Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2005
12/20/2005US6977728 Projection exposure apparatus and aberration measurement method
12/20/2005US6977716 Catadioptric lithography system and method with reticle stage orthogonal to wafer stage
12/20/2005US6977714 Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby
12/20/2005US6977713 Lithographic apparatus and device manufacturing method
12/20/2005US6977710 Display device with an adhesion layer and a thin glass layer on adhesion layer and method of manufacturing the same
12/20/2005US6977707 Display device and wiring substrate including electric wiring formed of conductive film
12/20/2005US6977705 Structure for reducing the diffraction effect in periodic electrode arrangements and liquid crystal device including the same
12/20/2005US6977522 Interface device and information processing system
12/20/2005US6977521 Field programmable gate array
12/20/2005US6977515 Method for forming photo-defined micro electrical contacts
12/20/2005US6977514 Probe structure
12/20/2005US6977461 System and method for moving an object employing piezo actuators
12/20/2005US6977442 a conductive layer with a plurality of wires; a bonding pad overlapping the wires, a protective film bridging adjacent wires in a region overlapping with the bonding pad so that a void is formed in the protective film between the adjacent wires
12/20/2005US6977440 Stacked packages
12/20/2005US6977438 Dual damascene circuit with upper wiring and interconnect line positioned in regions formed as two layers including organic polymer layer and low-permittivity layer
12/20/2005US6977437 Method for forming a void free via
12/20/2005US6977435 Thick metal layer integrated process flow to improve power delivery and mechanical buffering
12/20/2005US6977432 Prefabricated semiconductor chip carrier
12/20/2005US6977429 Manufacturing system and apparatus for balanced product flow with application to low-stress underfilling of flip-chip electronic devices
12/20/2005US6977428 Semiconductor device adapted to remove noise from a signal
12/20/2005US6977426 Semiconductor device including high speed transistors and high voltage transistors disposed on a single substrate
12/20/2005US6977425 Semiconductor device having a lateral MOSFET and combined IC using the same
12/20/2005US6977422 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern
12/20/2005US6977421 Semiconductor constructions
12/20/2005US6977419 MOSFETs including a dielectric plug to suppress short-channel effects
12/20/2005US6977418 Low resistance semiconductor process and structures
12/20/2005US6977417 Semiconductor device and method of fabricating the same
12/20/2005US6977416 Semiconductor device and a method of manufacturing the same
12/20/2005US6977415 Semiconductor device including a gate insulating film on a recess and source and drain extension regions
12/20/2005US6977414 Semiconductor device
12/20/2005US6977413 Bar-type field effect transistor and method for the production thereof
12/20/2005US6977412 Trench corner effect bidirectional flash memory cell
12/20/2005US6977411 Semiconductor device comprising transistors having control gates and floating gate electrodes
12/20/2005US6977410 Test mode decoder in a flash memory
12/20/2005US6977409 Flash memory having memory section and peripheral circuit section
12/20/2005US6977408 High-performance non-volatile memory device and fabrication process
12/20/2005US6977407 Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
12/20/2005US6977406 Short channel insulated-gate static induction transistor and method of manufacturing the same
12/20/2005US6977405 Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it
12/20/2005US6977404 Trench DRAM with double-gated transistor and method of manufacturing the same
12/20/2005US6977403 Semiconductor apparatus having a built-in-electric coil and a method of making the semiconductor apparatus
12/20/2005US6977402 Memory device having storage part and thin-film part
12/20/2005US6977401 Magnetic memory device having magnetic shield layer, and manufacturing method thereof
12/20/2005US6977400 Silicon germanium CMOS channel
12/20/2005US6977398 C implants for improved SiGe bipolar yield
12/20/2005US6977397 Light emitting element and method of making same
12/20/2005US6977394 Semiconductor device and manufacturing method therefor
12/20/2005US6977393 Electro-optical device and manufacturing method thereof
12/20/2005US6977392 Semiconductor display device
12/20/2005US6977376 Method of prevention charging, and apparatus for charged particle beam using the same
