| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/05/2005 | US6913968 Method and structure for vertical DRAM devices with self-aligned upper trench shaping |
| 07/05/2005 | US6913967 Ferroelectric memory device with merged-top plate structure and method for fabricating the same |
| 07/05/2005 | US6913966 Method for stabilizing or offsetting voltage in an integrated circuit |
| 07/05/2005 | US6913965 Non-Continuous encapsulation layer for MIM capacitor |
| 07/05/2005 | US6913964 Method of fabricating a one transistor floating-body DRAM cell in bulk CMOS process with electrically isolated charge storage region |
| 07/05/2005 | US6913963 Method for fabricating capacitor in semiconductor device |
| 07/05/2005 | US6913962 Manufacturing method of semiconductor device and semiconductor device |
| 07/05/2005 | US6913961 Method of manufacturing high-k gate dielectric by use of annealing in high-pressure hydrogen atmosphere |
| 07/05/2005 | US6913960 Fin-based double poly dynamic threshold CMOS FET with spacer gate and method of fabrication |
| 07/05/2005 | US6913959 Method of manufacturing a semiconductor device having a MESA structure |
| 07/05/2005 | US6913958 Method for patterning a feature using a trimmed hardmask |
| 07/05/2005 | US6913957 Method of fabricating a thin film transistor array panelsubstrate |
| 07/05/2005 | US6913956 Semiconductor device and method of manufacturing the same |
| 07/05/2005 | US6913955 Method of manufacturing a thyristor device with a control port in a trench |
| 07/05/2005 | US6913953 Semiconductor device capable of preventing moisture absorption of fuse area thereof and method for manufacturing the fuse area |
| 07/05/2005 | US6913952 Methods of forming circuit traces and contact pads for interposers utilized in semiconductor packages |
| 07/05/2005 | US6913951 Method of making a lead-on-chip device |
| 07/05/2005 | US6913950 Semiconductor device with chamfered substrate and method of making the same |
| 07/05/2005 | US6913949 Stacked packages |
| 07/05/2005 | US6913946 Method of making an ultimate low dielectric device |
| 07/05/2005 | US6913945 Method of mounting a chip |
| 07/05/2005 | US6913943 Photovoltaic device |
| 07/05/2005 | US6913942 Sacrificial layers for use in fabrications of microelectromechanical devices |
| 07/05/2005 | US6913940 Semiconductor laser light source with photocurrent feedback control for single mode operation |
| 07/05/2005 | US6913939 Method for inspecting a wafer and apparatus for inspecting a wafer |
| 07/05/2005 | US6913938 Process control; forming film; semiconductors |
| 07/05/2005 | US6913937 Memory cell array having ferroelectric capacity, method of manufacturing the same and ferroelectric memory device |
| 07/05/2005 | US6913873 Photoresist amplification; phenolic resin, acrylic polymer and acid generator |
| 07/05/2005 | US6913872 Forming a photoresist structure having reduced thickness and rounded corners |
| 07/05/2005 | US6913861 Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device |
| 07/05/2005 | US6913857 Reduced deformation due to heat generation |
| 07/05/2005 | US6913796 Plasma curing process for porous low-k materials |
| 07/05/2005 | US6913794 Diode-laser curing of liquid epoxide encapsulants |
| 07/05/2005 | US6913790 A MoO2 layer is formed on the surface of the electrically conductive layer of molybdenum or alloy. The sheet resistivity can thereby be reduced in the order of magnitude of 10% to 15%. |
| 07/05/2005 | US6913781 Substrate processing apparatus and method including a device for applying a coating and a device for measuring the film quality of the coating |
| 07/05/2005 | US6913703 Method of adjusting the thickness of an electrode in a plasma processing system |
| 07/05/2005 | US6913701 Method for fabricating integrated LC/ESI device using SMILE, latent masking, and delayed LOCOS techniques |
| 07/05/2005 | US6913681 Plating method and plating apparatus |
| 07/05/2005 | US6913680 Applying a voltage between anode and plating surface to enhance the concentration of metal ions in the electrolyte solution that is contained in a feature on the plating surface prior to the bulk deposition on the plating surface. |
| 07/05/2005 | US6913675 Two types of film forming mechanisms in the same chamber |
| 07/05/2005 | US6913670 Substrate support having barrier capable of detecting fluid leakage |
| 07/05/2005 | US6913669 Retaining ring for holding semiconductor wafers in a chemical mechanical polishing apparatus |
| 07/05/2005 | US6913654 Purging gas |
| 07/05/2005 | US6913653 Prior to cleaning with XeF2, contacting XeF2 gas with an article to be cleaned, such as a semiconductor, in a reduced-pressure or vacuum atmosphere containing a required amount of water to form HFto be |
| 07/05/2005 | US6913651 Apparatus and method for electroless deposition of materials on semiconductor substrates |
| 07/05/2005 | US6913646 Silicon single crystal wafer and method for producing silicon single crystal |
| 07/05/2005 | US6913634 Abrasives for copper CMP and methods for making |
