Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2005
05/12/2005US20050101073 Photo diodes having a conductive plug contact to a buried layer and methods of manufacturing the same
05/12/2005US20050101072 Transistor structure with thick recessed source/drain structures and fabrication process of same
05/12/2005US20050101071 Thin film transistor structure and method of manufacturing the same
05/12/2005US20050101070 Method of manufacturing semiconductor device
05/12/2005US20050101069 Confined spacers for double gate transistor semiconductor fabrication process
05/12/2005US20050101067 Method of fabricating CMOS thin film transistor
05/12/2005US20050101066 Semiconductor device and method for manufacturing the same
05/12/2005US20050101065 Method of manufacturing a semiconductor device
05/12/2005US20050101062 Thin film transistor array panel and manufacturing method thereof
05/12/2005US20050101061 Transfer mold semiconductor packaging processes, circuit substrates, semiconductor packages, and ball grid arrays
05/12/2005US20050101060 Electronic device, rubber product, and methods for manufacturing the same
05/12/2005US20050101059 Method and system for hermetically sealing packages for optics
05/12/2005US20050101056 Semiconductor chip, chip stack package and manufacturing method
05/12/2005US20050101055 Lead frame, method of manufacturing the same, and method of manufacturing a semiconductor device using the same
05/12/2005US20050101054 Process for manufacturing a through insulated interconnection in a body of semiconductor material
05/12/2005US20050101052 Manufacturing method of semiconductor device and semiconductor device
05/12/2005US20050101050 Photolithograph system and method for driving the same
05/12/2005US20050101049 Method for manufacturing CMOS image sensor
05/12/2005US20050101047 Process of making an all-silicon microphone
05/12/2005US20050101046 Method and forming liquid crystal cell for liquid crystal display device
05/12/2005US20050101045 Sealing openings in micro-electromechanical systems
05/12/2005US20050101044 Method for fabricating array substrate of liquid crystal display device
05/12/2005US20050101043 Manufacturing method of image sensor device
05/12/2005US20050101042 Ejection method, lens and its manufacturing method, semiconductor laser and its fabrication method, optical device and ejection device
05/12/2005US20050101041 Method of forming thin film
05/12/2005US20050101040 Method of forming a through-substrate interconnect
05/12/2005US20050101039 Apparatus and method for stacking laser bars for uniform facet coating
05/12/2005US20050101038 Method and apparatus for a heterojunction bipolar transistor using self-aligned epitaxy
05/12/2005US20050101037 Test system with interconnect having conductive members and contacts on opposing sides
05/12/2005US20050101036 System for the detection of macrodefects
05/12/2005US20050101035 Method for constructing a magneto-resistive element
05/12/2005US20050101034 Hardmask for forming ferroelectric capacitors in a semiconductor device and methods for fabricating the same
05/12/2005US20050100832 Exposure device, exposure method and method of manufacturing semiconductor device
05/12/2005US20050100831 Exposure a photoresist on substrate ti image pattern; changing position of substrate holder during exposure
05/12/2005US20050100830 Methods for fabricating patterned features utilizing imprint lithography
05/12/2005US20050100828 Mass production method for three-dimensional micro structure having high aspect ratio
05/12/2005US20050100819 photoresists comprising mixtures of acrylic ester copolymers, acid generators and quenchers, having improved sensitivity, suitable for excimer laser lithography
05/12/2005US20050100814 Using fluorocopolymer; exposure, imaging, development
05/12/2005US20050100801 Heat generated at surface can be radiated to support substrate; thin film with aperture pattern; plug
05/12/2005US20050100800 Stencil mask and method of producing the same
05/12/2005US20050100799 Mixture of photomasks; controlling incline of pattern; lithography; phase shifting; removal of mask by etching
05/12/2005US20050100798 Device and method for providing wavelength reduction with a photomask
05/12/2005US20050100745 Anti-corrosion layer on objective lens for liquid immersion lithography applications
05/12/2005US20050100683 Method of improving post-develop photoresist profile on a deposited dielectric film
05/12/2005US20050100682 Chemical and radiation resistance; plasma chemical vapor deposition; electrode coupled to radio frequency power source; substrate holder coupled to second radio frequency power source; tunable etch resistance layer
05/12/2005US20050100681 Substrate coating unit and substrate coating method