12/20/2005US6977364 System and method for compensating for dark current in photosensitive devices
12/20/2005US6977363 Correlated double sampling circuit and CMOS image sensor including the same
12/20/2005US6977359 controlling parameters for semiconductor wafer vacuum-processing, considering cleaning frequency of vessel; improved uniformity of thin film thickness on wafers
12/20/2005US6977338 Underfill diffusion prevention layer of photosensitive polyimide between mounted electronic part and conductor cover layer; prevents underfill on highly wettable surface; allows high density circuit design
12/20/2005US6977230 Methods of removing material from a semiconductor substrate
12/20/2005US6977229 Manufacturing method for semiconductor devices
12/20/2005US6977228 Semiconductor device using damascene technique and manufacturing method therefor
12/20/2005US6977227 Method of etching bottle trench and fabricating capacitor with same
12/20/2005US6977226 Semiconductor memory device and method for fabricating the same
12/20/2005US6977225 Chemical vapor deposition of titanium from titanium tetrachloride and hydrocarbon reactants
12/20/2005US6977224 Method of electroless introduction of interconnect structures
12/20/2005US6977223 Three dimensional microfabrication
12/20/2005US6977222 Pattern forming method and apparatus, and device fabrication method and device
12/20/2005US6977221 Methods of forming an electrically conductive line
12/20/2005US6977220 Copper alloys for interconnections having improved electromigration characteristics and methods of making same
12/20/2005US6977219 Solvent vapor-assisted plasticization of photoresist films to achieve critical dimension reduction during temperature reflow
12/20/2005US6977218 Method for fabricating copper interconnects
12/20/2005US6977217 Aluminum-filled via structure with barrier layer
12/20/2005US6977216 Method for forming metal wire in semiconductor device
12/20/2005US6977215 Tungsten plug corrosion prevention method using gas sparged water
12/20/2005US6977214 Die paddle clamping method for wire bond enhancement
12/20/2005US6977213 IC chip solder bump structure and method of manufacturing same
12/20/2005US6977212 Fabricating a semiconductor device using fully cured bisbenzocyclobutene
12/20/2005US6977211 Selective consolidation processes for electrically connecting contacts of semiconductor device components
12/20/2005US6977210 Method for forming bit line contact hole/contact structure
12/20/2005US6977209 Method of manufacturing non-volatile semiconductor memory device and method for controlling same
12/20/2005US6977208 Schottky with thick trench bottom and termination oxide and process for manufacture
12/20/2005US6977207 Method for fabricating dual-gate semiconductor device
12/20/2005US6977206 Heating plate crystallization method
12/20/2005US6977205 Method for manufacturing SOI LOCOS MOSFET with metal oxide film or impurity-implanted field oxide
12/20/2005US6977204 Method for forming contact plug having double doping distribution in semiconductor device
12/20/2005US6977203 Method of forming narrow trenches in semiconductor substrates
12/20/2005US6977202 Method of making a non-volatile semiconductor memory device
12/20/2005US6977201 Method for fabricating flash memory device
12/20/2005US6977200 Method of manufacturing split-gate memory
12/20/2005US6977199 Method of fabricating semiconductor device
12/20/2005US6977198 Metal-insulator-metal (MIM) capacitor and fabrication method for making the same
12/20/2005US6977197 Semiconductor devices having DRAM cells and methods of fabricating the same
12/20/2005US6977196 Micro-electromechanical switch fabricated by simultaneous formation of a resistor and bottom electrode
12/20/2005US6977195 Test structure for characterizing junction leakage current
12/20/2005US6977194 Structure and method to improve channel mobility by gate electrode stress modification
12/20/2005US6977193 Thin film transistor manufacture method
12/20/2005US6977192 Method of manufacturing thin film semiconductor device
12/20/2005US6977191 Apparatus for and method of packaging semiconductor devices
12/20/2005US6977189 Wafer scale caps located by molding
12/20/2005US6977188 Resin encapsulation molding method of electronic part and resin encapsulation molding apparatus used therefor
12/20/2005US6977187 Chip package sealing method
12/20/2005US6977186 Method for manufacturing semiconductor laser optical device
12/20/2005US6977184 Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring
12/20/2005US6977183 Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrate
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