| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/28/2006 | US7020007 Non-volatile static random access memory |
| 03/28/2006 | US7020002 Semiconductor integrated circuit |
| 03/28/2006 | US7020001 Multi-level semiconductor memory architecture and method of forming the same |
| 03/28/2006 | US7019971 Thermal management systems for micro-components |
| 03/28/2006 | US7019956 Electrostatic chuck having bonded structure and method of manufacturing the same |
| 03/28/2006 | US7019879 Angled strobe lines for high aspect ratio spatial light modulator |
| 03/28/2006 | US7019846 Method for determining wavefront aberrations |
| 03/28/2006 | US7019836 Position detection method and apparatus, and exposure method and apparatus |
| 03/28/2006 | US7019829 Method and device utilizing plasma source for real-time gas sampling |
| 03/28/2006 | US7019824 Moire method and measuring system for measuring the distortion of an optical imaging system |
| 03/28/2006 | US7019819 Chucking system for modulating shapes of substrates |
| 03/28/2006 | US7019817 Edge-holding aligner |
| 03/28/2006 | US7019816 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/28/2006 | US7019815 Off-axis leveling in lithographic projection apparatus |
| 03/28/2006 | US7019814 Lithographic projection mask, device manufacturing method, and device manufactured thereby |
| 03/28/2006 | US7019730 Power supply circuit, operational amplifier circuit, liquid crystal device and electronic instrument |
| 03/28/2006 | US7019582 Silicon-on-insulator device structure |
| 03/28/2006 | US7019575 Mixing prevention circuit for preventing mixing of semiconductor chips and semiconductor chip discrimination method |
| 03/28/2006 | US7019410 Die attach material for TBGA or flexible circuitry |
| 03/28/2006 | US7019409 Circuit device |
| 03/28/2006 | US7019405 Terminal, semiconductor device, terminal forming method and flip chip semiconductor device manufacturing method |
| 03/28/2006 | US7019404 Multilayered circuit substrate, semiconductor device and method of producing same |
| 03/28/2006 | US7019403 Adhesive film and tacking pads for printed wiring assemblies |
| 03/28/2006 | US7019402 Silicon chip carrier with through-vias using laser assisted chemical vapor deposition of conductor |
| 03/28/2006 | US7019400 Semiconductor device having multilayer interconnection structure and method for manufacturing the device |
| 03/28/2006 | US7019399 Copper diffusion barriers made of diamond-like nanocomposits doped with metals |
| 03/28/2006 | US7019398 Semiconductor device |
| 03/28/2006 | US7019397 Semiconductor device, manufacturing method of semiconductor device, stack type semiconductor device, and manufacturing method of stack type semiconductor device |
| 03/28/2006 | US7019394 Circuit package and method of plating the same |
| 03/28/2006 | US7019393 Electric circuit substrate |
| 03/28/2006 | US7019390 Silicon nitride insulating substrate for power semiconductor module |
| 03/28/2006 | US7019388 Semiconductor device |
| 03/28/2006 | US7019385 Semiconductor device and method of fabricating same |
| 03/28/2006 | US7019383 Gallium arsenide HBT having increased performance and method for its fabrication |
| 03/28/2006 | US7019378 Field-shielded SOI-MOS structure free from floating body effects, and method of fabrication therefor |
| 03/28/2006 | US7019370 Method for manufacturing magnetic random access memory |
| 03/28/2006 | US7019369 Static random access memory and semiconductor device using MOS transistors having channel region electrically connected with gate |
| 03/28/2006 | US7019365 Semiconductor device formed in semiconductor layer arranged on substrate with one of insulating film and cavity interposed between the substrate and the semiconductor layer |
| 03/28/2006 | US7019364 Semiconductor substrate having pillars within a closed empty space |
| 03/28/2006 | US7019362 Power MOSFET with reduced dgate resistance |
| 03/28/2006 | US7019361 Semiconductor device and method of fabricating the same |
| 03/28/2006 | US7019360 High voltage power mosfet having a voltage sustaining region that includes doped columns formed by trench etching using an etchant gas that is also a doping source |
| 03/28/2006 | US7019358 High voltage semiconductor device having an increased breakdown voltage relative to its on-resistance |
| 03/28/2006 | US7019357 Transistor |
| 03/28/2006 | US7019355 Nonvolatile semiconductor memory and a fabrication method thereof |
| 03/28/2006 | US7019354 Electrically erasable programmable read only memory (EEPROM) cells and methods of fabricating the same |
| 03/28/2006 | US7019353 Three dimensional flash cell |
| 03/28/2006 | US7019352 Low silicon-hydrogen sin layer to inhibit hydrogen related degradation in semiconductor devices having ferroelectric components |
| 03/28/2006 | US7019351 Transistor devices, and methods of forming transistor devices and circuit devices |
