Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2006
01/05/2006DE102004028679A1 Isolationsgrabenanordnung Isolation grave arrangement
01/05/2006DE102004028031A1 Selective coating method used in the semiconductor industry comprises preparing a substrate, covering predetermined surface regions of a surface with a mask, inserting a coating controlling agent and catalytically depositing a thin layer
01/05/2006DE102004027788A1 Semiconductor base component for semiconductor component pile, has boundary regions of substrate surrounding chip, with elastic contact unit which is electrically connected with regions of distribution plate
01/05/2006DE102004027787A1 Halbleiterbauteile mit Kunststoffgehäuse und Verfahren zur Herstellung derselben Semiconductor devices with plastic housing and methods of making the same
01/05/2006DE102004027752A1 Schleusenvorrichtung Lock device
01/05/2006DE102004027691A1 Verfahren zum Herstellen eines Steges aus einem Halbleitermaterial A method of manufacturing a web made of a semiconductor material
01/05/2006DE102004025773A1 Electronic structural component, has two electronic circuits directly bonded with pins and arranged on single lead frame on which two areas are designed, where one area is thermally isolated from other area by heat circumstances
01/05/2006DE102004017747A1 Semiconductor unit e.g. dynamic RAM memory chip, manufacture, involves partially arranging hard mask for protecting border area of substrate, before etching border area that lies beneath mask
01/05/2006DE102004010840B4 Verfahren zum Betreiben einer elektrischen beschreib- und löschbaren nicht flüchtigen Speicherzelle und eine Speichereinrichtung zum elektrischen nicht flüchtigen Speichern A method of operating an electrical writable and erasable non-volatile memory cell and a memory device for storing nonvolatile electric
01/05/2006DE10140468B4 Verfahren zur Erzeugung von Kontaktlöchern auf einer Metallisierungsstruktur A process for the production of contact holes to a metallization
01/05/2006DE10136400B4 Verfahren zur Herstellung einer Metallkarbidschicht und Verfahren zur Herstellung eines Grabenkondensators A process for preparing a metal carbide and method for producing a capacitor grave
01/05/2006CA2571544A1 Method of manufacture of electronic or functional devices
01/04/2006EP1613138A1 Device for applying adhesive onto a substrate
01/04/2006EP1612891A1 Anisotropic electrically conductive film and method of producing the same
01/04/2006EP1612866A2 ALGaN/GaN Hemt Devices
01/04/2006EP1612865A1 Magnetoresistive element and magnetic memory device
01/04/2006EP1612863A2 Solid-state imaging device, camera and method of producing the solid-state imaging device
01/04/2006EP1612862A2 Photovoltaic cell, photovoltaic cell module, method of fabricating photovoltaic cell and method of repairing photovoltaic cell
01/04/2006EP1612861A1 Semiconductor device and its manufacturing method
01/04/2006EP1612859A2 Through electrode and method for forming the same
01/04/2006EP1612858A2 Composition for stripping and cleaning and use thereof
01/04/2006EP1612857A1 Cvd apparatus and method for cleaning cvd apparatus
01/04/2006EP1612856A1 Device for cleaning cvd device and method of cleaning cvd device
01/04/2006EP1612855A2 Method and apparatus for plating semiconductor wafers
01/04/2006EP1612854A1 Loading table and heat treating apparatus having the loading table
01/04/2006EP1612853A1 Cooling device for vacuum treatment device
01/04/2006EP1612852A1 Thin film transistor having no grain boundary and method for fabricating the same
01/04/2006EP1612851A1 A method for the treatment of a surface of a metal-carbide substrate for use in semiconductor manufacturing processes as well as such a metal-carbide substrate
01/04/2006EP1612847A2 Cleaning apparatus
01/04/2006EP1612846A2 Concentric processing head
01/04/2006EP1612845A2 Cleaning Apparatus
01/04/2006EP1612844A1 Self-draining edge wheel system and method
01/04/2006EP1612843A1 Method and apparatus for mounting semiconductors
01/04/2006EP1612818A1 Thick-film capacitors, embedding thick-film capacitors inside printed circuit boards, and methods of forming such capacitors and printed circuit boards
01/04/2006EP1612723A2 Smart label web and manufacturing procedure thereof
01/04/2006EP1612608A2 Positioning apparatus and photolithography apparatus including the same
01/04/2006EP1612573A2 Test circuit and semiconductor integrated circuit effectively carrying out verification of connection of nodes
01/04/2006EP1612546A1 Inspection method and system for and method of producing component mounting substrate
01/04/2006EP1612533A1 Glass substrate and capacitance-type pressure sensor using the same
01/04/2006EP1612249A1 Polishing solution of metal and chemical mechanical polishing method
01/04/2006EP1612021A1 Release film for encapsulation of semiconductor chip
