herstellung DRAM semiconductor memory cell as well as processes for their preparation |
| 02/03/2005 | DE10331526A1 Verfahren zum anisotropen Ätzen einer Ausnehmung in ein Siliziumsubstrat und Verwendung einer Plasmaätzanlage A method for anisotropically etching a recess in a silicon substrate using a plasma etching and |
| 02/03/2005 | DE10330535A1 Production of a layer made from ferroelectric material used in the production of a ferroelectric capacitor comprises roughening a ferroelectric material layer on a surface and applying an electrode to the roughened surface |
| 02/03/2005 | DE10330003A1 Vorrichtung, Verfahren und Computerprogramm zur Wafer-Inspektion Apparatus, method and computer program for wafer inspection |
| 02/03/2005 | DE10329976A1 Mechanical fixing device securing substrate to substrate electrode e.g. for plasma treatment of semiconductor wafer, using pneumatic adjustment of clamp relative to substrate support surface |
| 02/03/2005 | DE10329865A1 Semiconductor wafer alignment method during formation of structures in the photosensitive surface layer using masks, whereby the last illumination field of one step is used as the first illumination field of the next |
| 02/03/2005 | DE10329856A1 Verfahren und Vorrichtung zur Ermittlung des Verhältnisses zwischen einer RC-Zeitkonstante in einer integrierten Schaltung und einem Sollwert Method and apparatus for determining the relationship between a RC time constant in an integrated circuit and a target value |
| 02/03/2005 | DE10329364A1 Electrical contact for an optoelectronic component, especially an illuminating diode emitting in the infrared region comprises a mirror layer containing a gold-germanium alloy layer and a gold layer, a barrier layer and a solder layer |
| 02/03/2005 | DE10329326B3 Manufacturing packages with electrical, electronic, micromechanical components or microelectromechanical systems involves providing protective wafer of ceramic, metal or plastic |
| 02/03/2005 | DE10328876A1 Method for separation of semiconductor chips from semiconductor wafer using formation of separation lines by ion implantation and separation using ultrasonic bath |
| 02/03/2005 | DE10328008A1 Integrierte Schaltungsanordnung mit pnp- und npn-Bipolartransistoren sowie Herstellungsverfahren An integrated circuit device with PNP and NPN bipolar transistors and manufacturing processes |
| 02/03/2005 | DE10324448B3 Verfahren zur Herstellung einer Halbleiter-Gate-Struktur A process for producing a semiconductor gate structure |
| 02/03/2005 | DE10318440B3 Elektrochemisches Verfahren zur direkten nanostrukturierbaren Materialabscheidung auf einem Substrat und mit dem Verfahren hergestelltes Halbleiterbauelement An electrochemical process for direct nanostrukturierbaren material deposition on a substrate and by the method of semiconductor component produced |
| 02/03/2005 | DE10304103B4 Verfahren zur Herstellung von mit Aluminium gefüllten Kontaktlöchern A process for the production of filled aluminum vias |
| 02/03/2005 | DE10259835B4 Vorrichtung und Verfahren zum Transport einer Komponente Device and method for transport of a component |
| 02/03/2005 | DE10250823B4 Läuferscheibe und Verfahren zur gleichzeitig beidseitigen Bearbeitung von Werkstücken Rotor disc and method for simultaneously sided machining of workpieces |
| 02/03/2005 | DE102004031920A1 Mehrchippackung und Herstellungsverfahren Multi-chip package and manufacturing processes |
| 02/03/2005 | DE102004030860A1 Verfahren zum Schützen eines Metallisierungsgebiets und Halbleiterstruktur mit mindestens einem Metallisierungsgebiet A method for protecting a Metallisierungsgebiets and semiconductor structure with at least one Metallisierungsgebiet |
| 02/03/2005 | DE102004029511A1 Substrate drying method used in semiconductor manufacture involves discharging gas through opening of dry disk provided at predetermined distance above process substrate |
| 02/03/2005 | DE102004029007A1 Verfahren zum Entwickeln eines Fotolackmaterials und Halbleiteranordnung A method for developing a photoresist material, and the semiconductor arrangement |
| 02/03/2005 | DE102004028057A1 Zusammengesetzte dielektrische Struktur mit niedrigem k Composite dielectric structure with low k |
| 02/03/2005 | DE102004028026A1 Zweischichtige Metallhartmasken zur Verwendung in Dual-Damascene-Ätzschemata Two-layer metal hard mask for use in dual-damascene Ätzschemata |
| 02/03/2005 | DE102004025925A1 Formation of self-aligned contact structure involves planarizing upper conductive layer and sacrificial mask patterns until upper surfaces of recessed mask patterns are exposed to form plug surrounded by spacer |
| 02/03/2005 | DE102004025707A1 Verfahren zum Teilen eines nicht-metallischen Substrats A method for dividing a non-metallic substrate |
| 02/03/2005 | DE102004023674A1 Process for coating unfired ceramic foils used in the manufacture of strip conductors comprises cutting ceramic foils to a required length, forming recesses a surface side, and further processing |
| 02/03/2005 | CA2532740A1 Device for cutting or heating medical implants |
| 02/03/2005 | CA2532638A1 Silicon crystallization using self-assembled monolayers |
