| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/28/2006 | US7018924 CMP slurry compositions for oxide films and methods for forming metal line contact plugs using the same |
| 03/28/2006 | US7018923 Composite material for producing an electric contact surface, in addition a method for creating a lubricated, corrosion-free electric contact surface |
| 03/28/2006 | US7018922 Patterning for elongated VSS contact flash memory |
| 03/28/2006 | US7018921 Method of forming metal line in semiconductor device |
| 03/28/2006 | US7018920 Composite sacrificial material |
| 03/28/2006 | US7018919 Method of manufacturing a semiconductor integrated circuit device including a hole formed in an insulating film and a first conductive film formed over a bottom region and sidewalls of the hole |
| 03/28/2006 | US7018918 Method of forming a selectively converted inter-layer dielectric using a porogen material |
| 03/28/2006 | US7018917 Multilayer metallization |
| 03/28/2006 | US7018916 Structure and method for forming a dielectric chamber and electronic device including the dielectric chamber |
| 03/28/2006 | US7018915 Group III nitride compound semiconductor device and method for forming an electrode |
| 03/28/2006 | US7018914 Method of enlarging contact area of a gate electrode, semiconductor device having a surface-enlarged gate electrode, and method of manufacturing the same |
| 03/28/2006 | US7018913 Method for implanting atomic species through an uneven surface of a semiconductor layer |
| 03/28/2006 | US7018912 Fabrication method of nitride semiconductors and nitride semiconductor structure fabricated thereby |
| 03/28/2006 | US7018910 Transfer of a thin layer from a wafer comprising a buffer layer |
| 03/28/2006 | US7018909 Forming structures that include a relaxed or pseudo-relaxed layer on a substrate |
| 03/28/2006 | US7018908 Methods of forming silicon dioxide layers, and methods of forming trench isolation regions |
| 03/28/2006 | US7018907 Methods for forming shallow trench isolation structures |
| 03/28/2006 | US7018906 Chemical mechanical polishing for forming a shallow trench isolation structure |
| 03/28/2006 | US7018905 Method of forming isolation film in semiconductor device |
| 03/28/2006 | US7018904 Semiconductor chip having multiple functional blocks integrated in a single chip and method for fabricating the same |
| 03/28/2006 | US7018903 Method of forming semiconductor device with capacitor |
| 03/28/2006 | US7018902 Gate dielectric and method |
| 03/28/2006 | US7018901 Method for forming a semiconductor device having a strained channel and a heterojunction source/drain |
| 03/28/2006 | US7018900 Method for making a semiconductor device comprising a superlattice channel vertically stepped above source and drain regions |
| 03/28/2006 | US7018899 Methods of fabricating lateral double-diffused metal oxide semiconductor devices |
| 03/28/2006 | US7018898 Non-volatile two transistor semiconductor memory cell and method for producing the same |
| 03/28/2006 | US7018897 Self aligned method of forming a semiconductor memory array of floating gate memory cells with control gate spacers |
| 03/28/2006 | US7018896 UV-blocking layer for reducing UV-induced charging of SONOS dual-bit flash memory devices in BEOL processing |
| 03/28/2006 | US7018895 Nonvolatile memory cell with multiple floating gates formed after the select gate |
| 03/28/2006 | US7018894 EEPROM device having selecting transistors and method of fabricating the same |
| 03/28/2006 | US7018893 Method for fabricating bottom electrodes of stacked capacitor memory cells |
| 03/28/2006 | US7018892 Semiconductor capacitor structure and method for manufacturing the same |
| 03/28/2006 | US7018891 Ultra-thin Si channel CMOS with improved series resistance |
| 03/28/2006 | US7018890 Non-volatile semiconductor memory device and manufacturing method thereof |
| 03/28/2006 | US7018889 Latch-up prevention for memory cells |
| 03/28/2006 | US7018888 Method for manufacturing improved sidewall structures for use in semiconductor devices |
| 03/28/2006 | US7018887 Dual metal CMOS transistors with silicon-metal-silicon stacked gate electrode |
| 03/28/2006 | US7018886 Shallow trench filled with two or more dielectrics for isolation and coupling or for stress control |
| 03/28/2006 | US7018885 Method of manufacturing semiconductor devices |
| 03/28/2006 | US7018884 Method for a parallel production of an MOS transistor and a bipolar transistor |
| 03/28/2006 | US7018883 Dual work function gate electrodes |
| 03/28/2006 | US7018882 Method to form local “silicon-on-nothing” or “silicon-on-insulator” wafers with tensile-strained silicon |
| 03/28/2006 | US7018881 Suspended gate single-electron device |
| 03/28/2006 | US7018880 Method for manufacturing a MOS transistor having reduced 1/f noise |
| 03/28/2006 | US7018879 Method of making an ultrathin silicon dioxide gate with improved dielectric properties using NH3 nitridation and post-deposition rapid thermal annealing |
| 03/28/2006 | US7018878 Metal structures for integrated circuits and methods for making the same |
| 03/28/2006 | US7018877 Selective delamination of thin-films by interface adhesion energy contrasts and thin film transistor devices formed thereby |
| 03/28/2006 | US7018876 Transistor with vertical dielectric structure |
| 03/28/2006 | US7018875 Insulated-gate field-effect thin film transistors |
| 03/28/2006 | US7018874 Method for fabricating thin-film transistor |
| 03/28/2006 | US7018873 Method of making a device threshold control of front-gate silicon-on-insulator MOSFET using a self-aligned back-gate |