01/04/2006EP1611642A1 Durable electronic assembly with conductive adhesive
01/04/2006EP1611616A1 Bipolar transistor
01/04/2006EP1611615A1 Method for the production of a bipolar semiconductor element, especially a bipolar transistor, and corresponding bipolar semiconductor component
01/04/2006EP1611612A2 Method for fabricating dual-metal gate device
01/04/2006EP1611611A2 Methods for fabricating three-dimensional all organic interconnect structures
01/04/2006EP1611608A2 Real-time in-line testing of semiconductor wafers
01/04/2006EP1611607A1 Method of fabricating semiconductor probe with resistive tip
01/04/2006EP1611606A2 Chip attachment in an rfid tag
01/04/2006EP1611605A1 Cmos integration for multi-thickness silicide devices
01/04/2006EP1611604A2 A method and apparatus for process control in time division multiplexed tdm etch processes
01/04/2006EP1611603A1 Method for plasma etching using periodic modulation of gas chemistry
01/04/2006EP1611602A1 Method for epitaxial deposition of an n-doped silicon layer
01/04/2006EP1611601A2 Substrate support having temperature controlled surface
01/04/2006EP1611600A1 Methods and apparatus for vertical transfer of semiconductor substrates between cleaning modules
01/04/2006EP1611599A2 System, method and apparatus for improved local dual-damascene planarization
01/04/2006EP1611598A2 Semiconductor alignment aid
01/04/2006EP1611540A2 Attachment of rfid modules to antennas
01/04/2006EP1611447A1 System and method for in-situ monitor and control of film thickness and trench depth
01/04/2006EP1611268A2 Apparatus and method for non-contact cleaning of a surface
01/04/2006EP1610927A2 Device for gripping a semiconductor plate through a transfer opening, using the closure of the opening
01/04/2006EP1590421A4 Copper chemical mechanical polishing solutions using sulfonated amphiprotic agents
01/04/2006EP1461286A4 Differential stress reduction in thin films
01/04/2006EP1438745B1 Multiple die interconnect system
01/04/2006EP1278786B1 Copolymers for photoresists and processes therefor
01/04/2006EP1210714A4 High density non-volatile memory device
01/04/2006EP1066416B9 Passivating etchants for metallic particles
01/04/2006EP1034325B9 Gallium nitride epitaxial layer
01/04/2006EP0890186B1 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE HAVING SEMICONDUCTOR LAYERS OF SiC BY THE USE OF AN IMPLANTING STEP
01/04/2006CN2750477Y Structure of embedded capacitor via
01/04/2006CN2750352Y Control device for preventing chip break-up
01/04/2006CN1717970A Board carrier, component mounter, and method for carrying board in component mounting
01/04/2006CN1717965A Method for mounting electronic component
01/04/2006CN1717811A Transistors having buried P-type layers beneath the source region and methods of fabricating the same
01/04/2006CN1717806A Process for producing semiconductor device
01/04/2006CN1717805A Information storage element, manufacturing method thereof, and memory array
01/04/2006CN1717804A Semiconductor device
01/04/2006CN1717802A Semiconductor device having a bond pad and method for its fabrication
01/04/2006CN1717799A Magnetoelectronics device and method for fabricating the same
01/04/2006CN1717798A Novel field effect transistor and method of fabrication
01/04/2006CN1717797A Semiconductor multilayer interconnection forming method
01/04/2006CN1717796A Substrate processing device
01/04/2006CN1717795A Microelectronic packaging and components
01/04/2006CN1717794A Semiconductor device with parallel plate trench capacitor
01/04/2006CN1717793A Method for the production of a bipolar transistor
01/04/2006CN1717792A Insulating film material containing organic silane or organic siloxane compound, method for producing same, and semiconductor device
01/04/2006CN1717791A Method for cleaning substrate processing chamber
01/04/2006CN1717790A Plasma processing method and apparatus
01/04/2006CN1717789A Plasma processing apparatus and method, and electrode plate for plasma processing apparatus
01/04/2006CN1717788A Plasma processing method and apparatus
01/04/2006CN1717787A Integration of silicon etch and chamber cleaning processes
01/04/2006CN1717786A Method and apparatus for monitoring a material processing system
01/04/2006CN1717785A Polishing pad and method for manufacturing semiconductor device
01/04/2006CN1717784A Laser beam machining method
01/04/2006CN1717783A Alloy material for semiconductor, semiconductor chip using such alloy material, and method for manufacturing same
01/04/2006CN1717782A Vaporizer for CVD, solution voporizing CVD device and voporization method for CVD
01/04/2006CN1717781A Process for producing semiconductor device
01/04/2006CN1717780A 3-5 group compound semiconductor and method for preparation thereof
01/04/2006CN1717779A Stage device, exposure apparatus, and method of manufacturing devices
01/04/2006CN1717778A Method and apparatus for multilayer photoresist dry development