Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2005
06/09/2005DE10350751A1 Verfahren zum Herstellen eines vertikalen Feldeffekttransistors und Feldeffekttransistor A method for producing a vertical field effect transistor and the field effect transistor
06/09/2005DE10350702A1 Capacitive component for power semiconductors and eeprom memory cells has two electrodes sandwiching a dielectric layer with a resistive layer between dielectric and one electrode
06/09/2005DE10350689A1 Production of insulator structures in a semiconductor substrate comprises inserting insulating trenches into the substrate, depositing an insulating material in a high density plasma-promoted process , and treating the insulating material
06/09/2005DE10350684A1 Production of a power transistor arrangement used as a metal oxide semiconductor power transistor involves forming a cell field in a semiconductor substrate, inserting cell field trenches and a connecting trench within the cell field
06/09/2005DE10350517A1 Holder for semiconductor wafer stack has robotic handling arm and separate stacks rotatable about a vertical axis for free access and transportation
06/09/2005DE10310346B4 Verfahren zum Herstellen einer Photomaske auf einer Mikrostruktur mit Gräben und entsprechende Verwendung der Photomaske A method of manufacturing a photomask on a microstructure with grooves and corresponding use of photomask
06/09/2005DE10245089B4 Dotierverfahren und Halbleiterbauelement And doping the semiconductor component
06/09/2005DE10219450B4 Poliervorrichtung zum Polieren des Umfangs eines Wafers A polishing apparatus for polishing the periphery portion of a wafer
06/09/2005DE10211335A1 SRAM-Speicherzelle, Speicherzellen-Anordnung und Verfahren zum Herstellen einer Speicherzellen-Anordnung SRAM memory cell, the memory cell arrangement and method of fabricating a memory cell arrangement
06/09/2005DE102004054295A1 Verfahren zum Verbessern der Adhäsion von Epoxidharz an Goldflächen A method for improving the adhesion of epoxy resin to gold surfaces
06/09/2005DE102004053563A1 Photomaske und Verfahren zum Bilden eines Musters Photo mask and method for forming a pattern
06/09/2005DE102004052650A1 Belichtungsverfahren Exposure method
06/09/2005DE102004052411A1 Production of a film based on silicon dioxide used in the production of a semiconductor device comprises applying a coating solution on a substrate to form a film and drying, heat treating, etching, and further heat treating
06/09/2005DE102004049887A1 Laserstrahlmaschine Laser beam machine
06/09/2005DE102004048723A1 Herstellverfahren für ein Dünnschichttransistorarray-Substrat Manufacturing method of a thin film transistor array substrate
06/09/2005DE102004047499A1 Wire Bonder mit einer Haltevorrichtung zum Anpressen der Anschlussfinger eines Systemträgers an eine Heizplatte Wire bonder having a holding device for pressing the connector fingers of a lead frame on a hot plate
06/09/2005DE102004046995A1 Lichtemittierende Diode A light-emitting diode
06/09/2005DE102004036407A1 Prüfkarte und Verbinder für diese Probe card and connector for this
06/09/2005DE102004024105A1 Trenchkondensatorstruktur und Verfahren zum Aufbringen einer Deckschicht sowie einer Maske für Trenchätzprozesse in Halbleitersubstraten Trench capacitor structure and method for applying a cover layer and a mask in semiconductor substrates for Trenchätzprozesse
06/09/2005DE10106424B4 Verfahren zum Überwachen der Herstellung integrierter Schaltkreise abhängig von Korrekturwerten einer Belichtungsanlage sowie zugehörige Komponenten A method for monitoring the manufacture of integrated circuits depending on correction values ​​of an exposure system, and associated components
06/08/2005EP1538685A1 OFETs with active channels formed of densified layers
06/08/2005EP1538684A1 Process for doping organic semiconductors with derivatives of diiminoquinones
06/08/2005EP1538681A2 Process for producing optical semiconductor device
06/08/2005EP1538678A2 LDMOS structure and method of making the same
06/08/2005EP1538677A1 LDMOS structure and method of making the same
06/08/2005EP1538676A1 Thin film semiconductor integrated circuit and method of fabricating the same
06/08/2005EP1538675A1 Semiconductor device
06/08/2005EP1538674A2 Semiconductor device
06/08/2005EP1538672A1 Semiconductor device
06/08/2005EP1538671A2 Semiconductor integrated circuit with protection against electrostatic discharge
06/08/2005EP1538666A1 Semiconductor integrated circuit device
06/08/2005EP1538665A1 Method of forming a dual damascene metal interconnection
06/08/2005EP1538664A1 Etchant and etching method
06/08/2005EP1538663A2 Wafer backside processing method and corresponding processing apparatus
06/08/2005EP1538662A2 Thin-plate supporting container
06/08/2005EP1538656A1 System for plasma treatment of gases in a vacuum pump
06/08/2005EP1538640A2 Capacitor and method for manufacturing the same
06/08/2005EP1538631A1 Regulating a magnetic memory cell write current
06/08/2005EP1538485A1 Method of Preparing a Substrate, Method of Measuring, Device Manufacturing Method, Lithographic Apparatus, Computer Program and Substrate
