Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/06/2005DE102004013478A1 Verfahren zur Herstellung eines Bipolartransistors mit verbessertem Basisanschluss A method of manufacturing a bipolar transistor with an improved base terminal
10/06/2005DE102004013467A1 Method for lapping semiconductor wafers, involves reducing rotational lapping speeds gradually to zero
10/06/2005DE102004013047A1 Verfahren zur Strukturierung eines Halbleiterbauelements A process for patterning a semiconductor device
10/06/2005DE102004012798A1 Stickstofffreie antireflektierende Beschichtung und Verfahren zur Herstellung derselben Nitrogen-free anti-reflective coating and methods for making the same
10/06/2005DE102004012751A1 Verwendung von N-Ethyl-2-pyrrolidon Use of N-ethyl-2-pyrrolidone
10/06/2005DE102004012280A1 Verfahren zur Herstellung einer Halbleiterstruktur A process for producing a semiconductor structure
10/06/2005DE102004011702A1 Verfahren zur Herstellung einer kontaktlosen Chipkarte und kontaktlose Chipkarte A process for the preparation of a contactless IC card and contactless IC card
10/06/2005DE102004008699B3 Process for joining at least two semiconductor substrates used in semiconductor manufacture comprises moving a radiation source relative to a bonding surface during pretreatment
10/06/2005DE102004005694B3 Grabenkondensator mit Isolationskragen und entsprechendes Herstellungsverfahren Grave capacitor insulation collar and manufacturing method thereof
10/06/2005DE102004003084B3 Halbleiterspeicherzelle sowie zugehöriges Herstellungsverfahren A semiconductor memory cell, and manufacturing method thereof
10/06/2005DE10131706B4 Verfahren zur Herstellung eines DMOS-Transistors A process for the preparation of a DMOS transistor
10/06/2005DE10128718B4 Grabenkondensator einer DRAM-Speicherzelle mit metallischem Collarbereich und nicht-metallischer Leitungsbrücke zum Auswahltransistor Grave capacitor of a DRAM memory cell with metallic and non-metallic conduit Collarbereich bridge to the selection transistor
10/06/2005DE10060697B4 Doppelseiten-Polierverfahren mit reduzierter Kratzerrate und Vorrichtung zur Durchführung des Verfahrens The double-side polishing method with reduced scratches rate and apparatus for carrying out the method
10/06/2005DE10032311B4 Nichtflüchtiger ferroelektrischer Speicher und Herstellverfahren für denselben Non-volatile ferroelectric memory and manufacturing method for the same
10/06/2005CA2558507A1 Wafer scale die handling
10/06/2005CA2555431A1 Reduction of carrot defects in silicon carbide epitaxy
10/06/2005CA2554408A1 Lithographic methods to reduce stacking fault nucleation sites and structures having reduced stacking fault nucleation sites
10/05/2005EP1583406A2 Interconnect assembly for printed circuit boards
10/05/2005EP1583405A2 Circuitized substrate, method of making same, electrical assembly utilizing same, and information handling system utilizing same
10/05/2005EP1583239A2 Combination field programmable gate array allowing dynamic reprogrammability
10/05/2005EP1583238A2 Semiconductor device having universal logic cell
10/05/2005EP1583165A1 Thin-film field-effect transistors and making method
10/05/2005EP1583161A1 Structurally gradient material and functional element including the same
10/05/2005EP1583154A1 P-type nitride semiconductor structure and bipolar transistor
10/05/2005EP1583153A1 GaAsSb/InP heterojunction bipolar transistor and method of fabricating the same
10/05/2005EP1583152A2 Semiconductor device with lightly doped layer and method of manufacturing the same
10/05/2005EP1583148A1 Semiconductor device and its fabricating method
10/05/2005EP1583146A2 High density nanostructured interconnection
10/05/2005EP1583145A1 Method of producing soi wafer and soi wafer
10/05/2005EP1583144A2 Dicing die-bonding film
10/05/2005EP1583143A2 Method of fabricating self-aligned source and drain contacts in a Double gate FET with controlled manufacturing of a thin Si or non-Si channel
10/05/2005EP1583142A2 Deposition method and semiconductor device
10/05/2005EP1583141A2 Solvents and methods using same for removing silicon-containing residues from a substrate
10/05/2005EP1583140A1 Method for producing semiconductor single crystal wafer and laser processing device used therefor
10/05/2005EP1583139A1 Method for depositing a group III-nitride material on a silicon substrate and device therefor
10/05/2005EP1583138A1 Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer
10/05/2005EP1583137A2 Substrate meniscus interface and methods for operation
10/05/2005EP1583136A1 Controls of ambient environment during wafer drying using proximity head
