Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2005
12/27/2005US6979659 Silicon fixture supporting silicon wafers during high temperature processing
12/27/2005US6979658 Method of fabricating a semiconductor device containing nitrogen in a gate oxide film
12/27/2005US6979657 Method for forming a dielectric layer in a semiconductor device
12/27/2005US6979656 Carbon and halogen doped silicate glass dielectric layer and method for fabricating the same
12/27/2005US6979655 Substrate processing method and substrate processing apparatus
12/27/2005US6979654 Method of avoiding dielectric layer deterioation with a low dielectric constant during a stripping process
12/27/2005US6979653 Semiconductor fabrication methods and apparatus
12/27/2005US6979652 Etching multi-shaped openings in silicon
12/27/2005US6979651 Method for forming alignment features and back-side contacts with fewer lithography and etch steps
12/27/2005US6979650 Fabrication method of semiconductor integrated circuit device
12/27/2005US6979649 Fabrication method of semiconductor integrated circuit device
12/27/2005US6979648 Method for BARC over-etch time adjust with real-time process feedback
12/27/2005US6979647 Method for chemical etch control of noble metals in the presence of less noble metals
12/27/2005US6979646 Hardening of copper to improve copper CMP performance
12/27/2005US6979645 Method of producing a semiconductor device having copper wiring
12/27/2005US6979644 Method of manufacturing electronic circuit component
12/27/2005US6979643 Interlayer connections for layered electronic devices
12/27/2005US6979642 Method of self-annealing conductive lines that separates grain size effects from alloy mobility
12/27/2005US6979641 Methods of forming a conductive contact through a dielectric
12/27/2005US6979640 Contact structure and method of making the same
12/27/2005US6979638 Conducting wire and contact opening forming method for reducing photoresist thickness and via resistance
12/27/2005US6979637 Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming
12/27/2005US6979636 Method for forming heightened solder bumps on circuit boards
12/27/2005US6979635 Method of forming miniaturized polycrystalline silicon gate electrodes using selective oxidation
12/27/2005US6979634 Manufacturing method for semiconductor device having a T-type gate electrode
12/27/2005US6979633 Method of manufacturing semiconductor device
12/27/2005US6979632 Fabrication method for thin-film semiconductor
12/27/2005US6979631 Methods of forming semiconductor circuitry
12/27/2005US6979630 Method and apparatus for transferring a thin layer of semiconductor material
12/27/2005US6979629 Method and apparatus for processing composite member
12/27/2005US6979628 Methods of forming semiconductor devices having field oxides in trenches and devices formed thereby
12/27/2005US6979627 Isolation trench
12/27/2005US6979626 Method for fabricating a self-aligned bipolar transistor having increased manufacturability and related structure
12/27/2005US6979625 Copper interconnects with metal capping layer and selective copper alloys
12/27/2005US6979624 Reduced mask count buried layer process
12/27/2005US6979623 Method for fabricating split gate transistor device having high-k dielectrics
12/27/2005US6979622 Semiconductor transistor having structural elements of differing materials and method of formation
12/27/2005US6979621 Trench MOSFET having low gate charge
12/27/2005US6979620 Method for fabricating a flash memory cell
12/27/2005US6979619 Flash memory device and a method of fabrication thereof
12/27/2005US6979618 Method of manufacturing NAND flash device
12/27/2005US6979617 Method for fabricating flash memory device
12/27/2005US6979616 Method for fabricating semiconductor device with dual gate dielectric structure
12/27/2005US6979615 System and method for forming a semiconductor with an analog capacitor using fewer structure steps
12/27/2005US6979614 Semiconductor memory device and method of manufacturing the same
12/27/2005US6979613 Method for fabricating a trench capacitor of DRAM
12/27/2005US6979612 Semiconductor devices and manufacturing methods
12/27/2005US6979611 Method for fabricating semiconductor device
12/27/2005US6979610 Semiconductor device fabrication method
12/27/2005US6979609 Method of fabricating MOSFET transistors with multiple threshold voltages by halo compensation and masks
12/27/2005US6979607 Technique to control tunneling currents in DRAM capacitors, cells, and devices
12/27/2005US6979605 Manufacturing method for a semiconductor device using a marker on an amorphous semiconductor film to selectively crystallize a region with a laser light
