Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2005
12/29/2005DE102004027273A1 Halbleiterbaustein mit einer ersten und mindestens einer weiteren Halbleiterschaltung und Verfahren A semiconductor device having a first and at least a further semiconductor circuit and method
12/29/2005DE102004027271A1 Production of a trench capacitor in which a trench is etched into a substrate coated with a layer of Pa dioxide and Si nitride useful in electronics for DRAM storage cells
12/29/2005DE102004026128A1 Integrierter Halbleiterspeicher mit mindestens einer Wortleitung und mit einer Vielzahl von Speicherzellen Integrated semiconductor memory having at least one word line and a plurality of memory cells
12/29/2005DE102004025658A1 Verfahren zur Herstellung einer Halbleiterschaltung und entsprechende Halbleiterschaltung A process for producing a semiconductor circuit and corresponding semiconductor circuit
12/29/2005DE102004025615A1 Production of a solid electrolyte storage cell where a storage element has a material region formed from a solid electrolyte material and a region of the solid electrolyte material is activated
12/29/2005DE102004025083A1 Production of a solid body electrolyte material region made from a chalcogenide material comprises using germanium and/or silicon as precursor compound or carrier compound in the form of an organic compound
12/29/2005DE102004022329B3 Dynamic dosage adaptation method in lithography projector, involves setting exposure amount for each light exposure area, based on difference between time set for exposing each exposure area and time set for stabilizing resist layer
12/29/2005DE102004021052B3 Verfahren zur Herstellung von Trench-DRAM-Speicherzellen und Trench-DRAM-Speicherzellenfeld mit Stegfeldeffekttransistoren mit gekrümmtem Kanal (CFET) Process for the preparation of trench DRAM memory cells and trench DRAM memory cell array having fin field-effect transistors with a curved channel (CFET)
12/29/2005DE102004019609B3 Multi-stage semiconductor manufacturing process uses a combination of wet and dry chemical etching processes
12/29/2005DE102004012280B4 Verfahren zur Herstellung einer Halbleiterstruktur A process for producing a semiconductor structure
12/29/2005DE102004010599B4 Transfer device in manipulation and/or processing centers of clean room systems, has transfer chambers combined to form structural unit
12/29/2005DE102004005951B4 Verfahren zur Herstellung von vertikal isolierten Bauelementen auf SOI-Material unterschiedlicher Dicke Process for preparing vertical insulated components on SOI material of different thickness
12/29/2005DE102004001107B4 Strukturierung auf Oberflächen mittels Folie Structuring of surfaces by film
12/29/2005DE10034004B4 Nicht-flüchtige Halbleiter-Speicherzelle mit verbesserten Programmiereigenschaften sowie zugehöriges Herstellungsverfahren The non-volatile semiconductor memory cell with improved programming characteristics and associated production method
12/29/2005DE10014071B4 Verfahren zum Lagern eines Halbleiterwafers nach seinem CMP-Polieren A method for storing a semiconductor wafer after its CMP-polishing
12/28/2005EP1610396A2 Manufacturing method of a semiconductor wafer having lid parts and manufacturing method of a semiconductor device
12/28/2005EP1610395A2 Semiconductor device comprising a field-effect transistor
12/28/2005EP1610394A1 Semiconductor device, process for producing the same and process for producing metal compound thin film
12/28/2005EP1610393A1 Semiconductor device and method for manufacturing same
12/28/2005EP1610391A2 Spin transistor, programmable logic circuit, and magnetic memory
12/28/2005EP1610387A1 Memory cell, memory using the memory cell, memory cell manufacturing method, and memory recording/reading method
12/28/2005EP1610386A1 Tunnel transistor having spin-dependent transfer characteristic and nonvolatile memory using same
12/28/2005EP1610385A1 Process for producing semiconductor device
12/28/2005EP1610382A2 Semiconductor apparatus with self-security function
12/28/2005EP1610381A2 Electronic package employing segmented connector and solder joint
12/28/2005EP1610380A2 Hermetic seal cover and manufacturing method thereof
12/28/2005EP1610379A2 Dram cell capacitors having enhancing electrode surface area and method of their manufacture
12/28/2005EP1610378A1 Semiconductor device
12/28/2005EP1610377A2 System for modifying small structures
12/28/2005EP1610376A1 Semiconductor device
12/28/2005EP1610375A2 Contact carriers for populating substrates with spring contacts
12/28/2005EP1610374A1 Silicon wafer heat treatment jig, and silicon wafer heat treatment method
12/28/2005EP1610373A2 Method and apparatus for determining generation lifetime of product semiconductor wafers
12/28/2005EP1610372A2 Fabrication method of a self aligned contact in a semiconductor device
12/28/2005EP1610371A1 SiGe heterojunction bipolar transistors
12/28/2005EP1610370A2 Semiconductor device, and fabrication method of semiconductor device
12/28/2005EP1610369A1 Plasma film-forming method and plasma film-forming apparatus
12/28/2005EP1610368A1 Plasma processing apparatus and method
12/28/2005EP1610367A2 Cerium oxide abrasiveand method of polishing substrates
12/28/2005EP1610366A1 Cleaning method, method for removing foreign particle, cleaning apparatus and cleaning liquid