06/08/2005EP1538484A1 EUV illumination system and lithographic apparatus
06/08/2005EP1538483A1 Measuring method and apparatus, exposure method and apparatus and device manufacturing method
06/08/2005EP1538481A1 A method of activating a silicon surface for subsequent patterning of molecules onto said surface
06/08/2005EP1538452A1 Placing table drive device and probe method
06/08/2005EP1538243A1 Diboride single crystal substrate, semiconductor device using this and its manufacturing method
06/08/2005EP1538236A2 Substrate support
06/08/2005EP1538235A1 Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
06/08/2005EP1538129A1 Method for supply of constant-concentration ozonated water
06/08/2005EP1537938A2 Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
06/08/2005EP1537645A1 Voltage doubler circuit
06/08/2005EP1537616A2 Fixtures and methods for facilitating the fabrication of devices having thin film materials
06/08/2005EP1537606A1 Method of enhancing the photoconductive properties of a semiconductor and method of producing a semiconductor with enhanced photoconductive properties
06/08/2005EP1537601A1 Jet singulation of a substrate
06/08/2005EP1537600A1 Method for fabrication of in-laid metal interconnects
06/08/2005EP1537599A1 Dopant interface formation of an interconnect
06/08/2005EP1537596A1 Plasma processing apparatus and plasma processing method
06/08/2005EP1537585A1 Memory cell
06/08/2005EP1537455A2 Lithographic method for small line printing
06/08/2005EP1537426A2 Integrated circuit with embedded identification code
06/08/2005EP1537394A1 Soi component comprising margins for separation
06/08/2005EP1537263A2 Semiconductor nanocrystal heterostructures
06/08/2005EP1537258A1 Method of fabricating substrates, in particular for optics, electronics or optoelectronics----------------------------------------
06/08/2005EP1537183A1 Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same
06/08/2005EP1536920A1 Novel finishing pad design for multidirectional use
06/08/2005EP1536919A1 Method and apparatus for electromechanically and/or electrochemically-mechanically removing conductive material from a microelectronic substrate
06/08/2005EP1536918A1 A method of polishing a wafer of material
06/08/2005EP1536912A1 Wedge-bonding of wires in electronic device manufacture with a reversible wedge bonding tool
06/08/2005EP1472574A4 Spin-on anti-reflective coatings for photolithography
06/08/2005EP1457099B1 System for the manufacture of electric and integrated circuits
06/08/2005EP1379978A4 Extraction method of defect density and size distributions
06/08/2005EP1330684B1 Method and apparatus for embedded process control framework in tool systems
06/08/2005EP1296800B1 Polishing pad with built-in optical sensor
06/08/2005EP1210738A4 Chemically inert megasonic transducer system
06/08/2005EP0944685B1 Die attach adhesive compositions
06/08/2005EP0885405B1 Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
06/08/2005EP0809861B1 Method of manufacturing a semiconductor device for surface mounting suitable for comparatively high voltages, and such a semiconductor device
06/08/2005CN2704112Y Chip fastening structure improvement
06/08/2005CN1625930A Chip removal apparatus, fitting system and method of removing chips from a wafer
06/08/2005CN1625927A Method for embedding a component in a base and forming a contact
06/08/2005CN1625926A Method for embedding a component in a base
06/08/2005CN1625921A Heating in a vacuum atmosphere in the presence of a plasma
06/08/2005CN1625813A Planar avalanche photodiode
06/08/2005CN1625811A Enhnced cut-off frequency silicon germanium transistor
06/08/2005CN1625810A Semiconductor device and production method therefor
06/08/2005CN1625809A Semiconductor device and its manufacturing method
06/08/2005CN1625808A Semiconductor device comprising low dielectric material film and its production method
06/08/2005CN1625807A Split-gate power module and method for suppressing oscillation therein
06/08/2005CN1625805A Board for mounting semiconductor chip and manufacturing method and semiconductor module
06/08/2005CN1625803A Method of making transistors with gate insulation layers of differing thickness
06/08/2005CN1625802A Process for controlling denuded zone depth in an ideal oxygen precipitating silicon wafer
06/08/2005CN1625801A Method to form high quality oxide layers of different thickness in one processing step
06/08/2005CN1625800A Method for ashing
06/08/2005CN1625799A Deposition method of insulating layers having low dielectric constant of semiconductor device
06/08/2005CN1625797A Substrate treatment apparatus
06/08/2005CN1625796A Reticle and optical characteristic measuring method
06/08/2005CN1625795A Semiconductor manufacturing apparatus of minienvironment system
06/08/2005CN1625723A Semixonductor device and integrated circuit card
06/08/2005CN1625718A Lens consisting of a crystalline material
06/08/2005CN1625717A Multi-domain liquid crystal display and a thin film transistor substrate of the same
06/08/2005CN1625714A A vertically aligned mode liquid crystal display
06/08/2005CN1625695A 电子部件试验装置 Electronic component testing device
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