12/27/2005US6979603 Method of manufacturing a semiconductor device
12/27/2005US6979602 Method for making a recessed thyristor control port
12/27/2005US6979600 Apparatus and methods for an underfilled integrated circuit package
12/27/2005US6979599 Chip with molded cap array
12/27/2005US6979598 Method of attaching a leadframe to singulated semiconductor dice
12/27/2005US6979597 Wafer-level package with silicon gasket
12/27/2005US6979595 Packaged microelectronic devices with pressure release elements and methods for manufacturing and using such packaged microelectronic devices
12/27/2005US6979594 Process for manufacturing ball grid array package
12/27/2005US6979593 Method of manufacturing a semiconductor device
12/27/2005US6979592 Method for fabricating a semiconductor apparatus including a sealing member with reduced thermal stress
12/27/2005US6979591 Connection of integrated circuits
12/27/2005US6979590 Methods of making electromechanical three-trace junction devices
12/27/2005US6979589 Silicon-based thin-film photoelectric conversion device and method of manufacturing thereof
12/27/2005US6979588 Method for manufacturing CMOS image sensor having microlens therein with high photosensitivity
12/27/2005US6979585 Micro-electromechanical system
12/27/2005US6979584 Method for producing group III nitride compound semiconductor and group III nitride compound semiconductor device
12/27/2005US6979582 Vertical-cavity surface emitting laser diode and method for producing the same
12/27/2005US6979581 Method of manufacturing semiconductor light emitting device and oxidation furnace
12/27/2005US6979580 Process for controlling performance characteristics of a negative differential resistance (NDR) device
12/27/2005US6979579 Methods and apparatus for inspecting contact openings in a plasma processing system
12/27/2005US6979577 Method and apparatus for manufacturing semiconductor device
12/27/2005US6979528 Method and apparatus for uniformly baking substrates such as photomasks
12/27/2005US6979525 Forming a pattern on a substrate by using a halftone phase shift mask where the halftone phase shift mask includes a translucent phase shift pattern having an aperutre, and an auxiliary pattern, having an organic film for light shielding
12/27/2005US6979522 Adjustment physical properties; using exposure tool; calibration pattern; accuracy
12/27/2005US6979520 Stencil mask for ion implantation
12/27/2005US6979518 Attenuated embedded phase shift photomask blanks
12/27/2005US6979476 Filter member manufacturing method, filter member cutting method, filter chip cutting method, and filter chip manufacturing method
12/27/2005US6979474 Heat treatment method, heat treatment apparatus and treatment system
12/27/2005US6979408 Method and apparatus for photomask fabrication
12/27/2005US6979406 Cantilever-type near-field probe for optical data storage and method of manufacturing the same
12/27/2005US6979370 Methods, complexes, and system for forming metal-containing films
12/27/2005US6979369 Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof
12/27/2005US6979368 Apparatus and method for producing a semiconductor device including a byproduct control system
12/27/2005US6979367 Method of improving surface planarity
12/27/2005US6979252 Low defectivity product slurry for CMP and associated production method
12/27/2005US6979248 Conductive polishing article for electrochemical mechanical polishing
12/27/2005US6979244 Method of manufacturing an electronic device containing a carbon nanotube
12/27/2005US6979242 Manufacturing method and structure of copper lines for a liquid crystal panel
12/27/2005US6979168 Method and apparatus for transferring substrate
12/27/2005US6979165 Reduced footprint tool for automated processing of microelectronic substrates
12/27/2005US6979034 Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector
12/27/2005US6978625 System for forming aerosols and cooling device incorporated therein
12/27/2005US6978534 Device for pressure bonding an integrated circuit to a printed circuit board
12/27/2005CA2218185C Vacuum actuated mechanical latch
12/22/2005WO2005122289A1 Gallium nitride-based semiconductor stacked structure
12/22/2005WO2005122286A2 Selective implementation of barrier layers to achieve threshold voltage control in cmos device fabrication with high k dielectrics
12/22/2005WO2005122285A2 Methods and devices for fabricating and assembling printable semiconductor elements
12/22/2005WO2005122284A2 Semiconductor-on-diamond devices and methods of forming
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