12/28/2005EP1610365A1 Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurry
12/28/2005EP1610363A1 Method of heat treatment and heat treatment apparatus
12/28/2005EP1610362A1 Stage device, exposure deice, and method of producing device
12/28/2005EP1610360A1 Dummy wafer
12/28/2005EP1610359A2 Bonding apparatus, bonding method, and method for manufacturing semiconductor device
12/28/2005EP1610340A1 Magnetic memory device, sense amplifier circuit, and reading method of magnetic memory device
12/28/2005EP1610339A1 Magnetic memory device and read method thereof
12/28/2005EP1610338A1 Steering gate and bit line segmentation in non-volatile memories
12/28/2005EP1610184A1 Resist pattern thickening material and process for forming the same, and semiconductor device and process for manufacturing the same
12/28/2005EP1610182A2 Lithographic apparatus and device manufacturing method
12/28/2005EP1610180A2 Semiconductor manufacturing apparatus and pattern formation method
12/28/2005EP1610179A1 Protective film-forming composition for immersion exposure and pattern-forming method using the same
12/28/2005EP1610178A1 Resist composition for liquid immersion exposure process and method of forming resist pattern therewith
12/28/2005EP1610132A2 Fabricating interconnects using sacrificial substrates
12/28/2005EP1610053A2 Fluid storage and dispensing system
12/28/2005EP1609847A1 Cleaning composition for semiconductor components and process for manufacturing semiconductor device
12/28/2005EP1609559A1 Laser beam machining method
12/28/2005EP1609558A1 Laser beam machining method
12/28/2005EP1609339A1 Method for manufacturing an electronic module and an electronic module
12/28/2005EP1609196A1 Organic semiconductor device
12/28/2005EP1609190A2 Led power package
12/28/2005EP1609188A2 Nanotube-on-gate fet structures and applications
12/28/2005EP1609187A2 Mram architecture and a method and system for fabricating mram memories utilizing the architecture
12/28/2005EP1609186A1 Cubic memory array
12/28/2005EP1609185A2 Bidirectional thermal trimming of electrical resistance
12/28/2005EP1609184A1 Arrangement composed of an electrical component on a substrate, and method for the production of said arrangement
12/28/2005EP1609181A2 Method and apparatus to form a planarized cu interconnect layer using electroless membrane deposition
12/28/2005EP1609180A1 Electrical connections in substrates
12/28/2005EP1609178A2 Gate electrode for mos transistors
12/28/2005EP1609177A2 Methods for nanoscale structures from optical lithography and subsequent lateral growth
12/28/2005EP1609176A2 Method and systems for single- or multi-period edge definition lithography
12/28/2005EP1609175A1 Method and apparatus for multilayer photoresist dry development
12/28/2005EP1609174A2 Chamber and associated methods for wafer processing
12/28/2005EP1609173A2 Electronic device including a self-assembled monolayer, and a method of fabricating the same
12/28/2005EP1609172A1 Device and method for wet treating disc-shaped articles
12/28/2005EP1609171A2 Wafer carrier having improved processing characteristics
12/28/2005EP1609165A2 Ion beam incident angle detector for ion implant systems
12/28/2005EP1609161A2 Stand-alone organic-based passive devices
12/28/2005EP1608799A1 Formation of thin semiconductor layers by low-energy plasma enhanced chemical vapor deposition and semiconductor heterostructure devices
12/28/2005EP1608792A2 A method and apparatus for forming a high quality low temperature silicon nitride film
12/28/2005EP1608598A1 Silica glass containing tio2 and process for its production
12/28/2005EP1608596A1 SILICA GLASS CONTAINING TIO sb 2 /sb AND PROCESS FOR ITS PRODUCTION
12/28/2005EP1608591A1 Potassium hydrogen peroxymonosulfate solutions
12/28/2005EP1476898B1 Method for production of a layer of silicon carbide or a nitride of a group iii element on a suitable substrate
12/28/2005EP1456871A4 Susceptor for epitaxial growth and epitaxial growth method
12/28/2005EP1364373B1 Method for production of a memory capacitor
12/28/2005EP1354227B1 Electro-optic structure and process for fabricating same
12/28/2005EP1320878B1 Process for the fabrication of mosfet depletion devices, silicided source and drain junctions
12/28/2005EP1301818B1 Apparatus for active compensation of aberrations in an optical system
12/28/2005EP1177631B1 Heterogeneous programmable gate array
12/28/2005EP1123348B1 Impact-resistant epoxide resin compositions
12/28/2005EP1105743B1 Method for manufacturing a magnetic sensor device
12/28/2005EP1025579B1 Rapid thermal processing (rtp) system with rotating substrate
12/28/2005EP0938634B1 Gas panel
12/28/2005EP0920435B1 Random access memory device and platinum chemical vapour deposition process used in its preparation
12/28/2005CN1714608A Multilayer wiring board, method for producing the came, and method for producing fiber reinforced resin board
12/28/2005CN1714517A Receiver system and method for reduced swing differential clock
12/28/2005CN1714485A Low voltage multi-junction vertical cavity surface emitting laser
12/28/2005CN1714459A Method for producing a semiconductor element
12/28/2005CN1714457A Silicon nitrade charge trapping memory device
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