| 03/28/2006 | US7018872 Organic thin-film transistor, organic thin-film transistor sheet and manufacturing method thereof |
| 03/28/2006 | US7018871 Solder masks for use on carrier substrates, carrier substrates and semiconductor device assemblies including such solder masks, and methods |
| 03/28/2006 | US7018870 Laser diode and heatsink quick connect/disconnect assembly |
| 03/28/2006 | US7018869 Methods for wafer-level packaging of microelectronic devices and microelectronic devices formed by such methods |
| 03/28/2006 | US7018868 Disposable hard mask for memory bitline scaling |
| 03/28/2006 | US7018867 Fabricating stacked chips using fluidic templated-assembly |
| 03/28/2006 | US7018866 Circuit component built-in module with embedded semiconductor chip and method of manufacturing |
| 03/28/2006 | US7018865 Method of protecting an element of an integrated circuit against the formation of a metal silicide |
| 03/28/2006 | US7018863 Method of manufacture of a resistance variable memory cell |
| 03/28/2006 | US7018862 Micromachined electromechanical device |
| 03/28/2006 | US7018861 Method of manufacturing integrated semiconductor devices and related devices |
| 03/28/2006 | US7018860 Method of preventing cathode of active matrix organic light emitting diode from breaking |
| 03/28/2006 | US7018859 Method of fabricating AlGaInP light-emitting diode and structure thereof |
| 03/28/2006 | US7018858 Light absorbing layer producing method |
| 03/28/2006 | US7018857 Method of manufacturing a semiconductor device including defect inspection using a semiconductor testing probe |
| 03/28/2006 | US7018856 Calibration standards for dopants/impurities in silicon and preparation method |
| 03/28/2006 | US7018855 Process controls for improved wafer uniformity using integrated or standalone metrology |
| 03/28/2006 | US7018854 Semiconductor device and method for manufacturing the same |
| 03/28/2006 | US7018853 Stepped structure for a multi-rank, stacked polymer memory device and method of making same |
| 03/28/2006 | US7018852 Methods for single qubit gate teleportation |
| 03/28/2006 | US7018844 Non-contact data carrier and method of fabricating the same |
| 03/28/2006 | US7018785 Reducing the contact angle of photoresist film, by chemically amplifying a photoresist film, to improve the wetting properties while development, controlling film thickness, forming an accuracy pattern shapes |
| 03/28/2006 | US7018781 Method for fabricating a contact hole plane in a memory module |
| 03/28/2006 | US7018780 Methods for controlling and reducing profile variation in photoresist trimming |
| 03/28/2006 | US7018750 Exposing the silicon layer to a laser beam through a mask having a phase shift layer; stripes having a first width separated by slits, and an overlapping blocking layer having stripes having a narrower width and parallel to the first |
| 03/28/2006 | US7018749 Crystallization apparatus, crystallization method, and phase shift mask and filter for use in these apparatus and method |
| 03/28/2006 | US7018748 Process for producing hard masks |
| 03/28/2006 | US7018728 Single crystal substrate having formed thereon a boron-phosphide (BP)-based semiconductor layer having p-type or n-type electrical conductivity or high resistance; light emitting diodes |
| 03/28/2006 | US7018725 Providing microscopic magnetic magnetoresistive effect element and microscopic magnetoresistive effect memory cell which include ferromagnetic film and are easily operable as result of strength of antimagnetic component of ferromagnetic film |
| 03/28/2006 | US7018718 Adhesive film for underfill and semiconductor device using the same |
| 03/28/2006 | US7018717 Antireflective hard mask compositions |
| 03/28/2006 | US7018678 Electronic device manufacture |
| 03/28/2006 | US7018676 Method and device for manufacturing ceramics, semiconductor device and piezoelectric device |
| 03/28/2006 | US7018675 reacting ruthenium precursor and oxygen to form ruthenium oxide layer and heating ruthenium oxide layer in presence of a hydrogen-rich gas to convert ruthenium oxide layer to a smooth-surfaced ruthenium metal layer; conductive material for semiconductor capacitor plates |
| 03/28/2006 | US7018597 High resistivity silicon carbide single crystal |
| 03/28/2006 | US7018581 Method of forming a polishing pad with reduced stress window |
| 03/28/2006 | US7018575 Method for assembly of complementary-shaped receptacle site and device microstructures |
| 03/28/2006 | US7018560 comprises a corrosion inhibitor for limiting removal of an interconnect metal with an acidic pH; includes an organic-containing ammonium salt |
| 03/28/2006 | US7018555 Substrate treatment method and substrate treatment apparatus |
| 03/28/2006 | US7018554 Method to reduce stacking fault nucleation sites and reduce forward voltage drift in bipolar devices |
| 03/28/2006 | US7018553 Optical monitoring and control system and method for plasma reactors |
| 03/28/2006 | US7018552 Method of manufacturing electronic device |
| 03/28/2006 | US7018551 Pull-back method of forming fins in FinFets |
| 03/28/2006 | US7018548 Conductive thin film pattern and method of forming the same, method of manufacturing thin film magnetic head, method of manufacturing thin film inductor, and method of manufacturing micro device |
| 03/28/2006 | US7018517 Transfer chamber for vacuum processing system |
| 03/28/2006 | US7018506 Plasma processing apparatus |
| 03/28/2006 | US7018505 Apparatus including chuck and matching box |
| 03/28/2006 | US7018504 Loadlock with integrated pre-clean chamber |
| 03/28/2006 | US7018494 Method of producing a composite sheet and method of producing a laminate by using the composite sheet |