10/05/2005EP1583135A1 Proximity head heating method and apparatus
10/05/2005EP1583134A2 Lid unit for thin plate supporting container
10/05/2005EP1583133A2 Wafer scanning device
10/05/2005EP1583101A1 Integrated code and data flash memory
10/05/2005EP1583069A2 Spatial light modulator and method of performing photolithography using the same
10/05/2005EP1583068A2 Spatial light modulator and method of performing photolithography using the same
10/05/2005EP1582935A1 Lithographic apparatus and device manufacturing method
10/05/2005EP1582934A2 Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems
10/05/2005EP1582933A2 Exposure apparatus and device manufacturing method
10/05/2005EP1582932A2 Alignment apparatus, exposure apparatus, and device manufacturing method
10/05/2005EP1582931A1 Lithograpic apparatus, illumination system, and optical element for rotating an intensity distribution
10/05/2005EP1582930A1 Lithographic apparatus and device manufacturing method
10/05/2005EP1582929A1 Lithographic apparatus and device manufacturing method
10/05/2005EP1582928A1 Lithographic apparatus and device manufacturing method
10/05/2005EP1582927A1 Lithographic apparatus and device manufacturing method
10/05/2005EP1582926A2 Positive resist composition
10/05/2005EP1582925A2 Positive resist composition
10/05/2005EP1582924A2 Processing apparatus
10/05/2005EP1582923A2 Processing apparatus
10/05/2005EP1582922A1 Nonlithographic method of defining geometries for plasma and/or ion implantation treatments on a semiconductor wafer
10/05/2005EP1582921A2 Film-depositing target and preparation of phase shift mask blank
10/05/2005EP1582908A2 Measuring apparatus and method
10/05/2005EP1582894A1 Patterned grid element polarizer
10/05/2005EP1582500A2 Dissipation of a charge buildup on a wafer portion
10/05/2005EP1582499A2 Encapsulation wafer process
10/05/2005EP1582294A2 Method of sucking water and water sucking device
10/05/2005EP1582293A2 Polishing apparatus
10/05/2005EP1582287A1 Soldered material, semiconductor device, method of soldering, and method of manufacturing semiconductor device
10/05/2005EP1582269A1 Proximity meniscus manifold
10/05/2005EP1582093A2 Improved patching methods and apparatus for fabricating memory modules
10/05/2005EP1581974A2 Electronic devices
10/05/2005EP1581973A2 Electronic devices
10/05/2005EP1581968A1 Integrated antifuse structure for finfet and cmos devices
10/05/2005EP1581967A1 Creation of hermetically sealed, dielectrically isolating trenches
10/05/2005EP1581966A2 Method for the production of a semiconductor component
10/05/2005EP1581965A2 Semiconductor chip stack and method for passivating a semiconductor chip stack
10/05/2005EP1581964A2 Method and apparatus for monitoring a material processing system
10/05/2005EP1581675A1 A template type substrate and a method of preparing the same
10/05/2005EP1581668A1 Etching of algainassb
10/05/2005EP1581667A1 Support system for a treatment apparatus
10/05/2005EP1580446B1 Method of operating a vacuum system with varying pressure
10/05/2005EP1576650A3 Method for microfabricating structures using silicon-on-insulator material
10/05/2005EP1554322A4 Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
10/05/2005EP1303729A4 Reticle storage and retrieval system
10/05/2005EP1231633B1 Material of heat-dissipating plate on which semiconductor is mounted, method for fabricating the same, and ceramic package produced by using the same
10/05/2005EP1064152A4 Method and apparatus for removing die from a wafer and conveying die to a pickup location
10/05/2005CN2731721Y Integrated circuit component
10/05/2005CN2731719Y Semiconductor structure having recess-resistant insulating layer
10/05/2005CN2731718Y Semiconductor device having multiple silicide types
10/05/2005CN2731713Y Semiconductor device and static discharging protection circuit
10/05/2005CN2731711Y Copper metal inlaid structure
10/05/2005CN2731706Y 半导体装置 Semiconductor device
10/05/2005CN2731705Y Memory/backup device of wafer prodn. appts.
10/05/2005CN2731455Y Gas generating simulator for coal layer
10/05/2005CN2730554Y Polishing-part for polishing substrate
10/05/2005CN2730553Y Polishing-part for electrochemical mechanical polishing
10/05/2005CN1679223A Voltage doubler circuit
10/05/2005CN1679216A 半导体装置 Semiconductor device
10/05/2005CN1679176A Method for producing an electromagnetic radiation-emitting semiconductor chip and a corresponding electromagnetic radiation-emitting semiconductor chip
10/05/2005CN1679175A Light emitting device and method for manufacturing the same
10/05/2005CN1679173A Gate electrode and manufacturing method thereof
10/05/2005CN1679172A Organic semiconductor device and its manufacturing method