| 07/05/2005 | US6913525 CMP device and production method for semiconductor device |
| 07/05/2005 | US6913523 Method for controlling pH during planarization and cleaning of microelectronic substrates |
| 07/05/2005 | US6913521 Methods using active retainer rings for improving edge performance in CMP applications |
| 07/05/2005 | US6913517 Microporous polishing pads |
| 07/05/2005 | US6913516 Dummy process and polishing-pad conditioning process for chemical mechanical polishing apparatus |
| 07/05/2005 | US6913513 Polishing apparatus |
| 07/05/2005 | US6913511 Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers |
| 07/05/2005 | US6913468 Methods of removably mounting electronic components to a circuit board, and sockets formed by the methods |
| 07/05/2005 | US6913373 Optical illumination device, exposure device and exposure method |
| 07/05/2005 | US6913302 Robot arm edge gripping device for handling substrates |
| 07/05/2005 | US6913243 Unitary slot valve actuator with dual valves |
| 07/05/2005 | US6913057 IC-card manufacturing apparatus |
| 07/05/2005 | US6913027 Resist stripping method and apparatus |
| 07/05/2005 | US6912915 Apparatus for shear testing bonds on silicon substrate |
| 07/05/2005 | US6912906 Method and apparatus for the production and quality testing of a bonded wire connection |
| 07/05/2005 | CA2340677C Semiconductor package, semiconductor device, electronic device, and method for producing semiconductor package |
| 07/05/2005 | CA2287834C Method and apparatus for self-doping negative and positive electrodes for silicon solar cells and other devices |
| 07/05/2005 | CA2208370C Laser diode with an ion-implanted region |
| 07/05/2005 | CA2194341C Apparatus and method for detecting and assessing a spatially discrete dot pattern |
| 06/30/2005 | WO2005060102A1 Level shift circuit, actuator apparatus using the same, and optical switch system |
| 06/30/2005 | WO2005060006A2 Gate insulating film comprising silicon and oxygen |
| 06/30/2005 | WO2005060003A1 Vertical nrom nand flash memory array |
| 06/30/2005 | WO2005060001A1 Nonvolatile memory device |
| 06/30/2005 | WO2005060000A2 Bridge field-effect transistor storage cell, device comprising said cells and method for producing a bridge field-effect transistor storage cell |
| 06/30/2005 | WO2005059997A1 Various structure/height bumps for wafer level-chip scale package |
| 06/30/2005 | WO2005059993A2 Packaging substrates for integrated circuits and soldering methods |
| 06/30/2005 | WO2005059992A1 Carrier for receiving an object and method for the production of a carrier |
| 06/30/2005 | WO2005059991A1 Apparatuses and methods for suppressing thermally induced motion of a workpiece |
| 06/30/2005 | WO2005059990A1 Electronic device and semiconductor device and method for manufacturing the same |
| 06/30/2005 | WO2005059989A1 Method to reduce seedlayer topography in bicmos process |
| 06/30/2005 | WO2005059988A1 Method for forming film |
| 06/30/2005 | WO2005059987A1 Insulating film, method for forming same and composition for forming film |
| 06/30/2005 | WO2005059986A1 Film-forming method, method for generating plasma, and substrate processing apparatus |
| 06/30/2005 | WO2005059985A1 Process for producing silicon substrate with porous layer |
| 06/30/2005 | WO2005059983A1 Gallium nitride material devices including an electrode-defining layer and methods of forming the same |
| 06/30/2005 | WO2005059982A1 Gallium nitride-based compound semiconductor light-emitting device and negative electrode thereof |
| 06/30/2005 | WO2005059981A1 Vapor growth device and production method for epitaxial wafer |
| 06/30/2005 | WO2005059980A1 Vapor growth device and porduction method for epitaxial wafer |
| 06/30/2005 | WO2005059979A1 Method for forming a strained si-channel in a mosfet structure |
| 06/30/2005 | WO2005059978A2 Single-crystal semiconductor layer with heteroaromatic macro-network |
| 06/30/2005 | WO2005059977A1 Stage apparatus, exposure apparatus, and exposure method |
| 06/30/2005 | WO2005059976A1 Substrate processing method, substrate processing apparatus and computer-readable recording medium |
| 06/30/2005 | WO2005059975A1 Ceramic heater unit |
| 06/30/2005 | WO2005059974A1 Edge flow faceplate for improvement of cvd film properties |
| 06/30/2005 | WO2005059973A2 Controlled growth of gallium nitride nanostructures |
| 06/30/2005 | WO2005059971A2 Active matrix pixel device with photo sensor |
| 06/30/2005 | WO2005059962A2 Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift |
| 06/30/2005 | WO2005059961A2 Low crosstalk substrate for mixed-signal integrated circuits |
| 06/30/2005 | WO2005059957A2 Metal interconnect system and method for direct die attachment |
| 06/30/2005 | WO2005059954A2 Method of forming a low voltage gate oxide layer and tunnel oxide layer in an eeprom cell |
| 06/30/2005 | WO2005059651A2 Method for repairing errors of patterns embodied in thin layers |
| 06/30/2005 | WO2005059531A1 Advanced roughness metrology |
| 06/30/2005 | WO2005058753A1 Ozone processing method and ozone processing system |