05/12/2005US20050100679 Substrate processing method and substrate processing system
05/12/2005US20050100670 Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor deposition
05/12/2005US20050100666 Aerosol method and apparatus, coated particulate products, and electronic devices made therefrom
05/12/2005US20050100487 Highly efficient compact capacitance coupled plasma reactor/generator and method
05/12/2005US20050100435 Atmospheric robot handling equipment
05/12/2005US20050100206 Method for inspecting a pattern and method for manufacturing a semiconductor chip having a circuit pattern
05/12/2005US20050100205 Method for measuring three dimensional shape of a fine pattern
05/12/2005US20050100071 Electromagnetic radiation generation using a laser produced plasma
05/12/2005US20050099874 Semiconductor integrated circuit device
05/12/2005US20050099865 Magnetoresistive element, magnetic memory cell, and magnetic memory device
05/12/2005US20050099860 Method of breaking down a fuse in a semiconductor device
05/12/2005US20050099859 Floating-gate semiconductor structures
05/12/2005US20050099854 Semiconductor wafer test system
05/12/2005US20050099847 Nonvolatile semiconductor memory, fabrication method for the same, semiconductor integrated circuits and systems
05/12/2005US20050099846 Contactless uniform-tunneling separate P-well (CUSP) non-volatile memory array architecture, fabrication and operation
05/12/2005US20050099839 Methods for machine detection of al least one aspect of an object, methods for machine identification of a person, and methods of forming electronic systems
05/12/2005US20050099814 Illumination optical system and exposure apparatus having the same
05/12/2005US20050099785 Substrate with stacked vias and fine circuits thereon, and method for fabricating the same
05/12/2005US20050099784 Semiconductor package using terminals formed on a conductive layer of a circuit board
05/12/2005US20050099760 Semiconductor device including an improved capacitor and method for manufacturing the same
05/12/2005US20050099758 Method of making a mems electrostatic chuck
05/12/2005US20050099757 Mounting method for a semiconductor component
05/12/2005US20050099756 Semiconductor device
05/12/2005US20050099744 Semiconductor integrated circuit
05/12/2005US20050099742 Semiconductor integrated circuit device
05/12/2005US20050099724 Magnetic device and magnetic memory
05/12/2005US20050099704 Flange assembly of an optical system
05/12/2005US20050099635 Exposure apparatus with interferometer
05/12/2005US20050099629 Substrate processing apparatus
05/12/2005US20050099623 Optical measuring method for semiconductor multiple layer structures and apparatus therefor
05/12/2005US20050099616 Movable stage system, lithographic apparatus, and device manufacturing method
05/12/2005US20050099613 Mask for inspecting an exposure apparatus, a method of inspecting an exposure apparatus, and an exposure apparatus
05/12/2005US20050099611 Minimizing thermal distortion effects on EUV mirror
05/12/2005US20050099579 Liquid crystal display panel and fabricating method thereof
05/12/2005US20050099578 Liquid crystal display device and method of fabricating the same
05/12/2005US20050099559 Reflective type liquid crystal display device and fabricating method thereof
05/12/2005US20050099557 Display device
05/12/2005US20050099551 Liquid crystal display device including polycrystalline silicon thin film transistor and method of fabricating the same
05/12/2005US20050099550 Semiconductor device and display device
05/12/2005US20050099377 Liquid crystal display, thin film transistor array panel for liquid crystal display and method of manufacturing the same
05/12/2005US20050099369 Active matrix type organic electroluminescence device
05/12/2005US20050099260 Semiconductor device with electrically coupled spiral inductors
05/12/2005US20050099259 Inductor formed in an integrated circuit
05/12/2005US20050099203 Voltage apparatus in a semiconductor probe station
05/12/2005US20050099199 Semiconductor device and its test method
05/12/2005US20050099196 Semiconductor inspection device based on use of probe information, and semiconductor inspection method
05/12/2005US20050099195 Probe sheet and probe sheet unit using same
05/12/2005US20050099194 Arch type probe and probe card using same
05/12/2005US20050099189 Inspection method and apparatus for circuit pattern of resist material
05/12/2005US20050099117 Organic EL display device
05/12/2005US20050099089 Method for enhancing epoxy adhesion to gold surfaces
05/12/2005US20050099078 Method for removal of SiC
05/12/2005US20050098906 Source gas flow control and CVD using same
05/12/2005US20050098905 SRAM cell structure and manufacturing method thereof
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