Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/04/2005US6951803 Method to prevent passivation layer peeling in a solder bump formation process
10/04/2005US6951802 Crystalline semiconductor film, method of manufacturing the same, and semiconductor device
10/04/2005US6951801 Metal reduction in wafer scribe area
10/04/2005US6951800 Method of making semiconductor device that has improved structural strength
10/04/2005US6951799 Cutting thin layer(s) from semiconductor material(s)
10/04/2005US6951798 Method of bonding a stack of layers by electromagnetic induction heating
10/04/2005US6951796 Substrate and manufacturing method therefor
10/04/2005US6951795 Method for fabricating capacitor using metastable-polysilicon process
10/04/2005US6951794 Semiconductor device with spiral inductor and method for fabricating semiconductor integrated circuit device
10/04/2005US6951793 Low-temperature polysilicon thin film transistor having buried LDD structure and process for producing same
10/04/2005US6951792 Dual-oxide transistors for the improvement of reliability and off-state leakage
10/04/2005US6951791 Global column select structure for accessing a memory
10/04/2005US6951790 Method of forming select lines for NAND memory devices
10/04/2005US6951789 Method of fabricating a random access memory device utilizing a vertically oriented select transistor
10/04/2005US6951788 Method of manufacturing semiconductor device
10/04/2005US6951787 Capacitor with stoichiometrically adjusted dielectric and method of fabricating same
10/04/2005US6951786 Method of forming a stack of refractory metal nitride over refractory metal silicide over silicon
10/04/2005US6951785 Methods of forming field effect transistors including raised source/drain regions
10/04/2005US6951784 Three-mask method of constructing the final hard mask used for etching the silicon fins for FinFETs
10/04/2005US6951783 Confined spacers for double gate transistor semiconductor fabrication process
10/04/2005US6951782 Nonvolatile memory cell with multiple floating gates formed after the select gate and having upward protrusions
10/04/2005US6951781 Semiconductor device and method of manufacturing the same
10/04/2005US6951780 Selective oxidation of silicon in diode, TFT, and monolithic three dimensional memory arrays
10/04/2005US6951779 Stereolithographic methods for fabricating hermetic semiconductor device packages and semiconductor devices including stereolithographically fabricated hermetic packages
10/04/2005US6951777 Methods for forming a slot with a laterally recessed area at an end thereof through an interposer or other carrier substrate
10/04/2005US6951776 Method of fabricating a thin and fine ball-grid array package with embedded heat spreader
10/04/2005US6951775 Method for forming interconnects on thin wafers
10/04/2005US6951774 Semiconductor device and method of manufacturing the same
10/04/2005US6951773 Chip packaging structure and manufacturing process thereof
10/04/2005US6951771 Method of forming laminate and method of manufacturing photovoltaic device
10/04/2005US6951769 Method for stripping sacrificial layer in MEMS assembly
10/04/2005US6951767 Development hastened stability of titanium nitride for APM etching rate monitor
10/04/2005US6951766 Correcting device, exposure apparatus, device production method, and device produced by the device production method
10/04/2005US6951764 Ferroelectric memory device with a conductive polymer layer and a method of formation
10/04/2005US6951710 Mixtures of amines and/or ammonium compounds, hydroxylamine, corrosion inhibitors, diluents and optionally water used for cleaning substrates
10/04/2005US6951709 Method of fabricating a semiconductor multilevel interconnect structure
10/04/2005US6951708 Method of forming photosensitive film pattern
10/04/2005US6951701 Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM
10/04/2005US6951695 Lapping, mechanical polishing, and reducing internal stress of a gallium, aluminum and indium nitride wafer by thermal annealing or chemical etching; crystallographic plane surfaces
10/04/2005US6951666 Metal precursor compound; and agent that reduces the conversion temperature of said precursor by at least 25 degrees C.; viscosity of at least 1000 centipoise
10/04/2005US6951624 Method and apparatus of arrayed sensors for metrological control
10/04/2005US6951597 Dynamic polishing fluid delivery system for a rotational polishing apparatus
10/04/2005US6951593 Laminating device and laminating method
10/04/2005US6951587 Ceramic heater system and substrate processing apparatus having the same installed therein
