Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/05/2005CN1222019C High-pressure treatment method
10/05/2005CN1222018C Mfg. method of semiconductor
10/05/2005CN1222017C Adhesive film for protecting simiconductor wafer surface and method for protecting wafer with same
10/05/2005CN1222016C Method of forming super-shallow junctions by laser annealing and rapid thermal annealing
10/05/2005CN1222015C Manufacture of thin film transistor
10/05/2005CN1222014C Method of forming TiN barrier by chemical vapour phase deposition
10/05/2005CN1221978C Non-volatile magnetic memory unit and component
10/05/2005CN1221947C Magnetic resistance effect device, magnetic head, magnetic recording equipment and storage device
10/05/2005CN1221873C Automation system using file server and its control method
10/05/2005CN1221869C Photoresist stripper/cleaner compositions containing aromatic acid inhibitors
10/05/2005CN1221867C Exposure method for forming IC chip image in intermeidate mask using main mask
10/05/2005CN1221866C Scanning pattern generator system and scanning method
10/05/2005CN1221864C Process for producing acid sensitive liquid composition containing a carbonate
10/05/2005CN1221858C Methods for deciding gap between a transparent template and substrate
10/05/2005CN1221845C Active-matrix addressing LCD device using laterial electric field
10/05/2005CN1221844C Active matrix substrate and manufacture thereof
10/05/2005CN1221684C Rejuvenation of refractory metal products
10/05/2005CN1221454C Substrate support apparatus for substrate holder
10/05/2005CN1221331C Multi-functional cleaning module and cleaning apparatus using the module
10/05/2005CN1221330C Equipment for cleaning substrate
10/05/2005CN1221323C Material quantity controlled throwing method on the substrate and device thereof
10/05/2005CN1221300C Chemical Supply device and method thereof
10/04/2005USRE38806 Semiconductor device and method of manufacturing the same
10/04/2005USH2128 Radiation hardened microcircuits
10/04/2005US6952818 Method and system for optical proximity correction
10/04/2005US6952656 Wafer fabrication data acquisition and management systems
10/04/2005US6952654 Methods for calculating the voltage induced in a device
10/04/2005US6952623 Permanent chip ID using FeRAM
10/04/2005US6952560 Tuned antenna resonant circuit of a passive transponder
10/04/2005US6952492 Method and apparatus for inspecting a semiconductor device
10/04/2005US6952369 Method for operating a NAND-array memory module composed of P-type memory cells
10/04/2005US6952364 Magnetic tunnel junction structures and methods of fabrication
10/04/2005US6952361 Volumetric data storage apparatus
10/04/2005US6952360 Device with layer edges separated through mechanical spacing
10/04/2005US6952269 Apparatus and method for adiabatically heating a semiconductor surface
10/04/2005US6952262 Exposure apparatus and aligning method
10/04/2005US6952258 Wafer chuck with integrated reference sample
10/04/2005US6952255 System and method for integrated multi-use optical alignment
10/04/2005US6952254 Supporting system in exposure apparatus
10/04/2005US6952253 Immersion; a non-contact gas seal forms so that liquid is contained in the space between the projection system and the substrate
10/04/2005US6952250 Pressure-welded structure of flexible circuit boards
10/04/2005US6952244 Active matrix device and display
10/04/2005US6952114 Apparatus and methods for silicon-on-insulator transistors in programmable logic devices
10/04/2005US6952110 Testing apparatus for carrying out inspection of a semiconductor device
10/04/2005US6952105 Inspection method and apparatus for circuit pattern of resist material
10/04/2005US6952055 Intermediate structures in porous substrates in which electrical and optical microdevices are fabricated and intermediate structures formed by the same
10/04/2005US6952054 Semiconductor package having interconnect with conductive members
10/04/2005US6952052 Cu interconnects with composite barrier layers for wafer-to-wafer uniformity
10/04/2005US6952051 Interlevel dielectric structure
10/04/2005US6952048 Semiconductor device with improved design freedom of external terminal
10/04/2005US6952046 Electronic and optoelectronic component packaging technique
10/04/2005US6952044 Monolithic bridge capacitor
10/04/2005US6952041 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