| 02/02/2005 | EP1503427A1 Method for fabricating tandem thin film photoelectric converter |
| 02/02/2005 | EP1503425A2 Heterojunction semiconductor device and method of manufacturing the same |
| 02/02/2005 | EP1503424A2 Multiple gate semiconductor device and method for forming same |
| 02/02/2005 | EP1503423A1 MIS power semiconductor device and method of making the same |
| 02/02/2005 | EP1503416A2 Power grid layout techniques on integrated circuits |
| 02/02/2005 | EP1503415A2 On-chip Inductors having interconnect and inductor portions providing combined magnetic fields |
| 02/02/2005 | EP1503414A2 Ball grid array package |
| 02/02/2005 | EP1503412A2 Semiconductor device and manufacturing method of the same |
| 02/02/2005 | EP1503411A1 Conductive lines embedded in isolation regions |
| 02/02/2005 | EP1503410A1 Semiconductor device and method of manufacturing the same |
| 02/02/2005 | EP1503409A2 Module with embedded semiconductor IC which has a narrow electrode pitch and method of fabricating the module |
| 02/02/2005 | EP1503408A1 Method for measuring withstand voltage of semiconductor epitaxial wafer and semiconductor epitaxial wafer |
| 02/02/2005 | EP1503406A2 Back-side contact pads of a semiconductor chip |
| 02/02/2005 | EP1503405A2 Selective etching of carbon-doped low-k dielectrics |
| 02/02/2005 | EP1503404A2 Precise patterning of high-k films |
| 02/02/2005 | EP1503403A1 Reticle and optical characteristic measuring method |
| 02/02/2005 | EP1503402A1 Substrate supporting apparatus |
| 02/02/2005 | EP1503401A1 Method and apparatus for cleaning a substrate by using a supercritical fluid |
| 02/02/2005 | EP1503389A1 Switchable inductance |
| 02/02/2005 | EP1503383A2 Method for manufacturing a memory |
| 02/02/2005 | EP1503246A2 Positioning mechanism, exposure apparatus, and device manufacturing method |
| 02/02/2005 | EP1503245A2 Modulation of exposure duration and/or power to achieve gray-scaling in maskless photolithography |
| 02/02/2005 | EP1503244A1 Lithographic projection apparatus and device manufacturing method |
| 02/02/2005 | EP1503243A1 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/02/2005 | EP1503216A1 Sheet-form connector and production method and application therefor |
| 02/02/2005 | EP1502972A1 Silicon single crystal wafer and epitaxial wafer, and method for producing silicon single crystal |
| 02/02/2005 | EP1502969A1 Method and apparatus for the soft deposition of dielectric films using plasma assisted CVD |
| 02/02/2005 | EP1502922A1 Curable encapsulant compositions |
| 02/02/2005 | EP1502881A1 Positioning assistance and procedure for the support of the adjustment of heavy machines |
| 02/02/2005 | EP1502703A1 Porous polyurethane polishing pads |
| 02/02/2005 | EP1502695A1 Finishing machine using laser beam |
| 02/02/2005 | EP1502485A1 Method of generating extreme ultraviolet radiation |
| 02/02/2005 | EP1502335A2 Automatic gas control system for a gas discharge laser |
| 02/02/2005 | EP1502309A1 Integrated circuit with internal impedance matching circuit |
| 02/02/2005 | EP1502308A1 Enhanced cutoff frequency silicon germanium transistor |
| 02/02/2005 | EP1502305A1 Metal gate electrode using silicidation and method of formation thereof |
| 02/02/2005 | EP1502304A1 Esd-robust power switch and method of using same |
| 02/02/2005 | EP1502303A1 High voltage switching devices and process for forming same |
| 02/02/2005 | EP1502302A1 Nanowire and electronic device |
| 02/02/2005 | EP1502301A2 Logic components from organic field effect transistors |
| 02/02/2005 | EP1502300A1 Circuit comprising a capacitor and at least one semiconductor component, and method for designing same |
| 02/02/2005 | EP1502299A2 Contacting of nanotubes |
| 02/02/2005 | EP1502298A1 Process for manufacturing substrates with detachment of a temporary support, and associated substrate |
| 02/02/2005 | EP1502297A2 Double pullback method of filling an isolation trench |
| 02/02/2005 | EP1502296A1 Semiconductor probe with resistive tip and method of fabricating the same, and information recording apparatus, information reproducing apparatus, and information measuring apparatus having the semiconductor probe |
| 02/02/2005 | EP1502295A1 Method of making transistors |
| 02/02/2005 | EP1502294A2 Methods for forming low resistivity, ultrashallow junctions with low damage |
| 02/02/2005 | EP1502293A2 Method for the production of structured layers on substrates |
| 02/02/2005 | EP1502292A1 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition |
| 02/02/2005 | EP1502291A1 Exposure apparatus and device fabrication method using the same |
| 02/02/2005 | EP1502290A2 Barrier for capacitor over plug structures |
| 02/02/2005 | EP1502289A2 Infrared thermopile detector system for semiconductor process monitoring and control |
| 02/02/2005 | EP1502288A2 Lithography laser with beam delivery and beam pointing control |
| 02/02/2005 | EP1502286A2 Method of fabricating vertical structure leds |
| 02/02/2005 | EP1502285A2 Silicon-on-insulator structures and methods |
| 02/02/2005 | EP1502283A2 Method of etching substrates |
| 02/02/2005 | EP1502265A2 Ferroelectric memory |