| 03/28/2006 | US7019350 Trench device structure with single-side buried strap and method for fabricating the same |
| 03/28/2006 | US7019349 Semiconductor memory device with cap structure and method of manufacturing the same |
| 03/28/2006 | US7019348 Embedded semiconductor product with dual depth isolation regions |
| 03/28/2006 | US7019347 Dynamic random access memory circuitry comprising insulative collars |
| 03/28/2006 | US7019346 Capacitor having an anodic metal oxide substrate |
| 03/28/2006 | US7019345 Photodiode CMOS imager with column-feedback soft-reset for imaging under ultra-low illumination and with high dynamic range |
| 03/28/2006 | US7019342 Double-gated transistor circuit |
| 03/28/2006 | US7019341 Silicon germanium hetero bipolar transistor having a germanium concentration profile in the base layer |
| 03/28/2006 | US7019340 Bipolar transistor device and method for fabricating the same |
| 03/28/2006 | US7019339 Method of using a germanium layer transfer to Si for photovoltaic applications and heterostructure made thereby |
| 03/28/2006 | US7019338 Subscriber interface protection circuit |
| 03/28/2006 | US7019336 Semiconductor device and method for manufacturing the same |
| 03/28/2006 | US7019332 Fabrication of a wavelength locker within a semiconductor structure |
| 03/28/2006 | US7019329 Semiconductor device and manufacturing method thereof |
| 03/28/2006 | US7019328 Printed transistors |
| 03/28/2006 | US7019327 Organic semiconductor polymer and organic thin film transistor using the same |
| 03/28/2006 | US7019326 Transistor with strain-inducing structure in channel |
| 03/28/2006 | US7019324 Strongly textured atomic ridge and dot MOSFETs, sensors and filters |
| 03/28/2006 | US7019323 Semiconductor light emitting device |
| 03/28/2006 | US7019316 High-energy ion implanter and method of operation thereof |
| 03/28/2006 | US7019314 Systems and methods for ion beam focusing |
| 03/28/2006 | US7019313 Methods and devices for evaluating beam blur in subfields projection-exposed by a charged-particle-beam microlithography apparatus |
| 03/28/2006 | US7019308 Thermal compensation in magnetic field influencing of an electron beam |
| 03/28/2006 | US7019294 Inspection method and apparatus using charged particle beam |
| 03/28/2006 | US7019293 Position detecting system and method |
| 03/28/2006 | US7019268 comprises heater, heat distribution plate, substrate with gas bearing member, and rotatable actuator; lithography |
| 03/28/2006 | US7019264 Heat-treatment system and method |
| 03/28/2006 | US7019263 Substrate heating apparatus and multi-chamber substrate processing system |
| 03/28/2006 | US7019253 includes chamber and coil system for converting field-generating current into radio frequency magnetic field in the chamber containing ionized gas which reacts with the magnetic plasma |
| 03/28/2006 | US7019099 Cyclic polymers comprising polysiloxanes used as dielectric coatings in electrical and electronic apparatus; heat resistance; anticracking agents |
| 03/28/2006 | US7019092 Fluorinated copolymers for microlithography |
| 03/28/2006 | US7018944 Apparatus and method for nanoscale pattern generation |
| 03/28/2006 | US7018943 Method of uniformly coating a substrate |
| 03/28/2006 | US7018942 Integrated circuit with improved RC delay |
| 03/28/2006 | US7018941 Post treatment of low k dielectric films |
| 03/28/2006 | US7018940 Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processes |
| 03/28/2006 | US7018939 Micellar technology for post-etch residues |
| 03/28/2006 | US7018938 Controlled use of photochemically susceptible chemistries for etching, cleaning and surface conditioning |
| 03/28/2006 | US7018937 Compositions for removal of processing byproducts and method for using same |
| 03/28/2006 | US7018936 Ion implant lithography method of processing a semiconductor substrate |
| 03/28/2006 | US7018935 Method of forming metal line of semiconductor device |
| 03/28/2006 | US7018934 Methods and apparatus for etching metal layers on substrates |
| 03/28/2006 | US7018933 Method of forming a metal-insulator-metal capacitor |
| 03/28/2006 | US7018932 Method for manufacturing a semiconductor device and apparatus for manufacturing a semiconductor device |
| 03/28/2006 | US7018931 Method of forming an isolation film in a semiconductor device |
| 03/28/2006 | US7018930 Method for fabricating semiconductor device |
| 03/28/2006 | US7018929 Method for reducing a low volatility byproduct from a wafer surface following an etching process |
| 03/28/2006 | US7018928 Plasma treatment method to reduce silicon erosion over HDI silicon regions |
| 03/28/2006 | US7018927 Method for forming isolation film for semiconductor devices |
| 03/28/2006 | US7018926 Method of manufacturing semiconductor device |
| 03/28/2006 | US7018925 Post high voltage gate oxide pattern high-vacuum outgas surface treatment |