10/04/2005US6951512 Chemical mechanical polishing apparatus and method of chemical mechanical polishing
10/04/2005US6951506 Polish pad with non-uniform groove depth to improve wafer polish rate uniformity
10/04/2005US6951340 Gaskets for substrate containers
10/04/2005US6951284 Wafer carrier with wafer retaining system
10/04/2005US6951221 Substrate processing apparatus
10/04/2005US6951125 System and method for aligning an integrated circuit die on an integrated circuit substrate
10/04/2005US6951042 Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same
10/04/2005CA2382800C Electrochemical solid-state device comprising b-site rich lanthanum calcium manganite
09/2005
09/30/2005CA2472411A1 Laser processing apparatus with polygon mirror
09/29/2005WO2005091687A1 Micro plasma jet generator
09/29/2005WO2005091376A1 Organic vertical transistor and process for fabricating same
09/29/2005WO2005091375A1 Method for forming pattern, thin film transistor, display device and method for manufacturing the same, and television device
09/29/2005WO2005091374A1 Semiconductor device and method for manufacturing same
09/29/2005WO2005091370A1 Method for manufacturing integrated circuit
09/29/2005WO2005091369A1 Self aligned non-volatile memory cells and processes for fabrication
09/29/2005WO2005091361A1 Semiconductor device and method of manufacturing thereof
09/29/2005WO2005091358A1 Semiconductor integrated circuit device and switching power source device using the same
09/29/2005WO2005091357A1 Programmable logic device and its designing method
09/29/2005WO2005091356A1 Bipolar electrostatic chuck
09/29/2005WO2005091355A1 Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment
09/29/2005WO2005091354A1 Solder composition and method of bump formation therewith
09/29/2005WO2005091353A1 A non-leaded semiconductor package and a method to assemble the same
09/29/2005WO2005091352A1 Packaging of microelectronic, optoelectronic and other devices
09/29/2005WO2005091351A1 Substrate for device bonding and method for manufacturing same
09/29/2005WO2005091350A1 Field effect transistor and method of manufacturing a field effect transistor
09/29/2005WO2005091349A1 Method of depositing an amorphous carbon film for metal etch hardmask application
09/29/2005WO2005091348A1 Plasma treatment to improve adhesion of low k dielectrics
09/29/2005WO2005091347A1 SiN FILM SELECTIVE ETCHING SOLUTION AND ETCHING METHOD
09/29/2005WO2005091346A1 Schedule control method in spin etching and spin etching system
09/29/2005WO2005091345A1 Carbon nanotube-containing metal thin film
09/29/2005WO2005091344A1 Method of manufacturing a semiconductor device and semiconductor device obtained with such a method
09/29/2005WO2005091343A1 Mirror, position aligning method, optical unit producing method, optical unit, and exposure device
09/29/2005WO2005091342A2 In-situ monitoring on a spinning-disk ion implanter
09/29/2005WO2005091341A1 Improved rails for semiconductor wafer carriers
09/29/2005WO2005091340A1 Single workpiece processing chamber
09/29/2005WO2005091339A2 Method of fabricating a semiconductor structure
09/29/2005WO2005091338A2 Dual doped polysilicon and silicon germanium etch
09/29/2005WO2005091337A1 Work piece transfer system for an ion beam implanter
09/29/2005WO2005091300A1 Printed magnetic rom - mprom
09/29/2005WO2005091262A1 Electroluminescent display devices
09/29/2005WO2005091079A1 Electron beam lithography system
09/29/2005WO2005091078A1 Pattern forming process and pattern
09/29/2005WO2005091074A1 Positively radiation-sensitive resin composition
09/29/2005WO2005091073A1 Negative resist composition
09/29/2005WO2005091072A1 Negative radiation-sensitive resin composition
09/29/2005WO2005091006A1 Probe device capable of being used for plural kinds of testers
09/29/2005WO2005090902A1 Stage device
09/29/2005WO2005090650A1 Compound semiconductor substrate
09/29/2005WO2005090649A1 Method of solid-phase flux epitaxy growth
09/29/2005WO2005090648A2 Electrolytic processing apparatus and electrolytic processing method
09/29/2005WO2005090638A2 Remote chamber methods for removing surface deposits
09/29/2005WO2005090515A1 Phosphor and light-emitting diode
09/29/2005WO2005090511A1 Polishing composition and polishing method
09/29/2005WO2005090510A1 Resin composition and semiconductor devices made by using the same
09/29/2005WO2005090447A2 Use of n-ethyl-2-pyrrolidone
09/29/2005WO2005090211A1 Transfer device with alignment function
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