10/04/2005US6952040 Transistor structure and method of fabrication
10/04/2005US6952038 3D polysilicon ROM and method of fabrication thereof
10/04/2005US6952037 Electrostatic discharge semiconductor protection circuit of reduced area
10/04/2005US6952036 Thin-film transistor structure, method for manufacturing the thin-film transistor structure, and display device using the thin-film transistor structure
10/04/2005US6952035 Semiconductor device of non-volatile memory
10/04/2005US6952034 Semiconductor memory array of floating gate memory cells with buried source line and floating gate
10/04/2005US6952033 Semiconductor memory array of floating gate memory cells with buried bit-line and raised source line
10/04/2005US6952032 Programmable array logic or memory devices with asymmetrical tunnel barriers
10/04/2005US6952031 Nonvolatile semiconductor memory and method of operating the same
10/04/2005US6952030 High-density three-dimensional memory cell
10/04/2005US6952029 Thin film capacitor with substantially homogenous stoichiometry
10/04/2005US6952028 Ferroelectric memory devices with expanded plate line and methods in fabricating the same
10/04/2005US6952023 Light emitting device
10/04/2005US6952021 Thin-film transistor and method for making the same
10/04/2005US6952020 Semiconductor device and manufacturing method thereof
10/04/2005US6952019 Electron device which controls quantum chaos and quantum chaos controlling method
10/04/2005US6952018 Semiconductor device including band-engineered superlattice
10/04/2005US6952017 Low-voltage and interface damage-free polymer memory device
10/04/2005US6952014 Constant current supply to energize an integrated circuit during Focused Ion Beam milling; monitoring the change in input voltage from the constant power supply
10/04/2005US6951996 Pulsed processing semiconductor heating methods using combinations of heating sources
10/04/2005US6951995 Method and system for high-speed, precise micromachining an array of devices
10/04/2005US6951981 Asymmetric transfer molding method and an asymmetric encapsulation made therefrom
10/04/2005US6951907 Composition of epoxy resin, secondary amine-functional adhesion promotor and curative of nitrogen-compound and transition metal complex
10/04/2005US6951828 Plasma CVD method
10/04/2005US6951827 Controlling surface chemistry on solid substrates
10/04/2005US6951826 Silicon carbide deposition for use as a low dielectric constant anti-reflective coating
10/04/2005US6951825 Method of etching a SiN/Ir/TaN or SiN/Ir/Ti stack using an aluminum hard mask
10/04/2005US6951823 Plasma ashing process
10/04/2005US6951822 Method for forming inside nitride spacer for deep trench device DRAM cell
10/04/2005US6951821 Processing system and method for chemically treating a substrate
10/04/2005US6951820 Method for using a hard mask for critical dimension growth containment
10/04/2005US6951819 High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same
10/04/2005US6951818 Method of manufacturing an electronic device
10/04/2005US6951817 Method of forming an insulator between features of a semiconductor device
10/04/2005US6951816 Method of forming a metal layer over patterned dielectric by electroless deposition using a catalyst
10/04/2005US6951815 Method and device for heat treatment
10/04/2005US6951814 Methods for forming a metal wiring layer on an integrated circuit device at reduced temperatures
10/04/2005US6951813 Methods of forming metal-containing layers including a metal bonded to halogens and trialkylaluminum
10/04/2005US6951812 Copper transition layer for improving copper interconnection reliability
10/04/2005US6951811 Method of producing vias and other conductor parts on an electrode terminal forming surface of a semiconductor wafer
10/04/2005US6951810 Barrier film integrity on porous low k dielectrics by application of a hydrocarbon plasma treatment
10/04/2005US6951809 Method for manufacturing semiconductor device
10/04/2005US6951808 Metal planarization system
10/04/2005US6951807 Semiconductor device and manufacturing method thereof
10/04/2005US6951806 Metal region for reduction of capacitive coupling between signal lines
10/04/2005US6951805 Method of forming integrated circuitry, method of forming memory circuitry, and method of forming random access memory circuitry
10/04/2005US6951804 Formation of a tantalum-nitride layer